DE10342026A1 - Speicherzelle mit Ionenleitungsspeichermechanismus und Verfahren zu deren Herstellung - Google Patents

Speicherzelle mit Ionenleitungsspeichermechanismus und Verfahren zu deren Herstellung Download PDF

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Publication number
DE10342026A1
DE10342026A1 DE10342026A DE10342026A DE10342026A1 DE 10342026 A1 DE10342026 A1 DE 10342026A1 DE 10342026 A DE10342026 A DE 10342026A DE 10342026 A DE10342026 A DE 10342026A DE 10342026 A1 DE10342026 A1 DE 10342026A1
Authority
DE
Germany
Prior art keywords
memory cell
storage mechanism
production
ion conduction
conduction storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE10342026A
Other languages
English (en)
Inventor
Cay-Uwe Pinnow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qimonda AG
Original Assignee
Infineon Technologies AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies AG filed Critical Infineon Technologies AG
Priority to DE10342026A priority Critical patent/DE10342026A1/de
Priority to PCT/DE2004/002016 priority patent/WO2005024839A1/de
Publication of DE10342026A1 publication Critical patent/DE10342026A1/de
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0009—RRAM elements whose operation depends upon chemical change
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0007—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements comprising metal oxide memory material, e.g. perovskites
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/011—Manufacture or treatment of multistable switching devices
    • H10N70/021—Formation of the switching material, e.g. layer deposition
    • H10N70/028—Formation of the switching material, e.g. layer deposition by conversion of electrode material, e.g. oxidation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/011—Manufacture or treatment of multistable switching devices
    • H10N70/041—Modification of the switching material, e.g. post-treatment, doping
    • H10N70/046—Modification of the switching material, e.g. post-treatment, doping by diffusion, e.g. photo-dissolution
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/20—Multistable switching devices, e.g. memristors
    • H10N70/24—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies
    • H10N70/245—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies the species being metal cations, e.g. programmable metallization cells
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801—Constructional details of multistable switching devices
    • H10N70/821—Device geometry
    • H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801—Constructional details of multistable switching devices
    • H10N70/841—Electrodes
    • H10N70/8416—Electrodes adapted for supplying ionic species
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801—Constructional details of multistable switching devices
    • H10N70/881—Switching materials
    • H10N70/883—Oxides or nitrides
    • H10N70/8833—Binary metal oxides, e.g. TaOx
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
    • G11C2213/10—Resistive cells; Technology aspects
    • G11C2213/11—Metal ion trapping, i.e. using memory material including cavities, pores or spaces in form of tunnels or channels wherein metal ions can be trapped but do not react and form an electro-deposit creating filaments or dendrites
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
    • G11C2213/30—Resistive cell, memory material aspects
    • G11C2213/32—Material having simple binary metal oxide structure
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
    • G11C2213/30—Resistive cell, memory material aspects
    • G11C2213/34—Material includes an oxide or a nitride
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
    • G11C2213/50—Resistive cell structure aspects
    • G11C2213/56—Structure including two electrodes, a memory active layer and a so called passive or source or reservoir layer which is NOT an electrode, wherein the passive or source or reservoir layer is a source of ions which migrate afterwards in the memory active layer to be only trapped there, to form conductive filaments there or to react with the material of the memory active layer in redox way

Abstract

Es werden eine Speicherzelle (1) mit einem Ionenleitungsspeichermechanismus sowie ein Verfahren zu deren Herstellung vorgestellt. Kerngedanke der erfindungsgemäßen Speicherzelle (1) und des erfindungsgemäßen Herstellungsverfahrens ist, dass ein entsprechendes ionenleitfähiges Speicherelement (100) ausgebildet ist oder wird, indem ein erster Materialbereich (10) aus Wolfram (W) mit einem zweiten Materialbereich (20) aus Wolframoxid (WOx) in mechanischem und elektrischem Kontakt miteinander vorgesehen sind oder werden.
DE10342026A 2003-09-11 2003-09-11 Speicherzelle mit Ionenleitungsspeichermechanismus und Verfahren zu deren Herstellung Ceased DE10342026A1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE10342026A DE10342026A1 (de) 2003-09-11 2003-09-11 Speicherzelle mit Ionenleitungsspeichermechanismus und Verfahren zu deren Herstellung
PCT/DE2004/002016 WO2005024839A1 (de) 2003-09-11 2004-09-10 Speicherzelle mit ionenleitungsspeichermechanismus und verfahren zu deren herstellung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10342026A DE10342026A1 (de) 2003-09-11 2003-09-11 Speicherzelle mit Ionenleitungsspeichermechanismus und Verfahren zu deren Herstellung

Publications (1)

Publication Number Publication Date
DE10342026A1 true DE10342026A1 (de) 2005-04-28

Family

ID=34258569

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10342026A Ceased DE10342026A1 (de) 2003-09-11 2003-09-11 Speicherzelle mit Ionenleitungsspeichermechanismus und Verfahren zu deren Herstellung

Country Status (2)

Country Link
DE (1) DE10342026A1 (de)
WO (1) WO2005024839A1 (de)

Families Citing this family (23)

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KR100593750B1 (ko) 2004-11-10 2006-06-28 삼성전자주식회사 이성분계 금속 산화막을 데이터 저장 물질막으로 채택하는교차점 비휘발성 기억소자 및 그 제조방법
US7812404B2 (en) 2005-05-09 2010-10-12 Sandisk 3D Llc Nonvolatile memory cell comprising a diode and a resistance-switching material
US7700398B2 (en) 2005-08-05 2010-04-20 Infineon Technologies Ag Method for fabricating an integrated device comprising a structure with a solid electrolyte
DE602005006123T2 (de) * 2005-08-08 2009-05-07 Qimonda Ag Verfahren zur Herstellung eines integrierten Bauelements mit einer Festkörperelektrolyt-Struktur
US7816659B2 (en) 2005-11-23 2010-10-19 Sandisk 3D Llc Devices having reversible resistivity-switching metal oxide or nitride layer with added metal
US7834338B2 (en) 2005-11-23 2010-11-16 Sandisk 3D Llc Memory cell comprising nickel-cobalt oxide switching element
US7875871B2 (en) 2006-03-31 2011-01-25 Sandisk 3D Llc Heterojunction device comprising a semiconductor and a resistivity-switching oxide or nitride
US7829875B2 (en) 2006-03-31 2010-11-09 Sandisk 3D Llc Nonvolatile rewritable memory cell comprising a resistivity-switching oxide or nitride and an antifuse
US7808810B2 (en) 2006-03-31 2010-10-05 Sandisk 3D Llc Multilevel nonvolatile memory cell comprising a resistivity-switching oxide or nitride and an antifuse
CN101174672A (zh) 2006-10-04 2008-05-07 旺宏电子股份有限公司 存储单元及其制程
US7524722B2 (en) 2006-10-12 2009-04-28 Macronix International Co., Ltd. Resistance type memory device and fabricating method and operating method thereof
WO2008075412A1 (ja) 2006-12-19 2008-06-26 Fujitsu Limited 抵抗変化素子及びその製造方法
KR101187374B1 (ko) 2006-12-19 2012-10-02 후지쯔 가부시끼가이샤 저항 변화 소자 및 그 제조 방법
WO2008075414A1 (ja) 2006-12-19 2008-06-26 Fujitsu Limited 抵抗変化素子の製造方法
US7667220B2 (en) * 2007-01-19 2010-02-23 Macronix International Co., Ltd. Multilevel-cell memory structures employing multi-memory with tungsten oxides and manufacturing method
US7960224B2 (en) 2007-04-03 2011-06-14 Macronix International Co., Ltd. Operation method for multi-level switching of metal-oxide based RRAM
US7800094B2 (en) 2007-06-11 2010-09-21 Macronix International Co., Ltd. Resistance memory with tungsten compound and manufacturing
KR20100031698A (ko) * 2007-06-29 2010-03-24 쌘디스크 3디 엘엘씨 선택적으로 성장한 가역 저항-스위칭 소자를 사용하는 메모리 셀과 상기 메모리 셀을 형성하는 방법
US7824956B2 (en) 2007-06-29 2010-11-02 Sandisk 3D Llc Memory cell that employs a selectively grown reversible resistance-switching element and methods of forming the same
US8233308B2 (en) 2007-06-29 2012-07-31 Sandisk 3D Llc Memory cell that employs a selectively deposited reversible resistance-switching element and methods of forming the same
US7902537B2 (en) 2007-06-29 2011-03-08 Sandisk 3D Llc Memory cell that employs a selectively grown reversible resistance-switching element and methods of forming the same
EP2023418A1 (de) * 2007-08-09 2009-02-11 Sony Corporation Speichervorrichtung
US9627057B2 (en) 2013-03-15 2017-04-18 Crossbar, Inc. Programming two-terminal memory cells with reduced program current

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WO2003079463A2 (en) * 2002-03-15 2003-09-25 Axon Technologies Corporation Programmable structure, an array including the structure, and methods of forming the same

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WO1989001228A1 (en) * 1987-07-28 1989-02-09 Maxdem Incorporated Electrically settable resistance device
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US20030053350A1 (en) * 2001-08-13 2003-03-20 Krieger Juri H. Memory device
WO2003058638A1 (en) * 2002-01-03 2003-07-17 Axon Technologies Corporation Programming circuit for a programmable microelectronic device, system including the circuit, and method of forming the same
WO2003079463A2 (en) * 2002-03-15 2003-09-25 Axon Technologies Corporation Programmable structure, an array including the structure, and methods of forming the same

Non-Patent Citations (1)

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Also Published As

Publication number Publication date
WO2005024839A1 (de) 2005-03-17

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8127 New person/name/address of the applicant

Owner name: QIMONDA AG, 81739 MUENCHEN, DE

8125 Change of the main classification

Ipc: H01L 27/24 AFI20070907BHDE

8131 Rejection