DE10017900A1 - Sensorenfeld, Herstellungsverfahren und Verwendung - Google Patents

Sensorenfeld, Herstellungsverfahren und Verwendung

Info

Publication number
DE10017900A1
DE10017900A1 DE10017900A DE10017900A DE10017900A1 DE 10017900 A1 DE10017900 A1 DE 10017900A1 DE 10017900 A DE10017900 A DE 10017900A DE 10017900 A DE10017900 A DE 10017900A DE 10017900 A1 DE10017900 A1 DE 10017900A1
Authority
DE
Germany
Prior art keywords
dielectric layer
array
pattern
electrical connections
holes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE10017900A
Other languages
German (de)
English (en)
Inventor
Hedengren Kristina Hel Valborg
William Paul Kornrumpf
Mark Lloyd Miller
Beale Hibbs Opsahl-Ong
Egidijus Edward Uzgiris
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/313,531 external-priority patent/US6084174A/en
Application filed by General Electric Co filed Critical General Electric Co
Publication of DE10017900A1 publication Critical patent/DE10017900A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K3/00Thermometers giving results other than momentary value of temperature
    • G01K3/08Thermometers giving results other than momentary value of temperature giving differences of values; giving differentiated values
    • G01K3/14Thermometers giving results other than momentary value of temperature giving differences of values; giving differentiated values in respect of space
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/02Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/10Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects operating with only the Peltier or Seebeck effects
    • H10N10/17Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects operating with only the Peltier or Seebeck effects characterised by the structure or configuration of the cell or thermocouple forming the device
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/80Constructional details
    • H10N10/85Thermoelectric active materials
    • H10N10/851Thermoelectric active materials comprising inorganic compositions
    • H10N10/854Thermoelectric active materials comprising inorganic compositions comprising only metals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Measuring And Recording Apparatus For Diagnosis (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
DE10017900A 1999-04-12 2000-04-11 Sensorenfeld, Herstellungsverfahren und Verwendung Withdrawn DE10017900A1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12874199P 1999-04-12 1999-04-12
US09/313,531 US6084174A (en) 1996-04-17 1999-05-12 Method for detecting temperature gradients in biological tissue using a thermocouple array
US09/395,135 US6180867B1 (en) 1996-04-17 1999-09-13 Thermal sensor array and methods of fabrication and use

Publications (1)

Publication Number Publication Date
DE10017900A1 true DE10017900A1 (de) 2001-01-11

Family

ID=27383781

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10017900A Withdrawn DE10017900A1 (de) 1999-04-12 2000-04-11 Sensorenfeld, Herstellungsverfahren und Verwendung

Country Status (3)

Country Link
US (1) US6180867B1 (enExample)
JP (1) JP4795507B2 (enExample)
DE (1) DE10017900A1 (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2276965C2 (ru) * 2003-12-26 2006-05-27 Донецкий физико-технический институт им.А.А.Галкина Национальной академии наук Украины Способ ранней диагностики опухолевых заболеваний молочной железы
RU2405419C1 (ru) * 2009-11-02 2010-12-10 Федеральное Государственное Учреждение "Российский Научный Центр Рентгенорадиологии Росмедтехнологий" (ФГУ "РНЦРР Росмедтехнологий") Способ исследования состояния постоперационной зоны после комбинированного лечения рака молочной железы
EP2077441A3 (en) * 2008-01-04 2011-05-25 White Box Inc. Thermometer material
DE102010018968A1 (de) * 2010-04-29 2011-11-03 Bundesrepublik Deutschland, vertr. durch d. Bundesministerium f. Wirtschaft und Technologie, dieses vertreten durch d. Präsidenten d. Physikalisch-Technischen Bundesanstalt Verfahren zum Messen einer thermischen Transportgröße und Transportgrößen-Messvorrichtung
RU2449724C1 (ru) * 2010-10-29 2012-05-10 Чингис Куанычевич Мустафин Способ оценки эффективности лечения диффузной мастопатии
DE102011077005A1 (de) * 2011-06-06 2012-12-06 Rehm Thermal Systems Gmbh Anlage zur Wärmebehandlung von Substraten und Verfahren zum Erfassen von Messdaten darin
RU2566214C1 (ru) * 2014-07-07 2015-10-20 Федеральное государственное бюджетное учреждение науки Институт механики сплошных сред Уральского отделения Российской академии наук Способ диагностики рака молочной железы

