DE102013223556A1 - Vakuumpumpen-System sowie Verfahren zum Betreiben eines Vakuumpumpen-Systems - Google Patents

Vakuumpumpen-System sowie Verfahren zum Betreiben eines Vakuumpumpen-Systems Download PDF

Info

Publication number
DE102013223556A1
DE102013223556A1 DE102013223556.9A DE102013223556A DE102013223556A1 DE 102013223556 A1 DE102013223556 A1 DE 102013223556A1 DE 102013223556 A DE102013223556 A DE 102013223556A DE 102013223556 A1 DE102013223556 A1 DE 102013223556A1
Authority
DE
Germany
Prior art keywords
vacuum pump
inlet
valve
pump system
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE102013223556.9A
Other languages
German (de)
English (en)
Inventor
Christian Beyer
Thomas Dreifert
Roland Müller
Max Pelikan
Dirk Schiller
Daniel Schneidenbach
Dirk Stratmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Priority to DE102013223556.9A priority Critical patent/DE102013223556A1/de
Priority to CN201480062828.8A priority patent/CN105829723B/zh
Priority to KR1020167012915A priority patent/KR20160085782A/ko
Priority to PCT/EP2014/073681 priority patent/WO2015074865A1/de
Priority to EP14793138.0A priority patent/EP3071837A1/de
Publication of DE102013223556A1 publication Critical patent/DE102013223556A1/de
Ceased legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
DE102013223556.9A 2013-11-19 2013-11-19 Vakuumpumpen-System sowie Verfahren zum Betreiben eines Vakuumpumpen-Systems Ceased DE102013223556A1 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE102013223556.9A DE102013223556A1 (de) 2013-11-19 2013-11-19 Vakuumpumpen-System sowie Verfahren zum Betreiben eines Vakuumpumpen-Systems
CN201480062828.8A CN105829723B (zh) 2013-11-19 2014-11-04 真空泵系统和用于操作真空泵系统的方法
KR1020167012915A KR20160085782A (ko) 2013-11-19 2014-11-04 진공 펌프 시스템 및 진공 펌프 시스템을 작동시키기 위한 방법
PCT/EP2014/073681 WO2015074865A1 (de) 2013-11-19 2014-11-04 Vakuumpumpen-system sowie verfahren zum betreiben eines vakuumpumpen-systems
EP14793138.0A EP3071837A1 (de) 2013-11-19 2014-11-04 Vakuumpumpen-system sowie verfahren zum betreiben eines vakuumpumpen-systems

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102013223556.9A DE102013223556A1 (de) 2013-11-19 2013-11-19 Vakuumpumpen-System sowie Verfahren zum Betreiben eines Vakuumpumpen-Systems

Publications (1)

Publication Number Publication Date
DE102013223556A1 true DE102013223556A1 (de) 2015-05-21

Family

ID=51846675

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102013223556.9A Ceased DE102013223556A1 (de) 2013-11-19 2013-11-19 Vakuumpumpen-System sowie Verfahren zum Betreiben eines Vakuumpumpen-Systems

Country Status (5)

Country Link
EP (1) EP3071837A1 (ko)
KR (1) KR20160085782A (ko)
CN (1) CN105829723B (ko)
DE (1) DE102013223556A1 (ko)
WO (1) WO2015074865A1 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018099710A1 (de) * 2016-11-30 2018-06-07 Leybold Gmbh Verfahren zum betreiben eines vakuumpumpensystems
WO2021180703A1 (en) * 2020-03-10 2021-09-16 Atlas Copco Airpower N.V. Pump speed controlling method and apparatus, a computer program and a computer readable medium having stored thereon the computer program applied thereby and a pump

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202016007609U1 (de) * 2016-12-15 2018-03-26 Leybold Gmbh Vakuumpumpsystem
DE102017107601B4 (de) * 2017-04-10 2019-11-07 Gardner Denver Deutschland Gmbh Verfahren zur Steuerung eines Schraubenverdichters

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2430314A1 (de) * 1974-06-24 1976-01-08 Siemens Ag Fluessigkeitsring-vakuumpumpe mit vorgeschaltetem verdichter
DE19524609A1 (de) * 1995-07-06 1997-01-09 Leybold Ag Vorrichtung zum raschen Evakuieren einer Vakuumkammer
US20020134439A1 (en) * 2001-03-22 2002-09-26 Hiroyuki Kawasaki Gas recirculation flow control method and apparatus for use in vacuum system
DE102010009083A1 (de) * 2009-03-24 2011-05-12 Vacuubrand Gmbh + Co Kg Vakuumpumpe

