DE10040537B4 - Mikromechanischer Drehratensensor und Verfahren zu seiner Herstellung - Google Patents

Mikromechanischer Drehratensensor und Verfahren zu seiner Herstellung Download PDF

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Publication number
DE10040537B4
DE10040537B4 DE10040537A DE10040537A DE10040537B4 DE 10040537 B4 DE10040537 B4 DE 10040537B4 DE 10040537 A DE10040537 A DE 10040537A DE 10040537 A DE10040537 A DE 10040537A DE 10040537 B4 DE10040537 B4 DE 10040537B4
Authority
DE
Germany
Prior art keywords
rotation rate
rate sensor
sensor according
wafer
micromechanical rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE10040537A
Other languages
German (de)
English (en)
Other versions
DE10040537A1 (de
Inventor
Karin Dr. Bauer
Tanjo Gleissner
Konrad Lentner
Stefan Sassen
Josef Schalk
Ralf Voss
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Airbus Defence and Space GmbH
Original Assignee
EADS Deutschland GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EADS Deutschland GmbH filed Critical EADS Deutschland GmbH
Priority to DE10040537A priority Critical patent/DE10040537B4/de
Priority to EP01980234A priority patent/EP1309835A1/de
Priority to JP2002519873A priority patent/JP2004506883A/ja
Priority to US10/344,925 priority patent/US6898972B2/en
Priority to PCT/EP2001/009066 priority patent/WO2002014787A1/de
Publication of DE10040537A1 publication Critical patent/DE10040537A1/de
Application granted granted Critical
Publication of DE10040537B4 publication Critical patent/DE10040537B4/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49007—Indicating transducer

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
DE10040537A 2000-08-18 2000-08-18 Mikromechanischer Drehratensensor und Verfahren zu seiner Herstellung Expired - Fee Related DE10040537B4 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE10040537A DE10040537B4 (de) 2000-08-18 2000-08-18 Mikromechanischer Drehratensensor und Verfahren zu seiner Herstellung
EP01980234A EP1309835A1 (de) 2000-08-18 2001-08-06 Mikromechanischer drehratensensor und verfahren zu seiner herstellung
JP2002519873A JP2004506883A (ja) 2000-08-18 2001-08-06 マイクロメカニカル回転速度センサおよびその製造方法
US10/344,925 US6898972B2 (en) 2000-08-18 2001-08-06 Micromechanical speed sensor
PCT/EP2001/009066 WO2002014787A1 (de) 2000-08-18 2001-08-06 Mikromechanischer drehratensensor und verfahren zu seiner herstellung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10040537A DE10040537B4 (de) 2000-08-18 2000-08-18 Mikromechanischer Drehratensensor und Verfahren zu seiner Herstellung

Publications (2)

Publication Number Publication Date
DE10040537A1 DE10040537A1 (de) 2002-03-07
DE10040537B4 true DE10040537B4 (de) 2004-05-13

Family

ID=7652955

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10040537A Expired - Fee Related DE10040537B4 (de) 2000-08-18 2000-08-18 Mikromechanischer Drehratensensor und Verfahren zu seiner Herstellung

Country Status (5)

Country Link
US (1) US6898972B2 (enExample)
EP (1) EP1309835A1 (enExample)
JP (1) JP2004506883A (enExample)
DE (1) DE10040537B4 (enExample)
WO (1) WO2002014787A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4155775B2 (ja) * 2002-03-07 2008-09-24 アルプス電気株式会社 静電容量式センサ
JP2003329444A (ja) * 2002-03-07 2003-11-19 Alps Electric Co Ltd 静電容量式センサ
DE10231730B4 (de) * 2002-07-13 2012-08-30 Robert Bosch Gmbh Mikrostrukturbauelement
KR100503472B1 (ko) * 2003-03-06 2005-07-25 삼성전자주식회사 회전형 자이로스코프
JP4123044B2 (ja) * 2003-05-13 2008-07-23 ソニー株式会社 マイクロマシンおよびその製造方法
DE10347215A1 (de) * 2003-10-10 2005-05-12 Bosch Gmbh Robert Mikromechanischer Sensor
WO2006107531A2 (en) * 2005-03-16 2006-10-12 Cluster Resources, Inc. Simple integration of an on-demand compute environment
US7387040B2 (en) * 2005-08-19 2008-06-17 Honeywell International Inc. Methods and systems for mounting sensors for use in a harsh vibration environment
JP5165294B2 (ja) * 2007-07-06 2013-03-21 三菱電機株式会社 静電容量式加速度センサ
DE102013212365A1 (de) 2013-06-27 2014-12-31 Robert Bosch Gmbh Kapazitiver Drehratensensor und Verfahren zum Herstellen eines kapazitiven Drehratensensor

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4598585A (en) * 1984-03-19 1986-07-08 The Charles Stark Draper Laboratory, Inc. Planar inertial sensor
US5329815A (en) * 1991-12-19 1994-07-19 Motorola, Inc. Vibration monolithic gyroscope
DE19523895A1 (de) * 1995-06-30 1997-01-02 Bosch Gmbh Robert Beschleunigungssensor
DE19641284C1 (de) * 1996-10-07 1998-05-20 Inst Mikro Und Informationstec Drehratensensor mit entkoppelten orthogonalen Primär- und Sekundärschwingungen
DE19745083A1 (de) * 1997-10-11 1999-04-15 Bodenseewerk Geraetetech Drehratensensor
US6032531A (en) * 1997-08-04 2000-03-07 Kearfott Guidance & Navigation Corporation Micromachined acceleration and coriolis sensor

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5195371A (en) 1988-01-13 1993-03-23 The Charles Stark Draper Laboratory, Inc. Semiconductor chip transducer
US5016072A (en) * 1988-01-13 1991-05-14 The Charles Stark Draper Laboratory, Inc. Semiconductor chip gyroscopic transducer
US5203208A (en) 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
US5408877A (en) * 1992-03-16 1995-04-25 The Charles Stark Draper Laboratory, Inc. Micromechanical gyroscopic transducer with improved drive and sense capabilities

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4598585A (en) * 1984-03-19 1986-07-08 The Charles Stark Draper Laboratory, Inc. Planar inertial sensor
US5329815A (en) * 1991-12-19 1994-07-19 Motorola, Inc. Vibration monolithic gyroscope
DE19523895A1 (de) * 1995-06-30 1997-01-02 Bosch Gmbh Robert Beschleunigungssensor
DE19641284C1 (de) * 1996-10-07 1998-05-20 Inst Mikro Und Informationstec Drehratensensor mit entkoppelten orthogonalen Primär- und Sekundärschwingungen
US6032531A (en) * 1997-08-04 2000-03-07 Kearfott Guidance & Navigation Corporation Micromachined acceleration and coriolis sensor
DE19745083A1 (de) * 1997-10-11 1999-04-15 Bodenseewerk Geraetetech Drehratensensor

Also Published As

Publication number Publication date
US6898972B2 (en) 2005-05-31
DE10040537A1 (de) 2002-03-07
JP2004506883A (ja) 2004-03-04
WO2002014787A1 (de) 2002-02-21
US20040011130A1 (en) 2004-01-22
EP1309835A1 (de) 2003-05-14

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8127 New person/name/address of the applicant

Owner name: EADS DEUTSCHLAND GMBH, 85521 OTTOBRUNN, DE

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee