CN107640909A - For preparing Steaming structure, the method for uniform film inside thin mouth, large scale glass bulb - Google Patents
For preparing Steaming structure, the method for uniform film inside thin mouth, large scale glass bulb Download PDFInfo
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- CN107640909A CN107640909A CN201710743680.XA CN201710743680A CN107640909A CN 107640909 A CN107640909 A CN 107640909A CN 201710743680 A CN201710743680 A CN 201710743680A CN 107640909 A CN107640909 A CN 107640909A
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Abstract
The present invention provides a kind of Steaming structure for being used to prepare uniform film inside thin mouth, large scale glass bulb, including support bar, evaporation electrode, evaporation source, correction net, the first motor and the second motor.Support bar, it is configured to liftable and rotary motion；Evaporation electrode, including positive electrode and negative electrode；Evaporation source is some groups, and every group includes heater strip and evaporation material；It is in beveled structure to correct net, its center is fixed on support bar, including several correction net keel and wire side, wire side have several equally distributed holes, the first end of each correction net keel is fixed on umbrella shape center, and the second end is arranged on the neighboring of umbrella shape.Steaming structure, the method proposed by the present invention for being used to prepare uniform film inside thin mouth, large scale glass bulb, the control methods combined using multiple spot evaporation with orthosis, plating film uniformity inside large scale elliposoidal glass bulb is effectively ensured, and thin mouth, large scale glass bulb inside completion plated film can be entered.
Description
Technical field
The present invention relates to vacuum vapor plating, glass surface coating technique field, more particularly to one kind to be used in thin mouth, greatly
Steaming structure, the method for uniform film are prepared inside size glass bulb.
Background technology
Thin mouth, large scale glass bulb inner surface coating technique are applied to electronic component manufacture, optical element processing, photoelectricity skill
The fields such as art, lighting engineering, Related product affect the production of the mankind, life.Traditional related coating technique, it is limited to thin
Mouthful, the special shape of large scale glass bulb, often can be only done corresponding coating process, but coating quality, including membrane uniformity
Deng can not often meet people to high-performance, the demand of the Related product of high stability.
In vacuum vapor plating field, to improve product membrane uniformity, selection sample to be plated or evaporation are often taken
Source, increase rectification plate the methods of.But in thin mouth, large scale glass bulb inner surface plated film, only glass bulb is more voluble, still
This method is poor for actual rectification effect, can not meet uniformity related request, and evaporation source is inside glass bulb during plated film, rotation
It is big to turn difficulty, can not realize.Rectification plate has operational feasibility, but its means is single, and rectification effect is poor.
The content of the invention
Present invention seek to address that above mentioned problem, there is provided one kind is used to prepare uniform film inside thin mouth, large scale glass bulb
Steaming structure, method.
To reach above-mentioned purpose, the technical solution adopted in the present invention is as follows：
A kind of Steaming structure for being used to prepare uniform film inside thin mouth, large scale glass bulb, suitable for thin mouth, large scale glass
Film is prepared inside shell, it is vacuum cavity that thin mouth, the large scale glass bulb of film to be prepared are placed on one by a glass bulb support frame
Vaporization chamber in, glass bulb support frame be vertically fixed on the bottom plate of vaporization chamber and liftable motion, glass bulb be placed on glass bulb support
On frame and glass bulb thin mouth down, the thin mouth of glass bulb is parallel with the bottom plate of vaporization chamber for circular and thin mouth end face, the Steaming structure
Entirety can be stretched into glass bulb through the thin mouth of glass bulb, including support bar, evaporation electrode, evaporation source, corrects net, the first motor and the
Two motors, wherein：
The support bar, it is the material members of insulating materials, in cylinder, is vertically fixed on the bottom plate in vaporization chamber,
It is concentric with the thin mouth of glass bulb, and support bar lower end is connected respectively with the first motor, the second motor and liftable and rotary motion；
The evaporation electrode, including positive electrode and negative electrode, both are symmetrically fixed in vaporization chamber centered on support bar
Bottom plate on and it is parallel with support bar；
The evaporation source, it is fixed on above evaporation electrode, is some groups, is evenly distributed on support bar surrounding, forms an envelope
Polygon is closed, every group of evaporation source includes a heater strip and one and be arranged on the evaporation material in heater strip centre position；
The correction net, overall is in beveled structure, and its center is fixed on support bar, including several rectifying in circular arc
Positive net keel and wire side, the wire side have several equally distributed holes, and the first end of each correction net keel is consolidated
Umbrella shape center is scheduled on, the second end is arranged on the neighboring of umbrella shape and can circumferentially moved along wire side neighboring so that should
Wire side in moving area becomes imporous；
First motor, in vaporization chamber, it is connected with the lower end of support bar, for driving support bar elevating movement；
Second motor, in vaporization chamber, it is connected with the lower end of support bar, for driving support bar rotary motion.