Families Citing this family (62)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE59913490D1 (de) * 1998-06-16 2006-07-06 Infineon Technologies Ag Einrichtung zur vermessung und analyse von elektrischen signalen eines integrierten schaltungsbausteins
US6716638B1 (en) * 1999-09-13 2004-04-06 Cyrano Sciences Inc. Measuring conducting paths using infrared thermography
FR2812532B1 (fr) * 2000-08-01 2003-07-04 Oreal Procede d'aquisition d'une image d'une zone non dermathoglyphique de la peau ou d'une zone des cheveux au moyen d'un dispositif d'acquisition comprenant un capteur non optique
JP4599767B2 (ja) * 2001-06-27 2010-12-15 株式会社デンソー 温度センサの製造方法
US7297572B2 (en) * 2001-09-07 2007-11-20 Hynix Semiconductor, Inc. Fabrication method for electronic system modules
US6927471B2 (en) * 2001-09-07 2005-08-09 Peter C. Salmon Electronic system modules and method of fabrication
DE10255013B4 (de) * 2002-11-25 2004-12-09 Siemens Ag Verfahren und Vorrichtung zur Lokalisierung von Licht emittierenden Bereichen
US7800079B2 (en) * 2003-12-22 2010-09-21 Asml Netherlands B.V. Assembly for detection of radiation flux and contamination of an optical component, lithographic apparatus including such an assembly and device manufacturing method
US20050267382A1 (en) * 2004-05-04 2005-12-01 Church Jonathan M Sensor
US20060000500A1 (en) * 2004-06-30 2006-01-05 Ioan Sauciuc Thermoelectric module
US20070181062A1 (en) * 2006-02-07 2007-08-09 Kim Il-Kyoung Semiconductor device manufacturing apparatus including temperature measuring unit
KR101039758B1 (ko) 2006-04-28 2011-06-09 젤티크 애스세틱스, 인코포레이티드. 피하 지질 과다 세포의 개선된 냉각을 위한 치료 장치와함께 사용하기 위한 동결 방지제
US8192474B2 (en) 2006-09-26 2012-06-05 Zeltiq Aesthetics, Inc. Tissue treatment methods
US9132031B2 (en) 2006-09-26 2015-09-15 Zeltiq Aesthetics, Inc. Cooling device having a plurality of controllable cooling elements to provide a predetermined cooling profile
US20080077201A1 (en) * 2006-09-26 2008-03-27 Juniper Medical, Inc. Cooling devices with flexible sensors
US7768376B2 (en) 2006-10-31 2010-08-03 The Board Of Trustees Of The University Of Illinois Conformal mesh for thermal imaging
US20080287839A1 (en) 2007-05-18 2008-11-20 Juniper Medical, Inc. Method of enhanced removal of heat from subcutaneous lipid-rich cells and treatment apparatus having an actuator
US8523927B2 (en) 2007-07-13 2013-09-03 Zeltiq Aesthetics, Inc. System for treating lipid-rich regions
EP3488833B1 (en) 2007-08-21 2025-10-22 Zeltiq Aesthetics, Inc. Monitoring the cooling of subcutaneous lipid-rich cells, such as the cooling of adipose tissue
US8603073B2 (en) 2008-12-17 2013-12-10 Zeltiq Aesthetics, Inc. Systems and methods with interrupt/resume capabilities for treating subcutaneous lipid-rich cells
SG10201401922TA (en) 2009-04-30 2014-06-27 Zeltiq Aesthetics Inc Device, system and method of removing heat from subcutaneous lipid-rich cells
US8334749B1 (en) 2009-09-28 2012-12-18 General Electric Company Temperature detection in a gas turbine
US20110094556A1 (en) * 2009-10-25 2011-04-28 Digital Angel Corporation Planar thermoelectric generator
CA2787374A1 (en) 2010-01-25 2011-07-28 Zeltiq Aesthetics, Inc. Home-use applicators for non-invasively removing heat from subcutaneous lipid-rich cells via phase change coolants, and associated devices, systems and methods
US8757874B2 (en) * 2010-05-03 2014-06-24 National Instruments Corporation Temperature sensing system and method
US8676338B2 (en) 2010-07-20 2014-03-18 Zeltiq Aesthetics, Inc. Combined modality treatment systems, methods and apparatus for body contouring applications
US20120222721A1 (en) * 2011-03-02 2012-09-06 General Electric Company Photovoltaic module package and fabrication method
US9844460B2 (en) 2013-03-14 2017-12-19 Zeltiq Aesthetics, Inc. Treatment systems with fluid mixing systems and fluid-cooled applicators and methods of using the same
US9545523B2 (en) 2013-03-14 2017-01-17 Zeltiq Aesthetics, Inc. Multi-modality treatment systems, methods and apparatus for altering subcutaneous lipid-rich tissue
JP2016534842A (ja) * 2013-10-25 2016-11-10 ボストン サイエンティフィック サイムド,インコーポレイテッドBoston Scientific Scimed,Inc. 除神経フレックス回路における埋め込み熱電対
US10201380B2 (en) 2014-01-31 2019-02-12 Zeltiq Aesthetics, Inc. Treatment systems, methods, and apparatuses for improving the appearance of skin and providing other treatments
US10675176B1 (en) 2014-03-19 2020-06-09 Zeltiq Aesthetics, Inc. Treatment systems, devices, and methods for cooling targeted tissue
USD777338S1 (en) 2014-03-20 2017-01-24 Zeltiq Aesthetics, Inc. Cryotherapy applicator for cooling tissue
US10952891B1 (en) 2014-05-13 2021-03-23 Zeltiq Aesthetics, Inc. Treatment systems with adjustable gap applicators and methods for cooling tissue
US10935174B2 (en) 2014-08-19 2021-03-02 Zeltiq Aesthetics, Inc. Stress relief couplings for cryotherapy apparatuses
US10568759B2 (en) 2014-08-19 2020-02-25 Zeltiq Aesthetics, Inc. Treatment systems, small volume applicators, and methods for treating submental tissue
EP3256065B1 (en) 2015-03-31 2020-11-11 St. Jude Medical, Cardiology Division, Inc. Devices for delivering pulsed rf energy during catheter ablation
US11154418B2 (en) 2015-10-19 2021-10-26 Zeltiq Aesthetics, Inc. Vascular treatment systems, cooling devices, and methods for cooling vascular structures
US11129555B2 (en) 2015-11-17 2021-09-28 University-Industry Cooperation Group Of Kyung Hee University Device for measuring biological information including sensor array and method of measuring biological information using device
KR101762022B1 (ko) * 2015-11-17 2017-08-04 경희대학교 산학협력단 온도 감지 어레이 및 장치
CA3009414A1 (en) 2016-01-07 2017-07-13 Zeltiq Aesthetics, Inc. Temperature-dependent adhesion between applicator and skin during cooling of tissue
US10765552B2 (en) 2016-02-18 2020-09-08 Zeltiq Aesthetics, Inc. Cooling cup applicators with contoured heads and liner assemblies
US11382790B2 (en) 2016-05-10 2022-07-12 Zeltiq Aesthetics, Inc. Skin freezing systems for treating acne and skin conditions
US10682297B2 (en) 2016-05-10 2020-06-16 Zeltiq Aesthetics, Inc. Liposomes, emulsions, and methods for cryotherapy
US10555831B2 (en) 2016-05-10 2020-02-11 Zeltiq Aesthetics, Inc. Hydrogel substances and methods of cryotherapy
DK3500334T3 (da) * 2016-08-18 2023-10-09 Novocure Gmbh Temperaturmåling i arrays til levering af ttfields
EP3522810B1 (en) * 2016-10-04 2022-06-29 St. Jude Medical, Cardiology Division, Inc. Ablation catheter tip with flexible electronic circuitry
KR101988097B1 (ko) * 2017-02-22 2019-10-01 한국표준과학연구원 박막형 온도 측정 어레이
US11076879B2 (en) 2017-04-26 2021-08-03 Zeltiq Aesthetics, Inc. Shallow surface cryotherapy applicators and related technology
US10794220B2 (en) * 2017-05-08 2020-10-06 Raytheon Technologies Corporation Temperature sensor array for a gas turbine engine
WO2020028179A1 (en) * 2018-07-30 2020-02-06 Csa Medical, Inc. Devices and methods for energy transfer mapping
AU2019315940B2 (en) 2018-07-31 2025-05-08 Zeltiq Aesthetics, Inc. Methods, devices, and systems for improving skin characteristics
US11638353B2 (en) 2018-09-17 2023-04-25 Hutchinson Technology Incorporated Apparatus and method for forming sensors with integrated electrical circuits on a substrate
US10725840B2 (en) 2018-11-13 2020-07-28 American Express Travel Related Services Company, Inc. Automated web service and API build configuration framework
JP7172747B2 (ja) * 2019-03-06 2022-11-16 信越半導体株式会社 シリコン単結晶の抵抗率測定方法
US11186479B2 (en) 2019-08-21 2021-11-30 Invensense, Inc. Systems and methods for operating a MEMS device based on sensed temperature gradients
US11174153B2 (en) * 2019-08-21 2021-11-16 Invensense, Inc. Package level thermal gradient sensing
US11313741B2 (en) 2019-12-11 2022-04-26 Apple Inc. Packaging technologies for temperature sensing in health care products
KR102280666B1 (ko) * 2020-11-19 2021-07-23 한국표준과학연구원 적층형 박막 온도센서 어레이
EP4570303A3 (en) * 2020-12-21 2025-07-30 Novocure GmbH Optimization of composite electrode
CN216386041U (zh) * 2021-08-26 2022-04-26 爱佩仪传感信息科技有限公司 一种用于中医诊疗的手温监测装置
KR102611603B1 (ko) * 2022-04-26 2023-12-07 한경희 매트릭스 구조의 배터리 팩용 온도 센서 장치

