WO2010097198A1 - Vorrichtung zur homogenisierung von laserstrahlung - Google Patents
Vorrichtung zur homogenisierung von laserstrahlung Download PDFInfo
- Publication number
- WO2010097198A1 WO2010097198A1 PCT/EP2010/001114 EP2010001114W WO2010097198A1 WO 2010097198 A1 WO2010097198 A1 WO 2010097198A1 EP 2010001114 W EP2010001114 W EP 2010001114W WO 2010097198 A1 WO2010097198 A1 WO 2010097198A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- laser radiation
- array
- refractive surfaces
- partial beams
- laser
- Prior art date
Links
- 230000005855 radiation Effects 0.000 title claims abstract description 45
- 238000009826 distribution Methods 0.000 claims description 25
- 238000000265 homogenisation Methods 0.000 claims description 4
- 238000003491 array Methods 0.000 claims description 3
- 230000009466 transformation Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000006735 deficit Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0972—Prisms
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
- G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
- G02B19/0014—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
- G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
- G02B19/0057—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode in the form of a laser diode array, e.g. laser diode bar
Definitions
- the present invention relates to a device for the homogenization of laser radiation, which has at least in a first, perpendicular to the propagation direction of the laser radiation direction spaced partial beams, in particular for the homogenization of laser radiation emanating from a laser diode bar. Furthermore, the present invention relates to a laser device, comprising a laser radiation source, in particular a laser diode bar, which can emit laser radiation having in the direction perpendicular to the direction of propagation of the laser radiation to each other spaced partial beams, and further comprising a device for homogenizing laser radiation.
- the propagation direction of the laser radiation means the mean propagation direction of the laser radiation, especially if this is not a plane wave or at least partially convergent or divergent.
- light beam, sub-beam or beam is meant, unless expressly stated otherwise, an idealized beam of geometric optics, but a real light beam, such as a laser beam with a Gaussian profile, which has no infinitesimal small, but an extended beam cross-section.
- Laser diode bars have a Gaussian near and far field distribution in the fast axis (fast axis).
- slow-Axis In the slow axis (Slow-Axis) there is usually a super-Gaussian near-field distribution.
- Collimation for example with a fast-axis collimation lens and / or a slow-axis collimation lens, converts the near and far field distribution into one another.
- homogeneous lines or Create fields include diffractive, single and two-stage refractive and Powell lens-based homogenizers (see, for example, FM Dickey, SC Holswade, "Laser Beam Shaping", Marcel Dekker Inc. New York, 2000).
- Diffractive homogenizers usually have losses of efficiency due to radiation in unwanted diffraction orders. In addition, their diffraction efficiency is limited by the number of steps in the case of a quantized conversion.
- Refractive homogenizers have the disadvantage that in the case of Gaussian irradiation, diffraction at the grating of the array leads to interferences and thus to impairment of the homogeneity in the field. Since these array elements are illuminated coherently and the lens transitions can not be worked out ideally, there is a loss of efficiency and a reduction in homogeneity (see, for example, WO 03/016963 A1).
- Powell lenses are based on a phase-shifting process and are only useful with Gaussian sources.
- the problem underlying the present invention is the provision of a device of the type mentioned, with which the emanating from a laser diode bar laser radiation can be better homogenized. Furthermore, a laser device should be specified with such a device.
- the device comprises an array of refractive surfaces, which can deflect at least a plurality of partial beams of the laser radiation to be homogenized so differently that they are at least partially convergent to each other after passing through the refractive surfaces, as before passing through the refractive surfaces, and in that the device further comprises lens means through which pass through the sub-beams passed through the array of refractive surfaces, wherein the lens means can superimpose at least some of the sub-beams in a working plane.
- the concept is based on a suitable superposition of collimated Gauss or Super Gauss single sources.
- the superimposition is carried out by means of optical array elements arranged in spatial space, which are assigned to each individual emitter and whose far field specifically adds a specific angular offset.
- the specific angular offset is dimensioned so that the resulting angular distribution overlaps in such a way that a homogeneous field with Gaussian flanks arises.
- the implementation of the concept can be carried out with a refractive prism array.
- sub-beams arranged next to one another in two directions perpendicular to one another and to the direction of propagation can be superimposed in such a way that a homogeneous intensity distribution results.
- a laser radiation with a two-dimensional cross section such as, for example, a stack of laser diode bars, should be able to be homogenized.
- Claim 14 provides that the laser device comprises a device according to the invention for homogenizing laser radiation and that the angles between the refractive surfaces of the array are such that the angular difference of the deflection which adjacent partial beams experience on adjacent refractive surfaces of the array is between 75%. and 95% of the full half width of the far-field distribution corresponds to one of the sub-beams before passing through the device. In the case of angle differences of this size, a comparatively homogeneous plateau of the far-field intensity distribution of the laser radiation homogenized with the device according to the invention results.
