CN86205339U - Coating apparatus for highly homogeneous coat - Google Patents
Coating apparatus for highly homogeneous coat Download PDFInfo
- Publication number
- CN86205339U CN86205339U CN 86205339 CN86205339U CN86205339U CN 86205339 U CN86205339 U CN 86205339U CN 86205339 CN86205339 CN 86205339 CN 86205339 U CN86205339 U CN 86205339U CN 86205339 U CN86205339 U CN 86205339U
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- Prior art keywords
- rete
- shielding plate
- friction
- driven wheel
- microscope carrier
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- 239000011248 coating agent Substances 0.000 title claims abstract description 51
- 238000000576 coating method Methods 0.000 title claims abstract description 51
- 239000000758 substrate Substances 0.000 claims description 53
- 230000008020 evaporation Effects 0.000 claims description 20
- 238000001704 evaporation Methods 0.000 claims description 20
- 239000007888 film coating Substances 0.000 claims description 17
- 238000009501 film coating Methods 0.000 claims description 17
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 230000003287 optical effect Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 9
- 239000012528 membrane Substances 0.000 description 7
- 230000000903 blocking effect Effects 0.000 description 5
- 239000010408 film Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000012788 optical film Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000013049 sediment Substances 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
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- Physical Vapour Deposition (AREA)
Abstract
The utility model relates to a coating apparatus for highly homogeneous coats, and is capable of coating convex, concave and flat base sheets with highly homogeneous coats. Friction orbits (28 or 28a) are composed of a pair of curved faces with the symmetry of surfaces and the asymmetry of axes. A nearest swinging extreme angle from a work piece holder (35) to an evaporator source (15 or 19) is bigger than a farthest swinging extreme angle from the work piece holder to the evaporator source (15 or 19); or simultaneously, an adjustable, foldable and detachable space shielding sheet microscope carrier device (48) is arranged on a coating chamber chassis (8) below the friction orbit (28). The utility model has the advantages of simple operation, convenient use, low cost, and high repeatability. The production efficiency is 2 to 5 times of the production efficiency in the prior art, and the quality of optical (or electronic) components and the entire machine can be improved.
Description
The utility model is that a kind of substrate that is used for is filmed, and particularly is coated with the high evenly film coating apparatus of rete on substrate.
The utility model is (English) HA MacLeod work in 1969, development on disclosed that class coating equipment basis of " optical film technique " chapter 9 that Zhou Jiulin, Yin Shu translated in 100 years and come.
A kind of plane load plate coating equipment of known rotation, in its coating chamber, evaporation source is parallel and place load plate below, workholder to be contained on the load plate and with the geometric centre axes revolution of load plate around driven wheel.As be used for big planar substrates and film, the circumferential homogeneity of rete and radially homogeneity is all poor is as only placing a big planar substrates at the load plate center, though the homogeneity of rete satisfies service requirements on the substrate, but efficient is too low, has increased the cost of product, has brought difficulty also for big production.As be used for the convex substrate and film, the homogeneity of rete is very poor on the general convex substrate, the homogeneity extreme difference of rete on the especially special protruding substrate, and the not only radially homogeneity extreme difference of rete, and the circumferential homogeneity of rete is extreme difference also.The planetary load plate coating equipment in another kind of known plane, in order to improve the homogeneity of substrate rete, on above-mentioned coating equipment basis, above load plate, load onto parallel with a load plate and concentric cylindrical surface Huo Yuan Cone face friction track, on workholder, increase a friction wheel, when this machine runs well, friction wheel rolls on friction track, like this, substrate can not only be with workholder around the revolution of the geometric centre axes of driven wheel, and with workholder together with bigger rotating speed separately around itself geometric centre axes rotation.As be used for big planar substrates and film, though the circumferential homogeneity of rete is good, the radially homogeneity of rete is still poor, can not satisfy service requirements.As be used for the convex substrate and film, though the circumferential homogeneity of rete improves on the special protruding substrate, the radially homogeneity of rete is extreme difference still.A kind of technology of blocking is considered to be fit to the coating technique of special protruding substrate, owing to be that substrate is blocked one by one, the shape of shielding plate and size just are difficult to decision, and the kind of the shielding plate that needs is many, require tight again, operation is complicated again, and this technology of blocking so far still can not be generally and be coated with high evenly rete widely on various convex substrates.