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1715316A (en) 1929-05-28 Thermopile
US1552284A (en) 1924-01-18 1925-09-01 Frank W Elliott Process of spinal analysis
US1610271A (en) 1924-08-25 1926-12-14 Frank W Elliott Temperature detector
US1648939A (en) 1925-07-13 1927-11-15 Frank W Elliott Diagnostic instrument
US1622887A (en) 1925-08-03 1927-03-29 Smith William Method of diagnostic analysis
US1752117A (en) 1928-09-28 1930-03-25 Smith William Temperature detector
US3219993A (en) 1962-10-24 1965-11-23 Xerox Corp Image formation and display utilizing a thermotropically color reversible material
CH413018A (de) 1963-04-30 1966-05-15 Du Pont Thermoelektrischer Generator
FR2123179B1 (enExample) 1971-01-28 1974-02-15 Commissariat Energie Atomique
DE2247962C3 (de) 1972-09-29 1979-03-01 Siemens Ag, 1000 Berlin Und 8000 Muenchen Thermoelementanordnung auf Halbleiterbasis
FR2238252A1 (en) 1973-07-19 1975-02-14 Petit Jean Louis Screen printed thermopile - comprising a plastic substrate with holes in two rows and conductive ink tracks on both sides
JPS5672321A (en) 1979-11-20 1981-06-16 Kensetsusho Kenchiku Kenkyu Shocho Radiation thermocouple and its manufacture
DE3273407D1 (en) 1981-04-16 1986-10-30 Atomic Energy Authority Uk Temperature surveillance system
JPS5810875A (ja) 1981-07-14 1983-01-21 Toshiba Chem Corp シ−ト状熱電対の製造方法
US4490053A (en) 1983-04-15 1984-12-25 Lockheed Missiles & Space Company, Inc. Temperature threshold detector
US4558342A (en) 1983-05-31 1985-12-10 Rockwell International Corporation Thermoelectric infrared detector array
US4513201A (en) 1983-07-21 1985-04-23 Ball Corporation Thermocouple detector
US4631350A (en) 1983-12-30 1986-12-23 Damon Germanton Low cost thermocouple apparatus and methods for fabricating the same
JPS63193023A (ja) * 1987-02-06 1988-08-10 Olympus Optical Co Ltd 温度測定装置
US5180440A (en) 1988-11-23 1993-01-19 Pace Incorporated Printed circuit thermocouple arrangements for personnel training and equipment evaluation purposes
JPH02263483A (ja) * 1989-04-03 1990-10-26 Toppan Printing Co Ltd 薄膜熱電対アレイ
JP3280394B2 (ja) 1990-04-05 2002-05-13 ロックヒード マーティン コーポレーション 電子装置
US5374123A (en) 1992-05-20 1994-12-20 Goldstar Co., Ltd. Thermal comfort sensing device
US5411600A (en) 1992-06-03 1995-05-02 Eastman Kodak Company Ultrathin film thermocouples and method of manufacture
JPH07146186A (ja) * 1993-11-25 1995-06-06 Shiimu:Kk 頭皮温度計測システム
ATE255369T1 (de) * 1994-06-27 2003-12-15 Boston Scient Ltd System zur steuerung von gewebeablation mit temperatursensoren

