DE102004017236A1 - Verbundmaterial mit verbesserter chemischer Beständigkeit - Google Patents

Verbundmaterial mit verbesserter chemischer Beständigkeit Download PDF

Info

Publication number
DE102004017236A1
DE102004017236A1 DE200410017236 DE102004017236A DE102004017236A1 DE 102004017236 A1 DE102004017236 A1 DE 102004017236A1 DE 200410017236 DE200410017236 DE 200410017236 DE 102004017236 A DE102004017236 A DE 102004017236A DE 102004017236 A1 DE102004017236 A1 DE 102004017236A1
Authority
DE
Germany
Prior art keywords
substrate
layer
adhesive agent
organic
composite material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE200410017236
Other languages
English (en)
Other versions
DE102004017236B4 (de
Inventor
Stephan Behle
Matthias Bicker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schott AG
Original Assignee
Schott AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schott AG filed Critical Schott AG
Priority to DE200410017236 priority Critical patent/DE102004017236B4/de
Priority to JP2005108197A priority patent/JP5362941B2/ja
Publication of DE102004017236A1 publication Critical patent/DE102004017236A1/de
Application granted granted Critical
Publication of DE102004017236B4 publication Critical patent/DE102004017236B4/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523—Pulsed gas flow or change of composition over time
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C23C16/029—Graded interfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C23C16/402—Silicon dioxide

Abstract

Die Erfindung betrifft ein Verbundmaterial mit einem Substrat, einer organischen Haftvermittlerschicht, einer anorganischen Barriereschicht und einer organischen Schutzschicht mit chemischer Barrierewirkung sowie ein Verfahren zur Herstellung des Verbundmaterials.
DE200410017236 2004-04-05 2004-04-05 Verbundmaterial mit verbesserter chemischer Beständigkeit und Verfahren zu dessen Herstellung Expired - Lifetime DE102004017236B4 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE200410017236 DE102004017236B4 (de) 2004-04-05 2004-04-05 Verbundmaterial mit verbesserter chemischer Beständigkeit und Verfahren zu dessen Herstellung
JP2005108197A JP5362941B2 (ja) 2004-04-05 2005-04-05 改善された耐薬品性を有する複合材料

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200410017236 DE102004017236B4 (de) 2004-04-05 2004-04-05 Verbundmaterial mit verbesserter chemischer Beständigkeit und Verfahren zu dessen Herstellung

Publications (2)

Publication Number Publication Date
DE102004017236A1 true DE102004017236A1 (de) 2005-10-20
DE102004017236B4 DE102004017236B4 (de) 2012-10-25

Family

ID=35034164

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200410017236 Expired - Lifetime DE102004017236B4 (de) 2004-04-05 2004-04-05 Verbundmaterial mit verbesserter chemischer Beständigkeit und Verfahren zu dessen Herstellung

Country Status (2)

Country Link
JP (1) JP5362941B2 (de)
DE (1) DE102004017236B4 (de)

