DE102009003673B4 - Elektronenquelle auf der Basis von Feldemittern mit minimierten Strahl-Emittanzwachstum - Google Patents

Elektronenquelle auf der Basis von Feldemittern mit minimierten Strahl-Emittanzwachstum Download PDF

Info

Publication number
DE102009003673B4
DE102009003673B4 DE102009003673.3A DE102009003673A DE102009003673B4 DE 102009003673 B4 DE102009003673 B4 DE 102009003673B4 DE 102009003673 A DE102009003673 A DE 102009003673A DE 102009003673 B4 DE102009003673 B4 DE 102009003673B4
Authority
DE
Germany
Prior art keywords
electron beam
grid
ece
voltage
extraction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE102009003673.3A
Other languages
German (de)
English (en)
Other versions
DE102009003673A1 (de
Inventor
Yun Zou
Yang Cao
Louis Paul Inzinna
Vasile Bogdan Neculaes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of DE102009003673A1 publication Critical patent/DE102009003673A1/de
Application granted granted Critical
Publication of DE102009003673B4 publication Critical patent/DE102009003673B4/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/065—Field emission, photo emission or secondary emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/06—Cathode assembly
    • H01J2235/062—Cold cathodes

Landscapes

  • X-Ray Techniques (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
DE102009003673.3A 2008-03-26 2009-03-25 Elektronenquelle auf der Basis von Feldemittern mit minimierten Strahl-Emittanzwachstum Expired - Fee Related DE102009003673B4 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/055,536 2008-03-26
US12/055,536 US7801277B2 (en) 2008-03-26 2008-03-26 Field emitter based electron source with minimized beam emittance growth

Publications (2)

Publication Number Publication Date
DE102009003673A1 DE102009003673A1 (de) 2009-10-01
DE102009003673B4 true DE102009003673B4 (de) 2014-02-20

Family

ID=41011323

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102009003673.3A Expired - Fee Related DE102009003673B4 (de) 2008-03-26 2009-03-25 Elektronenquelle auf der Basis von Feldemittern mit minimierten Strahl-Emittanzwachstum

Country Status (3)

Country Link
US (1) US7801277B2 (enExample)
JP (1) JP4590479B2 (enExample)
DE (1) DE102009003673B4 (enExample)

