DE102007035715A1 - Laserstrahlbearbeitungsvorrichtung sowie Verfahren zum Justieren der Fokuslage - Google Patents

Laserstrahlbearbeitungsvorrichtung sowie Verfahren zum Justieren der Fokuslage Download PDF

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Publication number
DE102007035715A1
DE102007035715A1 DE102007035715A DE102007035715A DE102007035715A1 DE 102007035715 A1 DE102007035715 A1 DE 102007035715A1 DE 102007035715 A DE102007035715 A DE 102007035715A DE 102007035715 A DE102007035715 A DE 102007035715A DE 102007035715 A1 DE102007035715 A1 DE 102007035715A1
Authority
DE
Germany
Prior art keywords
laser beam
workpiece
laser
focus
sensor unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102007035715A
Other languages
German (de)
English (en)
Inventor
Reiner Ramsayer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE102007035715A priority Critical patent/DE102007035715A1/de
Priority to KR1020097013363A priority patent/KR101467956B1/ko
Priority to CN200780048463.3A priority patent/CN101573204B/zh
Priority to PCT/EP2007/063167 priority patent/WO2008080728A1/de
Priority to EP07847678.5A priority patent/EP2117761B1/de
Priority to US12/308,608 priority patent/US8546725B2/en
Priority to JP2009543418A priority patent/JP5193226B2/ja
Priority to ES07847678T priority patent/ES2423952T3/es
Publication of DE102007035715A1 publication Critical patent/DE102007035715A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/20—Bonding
    • B23K26/21—Bonding by welding
    • B23K26/24—Seam welding
    • B23K26/28—Seam welding of curved planar seams
    • B23K26/282—Seam welding of curved planar seams of tube sections
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B23K26/0734—Shaping the laser spot into an annular shape

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Optical Elements Other Than Lenses (AREA)
DE102007035715A 2006-12-27 2007-07-30 Laserstrahlbearbeitungsvorrichtung sowie Verfahren zum Justieren der Fokuslage Withdrawn DE102007035715A1 (de)

Priority Applications (8)

Application Number Priority Date Filing Date Title
DE102007035715A DE102007035715A1 (de) 2006-12-27 2007-07-30 Laserstrahlbearbeitungsvorrichtung sowie Verfahren zum Justieren der Fokuslage
KR1020097013363A KR101467956B1 (ko) 2006-12-27 2007-12-03 반사된 환형 레이저 방사선을 센서 유닛 상에서 이미지화 하기 위한 수단을 구비한 레이저 빔 가공 장치 및 포커스 위치를 조정하는 방법
CN200780048463.3A CN101573204B (zh) 2006-12-27 2007-12-03 激光束加工装置以及聚焦位置的调节方法
PCT/EP2007/063167 WO2008080728A1 (de) 2006-12-27 2007-12-03 Laserstrahlbearbeitungsvorrichtung mit mittel zum abbilden der reflektierten ringgeformten laserstrahlung auf einer sensoreinheit sowie verfahren zum justieren der fokuslage
EP07847678.5A EP2117761B1 (de) 2006-12-27 2007-12-03 Laserstrahlbearbeitungsvorrichtung mit mittel zum abbilden der reflektierten ringeformten laserstrahlung auf einer sensoreinheit sowie verfahren zum justieren der fokuslage
US12/308,608 US8546725B2 (en) 2006-12-27 2007-12-03 Laser beam machining device and method for adjusting the focal position
JP2009543418A JP5193226B2 (ja) 2006-12-27 2007-12-03 レーザービーム処理装置並びに焦点位置をアライメントするための方法
ES07847678T ES2423952T3 (es) 2006-12-27 2007-12-03 Dispositivo de mecanización con rayo láser con medios para la representación de la radiación láser de forma anular reflejada sobre una unidad de sensor así como procedimiento para el ajuste de la posición focal

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102006061622.7 2006-12-27
DE102006061622 2006-12-27
DE102007035715A DE102007035715A1 (de) 2006-12-27 2007-07-30 Laserstrahlbearbeitungsvorrichtung sowie Verfahren zum Justieren der Fokuslage

Publications (1)

Publication Number Publication Date
DE102007035715A1 true DE102007035715A1 (de) 2008-07-03

Family

ID=39111581

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102007035715A Withdrawn DE102007035715A1 (de) 2006-12-27 2007-07-30 Laserstrahlbearbeitungsvorrichtung sowie Verfahren zum Justieren der Fokuslage

Country Status (7)

Country Link
US (1) US8546725B2 (https=)
EP (1) EP2117761B1 (https=)
JP (1) JP5193226B2 (https=)
KR (1) KR101467956B1 (https=)
DE (1) DE102007035715A1 (https=)
ES (1) ES2423952T3 (https=)
WO (1) WO2008080728A1 (https=)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2359978A2 (de) 2010-02-23 2011-08-24 Robert Bosch GmbH Messeinrichtung für eine Laserstrahlbearbeitungsvorrichtung
EP2361717A3 (de) * 2010-02-23 2011-12-07 Robert Bosch GmbH Laserstrahlschweißeinrichtung und Verfahren zum Betreiben einer Laserstrahlschweißeinrichtung
EP2359980A3 (de) * 2010-02-23 2011-12-14 Robert Bosch GmbH Laserstrahlschweißeinrichtung und Verfahren zur Prüfung einer Laserstrahlschweißeinrichtung
DE102011007792A1 (de) 2011-04-20 2012-10-25 Robert Bosch Gmbh Laserstrahlschweißvorrichtung und Laserstrahlschweißverfahren
EP2359979A3 (de) * 2010-02-23 2017-10-18 Robert Bosch GmbH Laserstrahlschweißeinrichtung und Verfahren zum Betreiben einer Laserstrahlschweißeinrichtung
CN109822219A (zh) * 2019-02-27 2019-05-31 惠州市通发激光设备有限公司 一种具有无缝焊接功能的水壶焊接装置

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US8230594B1 (en) * 2009-05-09 2012-07-31 Bossard Peter R System and method for welding small diameter tubes into a high-density matrix
CN102189333A (zh) * 2011-05-04 2011-09-21 苏州天弘激光股份有限公司 带有ccd自动对焦系统的激光切割机
US20160151862A1 (en) * 2012-02-10 2016-06-02 Limo Patentverwaltung Gmbh & Co. Kg Device for laser processing of a surface of a workpiece or for post-treatment of a coating on the outside or the inside of a workpiece
JP5940906B2 (ja) * 2012-06-19 2016-06-29 株式会社ディスコ レーザー加工装置
DE102012013750A1 (de) * 2012-06-21 2013-12-24 Johnson Controls Gmbh Verfahren zum Verbinden von zwei Bauteilen
JP5943812B2 (ja) * 2012-11-14 2016-07-05 三菱重工業株式会社 レーザ切断装置及びレーザ切断方法
US9039814B2 (en) 2013-04-18 2015-05-26 Saes Pure Gas, Inc. System and method for welding a plurality of small diameter palladium alloy tubes to a common base plate in a space efficient manner
US9429716B1 (en) * 2013-06-03 2016-08-30 Corning Cable Systems Llc Mirror systems securing optical fibers to ferrules by thermally securing bonding agents within fiber optic connector housings, and related methods and assemblies
JP6277986B2 (ja) * 2015-03-24 2018-02-14 トヨタ自動車株式会社 レーザ溶接装置及びレーザ溶接方法
EP3412400A1 (en) * 2017-06-09 2018-12-12 Bystronic Laser AG Beam shaper and use thereof, device for laser beam treatment of a workpiece and use thereof, method for laser beam treatment of a workpiece
CN110129523A (zh) * 2019-06-04 2019-08-16 沈阳中科煜宸科技有限公司 一种圆柱体工件表面连续无搭接激光淬火装置及其淬火方法
CN111766690B (zh) * 2020-07-24 2022-03-25 苏州天准科技股份有限公司 对位成像设备及激光直接成像系统
CN112643199A (zh) * 2020-12-24 2021-04-13 洛阳博特自动化工程有限公司 一种环形光激光焊接装置
CN113084290B (zh) * 2021-03-15 2023-04-28 武汉华工激光工程有限责任公司 激光锡焊系统以及方法
CN114523207B (zh) * 2022-03-02 2024-03-29 河北科技大学 激光焊接方法
JP2024107934A (ja) * 2023-01-30 2024-08-09 株式会社ディスコ ウエーハの加工方法
EP4600718A3 (de) * 2023-02-28 2025-10-15 Saertex multicom GmbH Aushärtung eines liners mittels laser
CN116851906B (zh) * 2023-05-30 2026-01-30 深圳市单色科技有限公司 可灵活调控焦点形态结构的激光加工系统及方法

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EP1508397A1 (de) 2003-08-21 2005-02-23 Leister Process Technologies Verfahren und Vorrichtung zum simultanen Erwärmen von Materialien

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EP1508397A1 (de) 2003-08-21 2005-02-23 Leister Process Technologies Verfahren und Vorrichtung zum simultanen Erwärmen von Materialien

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2359978A2 (de) 2010-02-23 2011-08-24 Robert Bosch GmbH Messeinrichtung für eine Laserstrahlbearbeitungsvorrichtung
DE102010002260A1 (de) 2010-02-23 2011-08-25 Robert Bosch GmbH, 70469 Messeinrichtung für eine Laserstrahlbearbeitungsvorrichtung
EP2361717A3 (de) * 2010-02-23 2011-12-07 Robert Bosch GmbH Laserstrahlschweißeinrichtung und Verfahren zum Betreiben einer Laserstrahlschweißeinrichtung
EP2359980A3 (de) * 2010-02-23 2011-12-14 Robert Bosch GmbH Laserstrahlschweißeinrichtung und Verfahren zur Prüfung einer Laserstrahlschweißeinrichtung
EP2359978A3 (de) * 2010-02-23 2015-04-29 Robert Bosch GmbH Messeinrichtung für eine Laserstrahlbearbeitungsvorrichtung
EP2359979A3 (de) * 2010-02-23 2017-10-18 Robert Bosch GmbH Laserstrahlschweißeinrichtung und Verfahren zum Betreiben einer Laserstrahlschweißeinrichtung
DE102011007792A1 (de) 2011-04-20 2012-10-25 Robert Bosch Gmbh Laserstrahlschweißvorrichtung und Laserstrahlschweißverfahren
WO2012143181A2 (de) 2011-04-20 2012-10-26 Robert Bosch Gmbh Laserstrahlschweissvorrichtung und laserstrahlschweissverfahren
WO2012143181A3 (de) * 2011-04-20 2013-01-10 Robert Bosch Gmbh Laserstrahlschweissvorrichtung und laserstrahlschweissverfahren
CN109822219A (zh) * 2019-02-27 2019-05-31 惠州市通发激光设备有限公司 一种具有无缝焊接功能的水壶焊接装置

Also Published As

Publication number Publication date
US20100320177A1 (en) 2010-12-23
ES2423952T3 (es) 2013-09-25
EP2117761B1 (de) 2013-06-26
WO2008080728A1 (de) 2008-07-10
KR20090094112A (ko) 2009-09-03
US8546725B2 (en) 2013-10-01
KR101467956B1 (ko) 2014-12-03
JP2010514568A (ja) 2010-05-06
EP2117761A1 (de) 2009-11-18
JP5193226B2 (ja) 2013-05-08

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