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006058771A1 (de) 2006-12-12 2008-06-19 Schott Ag Behälter mit verbesserter Restentleerbarkeit und Verfahren zu dessen Herstellung
US8219011B2 (en) 2007-02-26 2012-07-10 Konica Minolta Business Technologies, Inc. Intermediate transfer member and image formation apparatus
DE102011005234A1 (de) * 2011-03-08 2012-09-13 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Gasbarriereschichtsystem
WO2013071138A1 (en) 2011-11-11 2013-05-16 Sio2 Medical Products, Inc. PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL PACKAGE, COATING PROCESS AND APPARATUS
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US9545360B2 (en) 2009-05-13 2017-01-17 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
US9554968B2 (en) 2013-03-11 2017-01-31 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging
US9572526B2 (en) 2009-05-13 2017-02-21 Sio2 Medical Products, Inc. Apparatus and method for transporting a vessel to and from a PECVD processing station
US9662450B2 (en) 2013-03-01 2017-05-30 Sio2 Medical Products, Inc. Plasma or CVD pre-treatment for lubricated pharmaceutical package, coating process and apparatus
US9664626B2 (en) 2012-11-01 2017-05-30 Sio2 Medical Products, Inc. Coating inspection method
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US9863042B2 (en) 2013-03-15 2018-01-09 Sio2 Medical Products, Inc. PECVD lubricity vessel coating, coating process and apparatus providing different power levels in two phases
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US9903782B2 (en) 2012-11-16 2018-02-27 Sio2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
US10201660B2 (en) 2012-11-30 2019-02-12 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition on medical syringes, cartridges, and the like
US11066745B2 (en) 2014-03-28 2021-07-20 Sio2 Medical Products, Inc. Antistatic coatings for plastic vessels
US11077233B2 (en) 2015-08-18 2021-08-03 Sio2 Medical Products, Inc. Pharmaceutical and other packaging with low oxygen transmission rate
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006048658B4 (de) * 2006-10-14 2014-03-27 Khs Corpoplast Gmbh PICVD-Beschichtung für Kunststoffbehälter und Verfahren zu deren Herstellung
JP5244622B2 (ja) * 2009-01-08 2013-07-24 三菱樹脂株式会社 ガスバリア性フィルム
WO2011004682A1 (ja) * 2009-07-09 2011-01-13 コニカミノルタホールディングス株式会社 バリアフィルム、有機光電変換素子及びバリアフィルムの製造方法
DE102010048960A1 (de) 2010-10-18 2012-04-19 Khs Corpoplast Gmbh Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
CA2830226A1 (en) * 2011-03-14 2012-09-20 Sio2 Medical Products, Inc. Detection of mechanical stress on coated articles
JP6256903B2 (ja) * 2012-06-05 2018-01-10 モックステック・インコーポレーテッド 非晶質炭素およびアルミニウムのｘ線窓
CN106170582A (zh) * 2012-07-03 2016-11-30 Sio2医药产品公司 药物包装的SiOx 阻隔物和涂布方法
WO2015190572A1 (ja) * 2014-06-13 2015-12-17 Jnc株式会社 ガスバリアフィルム積層体とそれを用いた電子部品
JPWO2016117436A1 (ja) * 2015-01-20 2017-10-26 東レ株式会社 多層積層基板
TW202307255A (zh) * 2021-05-17 2023-02-16 美商應用材料股份有限公司 包裝材料及製造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4438359A1 (de) * 1994-10-27 1996-05-02 Schott Glaswerke Behälter aus Kunststoff mit einer Sperrbeschichtung und Verfahren zu seiner Herstellung
US20030215652A1 (en) * 2001-06-04 2003-11-20 O'connor Paul J. Transmission barrier layer for polymers and containers
DE10258680A1 (de) * 2002-08-07 2004-02-19 Schott Glas Herstellen eines Verbundmaterials mit einem biologisch abbaubaren Kunststoffsubstrat und zumindest einer Beschichtung
DE10258681A1 (de) * 2002-08-07 2004-02-26 Schott Glas Verfahren zum Herstellen von glatten Barriereschichten und Verbundmaterial mit glatter Barriereschicht
DE10258678A1 (de) * 2002-12-13 2004-07-08 Schott Glas Schnelles Verfahren zur Herstellung von Multilayer-Barriereschichten

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3605634B2 (ja) * 1999-12-27 2004-12-22 独立行政法人物質・材料研究機構 立方晶窒化ホウ素の気相合成法
JP4222707B2 (ja) * 2000-03-24 2009-02-12 東京エレクトロン株式会社 プラズマ処理装置及び方法、ガス供給リング及び誘電体
WO2001094448A2 (en) * 2000-06-06 2001-12-13 The Dow Chemical Company Barrier layer for polymers and containers
JP3957135B2 (ja) * 2000-10-13 2007-08-15 東京エレクトロン株式会社 プラズマ処理装置
JP2003328131A (ja) * 2002-05-07 2003-11-19 Toyo Seikan Kaisha Ltd ガスバリアー性に優れたケイ素酸化物膜及び包装体
EP1388593B1 (de) * 2002-08-07 2015-12-30 Schott AG Schnelles Verfahren zur Herstellung von Mehrfachlagen-Barriereschichten

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4438359A1 (de) * 1994-10-27 1996-05-02 Schott Glaswerke Behälter aus Kunststoff mit einer Sperrbeschichtung und Verfahren zu seiner Herstellung
US20030215652A1 (en) * 2001-06-04 2003-11-20 O'connor Paul J. Transmission barrier layer for polymers and containers
DE10258680A1 (de) * 2002-08-07 2004-02-19 Schott Glas Herstellen eines Verbundmaterials mit einem biologisch abbaubaren Kunststoffsubstrat und zumindest einer Beschichtung
DE10258681A1 (de) * 2002-08-07 2004-02-26 Schott Glas Verfahren zum Herstellen von glatten Barriereschichten und Verbundmaterial mit glatter Barriereschicht
DE10258678A1 (de) * 2002-12-13 2004-07-08 Schott Glas Schnelles Verfahren zur Herstellung von Multilayer-Barriereschichten

Cited By (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006058771A1 (de) 2006-12-12 2008-06-19 Schott Ag Behälter mit verbesserter Restentleerbarkeit und Verfahren zu dessen Herstellung
DE102006058771B4 (de) 2006-12-12 2018-03-01 Schott Ag Behälter mit verbesserter Restentleerbarkeit und Verfahren zu dessen Herstellung
US8219011B2 (en) 2007-02-26 2012-07-10 Konica Minolta Business Technologies, Inc. Intermediate transfer member and image formation apparatus
US9572526B2 (en) 2009-05-13 2017-02-21 Sio2 Medical Products, Inc. Apparatus and method for transporting a vessel to and from a PECVD processing station
US10537273B2 (en) 2009-05-13 2020-01-21 Sio2 Medical Products, Inc. Syringe with PECVD lubricity layer
US10390744B2 (en) 2009-05-13 2019-08-27 Sio2 Medical Products, Inc. Syringe with PECVD lubricity layer, apparatus and method for transporting a vessel to and from a PECVD processing station, and double wall plastic vessel
US9545360B2 (en) 2009-05-13 2017-01-17 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US11123491B2 (en) 2010-11-12 2021-09-21 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
DE102011005234A1 (de) * 2011-03-08 2012-09-13 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Gasbarriereschichtsystem
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
EP2776603A4 (de) * 2011-11-11 2015-08-19 Sio2 Medical Products Inc Passivierungs-, ph-schutz- oder schmierbeschichtung für arzneimittelverpackung, beschichtungsverfahren und vorrichtung
US10577154B2 (en) 2011-11-11 2020-03-03 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
US11884446B2 (en) 2011-11-11 2024-01-30 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
US11724860B2 (en) 2011-11-11 2023-08-15 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
US10189603B2 (en) 2011-11-11 2019-01-29 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
US11148856B2 (en) 2011-11-11 2021-10-19 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
WO2013071138A1 (en) 2011-11-11 2013-05-16 Sio2 Medical Products, Inc. PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL PACKAGE, COATING PROCESS AND APPARATUS
US9664626B2 (en) 2012-11-01 2017-05-30 Sio2 Medical Products, Inc. Coating inspection method
US9903782B2 (en) 2012-11-16 2018-02-27 Sio2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
US10201660B2 (en) 2012-11-30 2019-02-12 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition on medical syringes, cartridges, and the like
US11406765B2 (en) 2012-11-30 2022-08-09 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US10363370B2 (en) 2012-11-30 2019-07-30 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US9662450B2 (en) 2013-03-01 2017-05-30 Sio2 Medical Products, Inc. Plasma or CVD pre-treatment for lubricated pharmaceutical package, coating process and apparatus
US10016338B2 (en) 2013-03-11 2018-07-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging
US10912714B2 (en) 2013-03-11 2021-02-09 Sio2 Medical Products, Inc. PECVD coated pharmaceutical packaging
US11298293B2 (en) 2013-03-11 2022-04-12 Sio2 Medical Products, Inc. PECVD coated pharmaceutical packaging
US11344473B2 (en) 2013-03-11 2022-05-31 SiO2Medical Products, Inc. Coated packaging
US10537494B2 (en) 2013-03-11 2020-01-21 Sio2 Medical Products, Inc. Trilayer coated blood collection tube with low oxygen transmission rate
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
US11684546B2 (en) 2013-03-11 2023-06-27 Sio2 Medical Products, Inc. PECVD coated pharmaceutical packaging
US9554968B2 (en) 2013-03-11 2017-01-31 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging
US9863042B2 (en) 2013-03-15 2018-01-09 Sio2 Medical Products, Inc. PECVD lubricity vessel coating, coating process and apparatus providing different power levels in two phases
US11066745B2 (en) 2014-03-28 2021-07-20 Sio2 Medical Products, Inc. Antistatic coatings for plastic vessels
US11077233B2 (en) 2015-08-18 2021-08-03 Sio2 Medical Products, Inc. Pharmaceutical and other packaging with low oxygen transmission rate