Families Citing this family (122)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8378311B2 (en) 2008-05-22 2013-02-19 Vladimir Balakin Synchrotron power cycling apparatus and method of use thereof
US7943913B2 (en) * 2008-05-22 2011-05-17 Vladimir Balakin Negative ion source method and apparatus used in conjunction with a charged particle cancer therapy system
US8093564B2 (en) 2008-05-22 2012-01-10 Vladimir Balakin Ion beam focusing lens method and apparatus used in conjunction with a charged particle cancer therapy system
US8129694B2 (en) 2008-05-22 2012-03-06 Vladimir Balakin Negative ion beam source vacuum method and apparatus used in conjunction with a charged particle cancer therapy system
US8374314B2 (en) 2008-05-22 2013-02-12 Vladimir Balakin Synchronized X-ray / breathing method and apparatus used in conjunction with a charged particle cancer therapy system
US10092776B2 (en) 2008-05-22 2018-10-09 Susan L. Michaud Integrated translation/rotation charged particle imaging/treatment apparatus and method of use thereof
US8378321B2 (en) 2008-05-22 2013-02-19 Vladimir Balakin Charged particle cancer therapy and patient positioning method and apparatus
US9737272B2 (en) 2008-05-22 2017-08-22 W. Davis Lee Charged particle cancer therapy beam state determination apparatus and method of use thereof
US9095040B2 (en) 2008-05-22 2015-07-28 Vladimir Balakin Charged particle beam acceleration and extraction method and apparatus used in conjunction with a charged particle cancer therapy system
US8896239B2 (en) 2008-05-22 2014-11-25 Vladimir Yegorovich Balakin Charged particle beam injection method and apparatus used in conjunction with a charged particle cancer therapy system
US9616252B2 (en) 2008-05-22 2017-04-11 Vladimir Balakin Multi-field cancer therapy apparatus and method of use thereof
US8288742B2 (en) 2008-05-22 2012-10-16 Vladimir Balakin Charged particle cancer therapy patient positioning method and apparatus
US10070831B2 (en) 2008-05-22 2018-09-11 James P. Bennett Integrated cancer therapy—imaging apparatus and method of use thereof
US7953205B2 (en) * 2008-05-22 2011-05-31 Vladimir Balakin Synchronized X-ray / breathing method and apparatus used in conjunction with a charged particle cancer therapy system
US8436327B2 (en) 2008-05-22 2013-05-07 Vladimir Balakin Multi-field charged particle cancer therapy method and apparatus
US8399866B2 (en) 2008-05-22 2013-03-19 Vladimir Balakin Charged particle extraction apparatus and method of use thereof
US10684380B2 (en) 2008-05-22 2020-06-16 W. Davis Lee Multiple scintillation detector array imaging apparatus and method of use thereof
US8519365B2 (en) 2008-05-22 2013-08-27 Vladimir Balakin Charged particle cancer therapy imaging method and apparatus
US10029122B2 (en) 2008-05-22 2018-07-24 Susan L. Michaud Charged particle—patient motion control system apparatus and method of use thereof
US10548551B2 (en) 2008-05-22 2020-02-04 W. Davis Lee Depth resolved scintillation detector array imaging apparatus and method of use thereof
US8907309B2 (en) 2009-04-17 2014-12-09 Stephen L. Spotts Treatment delivery control system and method of operation thereof
US8624528B2 (en) 2008-05-22 2014-01-07 Vladimir Balakin Method and apparatus coordinating synchrotron acceleration periods with patient respiration periods
US9579525B2 (en) 2008-05-22 2017-02-28 Vladimir Balakin Multi-axis charged particle cancer therapy method and apparatus
EP2283713B1 (en) 2008-05-22 2018-03-28 Vladimir Yegorovich Balakin Multi-axis charged particle cancer therapy apparatus
US9044600B2 (en) 2008-05-22 2015-06-02 Vladimir Balakin Proton tomography apparatus and method of operation therefor
EP2283709B1 (en) * 2008-05-22 2018-07-11 Vladimir Yegorovich Balakin Charged particle cancer therapy patient positioning apparatus
US9737734B2 (en) 2008-05-22 2017-08-22 Susan L. Michaud Charged particle translation slide control apparatus and method of use thereof
US9744380B2 (en) 2008-05-22 2017-08-29 Susan L. Michaud Patient specific beam control assembly of a cancer therapy apparatus and method of use thereof
