DE102016117039B4 - Laserbearbeitungssystem zum überwachen von verunreinigungsgas in einem laserstrahlengang - Google Patents

Laserbearbeitungssystem zum überwachen von verunreinigungsgas in einem laserstrahlengang Download PDF

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Publication number
DE102016117039B4
DE102016117039B4 DE102016117039.9A DE102016117039A DE102016117039B4 DE 102016117039 B4 DE102016117039 B4 DE 102016117039B4 DE 102016117039 A DE102016117039 A DE 102016117039A DE 102016117039 B4 DE102016117039 B4 DE 102016117039B4
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DE
Germany
Prior art keywords
gas
laser beam
sensor
beam path
output value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE102016117039.9A
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German (de)
English (en)
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DE102016117039A1 (de
Inventor
Takashi Izumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fanuc Corp
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Fanuc Corp
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Publication date
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Publication of DE102016117039A1 publication Critical patent/DE102016117039A1/de
Application granted granted Critical
Publication of DE102016117039B4 publication Critical patent/DE102016117039B4/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/127—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
    • B23K26/128—Laser beam path enclosures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/142—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1435—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor involving specially adapted flow control means
    • B23K26/1437—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor involving specially adapted flow control means for flow rate control
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B23K26/707—Auxiliary equipment for monitoring laser beam transmission optics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0071—Beam steering, e.g. whereby a mirror outside the cavity is present to change the beam direction

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • Analytical Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Fluid Mechanics (AREA)
  • Laser Beam Processing (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE102016117039.9A 2015-09-17 2016-09-12 Laserbearbeitungssystem zum überwachen von verunreinigungsgas in einem laserstrahlengang Expired - Fee Related DE102016117039B4 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015184455A JP6254985B2 (ja) 2015-09-17 2015-09-17 レーザ光路内の不純ガスを監視するレーザ加工システム
JP2015-184455 2015-09-17

Publications (2)

Publication Number Publication Date
DE102016117039A1 DE102016117039A1 (de) 2017-03-23
DE102016117039B4 true DE102016117039B4 (de) 2019-02-07

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Application Number Title Priority Date Filing Date
DE102016117039.9A Expired - Fee Related DE102016117039B4 (de) 2015-09-17 2016-09-12 Laserbearbeitungssystem zum überwachen von verunreinigungsgas in einem laserstrahlengang

Country Status (4)

Country Link
US (1) US10145829B2 (ja)
JP (1) JP6254985B2 (ja)
CN (1) CN107030375B (ja)
DE (1) DE102016117039B4 (ja)

Families Citing this family (5)

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Publication number Priority date Publication date Assignee Title
EP3566097B1 (en) * 2017-01-09 2022-11-16 Max-Planck-Gesellschaft zur Förderung der Wissenschaften E. V. Broadband light source device and method of creating broadband light pulses
JP6702910B2 (ja) * 2017-04-17 2020-06-03 ファナック株式会社 レーザ加工装置
JP7350290B2 (ja) * 2019-06-28 2023-09-26 ヤマハファインテック株式会社 ガス濃度検出方法、ガス濃度検出装置、及びガス生成システム
JP7285713B2 (ja) * 2019-07-05 2023-06-02 三菱電機株式会社 レーザ加工ヘッド及びレーザ加工装置
US20230095918A1 (en) 2021-09-24 2023-03-30 Ii-Vi Delaware, Inc. Laser processing head having contamination resistance

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4335154B2 (ja) 2003-05-20 2009-09-30 三菱電機株式会社 レーザ加工装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04335154A (ja) 1991-05-09 1992-11-24 S R L:Kk 薬物スクリ−ニング方法
JP2768896B2 (ja) * 1994-01-20 1998-06-25 新コスモス電機株式会社 ガス検出器及びその使用方法
JPH11207484A (ja) * 1998-01-23 1999-08-03 Amada Co Ltd レーザ加工方法およびその装置
JP2002357576A (ja) * 2001-05-31 2002-12-13 Mitsubishi Heavy Ind Ltd 広い濃度範囲の水素ガスの検出方法及び同装置
JP2004103633A (ja) * 2002-09-05 2004-04-02 Hitachi Industrial Equipment Systems Co Ltd アモルファス鉄心モールド変圧器
CN101607348B (zh) * 2009-07-10 2011-11-30 西北工业大学 一种用于激光成形与修复的惰性气氛控制装置
JP2015182104A (ja) * 2014-03-24 2015-10-22 ファナック株式会社 レーザ光の伝播監視機能を備えたレーザ加工機
JP5911903B2 (ja) * 2014-03-28 2016-04-27 ファナック株式会社 レーザ光の強度分布を計測するビームプロファイラ、レーザ発振器、およびレーザ加工装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4335154B2 (ja) 2003-05-20 2009-09-30 三菱電機株式会社 レーザ加工装置

Also Published As

Publication number Publication date
US10145829B2 (en) 2018-12-04
DE102016117039A1 (de) 2017-03-23
CN107030375B (zh) 2018-12-11
US20170082587A1 (en) 2017-03-23
JP2017056480A (ja) 2017-03-23
CN107030375A (zh) 2017-08-11
JP6254985B2 (ja) 2017-12-27

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