Also Published As

Publication number Publication date
DE102004017236B4 (de) 2012-10-25
JP5362941B2 (ja) 2013-12-11
JP2005290560A (ja) 2005-10-20

Similar Documents

Publication Publication Date Title
DE102004017236A1 (de) Verbundmaterial mit verbesserter chemischer Beständigkeit
WO2008036742A3 (en) Method of chemical protection of metal surface
WO2006055459A3 (en) Tensile and compressive stressed materials for semiconductors
WO2006101856A3 (en) A plasma enhanced atomic layer deposition system and method
TW200420748A (en) Method for enhancing deposition rate of chemical vapor deposition films
SG170616A1 (en) Diffusion barrier coatings having graded compositions and devices inforporting the same
TW200720080A (en) Gas barrier laminated body
WO2005087974A3 (en) Cvd processes for the deposition of amorphous carbon films
WO2008069930A3 (en) Flexible substrates having a thin-film barrier
UA93984C2 (ru) Полимерная пленка, многослойный упаковочный материал, содержащий полимерную пленку, упаковочный контейнер, образованный из многослойного упаковочного материала, и способ получения полимерной пленки
JP2004533514A5 (de)
AU2003273873A1 (en) Protective layer, method and arrangement for the production of protective layers
WO2006101886A3 (en) A plasma enhanced atomic layer deposition system and method
DE60306817D1 (de) Metallkorrosionsschutz
BRPI0601049A (pt) sistema de camadas
WO2007064597A3 (en) Uniform surfaces for hybrid material substrates and methods for making and using same
WO2004007792A3 (en) Method of film deposition using activated precursor gases
MX2007004481A (es) Proceso para recubrimiento de plasma.
WO2005076918A3 (en) Barrier layer process and arrangement
WO2005006424A8 (en) Method and apparatus for removing a residual organic layer from a substrate using reactive gases
WO2007048963A3 (fr) Procede de traitement d'un substrat
TW200715375A (en) Low-temperature catalyzed formation of segmented nanowire of dielectric material
BR0301944A (pt) Corpo de corte, e, processo para a produção de uma camada de material duro
TW200724699A (en) Nonmetal compound and surface coating of the same
JP2006522224A5 (de)

Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
R016 Response to examination communication
R018 Grant decision by examination section/examining division
R020 Patent grant now final

Effective date: 20130126

R071 Expiry of right