DE102009020501A1 - Bandbreiteneinengungsmoduls zur Einstellung einer spektralen Bandbreite eines Laserstrahls - Google Patents

Bandbreiteneinengungsmoduls zur Einstellung einer spektralen Bandbreite eines Laserstrahls Download PDF

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Publication number
DE102009020501A1
DE102009020501A1 DE102009020501A DE102009020501A DE102009020501A1 DE 102009020501 A1 DE102009020501 A1 DE 102009020501A1 DE 102009020501 A DE102009020501 A DE 102009020501A DE 102009020501 A DE102009020501 A DE 102009020501A DE 102009020501 A1 DE102009020501 A1 DE 102009020501A1
Authority
DE
Germany
Prior art keywords
bandwidth
narrowing module
optical component
bandwidth narrowing
wavelength
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102009020501A
Other languages
German (de)
English (en)
Inventor
Markus Deubel
Anton Lengel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss Laser Optics GmbH
Original Assignee
Carl Zeiss Laser Optics GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Laser Optics GmbH filed Critical Carl Zeiss Laser Optics GmbH
Priority to DE102009020501A priority Critical patent/DE102009020501A1/de
Priority to PCT/EP2010/002722 priority patent/WO2010127831A1/en
Priority to JP2012508944A priority patent/JP2012526373A/ja
Publication of DE102009020501A1 publication Critical patent/DE102009020501A1/de
Priority to US13/238,470 priority patent/US20120099612A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
    • G02B19/0014—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements
    • G02B26/0883—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements the refracting element being a prism
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements
    • G02B26/0883—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements the refracting element being a prism
    • G02B26/0891—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements the refracting element being a prism forming an optical wedge
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0972—Prisms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4233—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application
    • G02B27/4244—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application in wavelength selecting devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
    • G03F7/70575—Wavelength control, e.g. control of bandwidth, multiple wavelength, selection of wavelength or matching of optical components to wavelength
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0057—Temporal shaping, e.g. pulse compression, frequency chirping

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Lasers (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
DE102009020501A 2009-05-08 2009-05-08 Bandbreiteneinengungsmoduls zur Einstellung einer spektralen Bandbreite eines Laserstrahls Withdrawn DE102009020501A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE102009020501A DE102009020501A1 (de) 2009-05-08 2009-05-08 Bandbreiteneinengungsmoduls zur Einstellung einer spektralen Bandbreite eines Laserstrahls
PCT/EP2010/002722 WO2010127831A1 (en) 2009-05-08 2010-05-04 Bandwidth narrowing module for setting a spectral bandwidth of a laser beam
JP2012508944A JP2012526373A (ja) 2009-05-08 2010-05-04 レーザビームのスペクトルバンド幅を設定するための狭帯域化モジュール
US13/238,470 US20120099612A1 (en) 2009-05-08 2011-09-21 Bandwidth narrowing module for setting a spectral bandwidth of a laser beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102009020501A DE102009020501A1 (de) 2009-05-08 2009-05-08 Bandbreiteneinengungsmoduls zur Einstellung einer spektralen Bandbreite eines Laserstrahls

Publications (1)

Publication Number Publication Date
DE102009020501A1 true DE102009020501A1 (de) 2010-12-23

Family

ID=42542902

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102009020501A Withdrawn DE102009020501A1 (de) 2009-05-08 2009-05-08 Bandbreiteneinengungsmoduls zur Einstellung einer spektralen Bandbreite eines Laserstrahls

Country Status (4)

Country Link
US (1) US20120099612A1 (https=)
JP (1) JP2012526373A (https=)
DE (1) DE102009020501A1 (https=)
WO (1) WO2010127831A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019238417A1 (de) 2018-06-14 2019-12-19 Carl Zeiss Smt Gmbh Optische baugruppe zur verringerung einer spektralen bandbreite eines ausgabestrahls eines lasers

