DE102021107273A1 - Methode zur Herstellung von körnigem Siliciumkarbid durch Zweifrequenz-Mikrowelle - Google Patents
Methode zur Herstellung von körnigem Siliciumkarbid durch Zweifrequenz-Mikrowelle Download PDFInfo
- Publication number
- DE102021107273A1 DE102021107273A1 DE102021107273.5A DE102021107273A DE102021107273A1 DE 102021107273 A1 DE102021107273 A1 DE 102021107273A1 DE 102021107273 A DE102021107273 A DE 102021107273A DE 102021107273 A1 DE102021107273 A1 DE 102021107273A1
- Authority
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- Germany
- Prior art keywords
- silicon carbide
- frequency microwave
- granular silicon
- production
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 87
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 85
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 34
- 238000000034 method Methods 0.000 title claims abstract description 32
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 52
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 41
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 35
- 239000002243 precursor Substances 0.000 claims abstract description 18
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 16
- 239000006004 Quartz sand Substances 0.000 claims abstract description 15
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims abstract description 14
- 239000007833 carbon precursor Substances 0.000 claims abstract description 7
- 238000003980 solgel method Methods 0.000 claims abstract description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 18
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 claims description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 16
- 238000009768 microwave sintering Methods 0.000 claims description 12
- 239000000203 mixture Substances 0.000 claims description 10
- 230000009977 dual effect Effects 0.000 claims description 8
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims description 7
- 235000011114 ammonium hydroxide Nutrition 0.000 claims description 7
- 238000003825 pressing Methods 0.000 claims description 7
- 235000012239 silicon dioxide Nutrition 0.000 claims description 6
- 239000011259 mixed solution Substances 0.000 claims description 5
- 238000001035 drying Methods 0.000 claims description 4
- 239000003002 pH adjusting agent Substances 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 239000002245 particle Substances 0.000 abstract description 22
- 238000010438 heat treatment Methods 0.000 abstract description 19
- 230000015572 biosynthetic process Effects 0.000 abstract description 8
- 238000003786 synthesis reaction Methods 0.000 abstract description 6
- 239000013078 crystal Substances 0.000 abstract description 5
- 238000010521 absorption reaction Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 13
- 239000007789 gas Substances 0.000 description 9
- 238000005245 sintering Methods 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 7
- 239000000523 sample Substances 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 6
- 238000001878 scanning electron micrograph Methods 0.000 description 5
- 238000003756 stirring Methods 0.000 description 5
- JKGITWJSGDFJKO-UHFFFAOYSA-N ethoxy(trihydroxy)silane Chemical compound CCO[Si](O)(O)O JKGITWJSGDFJKO-UHFFFAOYSA-N 0.000 description 4
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 239000003082 abrasive agent Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 229910052681 coesite Inorganic materials 0.000 description 3
- 229910052906 cristobalite Inorganic materials 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 229910052682 stishovite Inorganic materials 0.000 description 3
- 229910052905 tridymite Inorganic materials 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000003610 charcoal Substances 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 238000003912 environmental pollution Methods 0.000 description 2