Task of the present utility model is: design a kind of film coating apparatus, this device can be coated with high evenly rete on various convex substrates, can be coated with high evenly rete again on big planar substrates, and simple to operate, easy to use.
Its solution is: the friction track of driven wheel top (or below) is axisymmetric in the face of claiming that curved surface constitutes by a pair of not tool at least, workholder apart from the nearest swing extreme value angle of evaporation source greater than distance evaporation source swing extreme value angle farthest.
Like this, workholder can not only be around the geometric centre axes revolution of driven wheel, so that big rotating speed is separately around itself geometric centre axes rotation, and can also do well-regulated periodic swing around its oscillation centre separately, the homogeneity of various convex substrates institute's deposition membrane in the less important deposit of distance evaporation source rete far away district is further improved, and especially the homogeneity of institute's deposition membrane has raising especially significantly in the nearer rete of distance evaporation source mainly forms sediment the title district.Be substrate when placing any position, coating chamber deposit space, all be in the high evenly optimum regime of rete of deposit, thereby guaranteed on various convex substrates, to obtain even rete.General convex substrate membrane uniformity is fine, and the geometric thickness error of its rete is below ± 5%; The membrane uniformity of special protruding substrate improves 15% to 45% than the planetary load plate coating equipment in plane.
In like manner, adopt the coating equipment of above-mentioned feature, can be coated with high evenly rete on big planar substrates, the homogeneity of its rete can meet or exceed the membrane uniformity of the load plate central section of horizontal rotary plane workholder coating equipment.
In addition, the coating equipment with above-mentioned feature can also be coated with high evenly rete on special spill substrate, and substrate edge is bigger than adopting the cold mirror coating equipment to the effect of blocking at center, as the optical thickness error of rete on the cold mirror can be reduced to ± below 5%.In addition, the direction of the plane of symmetry of friction track is adjustable, thereby range of application is wider.
In order further to improve the membrane uniformity of the protruding substrate of various spies, a kind of adjustable detachable space shielding plate bearing table device of rolling over of ad hoc meter is contained in the evaporation source right on, friction track, on the coating chamber chassis of driven wheel and workholder below, with suitable placement space shielding plate.Space shielding plate microscope carrier can make the lifting at the same time or separately of its two ends by adjustable thing, and adjustable height can directly be read from the number of carving on the number thing at quarter.Like this, various special convex substrates are through a certain zone of the rete deposit spatial of device the time, and the evaporation coating materials can only be deposited on the edge of substrate, and can not be deposited to the central section of substrate.
Therefore, have the coating equipment of above-mentioned special construction, only need minority space shielding plate just can be coated with high evenly rete on various special convex substrates, the thicknesses of layers at edge can meet or exceed the thicknesses of layers at center.The geometric thickness error or the optical thickness error of the protruding substrate rete of various spies all can reach ± below 3%, and also the shape of space shielding plate and big or small available simple method just can determine substantially, as graphing method etc.
In order to use different evaporation sources, this device can both be coated with high evenly rete on substrate, the friction track of above-mentioned special shape can rotate its plane of symmetry around the geometric centre axes of driven wheel by adjustable thing, and rotational angle can directly be read from the number of carving on the number thing at quarter.In like manner, space shielding plate microscope carrier also can make its plane of symmetry rotate around the geometric centre axes of driven wheel by adjustable thing, and rotational angle also can directly be read from the number of carving on the number thing at quarter.
The utility model is one of biggest advantage compared with prior art, high evenly rete can be coated with exactly on the various convex substrates and on the big planar substrates, can be on the spill substrate, especially on special spill substrate, be coated with even rete, next is repeatability high (product percent of pass can reach more than 95%), simple to operate, easy to use.Another outstanding advantage is that production efficiency is 1 to 4 times of above-mentioned coating equipment.Like this, the utility model can significantly improve the quality of the attached and complete machine of optics (or electronics) unit, can reduce its cost again.It self production cost does not almost increase.
