DD111993A1 - - Google Patents

Info

Publication number
DD111993A1
DD111993A1 DD178453A DD17845374A DD111993A1 DD 111993 A1 DD111993 A1 DD 111993A1 DD 178453 A DD178453 A DD 178453A DD 17845374 A DD17845374 A DD 17845374A DD 111993 A1 DD111993 A1 DD 111993A1
Authority
DD
German Democratic Republic
Application number
DD178453A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to DD178453A priority Critical patent/DD111993A1/xx
Priority to FR7504252A priority patent/FR2271539B1/fr
Priority to DE19752506675 priority patent/DE2506675A1/de
Priority to CH211475A priority patent/CH584396A5/xx
Priority to CS1248A priority patent/CS177338B1/cs
Publication of DD111993A1 publication Critical patent/DD111993A1/xx
Priority to SE7503585A priority patent/SE406229B/xx
Priority to SU752120651A priority patent/SU643746A1/ru
Priority to US05/570,048 priority patent/US4027976A/en
Priority to GB1939875A priority patent/GB1476911A/en
Priority to JP5551975A priority patent/JPS5611081B2/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
DD178453A 1974-05-13 1974-05-13 DD111993A1 (fr)

Priority Applications (10)

Application Number Priority Date Filing Date Title
DD178453A DD111993A1 (fr) 1974-05-13 1974-05-13
FR7504252A FR2271539B1 (fr) 1974-05-13 1975-02-11
DE19752506675 DE2506675A1 (de) 1974-05-13 1975-02-17 Optisches interferometer
CH211475A CH584396A5 (fr) 1974-05-13 1975-02-20
CS1248A CS177338B1 (fr) 1974-05-13 1975-02-25
SE7503585A SE406229B (sv) 1974-05-13 1975-03-26 Optisk interferometer
SU752120651A SU643746A1 (ru) 1974-05-13 1975-04-07 "Расщепитель светового пучка интерферометра
US05/570,048 US4027976A (en) 1974-05-13 1975-04-21 Optical interferometer
GB1939875A GB1476911A (en) 1974-05-13 1975-05-08 Optical interferometer
JP5551975A JPS5611081B2 (fr) 1974-05-13 1975-05-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD178453A DD111993A1 (fr) 1974-05-13 1974-05-13

Publications (1)

Publication Number Publication Date
DD111993A1 true DD111993A1 (fr) 1975-03-12

Family

ID=5495729

Family Applications (1)

Application Number Title Priority Date Filing Date
DD178453A DD111993A1 (fr) 1974-05-13 1974-05-13

Country Status (10)

Country Link
US (1) US4027976A (fr)
JP (1) JPS5611081B2 (fr)
CH (1) CH584396A5 (fr)
CS (1) CS177338B1 (fr)
DD (1) DD111993A1 (fr)
DE (1) DE2506675A1 (fr)
FR (1) FR2271539B1 (fr)
GB (1) GB1476911A (fr)
SE (1) SE406229B (fr)
SU (1) SU643746A1 (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD137619A1 (de) * 1978-07-11 1979-09-12 Gerd Jaeger Vorrichtung,insbesondere zur digitalen kraftmessung
DD158187A3 (de) * 1980-06-30 1983-01-05 Karlheinz Bechstein Zweistufeninterferometer
US4788428A (en) * 1985-03-04 1988-11-29 The United States Of America As Represented By The Secretary Of The Navy Thermodynamics infrared imaging sensor
US4790642A (en) * 1986-12-01 1988-12-13 Gca Corporation/Tropel Division Integrated metrology for microlithographic objective reducing lens
US4884697A (en) * 1988-06-21 1989-12-05 Takacs Peter Z Surface profiling interferometer
DE3929152A1 (de) * 1989-09-02 1991-03-14 Roch Pierre Ets Elektronische auswerteschaltung fuer ein laser-interferometer
EP0611438B1 (fr) * 1991-11-08 1996-07-03 British Technology Group Ltd Instruments de mesure optique
ATE155238T1 (de) * 1994-02-26 1997-07-15 Heidenhain Gmbh Dr Johannes Interferometer
US5493394A (en) * 1994-05-25 1996-02-20 The Boeing Company Method and apparatus for use in measuring frequency difference between light signals
US20070024959A1 (en) * 2005-07-26 2007-02-01 Infocus Corporation Laser combiner
KR100737177B1 (ko) 2006-05-15 2007-07-10 경북대학교 산학협력단 수직 공진 표면광 레이저를 이용한 간섭계
JP5477774B2 (ja) * 2009-03-30 2014-04-23 株式会社ニコン 光学ユニット、干渉装置、ステージ装置、パターン形成装置およびデバイス製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3225644A (en) * 1961-10-16 1965-12-28 Zeiss Jena Veb Carl Apparatus producing interferential test data for measuring and control instruments
US3661464A (en) * 1970-03-16 1972-05-09 Jorway Corp Optical interferometer

Also Published As

Publication number Publication date
SU643746A1 (ru) 1979-01-25
FR2271539B1 (fr) 1978-02-24
CS177338B1 (fr) 1977-07-29
JPS5611081B2 (fr) 1981-03-12
SE406229B (sv) 1979-01-29
JPS50156483A (fr) 1975-12-17
FR2271539A1 (fr) 1975-12-12
CH584396A5 (fr) 1977-01-31
SE7503585L (sv) 1975-11-14
GB1476911A (en) 1977-06-16
US4027976A (en) 1977-06-07
DE2506675A1 (de) 1975-11-27

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