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103676498B (zh) * 2013-11-18 2017-04-05 中国科学院上海光学精密机械研究所 光刻机光瞳整形单元结构及其衍射光学元件设计方法
WO2016132321A1 (en) * 2015-02-18 2016-08-25 Imax Emea Limited Despeckling system for projected light
US9666191B1 (en) * 2016-03-17 2017-05-30 Vocalzoom Systems Ltd. Laser-based system and optical microphone having increased bandwidth
KR101753355B1 (ko) 2016-07-20 2017-07-06 서울대학교산학협력단 레이저 홀로그래픽 리소그래피 장치 및 패턴 제조 방법
PL446827A1 (pl) * 2023-11-23 2025-05-26 Uniwersytet Warszawski Sposób widmowego zawężania impulsów laserowych światła oraz układ do widmowego zawężania impulsów laserowych światła
EP4560851B1 (en) 2023-11-23 2026-04-08 Uniwersytet Warszawski Method and system for spectral narrowing of laser light pulses

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6163559A (en) * 1998-06-22 2000-12-19 Cymer, Inc. Beam expander for ultraviolet lasers
US20020075932A1 (en) * 1999-06-23 2002-06-20 Lambda Physik Ag. Line-narrowing module for high power laser
US20020131468A1 (en) * 1998-08-06 2002-09-19 Lambda Physik Ag. Laser resonator for improving narrow band emission of an excimer laser
US6856638B2 (en) * 2000-10-23 2005-02-15 Lambda Physik Ag Resonator arrangement for bandwidth control
US20070001127A1 (en) * 2005-06-30 2007-01-04 Cymer, Inc. Active bandwidth control for a laser

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Publication number Priority date Publication date Assignee Title
KR19980703204A (ko) * 1995-04-03 1998-10-15 안자끼 사토루 협대역 레이저 장치
JP4102457B2 (ja) * 1997-05-09 2008-06-18 株式会社小松製作所 狭帯域化レーザ装置
US6757316B2 (en) * 1999-12-27 2004-06-29 Cymer, Inc. Four KHz gas discharge laser
JP3590524B2 (ja) * 1998-03-25 2004-11-17 株式会社小松製作所 狭帯域化レーザの波面制御装置
US6061382A (en) * 1998-05-04 2000-05-09 Lambda Physik Gmbh Laser system and method for narrow spectral linewidth through wavefront curvature compensation
US6542243B2 (en) * 2000-01-27 2003-04-01 Lambda Physik Ag Resonator optics monitoring method
JP5157004B2 (ja) * 2006-07-04 2013-03-06 株式会社小松製作所 狭帯域化レーザのスペクトル幅調整方法
JP5114767B2 (ja) * 2006-10-10 2013-01-09 株式会社小松製作所 狭帯域化レーザのスペクトル幅調整装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6163559A (en) * 1998-06-22 2000-12-19 Cymer, Inc. Beam expander for ultraviolet lasers
US20020131468A1 (en) * 1998-08-06 2002-09-19 Lambda Physik Ag. Laser resonator for improving narrow band emission of an excimer laser
US20020075932A1 (en) * 1999-06-23 2002-06-20 Lambda Physik Ag. Line-narrowing module for high power laser
US6856638B2 (en) * 2000-10-23 2005-02-15 Lambda Physik Ag Resonator arrangement for bandwidth control
US20070001127A1 (en) * 2005-06-30 2007-01-04 Cymer, Inc. Active bandwidth control for a laser

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
DE-Buch: "Laser", Kneubühl, Siegrist, Teubner 1989, S. 261 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019238417A1 (de) 2018-06-14 2019-12-19 Carl Zeiss Smt Gmbh Optische baugruppe zur verringerung einer spektralen bandbreite eines ausgabestrahls eines lasers
DE102018209602A1 (de) 2018-06-14 2019-12-19 Carl Zeiss Smt Gmbh Optische Baugruppe zur Verringerung einer spektralen Bandbreite eines Ausgabestrahls eines Lasers
DE102018209602B4 (de) 2018-06-14 2022-05-12 Carl Zeiss Smt Gmbh Optische Baugruppe zur Verringerung einer spektralen Bandbreite eines Ausgabestrahls eines Lasers
US12300959B2 (en) 2018-06-14 2025-05-13 Carl Zeiss Smt Gmbh Optical assembly for reducing a spectral bandwidth of an output beam of a laser

Also Published As

Publication number Publication date
JP2012526373A (ja) 2012-10-25
WO2010127831A1 (en) 2010-11-11
US20120099612A1 (en) 2012-04-26

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Legal Events

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OP8 Request for examination as to paragraph 44 patent law
R016 Response to examination communication
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee
R002 Refusal decision in examination/registration proceedings
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee

Effective date: 20141202