It is connected in series or in parallel between evaporation source described in every group in further embodiment, and it is polygon to form a closing
Shape.
In further embodiment, the support bar include being vertically fixed on first connecting rod on the bottom plate in vaporization chamber,
Second connecting rod and support member, second connecting rod are hinged on first connecting rod and can adjust its angle between first connecting rod,
The both ends of support member are connected respectively with first connecting rod, second connecting rod and scalable motion, for supporting second connecting rod.
In further embodiment, the support bar includes being vertically fixed on the body of rod on the bottom plate in vaporization chamber and some
Individual bar branch, the angle [alpha] that each bar branch is fixed on the body of rod and between the body of rod is at an acute angle, and correction net is fixed on the bar branch
On.
In further embodiment, a diameter of 10mm-20mm of the support bar.
According to the improvement of the present invention, it is also proposed that a kind of steaming for being used to prepare uniform film inside thin mouth, large scale glass bulb
The method for sending out structure, this method include：
Steaming structure is perpendicularly fixed in vaporization chamber and the support bar and the thin mouth of glass bulb of Steaming structure are concentric；
Liftable glass bulb support movements make Steaming structure enter inside glass bulb and adjust evaporation source inside glass bulb
Position；
First motor and/or the second motor driving support bar are moved to adjust the relative position between evaporation source and correction net
Put,
Steaming structure evaporates, and completes glass bulb internal membrane and prepares.
In further embodiment, the first motor and/or the second motor driving support bar are moved to adjust evaporation source with rectifying
Relative position between positive net is：
First motor driving support bar carries out elevating movement to adjust the relative longitudinal position between evaporation source and correction net
And/or second motor driving support bar be rotated with adjust evaporation source and correction net between opposed lateral positions.
In further embodiment, methods described more includes：
When the second motor driving support bar is rotated to adjust the relatively transverse position between evaporation source and correction net
When putting, the first end for correcting net keel drives its second end circumferentially to be moved along wire side neighboring as support bar is rotated
Move so that the wire side in moving area becomes imporous shutter.
In further embodiment, the Steaming structure evaporation, complete glass bulb internal membrane and be prepared as：Heater strip heating makes
Material evaporation is evaporated, when the time of evaporation reaching time setting value T1, Steaming structure is automatically shut power off, and is completed inside glass bulb
Film preparation.
In further embodiment, the Steaming structure evaporation, complete glass bulb internal membrane and be prepared as：Heater strip heating makes
Material evaporation is evaporated, when the thickness inside glass bulb reaches thickness setting value Thickness1, Steaming structure automatically cuts off power supply,
Glass bulb internal membrane is completed to prepare.
Steaming structure, the method proposed by the present invention for being used to prepare uniform film inside thin mouth, large scale glass bulb, it is aobvious
Advantage is write to be：
1) mode such as position that the present invention is netted using adjustment evaporation source, correction, Steaming structure is completed in less space
Design, facilitate access for thin mouth, inside large scale glass bulb, complete plated film；
2) support bar that the present invention uses can complete the actions such as lifting, rotation in coating process, further improve plating
Film controllability；
3) shape for the correction net that the present invention uses, density can change, and realize and complete orientation, quantitative plated film；
4) aforementioned techniques of the invention can complete thin mouth, large scale glass bulb inner surface as a total solution
Uniform film preparation, while appropriate adjustment can be passed through, similar product plated film is completed, is widely used.
