DE1089089B - Magnetische Polschuhlinse - Google Patents
Magnetische PolschuhlinseInfo
- Publication number
- DE1089089B DE1089089B DEN12798A DEN0012798A DE1089089B DE 1089089 B DE1089089 B DE 1089089B DE N12798 A DEN12798 A DE N12798A DE N0012798 A DEN0012798 A DE N0012798A DE 1089089 B DE1089089 B DE 1089089B
- Authority
- DE
- Germany
- Prior art keywords
- pole piece
- magnetic pole
- correction
- lens according
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 27
- 201000009310 astigmatism Diseases 0.000 claims description 20
- 230000003287 optical effect Effects 0.000 claims description 11
- 239000003302 ferromagnetic material Substances 0.000 claims description 4
- 238000010894 electron beam technology Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000001447 compensatory effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003518 caustics Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000000414 obstructive effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Electron Beam Exposure (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL345397X | 1955-10-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1089089B true DE1089089B (de) | 1960-09-15 |
Family
ID=19784879
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DEN12798A Pending DE1089089B (de) | 1955-10-04 | 1956-10-01 | Magnetische Polschuhlinse |
Country Status (7)
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL242894A (c_deeref_Disk_and_Scratch_Disk_Pools_and_Their_Defaults.html) * | 1958-09-06 | |||
| US3046397A (en) * | 1959-06-17 | 1962-07-24 | Tesla Np | Device for compensating axial astigmatism of electron-optical systems |
| US3021445A (en) * | 1959-07-24 | 1962-02-13 | Bbc Brown Boveri & Cie | Electron lens |
| US3253144A (en) * | 1963-05-27 | 1966-05-24 | Tektronix Inc | Electron lens having means for correcting astigmatism |
| US3322950A (en) * | 1964-09-01 | 1967-05-30 | Varian Associates | Linear accelerator radiotherapy device and associated beam defining structure |
| JPS58123648A (ja) * | 1982-01-18 | 1983-07-22 | Hitachi Ltd | 電磁レンズポ−ルピ−ス構造体 |
| US7995443B2 (en) * | 2007-07-30 | 2011-08-09 | International Business Machines Corporation | Apparatus and method to store information in a holographic data storage medium |
| JP6219741B2 (ja) * | 2014-02-13 | 2017-10-25 | 日本電子株式会社 | 多極子レンズの製造方法、多極子レンズ、および荷電粒子線装置 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL54829C (c_deeref_Disk_and_Scratch_Disk_Pools_and_Their_Defaults.html) * | 1936-09-11 | |||
| DE973258C (de) * | 1938-03-08 | 1959-12-31 | Siemens Ag | Magnetische Polschuhlinse kleiner Brennweite fuer elektronenoptische Vergroesserungen in Elektronenmikroskopen |
| US2568456A (en) * | 1949-12-06 | 1951-09-18 | Gen Electric | Electromagnetic deflection yoke structure |
| US2587942A (en) * | 1949-12-27 | 1952-03-04 | Leitz Ernst Gmbh | Electronic optical correction mechanism for magnetic lenses |
| US2608665A (en) * | 1950-07-29 | 1952-08-26 | Gen Electric | Permanent magnet focusing device |
| NL94737C (c_deeref_Disk_and_Scratch_Disk_Pools_and_Their_Defaults.html) * | 1950-08-29 | |||
| NL194113A (c_deeref_Disk_and_Scratch_Disk_Pools_and_Their_Defaults.html) * | 1954-01-22 |
-
0
- BE BE551462D patent/BE551462A/xx unknown
- NL NL200957D patent/NL200957A/xx unknown
- NL NL100357D patent/NL100357C/xx active
-
1956
- 1956-10-01 GB GB29852/56A patent/GB833249A/en not_active Expired
- 1956-10-01 DE DEN12798A patent/DE1089089B/de active Pending
- 1956-10-02 CH CH345397D patent/CH345397A/de unknown
- 1956-10-02 FR FR1171295D patent/FR1171295A/fr not_active Expired
- 1956-10-03 US US613767A patent/US2910603A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| NL200957A (c_deeref_Disk_and_Scratch_Disk_Pools_and_Their_Defaults.html) | |
| FR1171295A (fr) | 1959-01-23 |
| CH345397A (de) | 1960-03-31 |
| NL100357C (c_deeref_Disk_and_Scratch_Disk_Pools_and_Their_Defaults.html) | |
| BE551462A (c_deeref_Disk_and_Scratch_Disk_Pools_and_Their_Defaults.html) | |
| US2910603A (en) | 1959-10-27 |
| GB833249A (en) | 1960-04-21 |
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