CN216074025U - Multi-angle rotating platform for film sputtering deposition - Google Patents
Multi-angle rotating platform for film sputtering deposition Download PDFInfo
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- CN216074025U CN216074025U CN202122520831.XU CN202122520831U CN216074025U CN 216074025 U CN216074025 U CN 216074025U CN 202122520831 U CN202122520831 U CN 202122520831U CN 216074025 U CN216074025 U CN 216074025U
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Abstract
The utility model discloses a multi-angle rotating platform for film sputtering deposition, which comprises a first shell; a first rotating assembly is arranged in the first shell; a first central gear is fixedly arranged at the top of the first shell; the first central gear is arranged in the magnetron sputtering device through a first central shaft and rotates around the first central shaft; a second rotating assembly is arranged in the second shell; the top of the second shell is fixedly connected with the first shell; the first rotating assembly is rotationally connected with the second rotating assembly; the rotating arm component is rotationally connected with the second rotating component; two ends of the rotating arm component are also fixedly connected with two ends of the second shell through fixing parts; the bottom end of the rotating arm component is coaxially connected with the sample table. According to the utility model, the first rotating assembly, the second rotating assembly and the rotating arm assembly are mutually matched to realize the adjustment and rotation of each angle of the sample table, so that uniform sputtering coating of sample materials at different grazing angles can be realized, and a required anisotropic film structure can be obtained.
Description
Technical Field
The utility model relates to the technical field of magnetron sputtering, in particular to a multi-angle rotating platform for film sputtering deposition.
Background
In the process of glancing angle sputtering deposition, the substrate on the sample table is not vertical incident particle flow any more, and inclines at a specific angle with the cathode target, the sputtered particles gradually deposit and grow on the substrate to form a layer of film, the formed film structure on the substrate can generate self-shadow effect on the particles falling onto the substrate, the growth condition of the incident particle flow can be adjusted by adjusting and controlling the glancing angle in the application process, the dimension and the shape of the film structure are effectively controlled, micro-nano metamaterial with special structural properties can be generated, such as nonlinear structures of nano wires, nano columns and the like, to form a micro-cavity structure, similar to an optical trap, the solar energy optical system has special reflection, transmission and absorption characteristics on solar spectrums (ultraviolet, visible light and infrared), and forms specific optical properties such as perfect absorption, antireflection, total reflection and the like.
The grazing angle sputtering deposition process has obvious influence on the structural property of the film, the sample table substrate and incident particle flow are inclined at a certain angle during sputtering, sputtered particles are influenced by a self-shadow effect, the surface diffusion of the particles is inhibited, an anisotropic film structure with special structural characteristics like nanowires, nano columns and the like can be generated on the surface of the substrate, the size and the shape of the film structure can be effectively controlled by different grazing angles, the nonlinear microcavity structure has an optical trap effect, incident light waves can generate special optical properties, and specific functions such as perfect absorption, antireflection, total reflection and the like can be generated.
For this purpose, it is needed to design a rotating platform capable of multi-angle adjustment and controlling the sample stage at any time in the magnetron sputtering apparatus.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a multi-angle rotating platform for film sputtering deposition, which is used for solving the problems in the prior art, and can realize uniform sputtering coating of sample materials at different glancing angles to obtain a required anisotropic film structure.
In order to achieve the purpose, the utility model provides the following scheme: the utility model provides a multi-angle rotating platform for film sputtering deposition, which is used for a magnetron sputtering device and comprises: a first housing; a first rotating assembly is arranged in the first shell; a first central gear is fixedly mounted at the top of the first shell; the first central gear is arranged in the magnetron sputtering device through a first central shaft and rotates around the first central shaft;
a second housing; a second rotating assembly is arranged in the second shell; the top of the second shell is fixedly connected with the first shell; the first rotating assembly is rotationally connected with the second rotating assembly;
a rotating arm assembly; the rotating arm assembly is rotationally connected with the second rotating assembly; two ends of the rotating arm assembly are fixedly connected with two ends of the second shell through fixing pieces; the bottom end of the rotating arm component is coaxially connected with the sample table.
The first shell is of a hollow cylindrical structure; the first rotating assembly includes a second sun gear; the second central gear center and the first central gear rotate synchronously through the first central shaft; the second sun gear is disposed in the first housing top region;
a planetary gear is meshed with one side of the second sun gear; the center of the planetary gear is arranged at one end of the second central shaft; the second central shaft is vertically arranged; a first conical gear is mounted at the bottom end of the second central shaft; the first conical gear is meshed with the second conical gear; the second conical gear is arranged right below the first conical gear and is arranged on one side of a third central shaft;
the third central shaft is horizontally arranged, and two ends of the third central shaft are arranged on the side wall of the first shell through bearings; the third central shaft penetrates through a vertical central axis of the first shell; a first rotating wheel is fixedly arranged in the middle of the third central shaft; the first rotating wheel is perpendicular to the second central gear; the first rotating wheel is rotatably connected with the second rotating assembly.
The second shell is formed by combining an upper connecting shell, a lower connecting shell and a connecting disc; the connecting disc is fixed at the top of the upper connecting shell; the connecting disc is matched with the first shell in size and shape; the connecting disc is fixedly arranged on the bottom surface of the first shell;
the bottom of the upper connecting shell and the connecting end surface of the lower connecting shell are provided with shaft mounting grooves; the second rotating assembly is installed in the shaft installation groove; the two opposite ends of the connecting end surface of the upper connecting shell and the lower connecting shell are also provided with mounting blocks in an extending way; the mounting blocks are of a semi-cylinder structure, and the two mounting blocks on the same side are combined and formed into a cylinder structure; and two ends of the rotating arm assembly are respectively rotatably arranged on the two sides of the mounting block.
A square through groove is formed in the centers of the upper connecting shell, the lower connecting shell and the connecting disc; the second rotating assembly includes a fourth central shaft; a second rotating wheel is arranged in the middle of the fourth central shaft; the second rotating wheel is arranged in the square through groove;
the second rotating wheel is meshed with the first rotating wheel of the first rotating assembly; the second rotating wheel is also in rotating connection with the rotating arm assembly; the fourth central shaft is rotatably installed in the shaft installation groove.
One side of the bottom of the lower connecting shell is also provided with an adjusting hole; at least two adjusting holes are arranged, and the adjusting holes are circumferentially arranged around the mounting block; the fixing piece is inserted in the adjusting hole.
The rotating arm assembly comprises a first rotating arm, a second rotating arm, a fourth central gear, a bottom shell and a third rotating assembly; the first rotating arm and the second rotating arm are respectively arranged on two sides of the top surface of the bottom shell; the third rotating assembly is mounted in the middle of the top surface of the bottom shell and is rotatably mounted at the bottoms of the first rotating arm and the second rotating arm through a fifth central shaft;
the third rotating assembly penetrates through the bottom shell through a sixth central shaft and coaxially rotates with the fourth central gear; the sample table is arranged on the bottom surface of the fourth central gear;
annular grooves are formed in the tops of the first rotating arm and the second rotating arm; and the first rotating arm and the second rotating arm are respectively rotatably installed on the two sides of the installation block through the annular grooves.
The third rotating assembly comprises a third rotating wheel; the third rotating wheel is meshed with the second rotating wheel; the third rotating wheel is arranged in the middle of the fifth central shaft; a worm is coaxially arranged on the fifth central shaft; the worm is arranged below the second rotating arm;
one side of the worm is engaged with a first worm gear; the worm gear is arranged at the top end of the seventh central shaft; the seventh central shaft is vertically arranged, and a second worm gear is mounted at the bottom end of the seventh central shaft; the second worm gear is meshed with the third central gear; and the third central gear is positioned below the third rotating wheel and is arranged at one end of the sixth central shaft.
A shell baffle is arranged between the worm and the third rotating wheel; the shell baffle is provided with a through hole for accommodating the seventh central shaft; the shell baffle side wall is connected with the second rotating arm.
An extension part is further arranged on one side of the top of the first rotating arm; the extension part corresponds to the position of the adjusting hole; the extension part is provided with a plurality of positioning holes; the fixing piece penetrates through the positioning hole and is installed in the adjusting hole.
The utility model discloses the following technical effects: according to the utility model, the first rotating assembly, the second rotating assembly and the rotating arm assembly are mutually matched to realize the adjustment and rotation of each angle of the sample table, so that uniform sputtering coating of sample materials at different grazing angles can be realized, and a required anisotropic film structure can be obtained.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.
FIG. 1 is a side view of the overall structure of the present invention;
FIG. 2 is a perspective view of the overall structure of the present invention;
FIG. 3 is a schematic view of the internal structure of the present invention;
FIG. 4 is a schematic diagram of the internal gear train structure of the present invention in a forward direction;
FIG. 5 is a reverse view of the internal gear train structure of the present invention;
FIG. 6 is a schematic view of a rotary arm structure according to the present invention;
fig. 7 is a schematic view of a second housing structure of the present invention.
Wherein, 1, a first shell; 2. a first sun gear; 3. a first central shaft; 4. a fixing member; 6. a shell baffle; 11. a second sun gear; 12. a planetary gear; 13. a first conical gear; 14. a second conical gear; 15. a first rotating wheel; 21. an upper connection shell; 22. a lower connecting shell; 23. a connecting disc; 24. a shaft mounting groove; 25. mounting blocks; 26. a second rotating wheel; 27. an adjustment hole; 3. a first central shaft; 31. a second central shaft; 32. a third central axis; 33. a fourth central axis; 34. a fifth central axis; 35. a sixth central axis; 36. a seventh central axis; 51. a first rotating arm; 52. a second rotating arm; 53. a fourth sun gear; 54. a bottom case; 55. an annular groove; 56. a third rotating wheel; 57. a worm; 58. a first worm gear; 59. a second worm gear; 510. a third sun gear; 7. a transmission gear.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
The utility model provides a multi-angle rotating platform for film sputtering deposition, which is used for a magnetron sputtering device and is characterized by comprising the following components: a first housing 1; a first rotating assembly is arranged in the first shell 1; a first central gear 2 is fixedly arranged at the top of the first shell 1; the first central gear 2 is arranged in the magnetron sputtering device through a first central shaft 3, and the first central gear 2 rotates around the first central shaft 3;
a second housing; a second rotating assembly is arranged in the second shell; the top of the second shell is fixedly connected with the first shell 1; the first rotating assembly is rotationally connected with the second rotating assembly;
a rotating arm assembly; the rotating arm component is rotationally connected with the second rotating component; and both ends of the rotating arm component are also fixedly connected with both ends of the second shell through fixing pieces 4; the bottom end of the rotating arm component is coaxially connected with the sample table.
The first shell 1 is a hollow cylindrical structure; the first rotating assembly comprises a second sun gear 11; the center of the second sun gear 11 rotates synchronously with the first sun gear 2 through the first central shaft 3; the second sun gear 11 is arranged in the top area of the first housing 1;
a planetary gear 12 is meshed with one side of the second sun gear 11; the center of the planet gear 12 is arranged at one end of the second central shaft 31; the second central shaft 31 is vertically arranged; the bottom end of the second central shaft 31 is provided with a first conical gear 13; the first conical gear 13 is meshed with the second conical gear 14; the second conical gear 14 is arranged right below the first conical gear 13, and the second conical gear 14 is arranged on one side of the third central shaft 32;
the third central shaft 32 is horizontally arranged, and two ends of the third central shaft are arranged on the side wall of the first shell 1 through bearings; the third central shaft 32 penetrates through the vertical central axis of the first housing 1; the middle part of the third central shaft 32 is also fixedly provided with a first rotating wheel 15; the first rotating wheel 15 is perpendicular to the second central gear 11; the first swivel wheel 15 is rotatably connected to the second swivel assembly.
In one embodiment of the present invention, the first sun gear 2 and the third sun gear 510 are positioned up and down and the first rotator 15, the second rotator 26 and the third rotator 56 at the center thereof are positioned on the same vertical plane; the first rotor 15 and the second rotor 26 have the same radius; the third rotator wheel 56 has a smaller radius than the first rotator wheel 15.
Further, the worm 57 is located in a region below the planetary gear 12.
The second shell is formed by combining an upper connecting shell 21, a lower connecting shell 22 and a connecting disc 23; the top of the upper connecting shell 21 is fixed with a connecting disc 23; the connecting disc 23 is matched with the first shell 1 in size and shape; the connecting disc 23 is fixedly arranged on the bottom surface of the first shell 1;
the connecting end surface of the bottom of the upper connecting shell 21 and the lower connecting shell 22 is provided with a shaft mounting groove 24; a second rotating component is arranged in the shaft mounting groove 24; the two opposite ends of the connecting end surface of the upper connecting shell 21 and the lower connecting shell 22 are also provided with mounting blocks 25 in an extending way; the mounting blocks 25 are of a semi-cylinder structure, and the two mounting blocks 25 on the same side are combined and formed into a cylinder structure; the two ends of the rotating arm component are respectively and rotatably arranged on the mounting blocks 25 at the two sides.
The centers of the upper connecting shell 21, the lower connecting shell 22 and the connecting disc 23 are provided with square through grooves; the second rotation assembly comprises a fourth central shaft 33; the middle part of the fourth central shaft 33 is provided with a second rotating wheel 26; the second rotating wheel 26 is arranged in the square through groove;
the second rotator wheel 26 is engaged with the first rotator wheel 15 of the first rotating assembly; the second rotary wheel 26 is also rotatably connected to the rotary arm assembly; the fourth central shaft 33 is rotatably installed in the shaft installation groove 24.
One side of the bottom of the lower connecting shell 22 is also provided with an adjusting hole 27; at least two adjusting holes 27 are arranged, and the adjusting holes 27 are arranged around the circumference of the mounting block 25; the fixing member 4 is inserted into the adjustment hole 27.
The rotating arm assembly includes a first rotating arm 51, a second rotating arm 52, a fourth sun gear 53, a bottom case 54 and a third rotating assembly; the first rotating arm 51 and the second rotating arm 52 are respectively installed at both sides of the top surface of the bottom case 4; the third rotating assembly is mounted in the middle of the top surface of the bottom shell 54, and the third rotating assembly is rotatably mounted at the bottoms of the first rotating arm 51 and the second rotating arm 52 through the fifth central shaft 34;
the third rotating assembly also penetrates through the bottom shell 4 through the sixth central shaft 35 to coaxially rotate with the fourth central gear 53; the bottom surface of the fourth central gear 53 is provided with a sample table;
in one embodiment of the present invention, the top of the lower connecting shell 22 is a flat plate structure; the center of the flat plate is provided with a shaft mounting groove 24 and a square through groove which is vertical to the shaft mounting groove 24; mounting blocks 25 are formed at both sides; the bottom of the lower connecting shell 22 is also fixedly connected with two semicircular blocks; the square through grooves are symmetrically arranged; the top ends of the first rotating arm 51 and the second rotating arm 52 are both adapted to the shape of the semicircular block, so that the relative rotation between the lower connecting shell 22 and the whole rotating arm assembly is facilitated;
in one embodiment of the present invention, the second rotating arm 52 is also filled with the second rotating arm 52 as a partition support around the worm 57 and the sixth central shaft 35; the same applies to the housing baffle 6.