US8373146B2 (en) 2008-05-22 2013-02-12 Vladimir Balakin RF accelerator method and apparatus used in conjunction with a charged particle cancer therapy system
US8309941B2 (en) 2008-05-22 2012-11-13 Vladimir Balakin Charged particle cancer therapy and patient breath monitoring method and apparatus
US9498649B2 (en) 2008-05-22 2016-11-22 Vladimir Balakin Charged particle cancer therapy patient constraint apparatus and method of use thereof
US8198607B2 (en) 2008-05-22 2012-06-12 Vladimir Balakin Tandem accelerator method and apparatus used in conjunction with a charged particle cancer therapy system
US8642978B2 (en) 2008-05-22 2014-02-04 Vladimir Balakin Charged particle cancer therapy dose distribution method and apparatus
US7939809B2 (en) * 2008-05-22 2011-05-10 Vladimir Balakin Charged particle beam extraction method and apparatus used in conjunction with a charged particle cancer therapy system
US8178859B2 (en) * 2008-05-22 2012-05-15 Vladimir Balakin Proton beam positioning verification method and apparatus used in conjunction with a charged particle cancer therapy system
US7940894B2 (en) * 2008-05-22 2011-05-10 Vladimir Balakin Elongated lifetime X-ray method and apparatus used in conjunction with a charged particle cancer therapy system
US8637833B2 (en) 2008-05-22 2014-01-28 Vladimir Balakin Synchrotron power supply apparatus and method of use thereof
US10143854B2 (en) 2008-05-22 2018-12-04 Susan L. Michaud Dual rotation charged particle imaging / treatment apparatus and method of use thereof
CN102119586B (zh) 2008-05-22 2015-09-02 弗拉迪米尔·叶戈罗维奇·巴拉金 多场带电粒子癌症治疗方法和装置
US8368038B2 (en) 2008-05-22 2013-02-05 Vladimir Balakin Method and apparatus for intensity control of a charged particle beam extracted from a synchrotron
US8598543B2 (en) 2008-05-22 2013-12-03 Vladimir Balakin Multi-axis/multi-field charged particle cancer therapy method and apparatus
US9981147B2 (en) 2008-05-22 2018-05-29 W. Davis Lee Ion beam extraction apparatus and method of use thereof
US8045679B2 (en) * 2008-05-22 2011-10-25 Vladimir Balakin Charged particle cancer therapy X-ray method and apparatus
US9056199B2 (en) 2008-05-22 2015-06-16 Vladimir Balakin Charged particle treatment, rapid patient positioning apparatus and method of use thereof
US8373143B2 (en) 2008-05-22 2013-02-12 Vladimir Balakin Patient immobilization and repositioning method and apparatus used in conjunction with charged particle cancer therapy
US9937362B2 (en) 2008-05-22 2018-04-10 W. Davis Lee Dynamic energy control of a charged particle imaging/treatment apparatus and method of use thereof
US8718231B2 (en) 2008-05-22 2014-05-06 Vladimir Balakin X-ray tomography method and apparatus used in conjunction with a charged particle cancer therapy system
US9168392B1 (en) 2008-05-22 2015-10-27 Vladimir Balakin Charged particle cancer therapy system X-ray apparatus and method of use thereof
CA2725315C (en) 2008-05-22 2015-06-30 Vladimir Yegorovich Balakin X-ray method and apparatus used in conjunction with a charged particle cancer therapy system
US9058910B2 (en) 2008-05-22 2015-06-16 Vladimir Yegorovich Balakin Charged particle beam acceleration method and apparatus as part of a charged particle cancer therapy system
US9910166B2 (en) 2008-05-22 2018-03-06 Stephen L. Spotts Redundant charged particle state determination apparatus and method of use thereof
US9682254B2 (en) 2008-05-22 2017-06-20 Vladimir Balakin Cancer surface searing apparatus and method of use thereof
US8129699B2 (en) 2008-05-22 2012-03-06 Vladimir Balakin Multi-field charged particle cancer therapy method and apparatus coordinated with patient respiration
US8144832B2 (en) 2008-05-22 2012-03-27 Vladimir Balakin X-ray tomography method and apparatus used in conjunction with a charged particle cancer therapy system
US9177751B2 (en) 2008-05-22 2015-11-03 Vladimir Balakin Carbon ion beam injector apparatus and method of use thereof
US8969834B2 (en) 2008-05-22 2015-03-03 Vladimir Balakin Charged particle therapy patient constraint apparatus and method of use thereof