- angles between the refractive surfaces of the array and / or the lens means can be designed such that the angular differences of adjacent partial beams are each the same size. This results in partial beams of the same intensity distribution to a good homogeneity of the superimposed intensity distribution in the working plane. If the partial beams have a mutually different intensity distribution, such as a different supergauss factor, it may be useful to choose the angular differences of adjacent partial beams differently.
- FIG. 1 is a schematic view of a laser device according to the invention.
- FIG. 2 shows a schematic side view of a device according to the invention with exemplary beam paths
- FIG. 3 shows a schematic detail view according to the arrow I M in FIG. 2;
- FIG. 6 shows a far-field intensity distribution of the laser radiation homogenized with the device according to the invention.
- the reference numeral 1 designates a laser diode bar which, in the so-called slow axis or in the figures, has individual emitters (not shown) spaced apart from one another in the X-direction.
- each of the emitters has a length of about 150 ⁇ m in the slow axis, wherein the distance between two adjacent emitters in this direction is generally 400 ⁇ m or 500 ⁇ m.
- the individual emitters emit partial beams 2 (see FIG. 2) of the laser radiation of the laser diode bar 1.
- fast-axis collimation means 3 which can collimate the individual sub-beams 2 in the fast axis or in the figures in the Y direction
- slow axis collimation means 4 are indicated schematically. which can collimate the individual partial beams 2 in the slow axis or in the figures in the X direction.
- the fast-axis collimation means 3 may comprise, for example, a cylindrical lens whose cylinder axis extends in the X direction.
- the slow-axis collimation means 4 may comprise, for example, a cylindrical lens whose cylinder axis extends in the Y direction.
- the fast-axis collimation means 3 in the propagation direction Z between the fast-axis collimation means 3 and the slow-axis collimation means 4, it is possible to provide a beam transformation device which can rotate each of the individual sub-beams 2 by 90 ° with respect to the propagation direction Z.
- the divergence of the partial beams in the fast axis is exchanged with that in the slow axis, so that the partial beams 2 are collimated after passing through the beam transformation device in the slow axis or in the figures in the X direction.
- Such beam transformation devices are well known and have for example in the X direction side by side arranged cylindrical lenses whose cylinder axes are aligned at an angle of 45 ° to the Y direction in the XY plane.
- the slow axis collimation means 4 could then comprise, for example, a cylindrical lens whose cylinder axis also extends in the X direction.
- the device according to the invention comprises an array 5 with a plane entrance surface and a plurality of refractive surfaces 6 on the exit surface (see FIG. 2).
- the array 5 is designed as a prism array, wherein it continues into the plane of the drawing of FIG. 2 or in the Y direction without changing its contour.
- the refractive surfaces 6 are each flat and adjoin one another in the X direction.
- the refractive surfaces 6 each enclose an angle ⁇ with each other (see FIG. 3).
- the angle ⁇ between the surfaces 6 may in each case be between 150 ° and 1 80 °, in particular between 165 ° and 180 °, preferably between 175 ° and 179 °.
- the refractive surfaces 6 are dimensioned and arranged such that in each case one of the partial beams 2 always strikes one of the refractive surfaces 6.
- the refractive surfaces 6 By the refractive surfaces 6, the partial beams 2 are deflected such that they extend convergent to one another after emerging from the refractive surfaces 6.
- a middle refractive surface 6a is provided, which is arranged perpendicular to the propagation direction Z of the laser radiation or in an XY plane. A partial beam 2 passing through the central refractive surface 6a in the Z direction is not deflected.
- Behind the array 5 lens means 7 are provided in the propagation direction Z of the laser radiation, which are formed, for example, in the illustrated Ausf ⁇ hrungsbeispiel as a biconvex lens.
- the lens means 7 may also be formed as a plano-convex or konkavkonvexe lens.
- the lens means 7 can superimpose the emerged from the array 5 partial beams 2 in a working plane 8 with each other.
- the working plane 8 is arranged in the output-side focal plane of the lens means 7.
- the lens means 7 thus serve as a Fourier lens and can transform the angular distribution of the laser radiation into a spatial distribution in the working plane 8.
- FIG. 5 shows a far-field intensity distribution 9 of a single partial beam 2 of the laser radiation. This essentially has a Gaussian profile.
- FIG. 6 shows a far-field intensity distribution 10 of the laser radiation homogenized with the device according to the invention, in which a plurality, for example 18 partial beams 2 in the far field are superimposed. It can be seen that the far-field intensity distribution 10 has a comparatively homogeneous plateau 11 and Gaussian flanks 12.