Brief description of the drawings
The accompanying drawing for forming the part of the present invention is used for providing a further understanding of the present invention, and accompanying drawing is not intended in proportion
Draw.In the accompanying drawings, each identical or approximately uniform part shown in each figure can use identical label table
Show.For clarity, in each figure, not each part is labeled.Now, example and refer to the attached drawing will be passed through
To describe the embodiment of various aspects of the invention, in the accompanying drawings：
Fig. 1 is the steaming for being used to prepare uniform film inside thin mouth, large scale glass bulb according to preferred embodiment of the present invention
Send out the schematic diagram of structure.
Fig. 2 is the steaming for being used to prepare uniform film inside thin mouth, large scale glass bulb according to preferred embodiment of the present invention
Send out the schematic diagram of structure.
Fig. 3 is the steaming for being used to prepare uniform film inside thin mouth, large scale glass bulb according to preferred embodiment of the present invention
Send out the schematic diagram of the evaporation source of structure.
Fig. 4 is the steaming for being used to prepare uniform film inside thin mouth, large scale glass bulb according to preferred embodiment of the present invention
Send out the schematic diagram of the correction net of structure.
Fig. 5 is that the method for being used to prepare uniform film inside thin mouth, large scale glass bulb of preferred embodiment of the present invention exists
Film thickness uniformity test result in the case of being netted without correction.(top view)
Fig. 6 is the method for preparing uniform film inside thin mouth, large scale glass bulb of preferred embodiment of the present invention
Final film thickness uniformity test result.(top view)
Fig. 7 is the Steaming structure for being used to prepare uniform film inside thin mouth, large scale glass bulb of certain embodiment of the invention
Support bar schematic diagram.
Fig. 8 is the Steaming structure for being used to prepare uniform film inside thin mouth, large scale glass bulb of certain embodiment of the invention
Support bar schematic diagram.
Embodiment
In order to know more about the technology contents of the present invention, especially exemplified by specific embodiment and above-mentioned institute's accompanying drawings are coordinated to be described as follows.
As shown in Figures 1 to 4, according to the preferred embodiment of the present invention, one kind is used to make inside thin mouth, large scale glass bulb
The Steaming structure of standby uniform film, suitable for preparing film, thin mouth, the big chi of film to be prepared inside thin mouth, large scale glass bulb 105
It is in the vaporization chamber 107 of vacuum cavity, during plated film in vacuum cavity that very little glass bulb 105 is placed on one by a glass bulb support frame 106
Portion's air pressure is less than 1 × 10-2Pa, and glass bulb support frame 106 is vertically fixed on the bottom plate of vaporization chamber 107 and liftable motion, glass bulb
105 are placed on glass bulb support frame 106, therefore glass bulb 105 can carry out elevating movement, glass bulb 105 with glass bulb support frame 106
Thin mouth down, parallel with the bottom plate of vaporization chamber 107 for circular and thin mouth end face, the Steaming structure can integrally pass through glass bulb
105 thin mouths are stretched into glass bulb, including support bar 103, evaporation electrode 101, evaporation source 102, correction net 104, the first motor and the
Two motors.
Support bar 103, it is the material members of insulating materials, in cylinder, the bottom plate being vertically fixed in vaporization chamber 107
On, its mouth 105 thin with glass bulb is concentric and its diameter is less than the thin mouth diameter of glass bulb, the lower end of support bar 103 and the first motor, the second electricity
Machine connects respectively and liftable and rotary motion.In this way, when the first motor driving support bar 103 carries out elevating movement, can
Adjust evaporation source 102 and correct the relative longitudinal position between net 104, obtain rectification effect in a longitudinal direction evenly；
When the second motor driving support bar 103 is rotated, can adjust relative between evaporation source 102 and correction net 104
Lateral attitude, obtain rectification effect in the horizontal direction evenly.
Evaporation electrode 101, including positive electrode 101A and negative electrode 101B, both are symmetrically fixed centered on support bar 103
It is on bottom plate in vaporization chamber 107 and parallel with support bar 103, it is smaller than glass between positive electrode 101A and negative electrode 101B
105 thin mouthfuls of diameters of shell.
Evaporation source 102, the top of evaporation electrode 101 is fixed on by modes such as screw thread, electric welding and the thin mouth of glass bulb can be passed through
Stretch into glass bulb 105, be some groups, be evenly distributed on the surrounding of support bar 103, form a closed polygon, every group of evaporation source 102
The evaporation material 102B in heater strip 102A centre positions is arranged on including a heater strip 102A and one.Usual heater strip 102A is electricity
Silk or evaporation boat are hindered, evaporation source 102 forms closed polygon using method in series or in parallel with each other, i.e. multiple spot evaporates.
Net 104 is corrected, overall to be less than the thin mouth diameter of glass bulb in beveled structure and its periphery footpath, correction net 104 center is consolidated
It is scheduled on support bar 103, including several are in correction the net keel 104A and wire side 104B of circular arc, wire side 104B has some
Individual equally distributed hole, each first end for correcting net keel 104A are fixed on umbrella shape center, and the second end is arranged on umbrella
It can be moved along wire side 104B neighborings on the neighboring of shape and circumferentially so that the wire side 104B in the moving area becomes nothing
Hole.In this way, when support bar 103 rotates, correction net keel 104A first end, which rotates with, drives two ends along wire side
The circumference movement of 104B neighborings is so that the wire side 104B in the moving area becomes imporous.Certainly, correction net 104 can be set
Put the either above or below in evaporation source 102, or have up and down, its density degree, density variation pattern, planar structure or
Curved-surface structure etc. is set according to the difference of the position distribution of evaporation source 102 and the evaporation capacity of each evaporation source 102 by technical staff,
For example correction net keel 104A shape can be other shapes.If it is equal above and below evaporation source 102 to correct net 104
Have, if a certain region of glass bulb without plated film, can also by one of them or it is several be changed to shutter, to reach glass bulb respective area
The effect of domain not plated film.
First motor, in vaporization chamber 107, it is connected with the lower end of support bar 103 and is electrically connected to a controller, it is controlled
Device processed controls its operating to drive support bar 103 to carry out elevating movement.
Second motor, in vaporization chamber 107, it is connected with the lower end of support bar 103 and is electrically connected to a controller, it is controlled
Device processed controls its operating to drive support bar 103 to be rotated.
In the present embodiment, as shown in figure 3, being connected between every group of evaporation source 102 for series connection with parallel combination, and one is formed
Closed polygon, share 4 groups of evaporation sources 102 and form a closing quadrangle.
In this way, the Steaming structure is evaporated using multiple spot, it is serially connected between evaporation source 102 or side by side, is formed a kind of symmetrical
Or unsymmetric structure, not the temperature in all evapn source 102 is all identical, evaporation source due to evaporation source 102 in the course of the work
102 temperature is influenceed by the distance of itself and evaporation electrode 101, can adjust different evaporations by adjusting the position of evaporation source 102
The evaporation capacity in source 102, while using adjustable hole gap type correction net 104 and liftable, the support bar 103 of rotation, complete not
With the regulation of the different evaporation capacity of evaporation direction.Due to evaporating the diversity of regulation and control method, Steaming structure can be in the chi of very little
Very little interior completion, solve the problems, such as that complicated Steaming structure cannot be introduced into thin mouth, large scale glass bulb inside.
In certain embodiments, as shown in fig. 7, support bar 103 includes being vertically fixed on the bottom plate in vaporization chamber 107
First connecting rod 103A, second connecting rod 103B and support member 103C, second connecting rod 103B be hinged on first connecting rod 103A and
Its angle between first connecting rod 103A is can adjust, support member 103C includes outer tube 103C1 and inner tube 103C2, inner tube
103C2 is embedded in outer tube 103C1 and can be in telescopic moving, outer tube 103C1 and first connecting rod in the space that outer tube 103C1 is limited
103A connections, inner tube 103C2 are connected with second connecting rod 103B, for supporting second connecting rod 103B.In this way, using can bend
Support bar 103, correction net 104 is worked just for certain several evaporation source 102, can avoid not needing the glass bulb region of plated film
Corresponding evaporation source 102, which works, to be caused by plated film.
