CS167349B2 - - Google Patents

Info

Publication number
CS167349B2
CS167349B2 CS3363A CS336372A CS167349B2 CS 167349 B2 CS167349 B2 CS 167349B2 CS 3363 A CS3363 A CS 3363A CS 336372 A CS336372 A CS 336372A CS 167349 B2 CS167349 B2 CS 167349B2
Authority
CS
Czechoslovakia
Application number
CS3363A
Other languages
Czech (cs)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of CS167349B2 publication Critical patent/CS167349B2/cs

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Silicon Compounds (AREA)
CS3363A 1971-05-19 1972-05-17 CS167349B2 (enrdf_load_html_response)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2125085A DE2125085C3 (de) 1971-05-19 1971-05-19 Vorrichtung zum Herstellen von einseitig geschlossenen Rohren aus Halbleitermaterial

Publications (1)

Publication Number Publication Date
CS167349B2 true CS167349B2 (enrdf_load_html_response) 1976-04-29

Family

ID=5808445

Family Applications (1)

Application Number Title Priority Date Filing Date
CS3363A CS167349B2 (enrdf_load_html_response) 1971-05-19 1972-05-17

Country Status (16)

Country Link
US (1) US3747559A (enrdf_load_html_response)
JP (1) JPS5540528B1 (enrdf_load_html_response)
AT (1) AT336682B (enrdf_load_html_response)
BE (1) BE778749A (enrdf_load_html_response)
CA (1) CA968673A (enrdf_load_html_response)
CH (1) CH537214A (enrdf_load_html_response)
CS (1) CS167349B2 (enrdf_load_html_response)
DD (1) DD96853A5 (enrdf_load_html_response)
DE (1) DE2125085C3 (enrdf_load_html_response)
DK (1) DK137550C (enrdf_load_html_response)
FR (1) FR2138099B1 (enrdf_load_html_response)
GB (1) GB1340464A (enrdf_load_html_response)
IT (1) IT955601B (enrdf_load_html_response)
NL (1) NL7202997A (enrdf_load_html_response)
PL (1) PL82569B1 (enrdf_load_html_response)
SE (1) SE367216B (enrdf_load_html_response)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4015922A (en) * 1970-12-09 1977-04-05 Siemens Aktiengesellschaft Apparatus for the manufacture of tubular bodies of semiconductor material
US3979490A (en) * 1970-12-09 1976-09-07 Siemens Aktiengesellschaft Method for the manufacture of tubular bodies of semiconductor material
US4034705A (en) * 1972-05-16 1977-07-12 Siemens Aktiengesellschaft Shaped bodies and production of semiconductor material
US4035460A (en) * 1972-05-16 1977-07-12 Siemens Aktiengesellschaft Shaped bodies and production of semiconductor material
DE2322952C3 (de) * 1973-05-07 1979-04-19 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zum Herstellen von Horden für die Aufnahme von Kristallscheiben bei Diffusions- und Temperprozessen
JP2888253B2 (ja) * 1989-07-20 1999-05-10 富士通株式会社 化学気相成長法およびその実施のための装置
DE69835216T2 (de) 1997-07-25 2007-05-31 Nichia Corp., Anan Halbleitervorrichtung aus einer nitridverbindung
DE19738234C1 (de) * 1997-09-02 1998-10-22 Fraunhofer Ges Forschung Einrichtung zum Aufstäuben von Hartstoffschichten
JP3770014B2 (ja) 1999-02-09 2006-04-26 日亜化学工業株式会社 窒化物半導体素子
US6711191B1 (en) 1999-03-04 2004-03-23 Nichia Corporation Nitride semiconductor laser device
TWI362769B (en) 2008-05-09 2012-04-21 Univ Nat Chiao Tung Light emitting device and fabrication method therefor
CN111734950A (zh) * 2020-07-01 2020-10-02 西安维国电子科技有限公司 密闭空间电绝缘气体填充与回收的方法及填充装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2955566A (en) * 1957-04-16 1960-10-11 Chilean Nitrate Sales Corp Dissociation-deposition unit for the production of chromium
GB944009A (en) * 1960-01-04 1963-12-11 Texas Instruments Ltd Improvements in or relating to the deposition of silicon on a tantalum article
US3451772A (en) * 1967-06-14 1969-06-24 Air Reduction Production of ultrapure titanium nitride refractory articles
US3547530A (en) * 1968-11-12 1970-12-15 Bell Telephone Labor Inc Overhead projector

Also Published As

Publication number Publication date
FR2138099A1 (enrdf_load_html_response) 1972-12-29
PL82569B1 (enrdf_load_html_response) 1975-10-31
DE2125085A1 (de) 1972-12-07
DK137550C (da) 1978-09-04
DK137550B (da) 1978-03-20
ATA241272A (de) 1976-09-15
JPS5540528B1 (enrdf_load_html_response) 1980-10-18
US3747559A (en) 1973-07-24
DD96853A5 (enrdf_load_html_response) 1973-04-12
FR2138099B1 (enrdf_load_html_response) 1974-07-26
NL7202997A (enrdf_load_html_response) 1972-11-21
DE2125085B2 (de) 1978-06-29
SE367216B (enrdf_load_html_response) 1974-05-20
GB1340464A (en) 1973-12-12
DE2125085C3 (de) 1979-02-22
AT336682B (de) 1977-05-25
CA968673A (en) 1975-06-03
BE778749A (fr) 1972-05-16
CH537214A (de) 1973-05-31
IT955601B (it) 1973-09-29

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