CN2868594Y - Solar cell substrate cutting machine - Google Patents
Solar cell substrate cutting machine Download PDFInfo
- Publication number
- CN2868594Y CN2868594Y CN 200520093727 CN200520093727U CN2868594Y CN 2868594 Y CN2868594 Y CN 2868594Y CN 200520093727 CN200520093727 CN 200520093727 CN 200520093727 U CN200520093727 U CN 200520093727U CN 2868594 Y CN2868594 Y CN 2868594Y
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Abstract
A solar cell substrate cutting machine comprises a machine base, a cutting head, cutting workstation and transmission device of assembled machine base, pneumatic control loop and electrical control loop. The utility model is characterized in that: the cutting head is composed of air static-pressure middle-frequency electric spindle and spindle end installed ultra-thin grinding wheel blade. The movement of the electric spindle is lead by longitudinal and vertical shaft stepping motor. The movement and rotation of the cutting workstation that with negative-pressure absorption substrate is drive by horizontal and rotating shaft stepping motor. The main controllers of the electrical control loop respectively control the action of the horizontal, longitudinal, vertical and rotating shaft stepping motors. The utility model is reasonable in structure designing, which is beneficial for realization of automatic operation, stable and reliable in running, high positioning accuracy, and has smooth and flat cutting cross section. The utility model improves the cutting quality and rapid of the substrate, and conversion efficiency of solar photovoltaic, which effectively achieves pitch variable cutting of the substrate and repeated use after positioning, and significantly increases the using performance and working efficiency of the solar cell.
Description
Technical field
The utility model relates to a kind of cutting equipment of solar cell substrates, particularly a kind of more piece that integrates multiple technologies apart from, one-time positioning is reusable automatically carries out the solar cell substrates cutting machine that precision is cut apart with ultra-thin emery wheel blade, it is applicable to the cutting of silicon chip or other similar field.
Background technology
Solar cell is because it utilizes the nature sunshine to make the energy, and advantages such as environmentally safe, conveniently moving are so be used widely in fields such as industrial production, civilian, military projects.It is greatly to artificial satellite, all can see to aspects such as traffic signals, the daily electricity consumptions of herdsman for a short time.The solar energy photoelectric conversion technology is now quite ripe, and solar energy becomes the alternative energy just flourish.Existing cutting equipment all is to cut apart solar cell substrates by glass cutter or laser, can produce following unfavorable factors thus:
The one glass cutter is cut apart and substrate can not be cut fully, because of the bad control of its feed dynamics, thus also need to increase the operation of sliver, and break the often coarse injustice of substrate fracture place of splitting off with the fingers and thumb, influence machining accuracy.
Though cutting apart, can cut fully its dual-laser, owing to laser is realized cutting by high temperature ablation, so microcosmic is seen the section indentation of substrate.Experimental results show that high heat is influential to the metallographic structure of material in the substrate heat affected area, therefore, laser is cut apart the photoelectric transformation efficiency that has reduced the solar cell substrate.
It three has different power requirements because of solar cell, have different calibration sizes at it on a slice substrate, and central point is sought in requirement automatically on its vertical direction, so traditional partitioning scheme, be difficult to finish the traitorous of above-mentioned substrate apart from the cutting task, also can't realize can not repeating behind the location repeatedly to use to the processing of substrate one-time positioning, the substrate working (machining) efficiency is very low.Therefore, existing traditional cutting mode is difficult to satisfy solar cell to improving the photoelectric transformation efficiency of substrate, the requirement of rapid processing substrate.
The utility model content
The purpose of this utility model provides a kind of solar cell substrates cutting machine, its reasonable in design, help realizing automation mechanized operation, operate steadily, reliably, the positioning accuracy height, cutting section is smooth smooth, non-environmental-pollution, the cut quality and the solar photoelectric transformation efficiency thereof of substrate have been improved, realize the traitorous of substrate effectively apart from cutting and one-time positioning, and can locate the back and reuse, obviously shorten the production cycle of substrate, significantly improve the serviceability and the operating efficiency of solar cell.