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2276965C2 (ru) * 2003-12-26 2006-05-27 Донецкий физико-технический институт им.А.А.Галкина Национальной академии наук Украины Способ ранней диагностики опухолевых заболеваний молочной железы
EP2077441A3 (en) * 2008-01-04 2011-05-25 White Box Inc. Thermometer material
RU2405419C1 (ru) * 2009-11-02 2010-12-10 Федеральное Государственное Учреждение "Российский Научный Центр Рентгенорадиологии Росмедтехнологий" (ФГУ "РНЦРР Росмедтехнологий") Способ исследования состояния постоперационной зоны после комбинированного лечения рака молочной железы
DE102010018968A1 (de) * 2010-04-29 2011-11-03 Bundesrepublik Deutschland, vertr. durch d. Bundesministerium f. Wirtschaft und Technologie, dieses vertreten durch d. Präsidenten d. Physikalisch-Technischen Bundesanstalt Verfahren zum Messen einer thermischen Transportgröße und Transportgrößen-Messvorrichtung
RU2449724C1 (ru) * 2010-10-29 2012-05-10 Чингис Куанычевич Мустафин Способ оценки эффективности лечения диффузной мастопатии
DE102011077005A1 (de) * 2011-06-06 2012-12-06 Rehm Thermal Systems Gmbh Anlage zur Wärmebehandlung von Substraten und Verfahren zum Erfassen von Messdaten darin
US9466514B2 (en) 2011-06-06 2016-10-11 Rehm Thermal Systems Gmbh System for the heat treatment of substrates, and method for detecting measurement data in said system
DE102011077005B4 (de) * 2011-06-06 2017-11-16 Rehm Thermal Systems Gmbh Anlage zur Wärmebehandlung von Substraten und Verfahren zum Erfassen von Messdaten darin
RU2566214C1 (ru) * 2014-07-07 2015-10-20 Федеральное государственное бюджетное учреждение науки Институт механики сплошных сред Уральского отделения Российской академии наук Способ диагностики рака молочной железы