- 238000005338 heat storage Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 206010013786 Dry skin Diseases 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007073 chemical hydrolysis Effects 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000008139 complexing agent Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000006482 condensation reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 230000001699 photocatalysis Effects 0.000 description 1
- 238000007146 photocatalysis Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 238000006479 redox reaction Methods 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000001308 synthesis method Methods 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/90—Carbides
- C01B32/914—Carbides of single elements
- C01B32/956—Silicon carbide
- C01B32/963—Preparation from compounds containing silicon
- C01B32/977—Preparation from organic compounds containing silicon
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/90—Carbides
- C01B32/914—Carbides of single elements
- C01B32/956—Silicon carbide
- C01B32/963—Preparation from compounds containing silicon
- C01B32/97—Preparation from SiO or SiO2
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/62—Submicrometer sized, i.e. from 0.1-1 micrometer
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/64—Nanometer sized, i.e. from 1-100 nanometer
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Inorganic Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Composite Materials (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Carbon And Carbon Compounds (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010250363.6 | 2020-04-01 | ||
| CN202010250363.6A CN111762785A (zh) | 2020-04-01 | 2020-04-01 | 一种双频微波制备颗粒状碳化硅的方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE102021107273A1 true DE102021107273A1 (de) | 2021-10-07 |
Family
ID=72719354
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE102021107273.5A Pending DE102021107273A1 (de) | 2020-04-01 | 2021-03-23 | Methode zur Herstellung von körnigem Siliciumkarbid durch Zweifrequenz-Mikrowelle |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN111762785A (zh) |
| DE (1) | DE102021107273A1 (zh) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114715895A (zh) * | 2022-04-14 | 2022-07-08 | 中国科学技术大学先进技术研究院 | 基于密胺泡沫模板构造弹性耐高温碳化硅气凝胶的制备方法 |
| BE1029482B1 (fr) * | 2022-07-20 | 2023-10-25 | Univ Zhengzhou Aeronautics | Méthode de préparation d'une poudre de carbure de titane nanométrique |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114685170B (zh) * | 2022-04-29 | 2023-05-23 | 洛阳理工学院 | 微波闪烧合成碳化硅的方法 |
| CN115010385B (zh) * | 2022-07-04 | 2023-12-12 | 郑州航空工业管理学院 | 一种SiC增强硅酸盐水泥熟料及其快速制备方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8778295B2 (en) * | 2010-08-11 | 2014-07-15 | Daniel Hodes | Combinatorial synthesis of diamond |
| CN103764357B (zh) * | 2011-08-26 | 2016-11-09 | 陶氏环球技术有限责任公司 | 制备陶瓷体的改进方法 |
| CN103822464B (zh) * | 2012-11-19 | 2015-08-05 | 黄旭鹏 | 一种连续式矿物小颗料、粉体高温工业微波煅烧炉 |
| CN103738964B (zh) * | 2013-12-30 | 2015-08-19 | 张家港市东大工业技术研究院 | 一种SiC/SiO2同轴纳米线的制备方法 |
| CN105274624B (zh) * | 2015-10-09 | 2017-09-29 | 张家港市东大工业技术研究院 | 一种利用微波辐照制备钒掺杂半绝缘碳化硅的方法 |
| CN205245771U (zh) * | 2015-12-16 | 2016-05-18 | 郑州大学 | 一种工业双频微波烧结设备 |
| CN105948123B (zh) * | 2016-04-28 | 2017-08-01 | 西安建筑科技大学 | 一种高效焙烧辉钼矿制备低硫三氧化钼的方法 |
| CN110387583A (zh) * | 2018-04-18 | 2019-10-29 | 郑州航空工业管理学院 | 一种利用界面反应制备SiC晶须的方法及SiC晶须 |
| CN110791810B (zh) * | 2018-08-03 | 2021-03-16 | 郑州大学 | 一种碳化硅晶体的制备方法 |
-
2020
- 2020-04-01 CN CN202010250363.6A patent/CN111762785A/zh active Pending
-
2021
- 2021-03-23 DE DE102021107273.5A patent/DE102021107273A1/de active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114715895A (zh) * | 2022-04-14 | 2022-07-08 | 中国科学技术大学先进技术研究院 | 基于密胺泡沫模板构造弹性耐高温碳化硅气凝胶的制备方法 |
| CN114715895B (zh) * | 2022-04-14 | 2023-09-05 | 中国科学技术大学先进技术研究院 | 基于密胺泡沫模板构造弹性耐高温碳化硅气凝胶的制备方法 |
| BE1029482B1 (fr) * | 2022-07-20 | 2023-10-25 | Univ Zhengzhou Aeronautics | Méthode de préparation d'une poudre de carbure de titane nanométrique |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111762785A (zh) | 2020-10-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R012 | Request for examination validly filed |