CS177338B1 - - Google Patents
Info
- Publication number
- CS177338B1 CS177338B1 CS1248A CS124875A CS177338B1 CS 177338 B1 CS177338 B1 CS 177338B1 CS 1248 A CS1248 A CS 1248A CS 124875 A CS124875 A CS 124875A CS 177338 B1 CS177338 B1 CS 177338B1
- Authority
- CS
- Czechoslovakia
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
- G01B9/02078—Caused by ambiguity
- G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
- G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD178453A DD111993A1 (fr) | 1974-05-13 | 1974-05-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CS177338B1 true CS177338B1 (fr) | 1977-07-29 |
Family
ID=5495729
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CS1248A CS177338B1 (fr) | 1974-05-13 | 1975-02-25 |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US4027976A (fr) |
| JP (1) | JPS5611081B2 (fr) |
| CH (1) | CH584396A5 (fr) |
| CS (1) | CS177338B1 (fr) |
| DD (1) | DD111993A1 (fr) |
| DE (1) | DE2506675A1 (fr) |
| FR (1) | FR2271539B1 (fr) |
| GB (1) | GB1476911A (fr) |
| SE (1) | SE406229B (fr) |
| SU (1) | SU643746A1 (fr) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DD137619A1 (de) * | 1978-07-11 | 1979-09-12 | Gerd Jaeger | Vorrichtung,insbesondere zur digitalen kraftmessung |
| DD158187A3 (de) * | 1980-06-30 | 1983-01-05 | Karlheinz Bechstein | Zweistufeninterferometer |
| US4788428A (en) * | 1985-03-04 | 1988-11-29 | The United States Of America As Represented By The Secretary Of The Navy | Thermodynamics infrared imaging sensor |
| US4790642A (en) * | 1986-12-01 | 1988-12-13 | Gca Corporation/Tropel Division | Integrated metrology for microlithographic objective reducing lens |
| US4884697A (en) * | 1988-06-21 | 1989-12-05 | Takacs Peter Z | Surface profiling interferometer |
| DE3929152A1 (de) * | 1989-09-02 | 1991-03-14 | Roch Pierre Ets | Elektronische auswerteschaltung fuer ein laser-interferometer |
| EP0611438B1 (fr) * | 1991-11-08 | 1996-07-03 | British Technology Group Ltd | Instruments de mesure optique |
| ATE155238T1 (de) * | 1994-02-26 | 1997-07-15 | Heidenhain Gmbh Dr Johannes | Interferometer |
| US5493394A (en) * | 1994-05-25 | 1996-02-20 | The Boeing Company | Method and apparatus for use in measuring frequency difference between light signals |
| US20070024959A1 (en) * | 2005-07-26 | 2007-02-01 | Infocus Corporation | Laser combiner |
| KR100737177B1 (ko) | 2006-05-15 | 2007-07-10 | 경북대학교 산학협력단 | 수직 공진 표면광 레이저를 이용한 간섭계 |
| JP5477774B2 (ja) * | 2009-03-30 | 2014-04-23 | 株式会社ニコン | 光学ユニット、干渉装置、ステージ装置、パターン形成装置およびデバイス製造方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3225644A (en) * | 1961-10-16 | 1965-12-28 | Zeiss Jena Veb Carl | Apparatus producing interferential test data for measuring and control instruments |
| US3661464A (en) * | 1970-03-16 | 1972-05-09 | Jorway Corp | Optical interferometer |
-
1974
- 1974-05-13 DD DD178453A patent/DD111993A1/xx unknown
-
1975
- 1975-02-11 FR FR7504252A patent/FR2271539B1/fr not_active Expired
- 1975-02-17 DE DE19752506675 patent/DE2506675A1/de not_active Withdrawn
- 1975-02-20 CH CH211475A patent/CH584396A5/xx not_active IP Right Cessation
- 1975-02-25 CS CS1248A patent/CS177338B1/cs unknown
- 1975-03-26 SE SE7503585A patent/SE406229B/xx unknown
- 1975-04-07 SU SU752120651A patent/SU643746A1/ru active
- 1975-04-21 US US05/570,048 patent/US4027976A/en not_active Expired - Lifetime
- 1975-05-08 GB GB1939875A patent/GB1476911A/en not_active Expired
- 1975-05-13 JP JP5551975A patent/JPS5611081B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| SU643746A1 (ru) | 1979-01-25 |
| FR2271539B1 (fr) | 1978-02-24 |
| JPS5611081B2 (fr) | 1981-03-12 |
| SE406229B (sv) | 1979-01-29 |
| JPS50156483A (fr) | 1975-12-17 |
| DD111993A1 (fr) | 1975-03-12 |
| FR2271539A1 (fr) | 1975-12-12 |
| CH584396A5 (fr) | 1977-01-31 |
| SE7503585L (sv) | 1975-11-14 |
| GB1476911A (en) | 1977-06-16 |
| US4027976A (en) | 1977-06-07 |
| DE2506675A1 (de) | 1975-11-27 |