- FIG. 4 illustrates the superimposition of the far-field intensity distribution 9 of individual partial beams 2 to a far-field intensity distribution 10.
- the intensity of the far field is plotted against an angular coordinate.
- five far field intensity distributions 9 of individual partial beams 2 are superimposed to form a common far field intensity distribution 10. It turns out that the individual partial beams 2 leave the array 5 at different angles.
- the angular difference ⁇ of adjacent partial beams corresponds to approximately 85% of the full half-width b of the far-field distribution 9 of each of the individual partial beams 2.
- a suitable angular difference ⁇ of the deflection that adjacent partial beams 2 experience on adjacent refractive surfaces 6 of the array 5 should be between 75%. and 95% of the full half width b of the far field distribution 9 of the sub-beams 2 before passing through the device. In the case of angle differences in this range, a comparatively homogeneous plateau 11 of the far-field intensity distribution 10 of the laser radiation homogenized with the device according to the invention results.
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011551433A JP5576886B2 (ja) | 2009-02-26 | 2010-02-23 | レーザビームを均質化するための装置 |
US13/203,510 US20110305023A1 (en) | 2009-02-26 | 2010-02-23 | Device for homogenizing laser radiation |
CN201080008928.4A CN102334060B (zh) | 2009-02-26 | 2010-02-23 | 用于使激光辐射均匀化的设备 |
EP10706935A EP2401646A1 (de) | 2009-02-26 | 2010-02-23 | Vorrichtung zur homogenisierung von laserstrahlung |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102009010693A DE102009010693A1 (de) | 2009-02-26 | 2009-02-26 | Vorrichtung zur Homogenisierung von Laserstrahlung |
DE102009010693.6 | 2009-02-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2010097198A1 true WO2010097198A1 (de) | 2010-09-02 |
Family
ID=42103037
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2010/001114 WO2010097198A1 (de) | 2009-02-26 | 2010-02-23 | Vorrichtung zur homogenisierung von laserstrahlung |
Country Status (7)
Country | Link |
---|---|
US (1) | US20110305023A1 (de) |
EP (1) | EP2401646A1 (de) |
JP (1) | JP5576886B2 (de) |
KR (1) | KR20110128175A (de) |
CN (1) | CN102334060B (de) |
DE (1) | DE102009010693A1 (de) |
WO (1) | WO2010097198A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103748968A (zh) * | 2011-09-02 | 2014-04-23 | Asml荷兰有限公司 | 辐射源和光刻设备 |
Families Citing this family (7)
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DE102011008192A1 (de) * | 2011-01-10 | 2012-07-12 | Limo Patentverwaltung Gmbh & Co. Kg | Vorrichtung zur Umwandlung von Laserstrahlung in Laserstahlung mit einem M-Profil |
EP3340404A4 (de) * | 2015-08-18 | 2018-07-18 | Alps Electric Co., Ltd. | Lichtemittierende vorrichtung |
CN109100872A (zh) * | 2017-12-29 | 2018-12-28 | 珠海迈时光电科技有限公司 | 光分束器及包含相同光分束器的光学设备 |
US10747096B2 (en) * | 2018-06-19 | 2020-08-18 | Casio Computer Co., Ltd. | Light source unit and projector |
DE102018115102A1 (de) * | 2018-06-22 | 2019-12-24 | Trumpf Laser- Und Systemtechnik Gmbh | Optische Anordnung und Lasersystem |
CN111897134B (zh) | 2020-07-31 | 2022-02-25 | 西安炬光科技股份有限公司 | 一种光学模组和医疗激光装置 |
CN115268094B (zh) * | 2020-08-27 | 2023-06-02 | 西安炬光科技股份有限公司 | 一种光学模组及激光模组 |
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- 2010-02-23 CN CN201080008928.4A patent/CN102334060B/zh not_active Expired - Fee Related
- 2010-02-23 EP EP10706935A patent/EP2401646A1/de not_active Withdrawn
- 2010-02-23 WO PCT/EP2010/001114 patent/WO2010097198A1/de active Application Filing
- 2010-02-23 JP JP2011551433A patent/JP5576886B2/ja not_active Expired - Fee Related
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103748968A (zh) * | 2011-09-02 | 2014-04-23 | Asml荷兰有限公司 | 辐射源和光刻设备 |
Also Published As
Publication number | Publication date |
---|---|
US20110305023A1 (en) | 2011-12-15 |
EP2401646A1 (de) | 2012-01-04 |
CN102334060B (zh) | 2015-04-01 |
CN102334060A (zh) | 2012-01-25 |
JP5576886B2 (ja) | 2014-08-20 |
JP2012518813A (ja) | 2012-08-16 |
KR20110128175A (ko) | 2011-11-28 |
DE102009010693A1 (de) | 2010-09-02 |
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