Concrete structure of the present utility model is provided by following most preferred embodiment and accompanying drawing thereof.
Accompanying drawing 1: a kind of front view of high even rete coating equipment, an even rete film coating apparatus of adjustable demountable height is housed in its coating chamber, an even rete film coating apparatus of adjustable demountable height that is fit to big planar substrates perhaps is housed, an even rete film coating apparatus of adjustable demountable height perhaps is housed, is equipped with one again simultaneously and adjustablely rolls over detachable space shielding plate bearing table device.
Accompanying drawing 2: coating chamber chassis layout drawing.
Accompanying drawing 3: in the coating chamber of high evenly rete coating equipment, the equipped evenly front view of rete film coating apparatus of height of going up has been represented using method and the structure thereof of high even rete film coating apparatus in this machine.Clear in order to represent, known evaporation electrode in this machine coating chamber, the bombardment electrode, baffle plate rotates, and relatively sheet mechanism and baking electric furnace etc. all do not draw.
Accompanying drawing 4: the sectional view of workholder, represented the structure of workholder.
Accompanying drawing 5: in the coating chamber of high evenly rete coating equipment, equipped last one is fit to the high evenly front view of rete film coating apparatus that big planar substrates is filmed, has represented a kind of using method of high even rete film coating apparatus in this machine.Clear in order to represent, known evaporation electrode in this machine coating chamber, the bombardment electrode, baffle plate rotates, and relatively sheet mechanism and baking electric furnace etc. do not draw.
Accompanying drawing 6: in the coating chamber of high evenly rete coating equipment, the equipped front view of high evenly rete film coating apparatus and space shielding plate bearing table device has been represented the be used method of two kinds of devices in this machine.Clear in order to represent, known evaporation electrode in this machine coating chamber, the bombardment electrode, baffle plate rotates, and relatively sheet mechanism and baking electric furnace etc. do not draw.
Accompanying drawing 7, accompanying drawing 8: be the right view and the vertical view of space shielding plate bearing table device, represented the structure of space shielding plate bearing table device and the shape of space shielding plate.
Accompanying drawing 9: schematic diagram, represented principle of work of the present utility model.
Below in conjunction with above-mentioned accompanying drawing the utility model is described in further detail.
A kind of high even rete coating equipment.As shown in Figure 1, it has a body 1 and coating chamber 26, and operation element platform 2 is equipped with on the surface of body 1, powerstat handwheel 3, baffle plate rotates handwheel 4, and crucible rotates handwheel 5, low vacuum valve 6, high vacuum valve 7, coating chamber chassis 8, bell jar 9, the outside surface of bell jar 9 is equipped with electron beam gun 10, baking power supply 11, compare sheet mechanism 12, transmitted light source 13, aciculiform air valve 14, as shown in Figure 2, following known parts are housed in the coating chamber 26: crucible 15, evaporation electrode 19, bombardment electrode 20, thermometric electrode 21, baffle plate rotates 24, on the coating chamber chassis 8, also be furnished with venting hole 18, light hole 22, reflection source light well 23, standby hole 25.As shown in Figure 3, in the coating chamber 26, a high even rete film coating apparatus 27 also is housed, the friction track 28 of high evenly rete film coating apparatus 27 is axisymmetric in the face of claiming that curved surface constitutes by a pair of not tool, friction track 28 is an integral body with its pallet 31, driven wheel 32 and main drive wheel 33 are contained on the dead ring 34 by known mode, preferably require driven wheel 32 parallel and concentric with dead ring 34.As shown in Figure 4, workholder 35 is by workpiece load plate 36, workpiece load plate base 37, and workpiece pressure ring 38, trip bolt 39, friction wheel 40, rotating swing axle 42, the rotatable parts 43 of swing axle 42 rotate little axle 44, bearing 45 compositions such as grade.Workholder 35 is by bearing 45 and be screwed on driven wheel 32.The transmission rig of pillar 16 and main drive wheel 33 is contained on the coating chamber chassis 8 by known method, and dead ring 34 and pallet 31 also are fixed on the pillar 16 by known method, preferably require coating chamber chassis 8, and dead ring 34 is parallel and concentric with pallet 31 threes.When device 27 runs well, friction wheel 40 rolls on friction track 28, as shown in Figure 9, workholder 35 can not only be around geometric centre axes 46 revolution of driven wheel 32, separately with of the geometric centre axes rotation of bigger rotating speed around itself, and can also make well-regulated reversible around its oscillation centre separately and periodically swing, and apart from the nearest swing extreme value angle ψ m of evaporation source (15 or 19) greater than distance evaporation source (15 or 19) oscillating quantity angle ψ ' n farthest.No matter main drive wheel 33 is just to change or reverse, and the motion conditions of workholder 35 is all the same.Like this, this machine can not only coat high evenly rete on various sphere convex substrates, and can coat high evenly rete on the especially special spill of spill substrate (as sphere spill, ellipsoid spill etc.) substrate, becomes the dual-purpose coating equipment of a kind of convex concave substrate.