NZ589387A (en) 2008-05-22 2012-11-30 Vladimir Yegorovich Balakin Charged particle beam extraction method and apparatus used in conjunction with a charged particle cancer therapy system
US9782140B2 (en) 2008-05-22 2017-10-10 Susan L. Michaud Hybrid charged particle / X-ray-imaging / treatment apparatus and method of use thereof
US9737733B2 (en) 2008-05-22 2017-08-22 W. Davis Lee Charged particle state determination apparatus and method of use thereof
US9974978B2 (en) 2008-05-22 2018-05-22 W. Davis Lee Scintillation array apparatus and method of use thereof
US9855444B2 (en) 2008-05-22 2018-01-02 Scott Penfold X-ray detector for proton transit detection apparatus and method of use thereof
US8089054B2 (en) 2008-05-22 2012-01-03 Vladimir Balakin Charged particle beam acceleration and extraction method and apparatus used in conjunction with a charged particle cancer therapy system
MX2010012714A (es) 2008-05-22 2011-06-01 Vladimir Yegorovich Balakin Metodo y aparato de control de la trayectoria de haces para la terapia contra el cancer mediante particulas cargadas.
US8373145B2 (en) 2008-05-22 2013-02-12 Vladimir Balakin Charged particle cancer therapy system magnet control method and apparatus
US8975600B2 (en) 2008-05-22 2015-03-10 Vladimir Balakin Treatment delivery control system and method of operation thereof
US9155911B1 (en) 2008-05-22 2015-10-13 Vladimir Balakin Ion source method and apparatus used in conjunction with a charged particle cancer therapy system
US8188688B2 (en) 2008-05-22 2012-05-29 Vladimir Balakin Magnetic field control method and apparatus used in conjunction with a charged particle cancer therapy system
US8569717B2 (en) 2008-05-22 2013-10-29 Vladimir Balakin Intensity modulated three-dimensional radiation scanning method and apparatus
US8710462B2 (en) 2008-05-22 2014-04-29 Vladimir Balakin Charged particle cancer therapy beam path control method and apparatus
US8229072B2 (en) 2008-07-14 2012-07-24 Vladimir Balakin Elongated lifetime X-ray method and apparatus used in conjunction with a charged particle cancer therapy system
US8625739B2 (en) * 2008-07-14 2014-01-07 Vladimir Balakin Charged particle cancer therapy x-ray method and apparatus
US8627822B2 (en) 2008-07-14 2014-01-14 Vladimir Balakin Semi-vertical positioning method and apparatus used in conjunction with a charged particle cancer therapy system
AU2009341615B2 (en) 2009-03-04 2013-03-28 Zakrytoe Aktsionernoe Obshchestvo Protom Multi-field charged particle cancer therapy method and apparatus
DE102010013362A1 (de) * 2010-03-30 2011-10-06 Siemens Aktiengesellschaft Substrat für einen Feldemitter, Verfahren zur Herstellung des Substrates und Verwendung des Substrates
US10751551B2 (en) 2010-04-16 2020-08-25 James P. Bennett Integrated imaging-cancer treatment apparatus and method of use thereof
US10625097B2 (en) 2010-04-16 2020-04-21 Jillian Reno Semi-automated cancer therapy treatment apparatus and method of use thereof
US10376717B2 (en) 2010-04-16 2019-08-13 James P. Bennett Intervening object compensating automated radiation treatment plan development apparatus and method of use thereof
US10188877B2 (en) 2010-04-16 2019-01-29 W. Davis Lee Fiducial marker/cancer imaging and treatment apparatus and method of use thereof
US11648420B2 (en) 2010-04-16 2023-05-16 Vladimir Balakin Imaging assisted integrated tomography—cancer treatment apparatus and method of use thereof
US10179250B2 (en) 2010-04-16 2019-01-15 Nick Ruebel Auto-updated and implemented radiation treatment plan apparatus and method of use thereof
US10518109B2 (en) 2010-04-16 2019-12-31 Jillian Reno Transformable charged particle beam path cancer therapy apparatus and method of use thereof
US10638988B2 (en) 2010-04-16 2020-05-05 Scott Penfold Simultaneous/single patient position X-ray and proton imaging apparatus and method of use thereof
US10086214B2 (en) 2010-04-16 2018-10-02 Vladimir Balakin Integrated tomography—cancer treatment apparatus and method of use thereof
US10589128B2 (en) 2010-04-16 2020-03-17 Susan L. Michaud Treatment beam path verification in a cancer therapy apparatus and method of use thereof
US10555710B2 (en) 2010-04-16 2020-02-11 James P. Bennett Simultaneous multi-axes imaging apparatus and method of use thereof
US10556126B2 (en) 2010-04-16 2020-02-11 Mark R. Amato Automated radiation treatment plan development apparatus and method of use thereof
US9737731B2 (en) 2010-04-16 2017-08-22 Vladimir Balakin Synchrotron energy control apparatus and method of use thereof
US10349906B2 (en) 2010-04-16 2019-07-16 James P. Bennett Multiplexed proton tomography imaging apparatus and method of use thereof
DE102010043561B4 (de) 2010-11-08 2020-03-05 Nuray Technology Co., Ltd. Elektronenquelle
DE102010043540A1 (de) 2010-11-08 2012-03-15 Siemens Aktiengesellschaft Röntgenröhre
US8915833B1 (en) 2011-02-15 2014-12-23 Velayudhan Sahadevan Image guided intraoperative simultaneous several ports microbeam radiation therapy with microfocus X-ray tubes
US9636525B1 (en) 2011-02-15 2017-05-02 Velayudhan Sahadevan Method of image guided intraoperative simultaneous several ports microbeam radiation therapy with microfocus X-ray tubes
US8787529B2 (en) * 2011-05-11 2014-07-22 Massachusetts Institute Of Technology Compact coherent current and radiation source
US8963112B1 (en) 2011-05-25 2015-02-24 Vladimir Balakin Charged particle cancer therapy patient positioning method and apparatus
KR102076380B1 (ko) * 2012-03-16 2020-02-11 나녹스 이미징 피엘씨 전자 방출 구조체를 갖는 장치
US10045752B2 (en) * 2012-05-14 2018-08-14 The General Hospital Corporation Method for coded-source phase contrast X-ray imaging
KR101868009B1 (ko) * 2012-06-18 2018-06-18 한국전자통신연구원 전계 방출 엑스선원 및 이를 이용한 전자 빔 집속 방법
KR101858230B1 (ko) * 2012-06-18 2018-05-16 한국전자통신연구원 엑스선원 및 이를 이용한 엑스선 초점 조절 방법
JP6295254B2 (ja) 2012-08-16 2018-03-14 ナノックス イメージング ピーエルシー Ｘ線放出装置
US9251987B2 (en) 2012-09-14 2016-02-02 General Electric Company Emission surface for an X-ray device
US8933651B2 (en) 2012-11-16 2015-01-13 Vladimir Balakin Charged particle accelerator magnet apparatus and method of use thereof
JP6063272B2 (ja) * 2013-01-29 2017-01-18 双葉電子工業株式会社 Ｘ線照射源及びｘ線管
US9048064B2 (en) * 2013-03-05 2015-06-02 Varian Medical Systems, Inc. Cathode assembly for a long throw length X-ray tube
KR20140112270A (ko) * 2013-03-13 2014-09-23 삼성전자주식회사 방열 블록을 포함한 엑스선 발생 장치
JP6188470B2 (ja) 2013-07-24 2017-08-30 キヤノン株式会社 放射線発生装置及びそれを用いた放射線撮影システム
CN105793952B (zh) 2013-11-27 2018-12-11 纳欧克斯影像有限公司 以耐离子轰击配置的电子发射结构
DE102014203334B4 (de) * 2014-02-25 2023-04-27 Siemens Healthcare Gmbh Röntgenanlage
JP6441015B2 (ja) * 2014-10-06 2018-12-19 キヤノンメディカルシステムズ株式会社 Ｘ線診断装置及びｘ線管制御方法
KR102088005B1 (ko) * 2015-11-11 2020-03-11 한국전자통신연구원 방사선 촬영 장치
US20170207592A1 (en) * 2016-01-14 2017-07-20 Advanced Magnet Lab, Inc. Contactless electrical current transfer apparatus with diamond and other emitter structures and homopolar machines comprising same
US9907981B2 (en) 2016-03-07 2018-03-06 Susan L. Michaud Charged particle translation slide control apparatus and method of use thereof
JP6659167B2 (ja) * 2016-03-30 2020-03-04 キヤノン株式会社 電子銃を備えたｘ線発生管及びｘ線撮影装置
US10991539B2 (en) * 2016-03-31 2021-04-27 Nano-X Imaging Ltd. X-ray tube and a conditioning method thereof
US10037863B2 (en) 2016-05-27 2018-07-31 Mark R. Amato Continuous ion beam kinetic energy dissipater apparatus and method of use thereof
CN106531592B (zh) * 2016-12-29 2018-12-28 清华大学 电子枪以及具有该电子枪的x射线光源与ct设备
KR101916711B1 (ko) * 2017-07-21 2019-01-24 주식회사 바텍 전계 방출 엑스선 소스를 이용한 엑스선 발생 장치
KR102361378B1 (ko) * 2018-12-28 2022-02-09 캐논 아네르바 가부시키가이샤 전자총, x선 발생 장치 및 x선 촬상 장치
CN111161988A (zh) * 2019-12-26 2020-05-15 兰州空间技术物理研究所 一种基于碳纳米管阴极的低能电子束枪
US11719652B2 (en) * 2020-02-04 2023-08-08 Kla Corporation Semiconductor metrology and inspection based on an x-ray source with an electron emitter array
EP3933881A1 (en) 2020-06-30 2022-01-05 VEC Imaging GmbH & Co. KG X-ray source with multiple grids
EP4394838A4 (en) * 2022-03-31 2025-04-30 Canon Anelva Corporation X-RAY GENERATING DEVICE, TARGET ADJUSTING METHOD, AND METHOD OF USING X-RAY GENERATING DEVICE
US12230468B2 (en) 2022-06-30 2025-02-18 Varex Imaging Corporation X-ray system with field emitters and arc protection

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080043920A1 (en) * 2000-10-06 2008-02-21 The University Of North Carolina At Chapel Hill Micro-focus field emission x-ray sources and related methods
US20090121613A1 (en) * 2006-03-13 2009-05-14 Nikon Corporation Method for producing carbon nanotube assembly, carbon nanotube assembly, catalyst particle dispersed film, electron emitting element, and field emission display

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4032815A (en) * 1975-11-04 1977-06-28 Stromberg Datagraphix Inc. Collimated beam electron gun system for shaped beam cathode ray tube
US4521901A (en) * 1983-03-01 1985-06-04 Imatron Associates Scanning electron beam computed tomography scanner with ion aided focusing
DE19824783A1 (de) * 1998-06-03 1999-12-16 Siemens Ag Vorrichtung zur Formung eines Elektronenstrahls, Verfahren zur Herstellung der Vorrichtung und Anwendung
JP2000251757A (ja) * 1999-02-26 2000-09-14 Toshiba Corp 陰極線管
KR100599702B1 (ko) * 2000-01-12 2006-07-12 삼성에스디아이 주식회사 음극선관의 컨버젼스 드리프트 보정 장치
JP2001216916A (ja) * 2000-01-31 2001-08-10 Toshiba Corp 陰極線管装置
US6553096B1 (en) * 2000-10-06 2003-04-22 The University Of North Carolina Chapel Hill X-ray generating mechanism using electron field emission cathode
US6876724B2 (en) * 2000-10-06 2005-04-05 The University Of North Carolina - Chapel Hill Large-area individually addressable multi-beam x-ray system and method of forming same
US7085351B2 (en) * 2000-10-06 2006-08-01 University Of North Carolina At Chapel Hill Method and apparatus for controlling electron beam current
JP3810656B2 (ja) * 2001-07-23 2006-08-16 株式会社神戸製鋼所 微小ｘ線源
US7192031B2 (en) 2004-02-05 2007-03-20 General Electric Company Emitter array configurations for a stationary CT system
JP2005237779A (ja) * 2004-02-27 2005-09-08 Shimadzu Corp Ｘ線ｃｔ装置
JP5049505B2 (ja) * 2006-03-29 2012-10-17 日立造船株式会社 エネルギー変換装置
KR100766907B1 (ko) * 2006-04-05 2007-10-17 한국전기연구원 마이크로 집속 수준의 전자빔 발생용 탄소나노튜브 기판분리형 방사선관 시스템
US7627087B2 (en) * 2007-06-28 2009-12-01 General Electric Company One-dimensional grid mesh for a high-compression electron gun
JP5426089B2 (ja) * 2007-12-25 2014-02-26 株式会社東芝 Ｘ線管及びｘ線ｃｔ装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080043920A1 (en) * 2000-10-06 2008-02-21 The University Of North Carolina At Chapel Hill Micro-focus field emission x-ray sources and related methods
US20090121613A1 (en) * 2006-03-13 2009-05-14 Nikon Corporation Method for producing carbon nanotube assembly, carbon nanotube assembly, catalyst particle dispersed film, electron emitting element, and field emission display