Also Published As

Publication number Publication date
JP4795507B2 (ja) 2011-10-19
JP2001008902A (ja) 2001-01-16
US6180867B1 (en) 2001-01-30

Similar Documents

Publication Publication Date Title
DE10017900A1 (de) Sensorenfeld, Herstellungsverfahren und Verwendung
DE60113409T2 (de) Kombinierte impedanzbildgebung und mammographie
DE3916311C2 (de) Mehrfach-Thermoelementfühler
DE2527505C3 (de) Thermischer Strömungsmeßumformer
EP0200958B1 (de) Vorrichtung zur Messung schwacher Magnetfelder mit mehreren Gradiometern
EP1715331B1 (de) Thermoanalytischer Sensor und Verfahren zu dessen Herstellung
EP0200080A1 (de) Vorrichtung zur Messung schwacher Magnetfelder mit wenigstens einem DC-SQUID
DE4139171A1 (de) Tonometrisches system zum bestimmen des blutdrucks
DE112019002492B4 (de) Elektrisch funktionelle polymer-mikronadel-anordnung
EP1717566A1 (de) Thermoanalytischer Sensor
DE10213827A1 (de) Fluidströmungssensor und Verfahren zum Herstellen desselben
DE102021208524A1 (de) Flexible temperaturerfassungsvorrichtungen zur körpertemperaturerfassung
DE602004003745T2 (de) Gekühlter opto-elektrischer Detektor
EP2681905B1 (de) Röntgenkamera zur ortsaufgelösten detektion von röntgenstrahlung
EP0149819A2 (de) Strahlungsmessgerät und unter Verwendung desselben ausgebildetes, aus einem der Strahlung ausgesetzten Messgerät und einem gegen die Strahlung abgeschirmten Referenzgerät bestehenden Messsystem
DE102009012500B4 (de) Wärmestromsensormatrix und Vorrichtung zum flächenhaften Heizen und/oder Kühlen
DE4310622A1 (de) Einrichtung zur Mikrobilderzeugung mittels ionisierender Strahlung
Pickard et al. Flexible printed-circuit probe for electrophysiology
Chen et al. A silicon probe with integrated microheaters for thermal marking and monitoring of neural tissue
DE4425972A1 (de) Stromversorgungseinrichtung, insbesondere für elektrisch betriebene Meßinstrumente
DE112021002404T5 (de) Temperaturmessvorrichtung, temperaturmessverfahren und temperaturdämpfungsmessverfahren
DE112007000478B4 (de) Intergrierte Schaltung mit einem Thermoelement
DE2349434C3 (de) Anordnung zum Detektieren elektromagnetischer Strahlung
DE102019129820A1 (de) Bewerten der Messqualität des Sensorelements zum Erfassen einer Objekttemperatur
DE4208135A1 (de) Vorrichtung zur messung einer gas- oder fluessigkeitsstroemung

Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
R016 Response to examination communication
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee

Effective date: 20141101