DE60133805D1 - vORRICHTUNG ZUR FIXIERUNG EINER BLATTFÖRMIGEN ELEKTRODE EINES PLASMA-POLYMERISATIONSGERÄTS - Google Patents
vORRICHTUNG ZUR FIXIERUNG EINER BLATTFÖRMIGEN ELEKTRODE EINES PLASMA-POLYMERISATIONSGERÄTSInfo
- Publication number
- DE60133805D1 DE60133805D1 DE60133805T DE60133805T DE60133805D1 DE 60133805 D1 DE60133805 D1 DE 60133805D1 DE 60133805 T DE60133805 T DE 60133805T DE 60133805 T DE60133805 T DE 60133805T DE 60133805 D1 DE60133805 D1 DE 60133805D1
- Authority
- DE
- Germany
- Prior art keywords
- fixing
- sheet electrode
- plasma polymerizing
- plasma
- polymerizing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32541—Shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32605—Removable or replaceable electrodes or electrode systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32568—Relative arrangement or disposition of electrodes; moving means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020000068029A KR20020037995A (ko) | 2000-11-16 | 2000-11-16 | 플라즈마 중합 처리장치의 전극 구조 |
PCT/KR2001/001964 WO2002041672A1 (en) | 2000-11-16 | 2001-11-16 | Apparatus for fixing an electrode in plasma polymerizing apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60133805D1 true DE60133805D1 (de) | 2008-06-12 |
Family
ID=19699334
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60133805T Expired - Lifetime DE60133805D1 (de) | 2000-11-16 | 2001-11-16 | vORRICHTUNG ZUR FIXIERUNG EINER BLATTFÖRMIGEN ELEKTRODE EINES PLASMA-POLYMERISATIONSGERÄTS |
Country Status (11)
Country | Link |
---|---|
US (1) | US7004108B2 (de) |
EP (1) | EP1262093B1 (de) |
JP (1) | JP3802486B2 (de) |
KR (2) | KR20020037995A (de) |
CN (1) | CN1223242C (de) |
AU (1) | AU2002224181A1 (de) |
DE (1) | DE60133805D1 (de) |
ES (1) | ES2302764T3 (de) |
IL (2) | IL150667A0 (de) |
MX (1) | MXPA02006866A (de) |
WO (1) | WO2002041672A1 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3970815B2 (ja) * | 2002-11-12 | 2007-09-05 | シャープ株式会社 | 半導体素子製造装置 |
DE102004029525B4 (de) * | 2004-06-18 | 2006-12-07 | Robert Bosch Gmbh | Befestigungseinheit für Zündeinheiten und Vorrichtung zur Kohlenstoffabscheidung |
KR100890522B1 (ko) * | 2005-01-28 | 2009-03-27 | 주식회사 에이디피엔지니어링 | 플라즈마 처리장치 |
CN107979907B (zh) * | 2017-12-26 | 2024-04-05 | 中国科学院西安光学精密机械研究所 | 大气压介质阻挡放电增强型直流交替电极低温等离子体射流阵列 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4233109A (en) * | 1976-01-16 | 1980-11-11 | Zaidan Hojin Handotai Kenkyu Shinkokai | Dry etching method |
JPS53112066A (en) * | 1977-03-11 | 1978-09-30 | Fujitsu Ltd | Plasma treatment apparatus |
US4289598A (en) * | 1980-05-03 | 1981-09-15 | Technics, Inc. | Plasma reactor and method therefor |
US4399014A (en) * | 1980-05-03 | 1983-08-16 | Engle Frank W | Plasma reactor and method therefor |
JPS60151295U (ja) | 1984-03-15 | 1985-10-08 | ユニチカ株式会社 | 低温プラズマ発生用電極 |