The purpose of this utility model is achieved in that this device comprises support, cutting head on the assembling support and cutting workbench and transmission device thereof, Pneumatic control circuit, electric control loop, it is characterized in that: described cutting head is made of the ultra-thin emery wheel blade of static air pressure formula intermediate frequency electricity main shaft and its axle head of assembling, described electric main shaft is fixed on an end of transmission arm, transmission arm utilizes rotating shaft to be assembled on vertical slide carriage, the transmission arm other end is connected the stepper motor driven leading screw of vertical shaft end, and drive transmission arm by leading screw and swing around the shaft, vertically slide carriage is assembled on the stepper motor driven ball screw assembly, of the longitudinal axis by gusset piece, utilize ball screw assembly, drive vertical slide carriage longitudinally guide plate and vertically guide pillar move; The adsorption plane that described cutting workbench has the substrate locating piece is communicated with the negative pressure gas circuit, workbench is assembled on the transverse slide carriage, and by the rotation of the stepper motor driven worm couple drive of rotating shaft workbench, transverse slide carriage utilizes the stepper motor driven synchronous pulley transmission group of transverse axis to drive it and moves along cross slide way, the master controller of described electric control loop is respectively by the action of subdivision driver control transverse axis stepper motor,, rotating shaft stepper motor action vertical, upright by the coding driver control.
The thickness of described emery wheel blade is 0.025～0.06mm.
The master controller of described electric control loop is made of 89 series monolithics, programmable interface chip, and it is connected with input-output unit, display unit and memory body respectively.
Because the utility model adopts the ultra-thin emery wheel blade of static air pressure formula intermediate frequency electricity main shaft and its axle head of assembling to constitute cutting head, drive a cutting workbench left side that has the negative-pressure adsorption substrate by the synchronous pulley transmission group with the transverse axis stepper motor, move right, realize the arbitrarily angled rotation of cutting workbench by rotating shaft stepper motor and worm gear, before driving electric main shaft with longitudinal axis stepper motor by ball screw assembly,, move the back, drive on the electric main shaft with vertical shaft stepper motor and leading screw, following motion, and the action by subdivision driver control transverse axis stepper motor respectively with the master controller of electric control loop, vertical by the coding driver control, upright, the action of rotating shaft stepper motor, help realizing Based Intelligent Control, data are preserved, automation mechanized operations such as movement memory, so reasonable in design, operate steadily, reliably, the positioning accuracy height is easy to realize accurate cutting.Because these facility have the behavior memory function, after once-through operation, just memory operation process automatically, the cutting of next substrate just can be finished automatically, has saved bit time, can produce in batches, has improved operating efficiency.Adopt the static air pressure electricity main shaft of rotation at a high speed to drive ultra-thin emery wheel blade and cut, the cut length face is smooth clean and tidy, and non-environmental-pollution has improved the cut quality and the solar photoelectric transformation efficiency thereof of substrate.
Description of drawings
Below in conjunction with accompanying drawing the utility model is further described.
Fig. 1 is a kind of electric control theory block diagram of the present utility model.
Fig. 2 is a kind of concrete structure figure of the present utility model.
Fig. 3 is the vertical view of Fig. 2.
Fig. 4 is a kind of pneumatic control principle schematic of the present utility model
Sequence number is described as follows among the figure: the U1 master controller, the U2 memory body, the U3 input-output unit, the U4 display unit, U5 keyboard input block, the U6 position control unit, U7 control valve control module, the U8 relay control unit, the U9 frequency converter, U110～U13 is a stepper motor 2,14,18,21 driver, 1 synchronous pulley, 2 transverse axis stepper motors, 3 are with synchronously, 4 workbench, 5 locating pieces, 6 substrates, 7 electric main shafts, 8 emery wheel blades, 9 rotating shafts, 10 transmission arms, 11 leading screws, 12 vertical slide carriages, 13 gusset pieces, 14 longitudinal axis stepper motors, 15 ball screw assembly,s, 16 longitudinal guide plates, 17 supports, 18 vertical shaft stepper motors, 19 vertical guide pillars, 20 are with synchronously, 21 rotating shaft stepper motors, 22 cross slide waies, 23 worm couples, 24 transverse slide carriages, 25 air compressors, 26 oil mist separators, 27 pressure-reducing valves, 28 electro connecting pressure gauges, 29 check valves, 30 vacuum generators, 31 speed control valves, 32 two-position three way magnetic valves, 33 air cleaners.
