DE102011082570A1 - Rotatorische Positionsmesseinrichtung - Google Patents

Rotatorische Positionsmesseinrichtung Download PDF

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Publication number
DE102011082570A1
DE102011082570A1 DE201110082570 DE102011082570A DE102011082570A1 DE 102011082570 A1 DE102011082570 A1 DE 102011082570A1 DE 201110082570 DE201110082570 DE 201110082570 DE 102011082570 A DE102011082570 A DE 102011082570A DE 102011082570 A1 DE102011082570 A1 DE 102011082570A1
Authority
DE
Germany
Prior art keywords
distance
measuring device
light source
rotary position
position measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE201110082570
Other languages
German (de)
English (en)
Inventor
Ulrich Benner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Priority to DE201110082570 priority Critical patent/DE102011082570A1/de
Priority to EP12182164.9A priority patent/EP2570780B1/de
Priority to US13/603,846 priority patent/US8937726B2/en
Priority to JP2012195723A priority patent/JP6246460B2/ja
Priority to CN201210338229.7A priority patent/CN102997948B/zh
Publication of DE102011082570A1 publication Critical patent/DE102011082570A1/de
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE201110082570 2011-09-13 2011-09-13 Rotatorische Positionsmesseinrichtung Withdrawn DE102011082570A1 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE201110082570 DE102011082570A1 (de) 2011-09-13 2011-09-13 Rotatorische Positionsmesseinrichtung
EP12182164.9A EP2570780B1 (de) 2011-09-13 2012-08-29 Rotatorische Positionsmesseinrichtung
US13/603,846 US8937726B2 (en) 2011-09-13 2012-09-05 Rotary position measuring instrument
JP2012195723A JP6246460B2 (ja) 2011-09-13 2012-09-06 回転式位置検出装置
CN201210338229.7A CN102997948B (zh) 2011-09-13 2012-09-13 旋转位置测量装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE201110082570 DE102011082570A1 (de) 2011-09-13 2011-09-13 Rotatorische Positionsmesseinrichtung

Publications (1)

Publication Number Publication Date
DE102011082570A1 true DE102011082570A1 (de) 2013-03-14

Family

ID=46801323

Family Applications (1)

Application Number Title Priority Date Filing Date
DE201110082570 Withdrawn DE102011082570A1 (de) 2011-09-13 2011-09-13 Rotatorische Positionsmesseinrichtung

Country Status (5)

Country Link
US (1) US8937726B2 (https=)
EP (1) EP2570780B1 (https=)
JP (1) JP6246460B2 (https=)
CN (1) CN102997948B (https=)
DE (1) DE102011082570A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012222077A1 (de) 2012-12-03 2014-06-05 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102016224012A1 (de) * 2016-12-02 2018-06-07 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Verfahren zum Betreiben einer Positionsmesseinrichtung
CN111458343B (zh) * 2019-01-18 2024-08-06 深圳中科飞测科技股份有限公司 检测设备及检测方法
JP7120200B2 (ja) * 2019-10-15 2022-08-17 株式会社デンソー 回転角検出装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09133552A (ja) 1995-11-08 1997-05-20 Yaskawa Electric Corp 光学式ロータリエンコーダ

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4572952A (en) * 1982-07-28 1986-02-25 Adrian March Research Ltd. Position sensor with moire interpolation
US4844617A (en) * 1988-01-20 1989-07-04 Tencor Instruments Confocal measuring microscope with automatic focusing
JPH07888Y2 (ja) * 1988-02-22 1995-01-11 株式会社ミツトヨ 光学式変位検出器
JP2749900B2 (ja) * 1989-09-11 1998-05-13 株式会社三協精機製作所 位置検出方法
JP2653186B2 (ja) * 1989-09-27 1997-09-10 キヤノン株式会社 ヘッドアップディスプレイ装置
JP3500214B2 (ja) * 1994-12-28 2004-02-23 日本電産コパル株式会社 光学式エンコーダ
JPH09105625A (ja) * 1995-10-13 1997-04-22 Topcon Corp 距離測定装置
JPH1123321A (ja) * 1997-06-30 1999-01-29 Canon Inc 光学スケール及びそれを用いた変位情報測定装置
JP3459755B2 (ja) * 1997-06-30 2003-10-27 キヤノン株式会社 変位情報測定装置
DE59912617D1 (de) * 1998-08-01 2006-02-16 Heidenhain Gmbh Dr Johannes Rotatorische Positionsmesseinrichtung
DE19908328A1 (de) * 1999-02-26 2000-08-31 Heidenhain Gmbh Dr Johannes Optische Positionsmeßeinrichtung
JP2002139353A (ja) * 2000-11-06 2002-05-17 Olympus Optical Co Ltd 光学式ロータリエンコーダ
GB0103582D0 (en) * 2001-02-14 2001-03-28 Renishaw Plc Position determination system
DE10333772A1 (de) * 2002-08-07 2004-02-26 Dr. Johannes Heidenhain Gmbh Interferenzielle Positionsmesseinrichtung
DE102006021017A1 (de) * 2006-05-05 2007-11-08 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102006042743A1 (de) * 2006-09-12 2008-03-27 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP2008292352A (ja) * 2007-05-25 2008-12-04 Mitsutoyo Corp 反射型エンコーダ
JP2009210374A (ja) * 2008-03-04 2009-09-17 Nikon Corp エンコーダ及び受光ユニット
DE102008025870A1 (de) * 2008-05-31 2009-12-03 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102008044858A1 (de) * 2008-08-28 2010-03-04 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102010029211A1 (de) * 2010-05-21 2011-11-24 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09133552A (ja) 1995-11-08 1997-05-20 Yaskawa Electric Corp 光学式ロータリエンコーダ

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
R. Pettigrew mit dem Titel "Analysis of Grating Imaging and its Application to Displacement Metrology" in SPIE Vol. 36, 1st European Congress on Optics applied to Metrology (1977), S. 325-332

Also Published As

Publication number Publication date
CN102997948B (zh) 2016-06-29
US20130063732A1 (en) 2013-03-14
JP2013061330A (ja) 2013-04-04
US8937726B2 (en) 2015-01-20
EP2570780A3 (de) 2017-01-11
JP6246460B2 (ja) 2017-12-13
EP2570780B1 (de) 2018-01-03
CN102997948A (zh) 2013-03-27
EP2570780A2 (de) 2013-03-20

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Legal Events

Date Code Title Description
R012 Request for examination validly filed
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee