DE102007061358B4 - Vorrichtung zur Formung von Laserstrahlung - Google Patents
Vorrichtung zur Formung von Laserstrahlung Download PDFInfo
- Publication number
- DE102007061358B4 DE102007061358B4 DE102007061358A DE102007061358A DE102007061358B4 DE 102007061358 B4 DE102007061358 B4 DE 102007061358B4 DE 102007061358 A DE102007061358 A DE 102007061358A DE 102007061358 A DE102007061358 A DE 102007061358A DE 102007061358 B4 DE102007061358 B4 DE 102007061358B4
- Authority
- DE
- Germany
- Prior art keywords
- interface
- refractive
- laser radiation
- partial beams
- refractive interface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000005855 radiation Effects 0.000 title claims abstract description 28
- 238000007493 shaping process Methods 0.000 title claims abstract description 10
- 239000000758 substrate Substances 0.000 claims description 24
- 230000007423 decrease Effects 0.000 claims description 3
- 230000009466 transformation Effects 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 239000013307 optical fiber Substances 0.000 description 3
- 239000000835 fiber Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
- G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
- G02B19/0057—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode in the form of a laser diode array, e.g. laser diode bar
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
- G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
- G02B19/0014—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
- G02B27/0966—Cylindrical lenses
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Couplings Of Light Guides (AREA)
- Semiconductor Lasers (AREA)
- Optical Elements Other Than Lenses (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102007061358A DE102007061358B4 (de) | 2007-12-19 | 2007-12-19 | Vorrichtung zur Formung von Laserstrahlung |
| EP08020687A EP2073051A3 (de) | 2007-12-19 | 2008-11-28 | Vorrichtung zur Formung von Laserstrahlung |
| KR1020080124380A KR101671332B1 (ko) | 2007-12-19 | 2008-12-09 | 레이저 방사선 셰이핑 장치 |
| US12/336,143 US7986461B2 (en) | 2007-12-19 | 2008-12-16 | Device for shaping laser radiation |
| CN2008101852198A CN101464563B (zh) | 2007-12-19 | 2008-12-18 | 激光辐射成形的装置 |
| JP2008324542A JP5507837B2 (ja) | 2007-12-19 | 2008-12-19 | レーザビームを形成するための装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102007061358A DE102007061358B4 (de) | 2007-12-19 | 2007-12-19 | Vorrichtung zur Formung von Laserstrahlung |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE102007061358A1 DE102007061358A1 (de) | 2009-07-02 |
| DE102007061358B4 true DE102007061358B4 (de) | 2012-02-16 |
Family
ID=40467125
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE102007061358A Expired - Fee Related DE102007061358B4 (de) | 2007-12-19 | 2007-12-19 | Vorrichtung zur Formung von Laserstrahlung |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7986461B2 (https=) |
| EP (1) | EP2073051A3 (https=) |
| JP (1) | JP5507837B2 (https=) |
| KR (1) | KR101671332B1 (https=) |
| CN (1) | CN101464563B (https=) |
| DE (1) | DE102007061358B4 (https=) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102008027231B4 (de) * | 2008-06-06 | 2016-03-03 | Limo Patentverwaltung Gmbh & Co. Kg | Vorrichtung zur Strahlformung |
| WO2010084001A1 (de) | 2009-01-23 | 2010-07-29 | Limo Patentverwaltung Gmbh & Co. Kg | Vorrichtung zur strahlformung von laserdiodenarrays |
| US9214368B2 (en) * | 2011-07-27 | 2015-12-15 | Ipg Photonics Corporation | Laser diode array with fiber optic termination for surface treatment of materials |
| DE102012107456A1 (de) | 2012-08-14 | 2014-02-20 | Limo Patentverwaltung Gmbh & Co. Kg | Anordnung zur Formung von Laserstrahlung |
| US10203399B2 (en) | 2013-11-12 | 2019-02-12 | Big Sky Financial Corporation | Methods and apparatus for array based LiDAR systems with reduced interference |
| US9360554B2 (en) | 2014-04-11 | 2016-06-07 | Facet Technology Corp. | Methods and apparatus for object detection and identification in a multiple detector lidar array |
| US10036801B2 (en) | 2015-03-05 | 2018-07-31 | Big Sky Financial Corporation | Methods and apparatus for increased precision and improved range in a multiple detector LiDAR array |
| US9866816B2 (en) | 2016-03-03 | 2018-01-09 | 4D Intellectual Properties, Llc | Methods and apparatus for an active pulsed 4D camera for image acquisition and analysis |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10118788A1 (de) * | 2001-04-18 | 2002-10-24 | Lissotschenko Vitalij | Anordnung zur Kollimierung des von einer Laserlichtquelle ausgehenden Lichts sowie Strahltransformationsvorrichtung für eine derartige Anordnung |
| US20060176912A1 (en) * | 2005-02-07 | 2006-08-10 | Anikitchev Serguei G | Apparatus for projecting a line of light from a diode-laser array |