The specific embodiment
Describe the concrete structure of the present utility model and the course of work in detail according to Fig. 1-4: this device comprises cutting head on support 17, the assembling support 17 and cutting workbench 4 and transmission device thereof, Pneumatic control circuit, electric control loop.Wherein cutting head is made of with the ultra-thin emery wheel blade 8 that is assembled in electric main shaft 7 axle heads static air pressure formula intermediate frequency electricity main shaft 7.In order to reach the purpose of cooling, the water collar (not shown) is set in the periphery of static air pressure intermediate frequency electricity main shaft 7.The rotary speed of ultra-thin emery wheel blade 8 is preferentially chosen 30000～40000rpm, and the thickness of blade should be selected 0.025～0.06mm.During cutting, the cut place of substrate 6 can also use cooling water to cool off, and to eliminate the localized hyperthermia that the cut place produces, solves the photoelectric problem of high temperature reduction solar energy substrate that traditional cutting mode exists.Electricity main shaft 7 is fixed on an end of transmission arm 10, and transmission arm 10 utilizes rotating shaft 9 to be assembled on vertical slide carriage 12, and transmission arm 10 other ends are connected leading screw 11 ends that vertical shaft stepper motor 18 drives.Vertical shaft stepper motor 18 is assembled on vertical slide carriage 12, and drives transmission arms 10 around the shaft 9 by the upper and lower swings of setting of height by leading screw 11, and its swing mode has continuously and two kinds of single steps, minimum step pitch 0.005mm, and range is 10mm.Vertically slide carriage 12 is assembled on the ball screw assembly, 15 that longitudinal axis stepper motor 14 drives by gusset piece 13, utilize ball screw assembly, 15 drive vertical slide carriage 12 longitudinally guide plate 16 and vertically guide pillar 19 move; During operation, longitudinal axis stepper motor 14 moves by the step value of setting is longitudinally forward and backward by the electric main shaft 7 that precise ball screw pair 15, gusset piece 13, vertical slide carriage 12 drive on the transmission arms 10, move mode has three kinds of repetitions, calibration, single step, minimum step pitch 0.005mm, range is 210mm.The adsorption plane that cutting workbench 4 has substrate locating piece 5 is communicated with the negative pressure gas circuit of Pneumatic control circuit.Cutting workbench 4 is assembled on the transverse slide carriage 24, and drives cutting workbench 4 along carrying over hour hands or rotation counterclockwise by the worm couple 23 that the rotating shaft stepper motor 21 that is assembled on the transverse slide carriage 24 drives.Rotation mode has two kinds of calibration and single steps, 0.0075 ° of minimum corner, 0～360 ° of rotating range.The synchronous pulley transmission group that transverse slide carriage 24 utilizes transverse axis stepper motor 2 to drive drives it and moves along cross slide way 22, transverse axis stepper motor 2 is by the synchronous pulley 1 of synchronous pulley transmission group and drive cutting workbench 4 by the stroke of setting with 3,20 synchronously, along cross slide way 22 left and right moving, minimum stroke 40mm, range is 250mm.The master controller U1 of described electric control loop is respectively by 2 actions of subdivision driver U10 control transverse axis stepper motor, by coding driver U11, vertical, upright, rotating shaft stepper motor 14,18,21 actions of U12, U13 control.
The circuit theory of this device is described as follows: the master controller U1 of electric control loop is made of 89 series monolithics, programmable interface chip, and it is connected with memory body U2, input-output unit U3, display unit U4 respectively.The position of input-output unit U3 is selected decoder, push button signalling and position signalling to drive by NAND gate and is input to bus, drives output line by photoelectricity isolation, not circuit, triode.Memory body U2 adopts the non-loss data storage of preserving user's setting data.Input-output unit U3 adopts optoelectronic switch as signal transducer, and control is horizontal, vertical, upright, the axial location of rotating shaft stepper motor 2,14,18,21 actions.