JPS63157877A (ja) * | 1986-12-19 | 1988-06-30 | Mitsubishi Electric Corp | 電極ホルダ |
JPH02226700A (ja) * | 1989-02-27 | 1990-09-10 | Ishikawajima Harima Heavy Ind Co Ltd | 真空容器におけるnegストリップの取付構造 |
DE69005938T2 (de) * | 1989-07-31 | 1994-05-19 | Matsushita Electric Ind Co Ltd | Vorrichtung zur Herstellung von einer dünnen diamantartigen Kohlenstoffschicht. |
JPH0562936A (ja) * | 1991-09-03 | 1993-03-12 | Mitsubishi Electric Corp | プラズマ処理装置およびプラズマクリーニング方法 |
JPH05101898A (ja) | 1991-10-11 | 1993-04-23 | Kobe Steel Ltd | プラズマ処理装置 |
US5843536A (en) * | 1992-12-03 | 1998-12-01 | Ransburg Corporation | Coating material dispensing and charging system |
JP3058530B2 (ja) * | 1993-02-20 | 2000-07-04 | 東京エレクトロン株式会社 | プラズマ処理装置 |
JPH0935894A (ja) * | 1995-07-19 | 1997-02-07 | Nissin Electric Co Ltd | プラズマ処理装置 |
JPH09320799A (ja) | 1996-05-27 | 1997-12-12 | Hitachi Ltd | プラズマ処理装置およびプラズマ処理方法 |
JP2990668B2 (ja) * | 1998-05-08 | 1999-12-13 | 日新電機株式会社 | 薄膜形成装置 |
JP2000286095A (ja) * | 1999-03-30 | 2000-10-13 | Rohm Co Ltd | 半導体基板用プラズマ表面処理装置におけるラジアルラインスロットアンテナの構造 |
KR20010019020A (ko) * | 1999-08-24 | 2001-03-15 | 구자홍 | 전극의 인장력부여 수단이 구비된 플라즈마중합처리장치 |
-
2000
- 2000-11-16 KR KR1020000068029A patent/KR20020037995A/ko unknown
-
2001
- 2001-11-16 DE DE60133805T patent/DE60133805D1/de not_active Expired - Lifetime
- 2001-11-16 US US10/181,228 patent/US7004108B2/en not_active Expired - Fee Related
- 2001-11-16 CN CNB018037690A patent/CN1223242C/zh not_active Expired - Fee Related
- 2001-11-16 KR KR10-2002-7008710A patent/KR100492770B1/ko not_active IP Right Cessation
- 2001-11-16 MX MXPA02006866A patent/MXPA02006866A/es active IP Right Grant
- 2001-11-16 EP EP01996986A patent/EP1262093B1/de not_active Expired - Lifetime
- 2001-11-16 WO PCT/KR2001/001964 patent/WO2002041672A1/en active IP Right Grant
- 2001-11-16 JP JP2002543266A patent/JP3802486B2/ja not_active Expired - Fee Related
- 2001-11-16 AU AU2002224181A patent/AU2002224181A1/en not_active Abandoned
- 2001-11-16 ES ES01996986T patent/ES2302764T3/es not_active Expired - Lifetime
- 2001-11-16 IL IL15066701A patent/IL150667A0/xx unknown
-
2002
- 2002-07-09 IL IL150667A patent/IL150667A/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
AU2002224181A1 (en) | 2002-05-27 |
IL150667A0 (en) | 2003-02-12 |
WO2002041672A1 (en) | 2002-05-23 |
US20030121474A1 (en) | 2003-07-03 |
CN1395814A (zh) | 2003-02-05 |
KR100492770B1 (ko) | 2005-06-07 |
JP3802486B2 (ja) | 2006-07-26 |
KR20020037995A (ko) | 2002-05-23 |
ES2302764T3 (es) | 2008-08-01 |
MXPA02006866A (es) | 2002-10-23 |
KR20020068392A (ko) | 2002-08-27 |
EP1262093B1 (de) | 2008-04-30 |
EP1262093A4 (de) | 2006-08-02 |
JP2004514028A (ja) | 2004-05-13 |
IL150667A (en) | 2008-07-08 |
CN1223242C (zh) | 2005-10-12 |
EP1262093A1 (de) | 2002-12-04 |
US7004108B2 (en) | 2006-02-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8332 | No legal effect for de |