CH584396A5 - - Google Patents

Info

Publication number
CH584396A5
CH584396A5 CH211475A CH211475A CH584396A5 CH 584396 A5 CH584396 A5 CH 584396A5 CH 211475 A CH211475 A CH 211475A CH 211475 A CH211475 A CH 211475A CH 584396 A5 CH584396 A5 CH 584396A5
Authority
CH
Switzerland
Application number
CH211475A
Original Assignee
Zeiss Jena Veb Carl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeiss Jena Veb Carl filed Critical Zeiss Jena Veb Carl
Publication of CH584396A5 publication Critical patent/CH584396A5/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
CH211475A 1974-05-13 1975-02-20 CH584396A5 (xx)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD178453A DD111993A1 (xx) 1974-05-13 1974-05-13

Publications (1)

Publication Number Publication Date
CH584396A5 true CH584396A5 (xx) 1977-01-31

Family

ID=5495729

Family Applications (1)

Application Number Title Priority Date Filing Date
CH211475A CH584396A5 (xx) 1974-05-13 1975-02-20

Country Status (10)

Country Link
US (1) US4027976A (xx)
JP (1) JPS5611081B2 (xx)
CH (1) CH584396A5 (xx)
CS (1) CS177338B1 (xx)
DD (1) DD111993A1 (xx)
DE (1) DE2506675A1 (xx)
FR (1) FR2271539B1 (xx)
GB (1) GB1476911A (xx)
SE (1) SE406229B (xx)
SU (1) SU643746A1 (xx)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD137619A1 (de) * 1978-07-11 1979-09-12 Gerd Jaeger Vorrichtung,insbesondere zur digitalen kraftmessung
DD158187A3 (de) * 1980-06-30 1983-01-05 Karlheinz Bechstein Zweistufeninterferometer
US4788428A (en) * 1985-03-04 1988-11-29 The United States Of America As Represented By The Secretary Of The Navy Thermodynamics infrared imaging sensor
US4790642A (en) * 1986-12-01 1988-12-13 Gca Corporation/Tropel Division Integrated metrology for microlithographic objective reducing lens
US4884697A (en) * 1988-06-21 1989-12-05 Takacs Peter Z Surface profiling interferometer
DE3929152A1 (de) * 1989-09-02 1991-03-14 Roch Pierre Ets Elektronische auswerteschaltung fuer ein laser-interferometer
WO1993009394A1 (en) * 1991-11-08 1993-05-13 British Technology Group Ltd. Measuring instruments
EP0670467B1 (de) * 1994-02-26 1997-07-09 Dr. Johannes Heidenhain GmbH Interferometer
US5493394A (en) * 1994-05-25 1996-02-20 The Boeing Company Method and apparatus for use in measuring frequency difference between light signals
US20070024959A1 (en) * 2005-07-26 2007-02-01 Infocus Corporation Laser combiner
KR100737177B1 (ko) 2006-05-15 2007-07-10 경북대학교 산학협력단 수직 공진 표면광 레이저를 이용한 간섭계
JP5477774B2 (ja) * 2009-03-30 2014-04-23 株式会社ニコン 光学ユニット、干渉装置、ステージ装置、パターン形成装置およびデバイス製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3225644A (en) * 1961-10-16 1965-12-28 Zeiss Jena Veb Carl Apparatus producing interferential test data for measuring and control instruments
US3661464A (en) * 1970-03-16 1972-05-09 Jorway Corp Optical interferometer

Also Published As

Publication number Publication date
SU643746A1 (ru) 1979-01-25
JPS5611081B2 (xx) 1981-03-12
DD111993A1 (xx) 1975-03-12
JPS50156483A (xx) 1975-12-17
FR2271539A1 (xx) 1975-12-12
SE406229B (sv) 1979-01-29
CS177338B1 (xx) 1977-07-29
SE7503585L (sv) 1975-11-14
US4027976A (en) 1977-06-07
FR2271539B1 (xx) 1978-02-24
DE2506675A1 (de) 1975-11-27
GB1476911A (en) 1977-06-16

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Legal Events

Date Code Title Description
PL Patent ceased