The third rotation assembly comprises a third rotation wheel 56; the third rotator wheel 56 is engaged with the second rotator wheel 26; a third rotating wheel 56 is mounted in the middle of the fifth central shaft 34; a worm 57 is coaxially arranged on the fifth central shaft 34; the worm 57 is disposed below the second rotating arm 52;
a first worm gear 58 is meshed with one side of the worm 57; the worm gear 58 is arranged at the top end of the seventh central shaft 36; the seventh central shaft 36 is vertically arranged, and the bottom end of the seventh central shaft 36 is provided with a second worm gear 59; the second worm gear 59 meshes with the third sun gear 510; the third sun gear 510 is located below the third rotating wheel 56 and is mounted to one end of the sixth central shaft 35.
A shell baffle 6 is arranged between the worm 57 and the third rotating wheel 56; a through hole for accommodating the seventh central shaft 36 is formed in the shell baffle 6; the side wall of the housing baffle 6 is connected with the second rotating arm 52.
An extension part is arranged on one side of the top of the first rotating arm 51; the extended part corresponds to the position of the adjusting hole 27; the extension part is provided with a plurality of positioning holes; the fixing member 4 penetrates the positioning hole and is installed in the adjusting hole 27.
In one embodiment of the utility model, the fixing member 4 is a fixing pin; the fixing pin is inserted into the positioning hole and the adjusting hole 27 to fix the first rotating arm 51 from rotating, so that the whole rotating arm assembly and the second housing are relatively fixed.
In another embodiment of the present invention, the angle can be fixed without inserting the fixing pin into the positioning hole and the adjusting hole 27; more accurate angle control can be achieved by replacing the equal positions with ratchet wheel set fixing.
In one embodiment of the present invention, the worm 57 drives the first worm gear 58 engaged therewith to effectively reduce the conducted rotation speed and increase the torque, the first worm gear 58 and the second worm gear 59 engaged with the worm 57 are vertically disposed, the worm 57 drives the gears to change the moving direction to the vertical direction, and the second worm gear 59 synchronized therewith drives the lower third central gear 510 to again reduce the rotation speed and increase the torque, thereby directly controlling the sample stage.
Furthermore, the mounting mode of the sample table can be selected from the modes of correct mounting or bolt fixing and the like.
The transmission mode of the utility model is as follows; before transmission begins, a sample is fixed on a sample table, and the angle between the second shell and the rotating arm component is adjusted through the fixing piece 4;
the first central shaft 3 drives the first central gear 2 to rotate, and the first central gear 2 drives the first shell 1 to synchronously rotate; the second sun gear 11 inside the first housing 1 rotates synchronously with the first sun gear 2; the second central gear 11 is meshed with the planet gear 12, and the second central shaft 31 drives the two conical gears to be meshed, so that the transmission direction is changed; the first rotating wheel 15 on the third central shaft 32 drives the second rotating wheel 26 to rotate;
the second rotating wheel 26 rotates the third rotating wheel 56; the second shell rotates along with the first shell, and the rotating arm component rotates along with the second shell as the second shell and the rotating arm component are fixed; the sixth central shaft 35 on the third rotating wheel 56 drives the coaxially arranged worm 57 to rotate, and the third central gear 510 is driven to rotate around the seventh central shaft 36 through the transmission of the first worm gear 58 and the second worm gear 59; thereby driving the sample table to rotate.
Preferably, the magnetron sputtering device comprises a shell, a rotating platform and a sputtering target material; the rotary platform is arranged at the top of the inner cavity of the shell, and the sputtering target is arranged at the bottom of the inner cavity of the shell.
In one embodiment of the utility model, a transmission gear 7 is further arranged on the magnetron sputtering device; the transmission gear 7 is meshed with the first sun gear 2; and the transmission gear 7 is arranged at the top of the inner cavity of the shell.
In the utility model, the connection between any shaft and the gear matched with the shaft is realized in a key connection or fixed connection mode.
In the description of the present invention, it is to be understood that the terms "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, are merely for convenience of description of the present invention, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.
The above-described embodiments are merely illustrative of the preferred embodiments of the present invention, and do not limit the scope of the present invention, and various modifications and improvements of the technical solutions of the present invention can be made by those skilled in the art without departing from the spirit of the present invention, and the technical solutions of the present invention are within the scope of the present invention defined by the claims.
Claims (9)
1. A multi-angle rotary platform for film sputtering deposition, which is used for a magnetron sputtering device, is characterized by comprising: a first housing (1); a first rotating assembly is arranged in the first shell (1); a first central gear (2) is fixedly arranged at the top of the first shell (1); the first central gear (2) is installed in the magnetron sputtering device through a first central shaft (3), and the first central gear (2) rotates around the first central shaft (3);
a second housing; a second rotating assembly is arranged in the second shell; the top of the second shell is fixedly connected with the first shell (1); the first rotating assembly is rotationally connected with the second rotating assembly;
a rotating arm assembly; the rotating arm assembly is rotationally connected with the second rotating assembly; two ends of the rotating arm component are also fixedly connected with two ends of the second shell through fixing pieces (4); the bottom end of the rotating arm component is coaxially connected with the sample table.
2. The multi-angle rotary platform for sputter deposition of thin films according to claim 1, wherein: the first shell (1) is of a hollow cylindrical structure; the first rotary assembly comprises a second sun gear (11); the center of the second central gear (11) synchronously rotates with the first central gear (2) through the first central shaft (3); the second sun gear (11) is arranged in the top area of the first shell (1);
a planetary gear (12) is meshed with one side of the second sun gear (11); the center of the planetary gear (12) is arranged at one end of a second central shaft (31); the second central shaft (31) is vertically arranged; a first conical gear (13) is mounted at the bottom end of the second central shaft (31); the first conical gear (13) is meshed with a second conical gear (14); the second conical gear (14) is arranged right below the first conical gear (13), and the second conical gear (14) is arranged on one side of a third central shaft (32);
the third central shaft (32) is horizontally arranged, and two ends of the third central shaft are arranged on the side wall of the first shell (1) through bearings; the third central shaft (32) penetrates through a vertical central axis of the first shell (1); a first rotating wheel (15) is fixedly arranged in the middle of the third central shaft (32); the first rotating wheel (15) and the second central gear (11) are perpendicular to each other; the first rotating wheel (15) is rotatably connected with the second rotating assembly.
3. The multi-angle rotary platform for sputter deposition of thin films according to claim 1, wherein: the second shell is formed by combining an upper connecting shell (21), a lower connecting shell (22) and a connecting disc (23); the top of the upper connecting shell (21) is fixed with the connecting disc (23); the connecting disc (23) is matched with the first shell (1) in size and shape; the connecting disc (23) is fixedly arranged on the bottom surface of the first shell (1);
a shaft mounting groove (24) is formed in the connecting end face of the bottom of the upper connecting shell (21) and the lower connecting shell (22); the second rotating assembly is installed in the shaft installation groove (24); the two opposite ends of the connecting end surface of the upper connecting shell (21) and the lower connecting shell (22) are also provided with mounting blocks (25) in an extending way; the mounting blocks (25) are of a semi-cylinder structure, and the two mounting blocks (25) on the same side are combined and formed into a cylinder structure; and two ends of the rotating arm component are respectively and rotatably arranged on the mounting blocks (25) at two sides.
4. The multi-angle rotary platform for thin film sputter deposition of claim 3, wherein: the centers of the upper connecting shell (21), the lower connecting shell (22) and the connecting disc (23) are provided with square through grooves; the second rotating assembly comprises a fourth central shaft (33); a second rotating wheel (26) is arranged in the middle of the fourth central shaft (33); the second rotating wheel (26) is arranged in the square through groove;
the second rotary wheel (26) is engaged with the first rotary wheel (15) of the first rotary assembly; the second rotating wheel (26) is also in rotating connection with the rotating arm assembly; the fourth central shaft (33) is rotatably mounted in the shaft mounting groove (24).