In some preferred embodiments, as shown in figure 8, support bar 103 includes the bottom being vertically fixed in vaporization chamber 107
Body of rod 103D on plate is fixed on body of rod 103D and between body of rod 103D with several bar branches 103E, each bar branch 103E
Angle [alpha] is at an acute angle, and correction net 104 is fixed on bar branch 103E, can so install multiple correction nets 104, make plated film more equal
It is even, as shown in Figure 5, Figure 6, add the evaporation device of correction net 104 and completed film preparation without the evaporation device of correction net 104
Afterwards, shown by the test result of instrument test, correction net 104 can make coating film thickness more uniform.
Preferably, a diameter of 10mm-20mm of support bar 103, support bar 103 between multiple evaporation sources 102, diameter compared with
It is small, reduce blocking to evaporation source 102.
According to the present invention improvement, as shown in Figures 1 to 6, it is also proposed that one kind be used for made inside thin mouth, large scale glass bulb
The method of the Steaming structure of standby uniform film, the method that the Steaming structure prepares uniform film comprise the following steps：
Step 1, prevapourising prepare：
Steaming structure is first assembled outside vaporization chamber 107 in advance, and liftable glass bulb support frame 106 is raised into highest point,
Film glass bulb 105 to be prepared is placed on glass bulb support frame 106 and the thin mouth down of glass bulb.
Step 2, Steaming structure installation：
Steaming structure is perpendicularly fixed in vaporization chamber 107 and the support bar 103 and 105 thin mouth of glass bulb of Steaming structure are concentric,
Vaporization chamber 107 is vacuum cavity, and vacuum cavity air pressure inside is less than 1 × 10-2Pa during plated film.
Liftable glass bulb support frame 106, which carries out descending motion, to be made Steaming structure enter the inside of glass 105 and adjusts evaporation
Position of the source 102 inside glass bulb 105.
Step 3, adjustment correction net 104：
First motor and/or the second motor driving support bar 103 are moved to adjust between evaporation source 102 and correction net 104
Relative position.
Step 5, evaporation：
Heater strip 102A heating evaporates evaporation material 102B, completes the internal membrane of glass bulb 105 and prepares.
Preferably, the first motor and/or the second motor driving support bar 103 are moved to adjust evaporation source 102 and correction net
Relative position between 104 is：
It is relative between evaporation source 102 and correction net 104 to adjust that first motor driving support bar 103 carries out elevating movement
Lengthwise position, obtain rectification effect in a longitudinal direction evenly and/or the second motor driving support bar 103 carries out rotation fortune
The dynamic correction to adjust the opposed lateral positions between evaporation source 102 and correction net 104, obtain in the horizontal direction evenly is imitated
Fruit.
Preferably, as shown in figure 4, this method more includes：
When the second motor driving support bar 103 is rotated to adjust evaporation source 102 with correcting the phase between net 104
During to lateral attitude, correction net keel 104A first end driven as support bar 103 is rotated its second end along
The circumference movement of wire side 104B neighborings is so that the wire side 104B in moving area becomes imporous shutter.
In some preferred embodiments, heater strip 102A heating evaporates evaporation material 102B, is reached when the time of evaporation
During to time setting value T1, Steaming structure is automatically shut power off, and is completed glass bulb internal membrane and is prepared.In the present embodiment, T1 roots
Set according to the required coating film thickness of glass bulb to be coated and the difference of the evaporation capacity of each evaporation source 102 by technical staff to ensure
Coating film thickness it is accurate.
In some preferred embodiments, heater strip 102A heating evaporates evaporation material 102B, the film inside glass bulb
When thickness reaches thickness setting value Thickness1, Steaming structure automatically cuts off power supply, completes glass bulb internal membrane and prepares.In this reality
Apply in example, Thickness1 is according to the required coating film thickness of glass bulb to be coated and the difference of the evaporation capacity of each evaporation source 102 by skill
Art personnel are set to ensure the accurate of coating film thickness.
Steaming structure, the method proposed by the present invention for being used to prepare uniform film inside thin mouth, large scale glass bulb, has
Advantages below：
1) mode such as position that the present invention is netted using adjustment evaporation source, correction, Steaming structure is completed in less space
Design, facilitate access for thin mouth, inside large scale glass bulb, complete plated film；
2) support bar that the present invention uses can complete the actions such as lifting, rotation in coating process, further improve plating
Film controllability；
3) shape for the correction net that the present invention uses, density can change, and realize and complete orientation, quantitative plated film；
4) aforementioned techniques of the invention can complete thin mouth, large scale glass bulb inner surface as a total solution
Uniform film preparation, while appropriate adjustment can be passed through, similar product plated film is completed, is widely used.