Below each device in the electric control loop of present embodiment is described in detail as follows (also can select other corresponding devices according to the actual requirement of user):
U1 master controller: band WATCHDOG (house dog in adopting, monitoring programme is used, one of device anti-interference method) Flash MPU (erasable central processing unit) 89 series monolithics and programmable interface chip 82C55,54 parallel I/O resources, 2 exterior interrupt, electrifying device is from resetting compositions such as negative logic input.It is mainly used in operation control, data are handled.
The U2 memory body: memory body U2 adopts non-loss static data memory to do the data storage.The data that the user sets will forever be preserved, and change until next time.
U3 input-output unit: select decoder, push button signalling and position signalling to drive with 74LS138 as the position and be input to bus by some 74LS00 NAND gates.Output drives output line by photoelectricity isolation, not circuit, triode.
The U4 display unit: the graphic dot matrix LCD (LCDs) backlight that adopts T6963C control IC to drive, all data one pages show, the number generator input.
U5 keyboard input block: instruction, data input to U3 by this unit (keyboard).
U6 position control unit: control as horizontal, vertical, upright, rotating shaft movement position by the GK122 optoelectronic switch.
U7 control valve control module: control two-position three way magnetic valve 32 and cooling water control valve.
U8 relay control unit: comprise tool setting relay, alarm lamp etc.
U9 frequency converter: adopt the single-phase input converter of Siemens.Master controller U1 controls this frequency converter start-stop, frequency by input-output unit U3.
U10 is the subdivision driver of transverse axis stepper motor 2, and motor 2 needs segmentation, and is steady in the hope of what turn round.Realize adjustable-speed by the regulating impulse frequency, and dynamically show, can realize fast return, single step adjustment and three kinds of rate conversion of scribing.
U11～U13 is a coding driver vertical, upright, rotating shaft stepper motor 14,18,21, and with coding control, having built decoder with hardware can be with unordered being translated in order of encoding, by the rotating of each motor of increase and decrease coding control to these stepper motors.Utilize the U10-U13 driver to drive the action of horizontal stroke, vertical, upright, rotating shaft stepper motor 2,14,18,21 respectively.When operating personnel operate this device, the instruction that MCU among the master controller U1 will be automatically give the external world by U5, U6 and each horizontal stroke, axial displacement and each motor action order vertical, upright, rotating shaft stepper motor 2,14,18,21 store formation behavior memory one by one.When starting memory operation, MCU does not just need extraneous instruction next time, can instruct U7～U13 correctly to work voluntarily according to the procedural order of remembering just now.
The course of work of this device is summarized as follows:
One, start: 1, open source of the gas earlier, the Pressure gauge indicating value reaches more than the 0.55Mpa; 2, source in the connection; 3, open converter power supply; 4, open cooling water.
Two, working method:
1, earlier emery wheel blade 8 is installed on the electric main shaft 7.
2, on U4, correctly set the pre-allowance of transverse edge, equidistantly or the data of not equidistant horizontal stroke 1, line of cut scale division values such as horizontal 2, horizontal 3, horizontal 4, horizontal 5.
3, start electric main shaft 7.
4, by upwarding key electric main shaft 7 is lifted, workbench 4 is moved on to blade 8 belows, remove the globule and foreign material on 4 of the workbench with spray gun, by the tool setting of tool setting key.
5, substrate 6 is placed on the workbench 4, and two right-angle sides of substrate 6 are pushed up on the locating surface of 3 locating pieces 5, clicks to inhale to put the key negative pressure and suck substrate.
6, select vertically to repeat, electric main shaft 7 is moved to the front end of substrate 6.
7,, select unidirectional cutting or two-way cutting according to technological requirement.
8, click automatic key, select automatic function.
9, click start key, machine will be carried out cutting automatically.
Automated manner starts down, and this installs after having drawn current direction, and half-twist carries out the second direction cutting more automatically, stops then.By the difference setting to cutting parameter, the modes such as same pitch, different pitch, center line that can realize are cut.