5. The multi-angle rotary platform for thin film sputter deposition of claim 4, wherein: one side of the bottom of the lower connecting shell (22) is also provided with an adjusting hole (27); at least two adjusting holes (27) are arranged, and the adjusting holes (27) are circumferentially arranged around the mounting block (25); the fixing piece (4) is inserted into the adjusting hole (27).
6. The multi-angle rotary platform for sputter deposition of thin films according to claim 5, wherein: the rotating arm assembly comprises a first rotating arm (51), a second rotating arm (52), a fourth central gear (53), a bottom shell (54) and a third rotating assembly; the first rotating arm (51) and the second rotating arm (52) are respectively arranged at two sides of the top surface of the bottom shell (54); the third rotating assembly is mounted in the middle of the top surface of the bottom shell (54) and rotatably mounted at the bottoms of the first rotating arm (51) and the second rotating arm (52) through a fifth central shaft (34);
the third rotating assembly also penetrates through the bottom shell (54) through a sixth central shaft (35) and coaxially rotates with the fourth central gear (53); the sample table is arranged on the bottom surface of the fourth central gear (53);
annular grooves (55) are formed in the tops of the first rotating arm (51) and the second rotating arm (52); and the first rotating arm (51) and the second rotating arm (52) are respectively and rotatably arranged on the mounting blocks (25) at two sides through the annular grooves (55).
7. The multi-angle rotary platform for sputter deposition of thin films according to claim 6, wherein: the third rotation assembly comprises a third rotation wheel (56); said third rotatable wheel (56) being engaged with said second rotatable wheel (26); the third rotating wheel (56) is arranged in the middle of the fifth central shaft (34); a worm (57) is coaxially arranged on the fifth central shaft (34); the worm (57) is arranged below the second rotating arm (52);
a first worm gear (58) is meshed with one side of the worm (57); the first worm gear (58) is arranged at the top end of the seventh central shaft (36); the seventh central shaft (36) is vertically arranged, and a second worm gear (59) is mounted at the bottom end of the seventh central shaft (36); the second worm gear (59) is meshed with a third central gear (510); the third sun gear (510) is located below the third rotating wheel (56) and is mounted to one end of the sixth center shaft (35).
8. The multi-angle rotary platform for sputter deposition of thin films according to claim 7, wherein: a shell baffle (6) is arranged between the worm (57) and the third rotating wheel (56); the shell baffle (6) is provided with a through hole for accommodating the seventh central shaft (36); the side wall of the shell baffle (6) is connected with the second rotating arm (52).
9. The multi-angle rotary platform for sputter deposition of thin films according to claim 7, wherein: an extension part is further arranged on one side of the top of the first rotating arm (51); the extension part corresponds to the position of the adjusting hole (27); the extension part is provided with a plurality of positioning holes; the fixing piece (4) penetrates through the positioning hole and is installed in the adjusting hole (27).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122520831.XU CN216074025U (en) | 2021-10-20 | 2021-10-20 | Multi-angle rotating platform for film sputtering deposition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122520831.XU CN216074025U (en) | 2021-10-20 | 2021-10-20 | Multi-angle rotating platform for film sputtering deposition |
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| Publication Number | Publication Date |
|---|---|
| CN216074025U true CN216074025U (en) | 2022-03-18 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202122520831.XU Active CN216074025U (en) | 2021-10-20 | 2021-10-20 | Multi-angle rotating platform for film sputtering deposition |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114959611A (en) * | 2022-05-30 | 2022-08-30 | 陕西工业职业技术学院 | Bent arm type series-parallel driving type film glancing angle sputtering platform |
-
2021
- 2021-10-20 CN CN202122520831.XU patent/CN216074025U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114959611A (en) * | 2022-05-30 | 2022-08-30 | 陕西工业职业技术学院 | Bent arm type series-parallel driving type film glancing angle sputtering platform |
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