Although the present invention is disclosed above with preferred embodiment, so it is not limited to the present invention.Skill belonging to the present invention
Has usually intellectual in art field, without departing from the spirit and scope of the present invention, when can be used for a variety of modifications and variations.Cause
This, the scope of protection of the present invention is defined by those of the claims.
Claims (10)
- A kind of 1. Steaming structure for being used to prepare uniform film inside thin mouth, large scale glass bulb, suitable for thin mouth, large scale glass bulb Inside prepares film, and thin mouth, the large scale glass bulb (105) of film to be prepared are placed on one by a glass bulb support frame (106) and are In the vaporization chamber (107) of vacuum cavity, glass bulb support frame (106) is vertically fixed on the bottom plate of vaporization chamber (107) and liftable Motion, glass bulb (105) is placed on glass bulb support frame (106) and the thin mouth down of glass bulb (105), the thin mouth of glass bulb (105) are Circular and thin mouth end face is parallel with the bottom plate of vaporization chamber (107), it is characterised in that the Steaming structure can integrally pass through glass bulb (105) thin mouth is stretched into glass bulb (105), including support bar (103), evaporation electrode (101), evaporation source (102), correction net (104), the first motor and the second motor, wherein：The support bar (103), it is the material members of insulating materials, in cylinder, the bottom being vertically fixed in vaporization chamber (107) On plate, it is concentric with the thin mouth of glass bulb (105), and support bar (103) lower end is connected respectively with the first motor, the second motor and liftable And rotary motion；The evaporation electrode (101), including positive electrode (101A) and negative electrode (101B), both are centered on support bar (103) Symmetrically it is fixed on the bottom plate in vaporization chamber (107) and parallel with support bar (103)；The evaporation source (102), it is fixed on above evaporation electrode (101), is some groups, is evenly distributed on support bar (103) four Week forms a closed polygon, and every group of evaporation source (102) is arranged in heater strip (102A) including a heater strip (102A) and one Between position evaporation material (102B)；The correction net (104), overall is in beveled structure, and its center is fixed on support bar (103), including several are in circular arc The correction net keel (104A) and wire side (104B) of shape, the wire side (104B) have several equally distributed holes, each The first end of the correction net keel (104A) is fixed on umbrella shape center, the second end be arranged on the neighboring of umbrella shape and Can be along the neighboring circumference movement of wire side (104B) so that the wire side (104B) in the moving area becomes imporous；First motor, in vaporization chamber (107), it is connected with the lower end of support bar (103), for driving support bar (103) to rise Drop motion；Second motor, in vaporization chamber (107), it is connected with the lower end of support bar (103), for driving support bar (103) to revolve Transhipment is dynamic.
- 2. the Steaming structure according to claim 1 for being used to prepare uniform film inside thin mouth, large scale glass bulb, it is special Sign is, is connected in series or in parallel between evaporation source (102) described in every group, and forms a closed polygon.
- 3. the Steaming structure according to claim 1 for being used to prepare uniform film inside thin mouth, large scale glass bulb, it is special Sign is, first connecting rod (103A) that the support bar (103) includes being vertically fixed on the bottom plate in vaporization chamber (107), the Two connecting rods (103B) and support member (103C), second connecting rod (103B) are hinged on first connecting rod (103A) and can adjust it With the angle between first connecting rod (103A), the both ends of support member (103C) respectively with first connecting rod (103A), second connecting rod (103B) is connected and scalable motion, for supporting second connecting rod (103B).
- 4. the Steaming structure according to claim 1 for being used to prepare uniform film inside thin mouth, large scale glass bulb, it is special Sign is that the support bar (103) includes the body of rod (103D) being vertically fixed on the bottom plate in vaporization chamber (107) and several Bar branch (103E), the angle [alpha] that each bar branch (103E) is fixed on the body of rod (103D) and between the body of rod (103D) are in sharp Angle, correction net (104) are fixed on the bar branch (103E).
