JPS5611081B2 - - Google Patents

Info

Publication number
JPS5611081B2
JPS5611081B2 JP5551975A JP5551975A JPS5611081B2 JP S5611081 B2 JPS5611081 B2 JP S5611081B2 JP 5551975 A JP5551975 A JP 5551975A JP 5551975 A JP5551975 A JP 5551975A JP S5611081 B2 JPS5611081 B2 JP S5611081B2
Authority
JP
Japan
Prior art keywords
light
splitting
splitting cube
employs
cube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5551975A
Other languages
English (en)
Other versions
JPS50156483A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS50156483A publication Critical patent/JPS50156483A/ja
Publication of JPS5611081B2 publication Critical patent/JPS5611081B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP5551975A 1974-05-13 1975-05-13 Expired JPS5611081B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD178453A DD111993A1 (ja) 1974-05-13 1974-05-13

Publications (2)

Publication Number Publication Date
JPS50156483A JPS50156483A (ja) 1975-12-17
JPS5611081B2 true JPS5611081B2 (ja) 1981-03-12

Family

ID=5495729

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5551975A Expired JPS5611081B2 (ja) 1974-05-13 1975-05-13

Country Status (10)

Country Link
US (1) US4027976A (ja)
JP (1) JPS5611081B2 (ja)
CH (1) CH584396A5 (ja)
CS (1) CS177338B1 (ja)
DD (1) DD111993A1 (ja)
DE (1) DE2506675A1 (ja)
FR (1) FR2271539B1 (ja)
GB (1) GB1476911A (ja)
SE (1) SE406229B (ja)
SU (1) SU643746A1 (ja)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD137619A1 (de) * 1978-07-11 1979-09-12 Gerd Jaeger Vorrichtung,insbesondere zur digitalen kraftmessung
DD158187A3 (de) * 1980-06-30 1983-01-05 Karlheinz Bechstein Zweistufeninterferometer
US4788428A (en) * 1985-03-04 1988-11-29 The United States Of America As Represented By The Secretary Of The Navy Thermodynamics infrared imaging sensor
US4790642A (en) * 1986-12-01 1988-12-13 Gca Corporation/Tropel Division Integrated metrology for microlithographic objective reducing lens
US4884697A (en) * 1988-06-21 1989-12-05 Takacs Peter Z Surface profiling interferometer
DE3929152A1 (de) * 1989-09-02 1991-03-14 Roch Pierre Ets Elektronische auswerteschaltung fuer ein laser-interferometer
EP0611438B1 (en) * 1991-11-08 1996-07-03 British Technology Group Ltd Optical measuring instruments
ATE155238T1 (de) * 1994-02-26 1997-07-15 Heidenhain Gmbh Dr Johannes Interferometer
US5493394A (en) * 1994-05-25 1996-02-20 The Boeing Company Method and apparatus for use in measuring frequency difference between light signals
US20070024959A1 (en) * 2005-07-26 2007-02-01 Infocus Corporation Laser combiner
KR100737177B1 (ko) 2006-05-15 2007-07-10 경북대학교 산학협력단 수직 공진 표면광 레이저를 이용한 간섭계
JP5477774B2 (ja) * 2009-03-30 2014-04-23 株式会社ニコン 光学ユニット、干渉装置、ステージ装置、パターン形成装置およびデバイス製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3225644A (en) * 1961-10-16 1965-12-28 Zeiss Jena Veb Carl Apparatus producing interferential test data for measuring and control instruments
US3661464A (en) * 1970-03-16 1972-05-09 Jorway Corp Optical interferometer

Also Published As

Publication number Publication date
SU643746A1 (ru) 1979-01-25
FR2271539B1 (ja) 1978-02-24
CS177338B1 (ja) 1977-07-29
SE406229B (sv) 1979-01-29
JPS50156483A (ja) 1975-12-17
DD111993A1 (ja) 1975-03-12
FR2271539A1 (ja) 1975-12-12
CH584396A5 (ja) 1977-01-31
SE7503585L (sv) 1975-11-14
GB1476911A (en) 1977-06-16
US4027976A (en) 1977-06-07
DE2506675A1 (de) 1975-11-27

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