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
D. Moonen et al., Grid lens approach for high effective emittance in SCALPEL, J. Vac. Sci. Tecnol. B 18 (2000), 3111-3114 *
J. R. Harris et al., Gridded Electron Guns and Modulation of Intense Beams, IEEE Transactions on Electron Devices 53 (2006), 2824-2829 *
S. Van Kranen et aql., Measuring the increase in effective emittance after a grid lens, Microelectronic Engineering 57-58 (2001), 173-179 *
Y. Zou et al., Theoretical study of transverse emittance growth in a gridded electron gun, Nuclear Instruments and Methods in Physics Research A 519 (2004), 432-441 *

Also Published As

Publication number Publication date
US7801277B2 (en) 2010-09-21
JP4590479B2 (ja) 2010-12-01
US20090245468A1 (en) 2009-10-01
JP2009238750A (ja) 2009-10-15
DE102009003673A1 (de) 2009-10-01

Similar Documents

Publication Publication Date Title
DE102009003673B4 (de) Elektronenquelle auf der Basis von Feldemittern mit minimierten Strahl-Emittanzwachstum
DE102010061229A1 (de) Vorrichtung zum Modifizieren des Elektronenstrahl-Aspektverhältnisses zur Röntgenstrahlungserzeugung
DE102009003863A1 (de) Schema zum Steuern einer virtuellen Matrix für Mehrfachpunkt-Röntgenquellen
DE10317612B4 (de) Röntgenstrahlquelle mit einer Katode mit gekrümmter Emissionsoberfläche, Bilddarstellungssystem und Abbildungsverfahren
DE102008033150B4 (de) Röntgenquelle sowie Mammographieanlage und Röntgenanlage mit einer solchen Röntgenquelle
DE202013105804U1 (de) Vorrichtungen zum Erzeugen verteilter Röntgenstrahlen
DE10334606A1 (de) Kathode für Hochemissions-Röntgenröhre
DE102009058266B4 (de) Medizinisches Röntgenaufnahmesystem
DE102010061584A1 (de) Röntgenstrahlkathode und Verfahren zum Herstellen derselben
DE102010027871A1 (de) Ringkathodensegment mit Nanostruktur als Elektronenemitter
EP0075712B1 (de) Elektronenoptisches System zur Erzeugung eines Elektronen-Formstrahl mit variablem Strahlquerschnitt, insbesondere zur Erzeugung von Mikrostrukturen
WO2019057338A1 (de) Mbfex-röhre
DE102010018715A1 (de) Röntgenaufnahmesystem
DE102010060484A1 (de) System und Verfahren zum Fokussieren und Regeln/Steuern eines Strahls in einer indirekt geheizten Kathode
DE102005049601A1 (de) Vorrichtung zur Erzeugung von Röntgenstrahlung mit einer kalten Elektronenquelle
DE69133256T2 (de) Rasterelekronenmikroskop und Bilderzeugungsverfahren
DE102019213196A1 (de) Ladungsträgerstrahlvorrichtung
DE60313282T2 (de) Vorrichtung für geladene Teilchen mit Reinigungseinheit und Verfahren zu deren Betrieb
WO2013007484A1 (de) Monochromatische röntgenquelle
DE112014003782T5 (de) lonenstrahlvorrichtung und Emitterspitzenausformverfahren
DE102017113979A1 (de) Vorrichtung zum Erzeugen beschleunigter Elektronen
EP3748667A1 (de) Silizium-feldeffekt-emitter
EP3629361A1 (de) Röntgenanode, röntgenstrahler und verfahren zur herstellung einer röntgenanode
DE10320859A1 (de) Anwendung gepulster Energie für Röntgenröhren
EP1614138A2 (de) Hochfrequenz-plasmastrahlquelle und verfahren zum bestrahlen einer oberfläche

Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
R016 Response to examination communication
R016 Response to examination communication
R016 Response to examination communication
R016 Response to examination communication
R016 Response to examination communication
R016 Response to examination communication
R018 Grant decision by examination section/examining division
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee

Effective date: 20141001