- 5. the Steaming structure according to claim 1 for being used to prepare uniform film inside thin mouth, large scale glass bulb, it is special Sign is, a diameter of 10mm-20mm of the support bar (103).
- 6. it is used to prepare inside thin mouth, large scale glass bulb described in any one in a kind of 1-5 using preceding claims The method of the Steaming structure of even film, it is characterised in that this method includes：Steaming structure is perpendicularly fixed in vaporization chamber (107) and the support bar (103) of Steaming structure and the thin mouth of glass bulb (105) are same The heart；Liftable glass bulb support frame (106) motion makes Steaming structure enter glass bulb (105) inside and adjusts evaporation source (102) In the internal position of glass bulb (105)；First motor and/or the second motor driving support bar (103) motion with adjust evaporation source (102) with correction net (104) it Between relative position,Steaming structure evaporates, and completes glass bulb (105) internal membrane and prepares.
- 7. the side according to claim 6 for being used to prepare the Steaming structure of uniform film inside thin mouth, large scale glass bulb Method, it is characterised in that the first motor and/or the second motor driving support bar (103) are moved to adjust evaporation source (102) and correction Relative position between net (104) is：First motor driving support bar (103) carries out elevating movement to adjust evaporation source (102) with correcting the phase between net (104) Lengthwise position and/or the second motor driving support bar (103) are rotated to adjust evaporation source (102) and correction net (104) opposed lateral positions between.
- 8. the side according to claim 7 for being used to prepare the Steaming structure of uniform film inside thin mouth, large scale glass bulb Method, it is characterised in that methods described more includes：When the second motor driving support bar (103) is rotated to adjust between evaporation source (102) and correction net (104) During opposed lateral positions, correction net keel (104A) first end with support bar (103) be rotated drive its second End is along wire side (104B) neighboring circumference movement so that the wire side (104B) in moving area becomes imporous shutter.
- 9. the side according to claim 6 for being used to prepare the Steaming structure of uniform film inside thin mouth, large scale glass bulb Method, it is characterised in that the Steaming structure evaporation, complete glass bulb (105) internal membrane and be prepared as：Heater strip (102A) heating makes Material (102B) evaporation is evaporated, when the time of evaporation reaching time setting value T1, Steaming structure is automatically shut power off, and completes glass It is prepared by shell (105) internal membrane.
- 10. the side according to claim 6 for being used to prepare the Steaming structure of uniform film inside thin mouth, large scale glass bulb Method, it is characterised in that the Steaming structure evaporation, complete glass bulb (105) internal membrane and be prepared as：Heater strip (102A) heating makes Material (102B) evaporation is evaporated, when the internal thickness of glass bulb (105) reaches thickness setting value Thickness1, Steaming structure is certainly It is dynamic to cut off the electricity supply, complete glass bulb (105) internal membrane and prepare.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111501008A (en) * | 2020-06-15 | 2020-08-07 | 合肥市辉耀真空材料有限责任公司 | Horizontal vacuum evaporation rainbow film production device and film coating process thereof |
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| JP2000192229A (en) * | 1998-12-24 | 2000-07-11 | Sony Corp | Vacuum deposition method and method for producing display |
| CN1624191A (en) * | 2004-09-22 | 2005-06-08 | 吉林大学 | Vacuum film plating machine having orientation and self-control function |
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| CN204251704U (en) * | 2014-12-11 | 2015-04-08 | 北京泰科诺科技有限公司 | A kind of automatic feeding for continous vacuum evaporation |
| CN105887020A (en) * | 2016-06-30 | 2016-08-24 | 光驰科技(上海)有限公司 | Coating device with multiple evaporation sources and coating method thereof |
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| CN111501008A (en) * | 2020-06-15 | 2020-08-07 | 合肥市辉耀真空材料有限责任公司 | Horizontal vacuum evaporation rainbow film production device and film coating process thereof |
| CN111501008B (en) * | 2020-06-15 | 2021-01-12 | 合肥市辉耀真空材料有限责任公司 | Horizontal vacuum evaporation rainbow film production device and film coating process thereof |
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