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2883934B1 (fr) * 2005-04-05 2010-08-20 Cit Alcatel Pompage rapide d'enceinte avec limitation d'energie
DE102007060174A1 (de) * 2007-12-13 2009-06-25 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe sowie Verfahren zum Betreiben einer Vakuumpumpe
FR2968730A1 (fr) * 2010-12-14 2012-06-15 Alcatel Lucent Dispositif de pompage a consommation d'energie reduite
CN103228914B (zh) * 2010-12-22 2015-09-30 株式会社爱发科 真空排气装置和真空处理装置以及真空排气方法
CN202468224U (zh) * 2012-03-19 2012-10-03 四川科伦药业股份有限公司 节能真空泵系统
CN202971096U (zh) * 2012-10-30 2013-06-05 新疆晨光天然色素有限公司 一种真空泵自动调压装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2430314A1 (de) * 1974-06-24 1976-01-08 Siemens Ag Fluessigkeitsring-vakuumpumpe mit vorgeschaltetem verdichter
DE19524609A1 (de) * 1995-07-06 1997-01-09 Leybold Ag Vorrichtung zum raschen Evakuieren einer Vakuumkammer
US20020134439A1 (en) * 2001-03-22 2002-09-26 Hiroyuki Kawasaki Gas recirculation flow control method and apparatus for use in vacuum system
DE102010009083A1 (de) * 2009-03-24 2011-05-12 Vacuubrand Gmbh + Co Kg Vakuumpumpe

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018099710A1 (de) * 2016-11-30 2018-06-07 Leybold Gmbh Verfahren zum betreiben eines vakuumpumpensystems
US11719231B2 (en) 2016-11-30 2023-08-08 Leybold Gmbh Method for operating a vacuum pump system
WO2021180703A1 (en) * 2020-03-10 2021-09-16 Atlas Copco Airpower N.V. Pump speed controlling method and apparatus, a computer program and a computer readable medium having stored thereon the computer program applied thereby and a pump
BE1028135B1 (nl) * 2020-03-10 2021-10-11 Atlas Copco Airpower Nv Werkwijze en inrichting voor het regelen van de pompsnelheid, computerprogramma en een door een computer leesbaar medium waarop het computerprogramma is opgeslagen daarbij toegepast en een pomp

Also Published As

Publication number Publication date
CN105829723A (zh) 2016-08-03
KR20160085782A (ko) 2016-07-18
EP3071837A1 (de) 2016-09-28
CN105829723B (zh) 2018-02-16
WO2015074865A1 (de) 2015-05-28

Similar Documents

Publication Publication Date Title
DE2529331C2 (de) Schraubenkompressor
DE10047940B4 (de) Verfahren zur Regelung des Betriebs einer ölfreien Schraubenkompressionsvorrichtung
EP3071837A1 (de) Vakuumpumpen-system sowie verfahren zum betreiben eines vakuumpumpen-systems
EP3280915A1 (de) Vakuumpumpensystem
EP2067963A2 (de) Lagerkammerdrucksystem
WO2014072276A1 (de) Vakuumpumpensystem zur evakuierung einer kammer sowie verfahren zur steuerung eines vakuumpumpensystems
DE2434873A1 (de) Rotationsschraubenverdichter mit optimal angeordneter stelle zur injektion eines fluessigen kuehlmittels
DE60307662T2 (de) Kompressor mit leistungsregelung
EP1240433B1 (de) Trockenverdichtende Vakuumpumpe mit Gasballasteinrichtung
DE102016105302A1 (de) Steuerstromregelventil, insbesondere für Scrollverdichter in Fahrzeugklimaanlagen oder Wärmepumpen
EP3161317B1 (de) Vakuumpumpen-system
DE102008048856A1 (de) Druckregeleinheit
DE3702432C2 (de) Schraubenverdichter mit Hubventilen zur Leistungssteuerung
DE102017107601A1 (de) Verfahren zur Steuerung eines Schraubenverdichters
DE112020001762T5 (de) Trockenvakuumpumpe und Pumpanlage
EP2065555A1 (de) Verfahren zum Betrieb einer Verdichtervorrichtung und zugehörige Verdichtervorrichtung
WO2018228784A1 (de) Mehrstufige wälzkolbenpumpe
EP3916225B1 (de) Vakuumpumpe
DE60105249T2 (de) Vakuumpumpe
EP2342462A2 (de) Verfahren zum betreiben einer ölgedichteten vakuumpumpe sowie ölgedichtete vakuumpumpe
DE10326466B4 (de) Schieber mit Anlaufentlastung
EP2246567B1 (de) Kolbenverdichter
WO2002103205A1 (de) Profilkontur der spindelroteren einer spindelpumpe
DE2462187A1 (de) Fluessigkeitsring-vakuumpumpe mit vorgeschaltetem seitenkanal-ringverdichter
WO2016045841A1 (de) Pumpvorrichtung, insbesondere axialkolbenpumpe, für eine abwärmenutzungseinrichtung eines kraftfahrzeugs

Legal Events

Date Code Title Description
R163 Identified publications notified
R081 Change of applicant/patentee

Owner name: LEYBOLD GMBH, DE

Free format text: FORMER OWNER: OERLIKON LEYBOLD VACUUM GMBH, 50968 KOELN, DE

R082 Change of representative

Representative=s name: DOMPATENT VON KREISLER SELTING WERNER - PARTNE, DE

R083 Amendment of/additions to inventor(s)
R012 Request for examination validly filed
R016 Response to examination communication
R002 Refusal decision in examination/registration proceedings
R003 Refusal decision now final