| WO2007078456A1 (en) * | 2005-12-15 | 2007-07-12 | Mind Melters, Inc. | System and method for generating intense laser light from laser diode arrays |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19800590B4 (de) | 1998-01-09 | 2005-12-01 | Jenoptik Ag | Optische Anordnung zur Symmetrierung der Strahlung eines oder mehrerer übereinander angeordneter Hochleistungsdiodenlaser |
| KR100318520B1 (ko) * | 1999-01-16 | 2001-12-22 | 윤덕용 | 유도 브릴루앙 산란 위상공액 거울을 이용한 광 차단기 및 이를 적용한 광 증폭계 |
| JP2002141301A (ja) | 2000-11-02 | 2002-05-17 | Mitsubishi Electric Corp | レーザアニーリング用光学系とこれを用いたレーザアニーリング装置 |
| JP2002239773A (ja) | 2000-12-11 | 2002-08-28 | Matsushita Electric Ind Co Ltd | 半導体レーザー加工装置および半導体レーザー加工方法 |
| DE10106155A1 (de) | 2001-02-10 | 2002-08-14 | Lissotschenko Vitalij | Strahlformungsvorrichtung für die Formung des Querschnitts eines Lichtstrahls sowie Anordnung zur Einkopplung eines von einer langgestreckten Laserlichtquelle ausgehenden Lichtstrahls mit einem länglichen Querschnitt in eine Lichtleitfaser |
| DE10136611C1 (de) | 2001-07-23 | 2002-11-21 | Jenoptik Laserdiode Gmbh | Optische Anordnung zur Formung und Homogenisierung eines von einer Laserdiodenanordnung ausgehenden Laserstrahls |
| US6952510B1 (en) * | 2001-08-31 | 2005-10-04 | Nlight Photonics Corporation | Optically corrected intracavity fiber coupled multigain element laser |
| US6750423B2 (en) | 2001-10-25 | 2004-06-15 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation method, laser irradiation apparatus, and method of manufacturing a semiconductor device |
| TWI289896B (en) | 2001-11-09 | 2007-11-11 | Semiconductor Energy Lab | Laser irradiation apparatus, laser irradiation method, and method of manufacturing a semiconductor device |
| US7113527B2 (en) | 2001-12-21 | 2006-09-26 | Semiconductor Energy Laboratory Co., Ltd. | Method and apparatus for laser irradiation and manufacturing method of semiconductor device |
| US6984573B2 (en) | 2002-06-14 | 2006-01-10 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation method and apparatus |
| US7016393B2 (en) * | 2003-09-22 | 2006-03-21 | Coherent, Inc. | Apparatus for projecting a line of light from a diode-laser array |
| CN100427995C (zh) | 2004-03-06 | 2008-10-22 | Limo专利管理有限及两合公司 | 用于使光均匀化的装置和用这种装置进行照明的结构 |
| US7422988B2 (en) | 2004-11-12 | 2008-09-09 | Applied Materials, Inc. | Rapid detection of imminent failure in laser thermal processing of a substrate |
| TWI361123B (en) | 2004-12-22 | 2012-04-01 | Zeiss Carl Laser Optics Gmbh | Optical illumination system for creating a line beam |
| CN101395424A (zh) * | 2006-03-30 | 2009-03-25 | 日立麦克赛尔株式会社 | 直下式背照光装置及光学透镜片 |
| JP2007294411A (ja) * | 2006-03-30 | 2007-11-08 | Hitachi Maxell Ltd | 直下型バックライト装置及び光学レンズシート |
-
2007
- 2007-12-19 DE DE102007061358A patent/DE102007061358B4/de not_active Expired - Fee Related
-
2008
- 2008-11-28 EP EP08020687A patent/EP2073051A3/de not_active Withdrawn
- 2008-12-09 KR KR1020080124380A patent/KR101671332B1/ko not_active Expired - Fee Related
- 2008-12-16 US US12/336,143 patent/US7986461B2/en not_active Expired - Fee Related
- 2008-12-18 CN CN2008101852198A patent/CN101464563B/zh active Active
- 2008-12-19 JP JP2008324542A patent/JP5507837B2/ja not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10118788A1 (de) * | 2001-04-18 | 2002-10-24 | Lissotschenko Vitalij | Anordnung zur Kollimierung des von einer Laserlichtquelle ausgehenden Lichts sowie Strahltransformationsvorrichtung für eine derartige Anordnung |
| US20060176912A1 (en) * | 2005-02-07 | 2006-08-10 | Anikitchev Serguei G | Apparatus for projecting a line of light from a diode-laser array |
| WO2007078456A1 (en) * | 2005-12-15 | 2007-07-12 | Mind Melters, Inc. | System and method for generating intense laser light from laser diode arrays |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101464563A (zh) | 2009-06-24 |
| KR20090067042A (ko) | 2009-06-24 |
| JP5507837B2 (ja) | 2014-05-28 |
| DE102007061358A1 (de) | 2009-07-02 |
| US7986461B2 (en) | 2011-07-26 |
| JP2009151311A (ja) | 2009-07-09 |
| US20090159820A1 (en) | 2009-06-25 |
| EP2073051A2 (de) | 2009-06-24 |
| CN101464563B (zh) | 2013-01-09 |
| EP2073051A3 (de) | 2010-12-22 |
| KR101671332B1 (ko) | 2016-11-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OM8 | Search report available as to paragraph 43 lit. 1 sentence 1 patent law | ||
| OP8 | Request for examination as to paragraph 44 patent law | ||
| R018 | Grant decision by examination section/examining division | ||
| R081 | Change of applicant/patentee |
Owner name: LIMO PATENTVERWALTUNG GMBH & CO. KG, DE Free format text: FORMER OWNER: LIMO PATENTVERWALTUNG GMBH & CO. KG, 36419 GERSTENGRUND, DE Effective date: 20120531 |
|
| R082 | Change of representative |
Representative=s name: FRITZ PATENT- UND RECHTSANWAELTE PARTNERSCHAFT, DE Effective date: 20120531 Representative=s name: FRITZ PATENT- UND RECHTSANWAELTE, DE Effective date: 20120531 |
|
| R020 | Patent grant now final |
Effective date: 20120517 |
|
| R119 | Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee |