DE102007012115A1 - Strahlungsdetektor - Google Patents

Strahlungsdetektor Download PDF

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Publication number
DE102007012115A1
DE102007012115A1 DE102007012115A DE102007012115A DE102007012115A1 DE 102007012115 A1 DE102007012115 A1 DE 102007012115A1 DE 102007012115 A DE102007012115 A DE 102007012115A DE 102007012115 A DE102007012115 A DE 102007012115A DE 102007012115 A1 DE102007012115 A1 DE 102007012115A1
Authority
DE
Germany
Prior art keywords
detector
sensitivity
radiation detector
radiation
control device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE102007012115A
Other languages
German (de)
English (en)
Inventor
Arndt Dr. Jaeger
Klaus Dr. Streubel
Peter Dr. Stauss
Werner Kuhlmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ams Osram International GmbH
Original Assignee
Osram Opto Semiconductors GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osram Opto Semiconductors GmbH filed Critical Osram Opto Semiconductors GmbH
Priority to DE102007012115A priority Critical patent/DE102007012115A1/de
Priority to TW096144735A priority patent/TWI365976B/zh
Priority to PCT/EP2007/063007 priority patent/WO2008065170A1/de
Priority to KR1020097013679A priority patent/KR101430030B1/ko
Priority to CN2007800414217A priority patent/CN101535785B/zh
Priority to EP07847523A priority patent/EP2054705A1/de
Priority to JP2009538716A priority patent/JP2010511162A/ja
Priority to US12/516,831 priority patent/US8274657B2/en
Publication of DE102007012115A1 publication Critical patent/DE102007012115A1/de
Ceased legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/42Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4228Photometry, e.g. photographic exposure meter using electric radiation detectors arrangements with two or more detectors, e.g. for sensitivity compensation
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F99/00Subject matter not provided for in other groups of this subclass
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/42Photometry, e.g. photographic exposure meter using electric radiation detectors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/30Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/36Investigating two or more bands of a spectrum by separate detectors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46Measurement of colour; Colour measuring devices, e.g. colorimeters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/465Measurement of colour; Colour measuring devices, e.g. colorimeters taking into account the colour perception of the eye; using tristimulus detection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G01J3/51Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G01J3/51Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters
    • G01J3/513Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters having fixed filter-detector pairs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/21Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
    • H10F30/22Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
    • H10F30/223Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier being a PIN barrier
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/02Details
    • G01J1/04Optical or mechanical part supplementary adjustable parts
    • G01J1/0488Optical or mechanical part supplementary adjustable parts with spectral filtering
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G01J2003/507Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors the detectors being physically selective

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Light Receiving Elements (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
DE102007012115A 2006-11-30 2007-03-13 Strahlungsdetektor Ceased DE102007012115A1 (de)

Priority Applications (8)

Application Number Priority Date Filing Date Title
DE102007012115A DE102007012115A1 (de) 2006-11-30 2007-03-13 Strahlungsdetektor
TW096144735A TWI365976B (en) 2006-11-30 2007-11-26 Radiation detector
PCT/EP2007/063007 WO2008065170A1 (de) 2006-11-30 2007-11-29 Strahlungsdetektor mit einstellbarer spektraler empfindlichkeit
KR1020097013679A KR101430030B1 (ko) 2006-11-30 2007-11-29 조절 가능한 스펙트럼 감도를 갖는 방사선 검출기
CN2007800414217A CN101535785B (zh) 2006-11-30 2007-11-29 具有可调节的光谱灵敏度的辐射检测器
EP07847523A EP2054705A1 (de) 2006-11-30 2007-11-29 Strahlungsdetektor mit einstellbarer spektraler empfindlichkeit
JP2009538716A JP2010511162A (ja) 2006-11-30 2007-11-29 調整可能なスペクトル感度を備えたビーム検出器
US12/516,831 US8274657B2 (en) 2006-11-30 2007-11-29 Radiation detector

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102006056579 2006-11-30
DE102006056579.7 2006-11-30
DE102007012115A DE102007012115A1 (de) 2006-11-30 2007-03-13 Strahlungsdetektor

Publications (1)

Publication Number Publication Date
DE102007012115A1 true DE102007012115A1 (de) 2008-06-05

Family

ID=39110400

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102007012115A Ceased DE102007012115A1 (de) 2006-11-30 2007-03-13 Strahlungsdetektor

Country Status (8)

Country Link
US (1) US8274657B2 (enExample)
EP (1) EP2054705A1 (enExample)
JP (1) JP2010511162A (enExample)
KR (1) KR101430030B1 (enExample)
CN (1) CN101535785B (enExample)
DE (1) DE102007012115A1 (enExample)
TW (1) TWI365976B (enExample)
WO (1) WO2008065170A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010064519B3 (de) 2009-05-05 2024-03-21 Apple Inc. Verfahren und vorrichtung zum detektieren eines masses von sichtbarem umgebungslicht ausserhalb einer vorrichtung

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US7442629B2 (en) 2004-09-24 2008-10-28 President & Fellows Of Harvard College Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate
US7057256B2 (en) 2001-05-25 2006-06-06 President & Fellows Of Harvard College Silicon-based visible and near-infrared optoelectric devices
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JP2010112807A (ja) * 2008-11-05 2010-05-20 Hioki Ee Corp 光パワーメータ
JP2010112808A (ja) * 2008-11-05 2010-05-20 Hioki Ee Corp 光パワーメータ
DE102009024069A1 (de) * 2009-06-05 2010-12-09 Osram Opto Semiconductors Gmbh Optisches Beleuchtungsgerät und optisches Aufzeichnungsgerät
US9673243B2 (en) 2009-09-17 2017-06-06 Sionyx, Llc Photosensitive imaging devices and associated methods
KR102234065B1 (ko) * 2009-09-17 2021-03-31 사이오닉스, 엘엘씨 감광성 이미징 장치 및 이와 관련된 방법
US9911781B2 (en) 2009-09-17 2018-03-06 Sionyx, Llc Photosensitive imaging devices and associated methods
CN102549454A (zh) * 2009-10-05 2012-07-04 株式会社岛津制作所 放射线检测器
US8692198B2 (en) 2010-04-21 2014-04-08 Sionyx, Inc. Photosensitive imaging devices and associated methods
CN103081128B (zh) 2010-06-18 2016-11-02 西奥尼克斯公司 高速光敏设备及相关方法
KR102394088B1 (ko) 2011-03-10 2022-05-03 사이오닉스, 엘엘씨 3차원 센서, 시스템, 및 관련 방법
JP2014509746A (ja) 2011-03-29 2014-04-21 オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツング 2つのフォトダイオードを用いて優位を占める光源のタイプを求めるためのユニット
US9496308B2 (en) 2011-06-09 2016-11-15 Sionyx, Llc Process module for increasing the response of backside illuminated photosensitive imagers and associated methods
CN103946867A (zh) 2011-07-13 2014-07-23 西奥尼克斯公司 生物计量成像装置和相关方法
US8865507B2 (en) 2011-09-16 2014-10-21 Sionyx, Inc. Integrated visible and infrared imager devices and associated methods
US9064764B2 (en) 2012-03-22 2015-06-23 Sionyx, Inc. Pixel isolation elements, devices, and associated methods
KR20150130303A (ko) 2013-02-15 2015-11-23 사이오닉스, 아이엔씨. 안티 블루밍 특성 및 관련 방법을 가지는 높은 동적 범위의 cmos 이미지 센서
WO2014151093A1 (en) 2013-03-15 2014-09-25 Sionyx, Inc. Three dimensional imaging utilizing stacked imager devices and associated methods
WO2014209421A1 (en) 2013-06-29 2014-12-31 Sionyx, Inc. Shallow trench textured regions and associated methods
US10281329B2 (en) * 2017-06-14 2019-05-07 Simmonds Precision Products, Inc. Method and system for fast determination of the wavelength of a light beam
CN109556710B (zh) * 2018-12-28 2024-04-16 浙江智慧照明技术有限公司 照明环境光传感器
DE102019114537A1 (de) * 2019-05-29 2020-12-03 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Optoelektronisches sensorbauelement zur lichtmessung mit eingebauter redundanz
KR102774244B1 (ko) * 2019-11-19 2025-03-05 삼성전자주식회사 스펙트럼을 분할하는 발광 소자 측정 장치, 및 이의 동작 방법
US20230243703A1 (en) * 2020-06-30 2023-08-03 Sharp Kabushiki Kaisha Electromagnetic wave sensor device and display device

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DE4024011A1 (de) * 1990-07-28 1992-01-30 Gossen Gmbh Verfahren und vorrichtung zur elektronischen belichtungsmessung
WO1997012212A1 (de) * 1995-09-27 1997-04-03 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Multispektralsensorvorrichtung
DE102004037020A1 (de) * 2003-09-30 2005-08-25 Osram Opto Semiconductors Gmbh Strahlungsdetektor
DE102005001280A1 (de) * 2004-09-30 2006-04-13 Osram Opto Semiconductors Gmbh Strahlungsdetektor
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010064519B3 (de) 2009-05-05 2024-03-21 Apple Inc. Verfahren und vorrichtung zum detektieren eines masses von sichtbarem umgebungslicht ausserhalb einer vorrichtung

Also Published As

Publication number Publication date
WO2008065170A1 (de) 2008-06-05
TW200844412A (en) 2008-11-16
CN101535785B (zh) 2011-12-28
EP2054705A1 (de) 2009-05-06
TWI365976B (en) 2012-06-11
US20100097609A1 (en) 2010-04-22
US8274657B2 (en) 2012-09-25
JP2010511162A (ja) 2010-04-08
KR20090098850A (ko) 2009-09-17
CN101535785A (zh) 2009-09-16
KR101430030B1 (ko) 2014-08-14

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