Above-mentioned Pneumatic control circuit is connected on electric main shaft 7 and the cutting workbench 4 by pipeline.Pneumatic control circuit comprises air compressor 25, oil mist separator 26, pressure-reducing valve 27, electro connecting pressure gauge 28, check valve 29, vacuum generator 30, speed control valve 31, two-position three way electricity valve magnetic 32, air cleaner 33 etc.Oil mist separator 26, air cleaner 33 and pressure-reducing valve 27 have been removed impurity such as the oil in the gas, water, dirt, guarantee to provide for electric main shaft 7 compressed air of constant pressure, cleaning.The effect of electro connecting pressure gauge 28 is when not giving electric main shaft 7 air feed or air pressure undesirable, and electric main shaft 7 can not start or on-streamly shut down immediately, and electric main shaft 7 is not stuck.
The negative pressure that vacuum generator 30 produces can be clamped on substrate 6 absorption on the adsorption plane of cutting workbench 4, the break-make of negative pressure is controlled by magnetic valve 32, when negative pressure disconnects, the vacuum chamber of workbench 4 feeds the compressed air of regulating through speed control valve 31, with suitable buoyancy substrate 6 is blown afloat, with the substrate 6 that conveniently takes off well cutting.
Claims (3)
1, a kind of solar cell substrates cutting machine, comprise support, cutting head on the assembling support and cutting workbench and transmission device thereof, Pneumatic control circuit, electric control loop, it is characterized in that: described cutting head is made of the ultra-thin emery wheel blade of static air pressure formula intermediate frequency electricity main shaft and its axle head of assembling, described electric main shaft is fixed on an end of transmission arm, transmission arm utilizes rotating shaft to be assembled on vertical slide carriage, the transmission arm other end is connected the stepper motor driven leading screw of vertical shaft end, and drive transmission arm by leading screw and swing around the shaft, vertically slide carriage is assembled on the stepper motor driven ball screw assembly, of the longitudinal axis by gusset piece, utilize ball screw assembly, drive vertical slide carriage longitudinally guide plate and vertically guide pillar move; The adsorption plane that described cutting workbench has the substrate locating piece is communicated with the negative pressure gas circuit, workbench is assembled on the transverse slide carriage, and by the rotation of the stepper motor driven worm couple drive of rotating shaft workbench, transverse slide carriage utilizes the stepper motor driven synchronous pulley transmission group of transverse axis to drive it and moves along cross slide way, the master controller of described electric control loop is respectively by the action of subdivision driver control transverse axis stepper motor,, rotating shaft stepper motor action vertical, upright by the coding driver control.
2, solar cell substrates cutting machine according to claim 1 is characterized in that: the thickness of described emery wheel blade is 0.025～0.06mm.
3, solar cell substrates cutting machine according to claim 1, it is characterized in that: the master controller of described electric control loop is made of 89 series monolithics, programmable interface chip, and it is connected with input-output unit, display unit respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520093727 CN2868594Y (en) | 2005-11-22 | 2005-11-22 | Solar cell substrate cutting machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520093727 CN2868594Y (en) | 2005-11-22 | 2005-11-22 | Solar cell substrate cutting machine |
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| Publication Number | Publication Date |
|---|---|
| CN2868594Y true CN2868594Y (en) | 2007-02-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200520093727 Expired - Fee Related CN2868594Y (en) | 2005-11-22 | 2005-11-22 | Solar cell substrate cutting machine |