As shown in Figure 5, in the coating chamber 26 as the even rete coating equipment of height, the former high evenly rete film coating apparatus of loading onto 27 is disassembled, other loads onto one and is fit to the adjustable dismountable high even rete film coating apparatus 27a that big planar substrates is filmed, its friction track 28a is axisymmetric in the face of claiming that curved surface constitutes to variform not tool by another, and friction track 28a and its pallet 31a are an integral body.Like this, this machine just can coat evenly but layer of height on big planar substrates, just become the special-purpose coating equipment of a kind of planar substrates.
In order to use different evaporation source (15 or 19), high evenly rete film coating apparatus (27 or 27a) can both be coated with high evenly rete on substrate, the plane of symmetry of friction track (28 or 28a) need rotate around the geometric centre axes 46 of driven wheel 32, three same arc-shaped holes that pass through for pillars 16 are arranged on the pallet of friction track (28 or 28a) (31 or 31a), and wherein a hole side is carved with the angle number.Like this, the rotation of friction track (28 or 28a) can realize by the rotation of its pallet (31 or 31a), and rotational angle can be directly read from the number at quarter that is engraved on the pallet (31 or 31a).
As shown in Figure 6, load onto a high even rete film coating apparatus 27 and a space shielding plate bearing table device 48 simultaneously in the coating chamber of high evenly rete coating equipment.As Fig. 6, Fig. 7 and shown in Figure 8, the adjustable microscope carrier 49 of rolling over detachable space shielding plate bearing table device 48, can pass through dovetail-indent 50, coattail board 51 rotates little axle 52, nut blank pipe 56, screw rod 58 and trip bolt 53 make the lifting at the same time or separately of its two ends, and adjustable height can directly be read from the number at quarter that is engraved on ring of numbers 57 and the screw rod 58.Space shielding plate bearing table device 48 is by microscope carrier pillar 59 and microscope carrier pillar chute 60 and be screwed on coating chamber chassis 8, and microscope carrier 49 can directly remove from nut pipe 56.Space shielding plate 61 is screwed on microscope carrier 49, and referring to schematic diagram 9, the substrate top shadow is represented to be blocked by the space shielding plate among the figure to the effect of blocking of deposit space and coating base for it.Like this, the even rete of this machine just can coat requirements at the higher level on various convex substrates or particular requirement (as the marginal membrane bed thickness and the center rete is thin), this machine just becomes the special-purpose coating equipment of a kind of convex substrate.
In order to use different evaporation source (15 or 19), device 48 can both play the identical effect of blocking to substrate, and the plane of symmetry of microscope carrier 49 need rotate around the geometric centre axes 46 of driven wheel 32.The rotation of microscope carrier 49 can realize the shift position on microscope carrier pillar chute 60 by screw rod 58, and the angle of rotation can be directly read from being engraved in the angle number that microscope carrier pillar chute 60 carves.
Claims (7)
1, being used for substrate films, particularly on substrate, be coated with the high evenly film coating apparatus of rete, its evaporation source (15 or 19) is parallel and place driven wheel (32) below, in driven wheel (32) top (or below) friction track (28 or 28a) is housed, a friction wheel (40) is housed on the workholder (35), friction wheel (40) is gone up at friction track (28 or 28a) and is rolled, and it is characterized in that:
(1) friction track (28 or 28a) is axisymmetric in the face of claiming that curved surface constitutes by a pair of not tool at least, workholder (35) apart from the nearest swing extreme value angle of evaporation source (15 or 19) greater than distance evaporation source (15 or 19) swing extreme value angle farthest.
