CZ299040B6 - Zpusob vylepšení presnosti merení laserovým interferometrem - Google Patents

Zpusob vylepšení presnosti merení laserovým interferometrem Download PDF

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Publication number
CZ299040B6
CZ299040B6 CZ20011929A CZ20011929A CZ299040B6 CZ 299040 B6 CZ299040 B6 CZ 299040B6 CZ 20011929 A CZ20011929 A CZ 20011929A CZ 20011929 A CZ20011929 A CZ 20011929A CZ 299040 B6 CZ299040 B6 CZ 299040B6
Authority
CZ
Czechia
Prior art keywords
laser
laser interferometer
laser beam
measurement
measured
Prior art date
Application number
CZ20011929A
Other languages
Czech (cs)
English (en)
Other versions
CZ20011929A3 (cs
Inventor
Mihaljov@Leonid
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of CZ20011929A3 publication Critical patent/CZ20011929A3/cs
Publication of CZ299040B6 publication Critical patent/CZ299040B6/cs

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/497—Means for monitoring or calibrating

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Lasers (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
CZ20011929A 1998-12-02 1999-11-26 Zpusob vylepšení presnosti merení laserovým interferometrem CZ299040B6 (cs)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI982603A FI982603A7 (fi) 1998-12-02 1998-12-02 Laser-mittauksen epätarkkuutta pienentävä mittausmenetelmä

Publications (2)

Publication Number Publication Date
CZ20011929A3 CZ20011929A3 (cs) 2001-10-17
CZ299040B6 true CZ299040B6 (cs) 2008-04-09

Family

ID=8553022

Family Applications (1)

Application Number Title Priority Date Filing Date
CZ20011929A CZ299040B6 (cs) 1998-12-02 1999-11-26 Zpusob vylepšení presnosti merení laserovým interferometrem

Country Status (19)

Country Link
US (1) US6501550B1 (https=)
EP (1) EP1149268B1 (https=)
JP (1) JP2002531816A (https=)
KR (1) KR100729491B1 (https=)
CN (1) CN1170117C (https=)
AT (1) ATE323879T1 (https=)
AU (1) AU768410B2 (https=)
BR (1) BR9916875A (https=)
CA (1) CA2350736C (https=)
CZ (1) CZ299040B6 (https=)
DE (1) DE69930966T2 (https=)
DK (1) DK1149268T3 (https=)
ES (1) ES2263292T3 (https=)
FI (1) FI982603A7 (https=)
IL (2) IL143453A0 (https=)
MX (1) MXPA01005609A (https=)
PT (1) PT1149268E (https=)
RU (1) RU2243500C2 (https=)
WO (1) WO2000033021A1 (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI110209B (fi) * 1999-06-23 2002-12-13 Leonid Mihaljov Menetelmä laserinterferometrillä tehtävien mittauksien tarkkuuden parantamiseksi
DE10329043B4 (de) * 2003-06-27 2007-07-26 Leuze Electronic Gmbh & Co Kg Verfahren zur Bestimmung von Distanzen
GB0523455D0 (en) * 2005-11-18 2005-12-28 Renishaw Plc Dynamic air turbulence compensation
EP1876469B1 (de) * 2006-07-04 2009-11-25 Pepperl + Fuchs Gmbh Verfahren und Vorrichtung zur optoelektronischen berührungslosen Distanzmessung nach dem Laufzeitprinzip
DE102007055665A1 (de) * 2007-11-21 2009-05-28 Dr. Johannes Heidenhain Gmbh Interferometeranordnung und Verfahren zu deren Betrieb
US10203268B2 (en) 2008-12-04 2019-02-12 Laura P. Solliday Methods for measuring and modeling the process of prestressing concrete during tensioning/detensioning based on electronic distance measurements
US9354043B2 (en) 2008-12-04 2016-05-31 Laura P. Solliday Methods for measuring and modeling the structural health of pressure vessels based on electronic distance measurements
US8209134B2 (en) * 2008-12-04 2012-06-26 Laura P. Solliday Methods for modeling the structural health of a civil structure based on electronic distance measurements
JP5602538B2 (ja) * 2010-03-03 2014-10-08 キヤノン株式会社 光波干渉計測装置
US9810784B2 (en) 2010-11-16 2017-11-07 Qualcomm Incorporated System and method for object position estimation based on ultrasonic reflected signals

