DE10191368T1 - Vorrichtung zur Prüfung einer plasmapolymerisierten Polymerschicht unter Verwendung eines UV-Spektrometers - Google Patents

Vorrichtung zur Prüfung einer plasmapolymerisierten Polymerschicht unter Verwendung eines UV-Spektrometers

Info

Publication number
DE10191368T1
DE10191368T1 DE10191368T DE10191368T DE10191368T1 DE 10191368 T1 DE10191368 T1 DE 10191368T1 DE 10191368 T DE10191368 T DE 10191368T DE 10191368 T DE10191368 T DE 10191368T DE 10191368 T1 DE10191368 T1 DE 10191368T1
Authority
DE
Germany
Prior art keywords
spectrometer
testing
polymer layer
polymerized polymer
plasma polymerized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE10191368T
Other languages
English (en)
Other versions
DE10191368B4 (de
Inventor
Sung Hee Kang
Hysun Uk Lee
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LG Electronics Inc
Original Assignee
LG Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LG Electronics Inc filed Critical LG Electronics Inc
Publication of DE10191368T1 publication Critical patent/DE10191368T1/de
Application granted granted Critical
Publication of DE10191368B4 publication Critical patent/DE10191368B4/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/33—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE10191368T 2000-02-07 2001-02-06 Vorrichtung zur Prüfung einer plasmapolymerisierten Polymerschicht unter Verwendung eines UV-Spektrometers Expired - Fee Related DE10191368B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR2000/5606 2000-02-07
KR1020000005606A KR100332802B1 (ko) 2000-02-07 2000-02-07 Ｕｖ 스펙트로미터를 이용한 플라즈마로 중합된 고분자막성능 평가 장치
PCT/KR2001/000172 WO2001086687A1 (en) 2000-02-07 2001-02-06 Apparatus for evaluating plasma polymerized polymer layer using uv spectrometer

Publications (2)

Publication Number Publication Date
DE10191368T1 true DE10191368T1 (de) 2002-05-16
DE10191368B4 DE10191368B4 (de) 2005-01-27

Family

ID=19644430

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10191368T Expired - Fee Related DE10191368B4 (de) 2000-02-07 2001-02-06 Vorrichtung zur Prüfung einer plasmapolymerisierten Polymerschicht unter Verwendung eines UV-Spektrometers

Country Status (7)

Country Link
US (1) US6764550B2 (de)
JP (1) JP2003532879A (de)
KR (1) KR100332802B1 (de)
CN (1) CN1363111A (de)
AU (1) AU3611701A (de)
DE (1) DE10191368B4 (de)
WO (1) WO2001086687A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100553743B1 (ko) * 2002-09-03 2006-02-20 삼성에스디아이 주식회사 플라즈마 디스플레이 패널의 소재특성평가용 장치와 이를이용한 측정방법
US9329336B2 (en) * 2012-07-06 2016-05-03 Micron Technology, Inc. Method of forming a hermetically sealed fiber to chip connection
US20140166989A1 (en) * 2012-12-17 2014-06-19 Universal Display Corporation Manufacturing flexible organic electronic devices

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4488773A (en) * 1982-12-23 1984-12-18 United Technologies Corporation Optical fiber position sensor
DE3330092A1 (de) * 1983-08-20 1985-03-07 Leybold-Heraeus GmbH, 5000 Köln Verfahren zum einstellen der oertlichen verdampfungsleistung an verdampfern in vakuumaufdampfprozessen
US5032435A (en) * 1989-03-27 1991-07-16 The United States Of America As Represented By The United States Department Of Energy UV absorption control of thin film growth
DE4114276C2 (de) * 1991-05-02 1996-09-19 Spectro Analytical Instr Gasgefülltes UV-Spektrometer
JPH05315095A (ja) * 1992-05-08 1993-11-26 Hitachi Sci Syst:Kk プラズマ評価装置をそなえたプラズマ装置
US5383776A (en) * 1992-12-31 1995-01-24 Hoechst Celanese Corporation Apparatus for analyzing polymer defects
JP2914098B2 (ja) * 1993-06-29 1999-06-28 東レ株式会社 蒸着フィルムの測定、制御方法、装置および製造方法
EP0648858A1 (de) * 1993-10-15 1995-04-19 Applied Materials, Inc. Methoden zum Beschichten von Plasmaätzkammern, sowie Vorrichtung zum Plasmaätzen von Werkstücken
KR0152355B1 (ko) * 1994-03-24 1998-12-01 가나이 쓰토무 플라즈마 처리장치 및 처리방법
US5683538A (en) * 1994-12-23 1997-11-04 International Business Machines Corporation Control of etch selectivity
JP3329685B2 (ja) * 1996-05-16 2002-09-30 株式会社東芝 計測装置および計測方法
JP3583289B2 (ja) 1998-05-28 2004-11-04 株式会社日立製作所 プラズマ処理装置及びプラズマ処理方法
JP2000309885A (ja) * 1999-04-23 2000-11-07 Sekisui Chem Co Ltd 傾斜機能材料の製造方法

Also Published As

Publication number Publication date
DE10191368B4 (de) 2005-01-27
US6764550B2 (en) 2004-07-20
WO2001086687A1 (en) 2001-11-15
KR20010077661A (ko) 2001-08-20
CN1363111A (zh) 2002-08-07
JP2003532879A (ja) 2003-11-05
AU3611701A (en) 2001-11-20
KR100332802B1 (ko) 2002-04-18
US20030047137A1 (en) 2003-03-13

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8125 Change of the main classification

Ipc: G01N 21/33

8364 No opposition during term of opposition
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee

Effective date: 20110901