(2) or in evaporation source (15 or 19) right on, friction track (28) is equipped with one simultaneously and adjustablely rolls over detachable space shielding plate bearing table device (48) on the coating chamber chassis (8) of driven wheel (32) and workholder (35) below.
2, according to the described device of claim 1, it is characterized in that: three same arc-shaped holes that pass through for pillars (16) are arranged on the pallet of friction track (28 or 28a) (31 or 31a).
3, according to claim 1,2 described devices, it is characterized in that: last three of pallet (31 or 31a) is carved with the angle number with the hole side in the arc-shaped hole.
4, according to the described device of claim 1, it is characterized in that: the microscope carrier (49) of space shielding plate bearing table device (48) can pass through adjustable thing (50,51,52,53,56,58) makes the lifting at the same time or separately of its two ends.
5, according to claim 1,4 described devices, it is characterized in that: the height of microscope carrier (49) the two ends lifting at the same time or separately of space shielding plate bearing table device (48), can directly read from the number of carving on the number thing (57,58) at quarter.
6, according to the described device of claim 1, it is characterized in that: the microscope carrier (49) of space shielding plate bearing table device (48) can make its plane of symmetry rotate around the geometric centre axes (46) of driven wheel (32) by adjustable thing (58,60).
7, according to claim 1,6 described devices, it is characterized in that: the angle that microscope carrier (49) plane of symmetry of space shielding plate bearing table device (48) rotates around the geometric centre axes (46) of driven wheel (32), can directly read from the number of carving on the number thing (60) at quarter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 86205339 CN86205339U (en) | 1986-07-08 | 1986-07-08 | Coating apparatus for highly homogeneous coat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 86205339 CN86205339U (en) | 1986-07-08 | 1986-07-08 | Coating apparatus for highly homogeneous coat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN86205339U true CN86205339U (en) | 1987-12-09 |
Family
ID=4808201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 86205339 Ceased CN86205339U (en) | 1986-07-08 | 1986-07-08 | Coating apparatus for highly homogeneous coat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN86205339U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107640909A (en) * | 2017-08-25 | 2018-01-30 | 北方夜视技术股份有限公司 | For preparing Steaming structure, the method for uniform film inside thin mouth, large scale glass bulb |
| CN108374149A (en) * | 2018-03-12 | 2018-08-07 | 内蒙古中天宏远再制造股份公司 | A kind of metal surface is rich in the process units of rare earth element super abrasive alloy-layer |
| CN108531868A (en) * | 2018-05-29 | 2018-09-14 | 马鞍山灵山机械设备科技有限公司 | A kind of device generating titanium carbonitride film on shield cutter |
| CN109652780A (en) * | 2018-12-12 | 2019-04-19 | 上海航天控制技术研究所 | A kind of control method improving special-shaped part plating film uniformity |
-
1986
- 1986-07-08 CN CN 86205339 patent/CN86205339U/en not_active Ceased
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107640909A (en) * | 2017-08-25 | 2018-01-30 | 北方夜视技术股份有限公司 | For preparing Steaming structure, the method for uniform film inside thin mouth, large scale glass bulb |
| CN108374149A (en) * | 2018-03-12 | 2018-08-07 | 内蒙古中天宏远再制造股份公司 | A kind of metal surface is rich in the process units of rare earth element super abrasive alloy-layer |
| CN108531868A (en) * | 2018-05-29 | 2018-09-14 | 马鞍山灵山机械设备科技有限公司 | A kind of device generating titanium carbonitride film on shield cutter |
| CN109652780A (en) * | 2018-12-12 | 2019-04-19 | 上海航天控制技术研究所 | A kind of control method improving special-shaped part plating film uniformity |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CE01 | Termination of patent right | ||
| CE01 | Termination of patent right |
Termination date: 19880615 |