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2170907A (en) * 1985-02-06 1986-08-13 Sonic Tape Plc Improvements relating to distance measuring devices
US4751689A (en) * 1985-07-22 1988-06-14 Nihon Coating Co., Ltd. Method of measuring a distance
US5287627A (en) * 1990-10-22 1994-02-22 Spectra-Physics Laserplane, Inc. Automatic plumb and level tool with acoustic measuring capability
WO1997043661A1 (en) * 1996-05-14 1997-11-20 The Guide Dogs For The Blind Association Method and apparatus for distance measurement

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3854325A (en) * 1973-07-13 1974-12-17 Us Air Force Method and means for determining fatigue damage and surface stress
US4372150A (en) * 1980-06-05 1983-02-08 Beckman Instruments, Inc. Flow monitoring method and apparatus
US4600307A (en) * 1983-07-29 1986-07-15 The Perkin-Elmer Corporation Coherent radiation detecting apparatus
US4998295A (en) * 1988-12-30 1991-03-05 General Electric Company Receiver having an interferometer
GB8920448D0 (en) * 1989-09-09 1989-10-25 Renishaw Plc Apparatus for adjusting the alignment of a light beam
US5604592A (en) * 1994-09-19 1997-02-18 Textron Defense Systems, Division Of Avco Corporation Laser ultrasonics-based material analysis system and method using matched filter processing
US5624188A (en) * 1994-10-20 1997-04-29 West; David A. Acoustic thermometer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2170907A (en) * 1985-02-06 1986-08-13 Sonic Tape Plc Improvements relating to distance measuring devices
US4751689A (en) * 1985-07-22 1988-06-14 Nihon Coating Co., Ltd. Method of measuring a distance
US5287627A (en) * 1990-10-22 1994-02-22 Spectra-Physics Laserplane, Inc. Automatic plumb and level tool with acoustic measuring capability
WO1997043661A1 (en) * 1996-05-14 1997-11-20 The Guide Dogs For The Blind Association Method and apparatus for distance measurement

Also Published As

Publication number Publication date
CN1329711A (zh) 2002-01-02
FI982603L (fi) 2000-06-03
KR20010099817A (ko) 2001-11-09
DE69930966D1 (de) 2006-05-24
RU2243500C2 (ru) 2004-12-27
EP1149268B1 (en) 2006-04-19
DK1149268T3 (da) 2006-08-14
IL143453A0 (en) 2002-04-21
CA2350736A1 (en) 2000-06-08
PT1149268E (pt) 2006-07-31
WO2000033021A1 (en) 2000-06-08
ATE323879T1 (de) 2006-05-15
BR9916875A (pt) 2001-11-13
FI982603A0 (fi) 1998-12-02
DE69930966T2 (de) 2006-12-28
EP1149268A1 (en) 2001-10-31
CZ20011929A3 (cs) 2001-10-17
US6501550B1 (en) 2002-12-31
MXPA01005609A (es) 2003-07-14
FI982603A7 (fi) 2000-06-03
WO2000033021A8 (en) 2001-01-11
ES2263292T3 (es) 2006-12-01
CA2350736C (en) 2007-05-15
AU768410B2 (en) 2003-12-11
CN1170117C (zh) 2004-10-06
JP2002531816A (ja) 2002-09-24
AU1563100A (en) 2000-06-19
IL143453A (en) 2007-06-17
KR100729491B1 (ko) 2007-06-15

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Date Code Title Description
MM4A Patent lapsed due to non-payment of fee

Effective date: 20101126