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| CN (1) | CN2868594Y (en) |
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102343634A (en) * | 2010-08-02 | 2012-02-08 | 北京中电科电子装备有限公司 | Overheat protecting device and method of motorized spindle and cutter |
| CN102476315A (en) * | 2010-11-25 | 2012-05-30 | 北京中电科电子装备有限公司 | Protecting method and device for air static pressure electric spindle, and cutter |
| CN102528837A (en) * | 2012-02-28 | 2012-07-04 | 长治市新举涂料有限公司 | Plate cutting machine |
| CN101861653B (en) * | 2008-01-24 | 2012-07-18 | 应用材料公司 | Solar panel edge deletion module |
| CN102729339A (en) * | 2011-04-01 | 2012-10-17 | 涂政德 | Roll-cutting shearer and roll-cutting method |
| CN102947063A (en) * | 2010-06-11 | 2013-02-27 | 夏普株式会社 | Module trimming method and trimming apparatus |
| CN103137515A (en) * | 2011-11-23 | 2013-06-05 | 北京中电科电子装备有限公司 | Control device and compensation method of motorized spindle thermal drift and dicing machine |
| CN104678892A (en) * | 2015-01-23 | 2015-06-03 | 苏州惠斯福自动化科技有限公司 | Machining equipment and debugging method thereof |
| CN105127335A (en) * | 2015-09-09 | 2015-12-09 | 国家电网公司 | Wire cutting machine |
| CN105195765A (en) * | 2015-10-30 | 2015-12-30 | 江苏耀阳电子有限公司 | Slicer main shaft structure for machining solar cell panel |
| CN106847993A (en) * | 2017-01-05 | 2017-06-13 | 沃沛斯(常州)能源科技有限公司 | Photovoltaic cell automation cutting separation equipment |
| CN108994905A (en) * | 2018-07-11 | 2018-12-14 | 张明明 | A kind of building board cutting machine |
| CN109397056A (en) * | 2018-12-21 | 2019-03-01 | 沈阳仪表科学研究院有限公司 | A kind of cutting method and its scribing machine of chip wafer |
| CN112792899A (en) * | 2021-04-15 | 2021-05-14 | 苏州维嘉科技股份有限公司 | Board separator |
| CN112792900A (en) * | 2021-04-15 | 2021-05-14 | 苏州维嘉科技股份有限公司 | Board separator |
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- 2005-11-22 CN CN 200520093727 patent/CN2868594Y/en not_active Expired - Fee Related
Cited By (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101861653B (en) * | 2008-01-24 | 2012-07-18 | 应用材料公司 | Solar panel edge deletion module |
| CN102947063A (en) * | 2010-06-11 | 2013-02-27 | 夏普株式会社 | Module trimming method and trimming apparatus |
| CN102343634A (en) * | 2010-08-02 | 2012-02-08 | 北京中电科电子装备有限公司 | Overheat protecting device and method of motorized spindle and cutter |
| CN102476315A (en) * | 2010-11-25 | 2012-05-30 | 北京中电科电子装备有限公司 | Protecting method and device for air static pressure electric spindle, and cutter |
| CN102476315B (en) * | 2010-11-25 | 2015-11-25 | 北京中电科电子装备有限公司 | The guard method of air static pressure electric spindle and device, cutting machine |
| CN102729339A (en) * | 2011-04-01 | 2012-10-17 | 涂政德 | Roll-cutting shearer and roll-cutting method |
| CN102729339B (en) * | 2011-04-01 | 2014-11-26 | 涂政德 | Roll-cutting shearer and roll-cutting method |
| CN103137515B (en) * | 2011-11-23 | 2015-07-01 | 北京中电科电子装备有限公司 | Control device and compensation method of motorized spindle thermal drift and dicing machine |
| CN103137515A (en) * | 2011-11-23 | 2013-06-05 | 北京中电科电子装备有限公司 | Control device and compensation method of motorized spindle thermal drift and dicing machine |
| CN102528837B (en) * | 2012-02-28 | 2015-07-08 | 长治市新举涂料有限公司 | Plate cutting machine |
| CN102528837A (en) * | 2012-02-28 | 2012-07-04 | 长治市新举涂料有限公司 | Plate cutting machine |
| CN104678892A (en) * | 2015-01-23 | 2015-06-03 | 苏州惠斯福自动化科技有限公司 | Machining equipment and debugging method thereof |
| CN105127335A (en) * | 2015-09-09 | 2015-12-09 | 国家电网公司 | Wire cutting machine |
| CN105195765A (en) * | 2015-10-30 | 2015-12-30 | 江苏耀阳电子有限公司 | Slicer main shaft structure for machining solar cell panel |
| CN106847993A (en) * | 2017-01-05 | 2017-06-13 | 沃沛斯(常州)能源科技有限公司 | Photovoltaic cell automation cutting separation equipment |
| CN106847993B (en) * | 2017-01-05 | 2018-04-03 | 沃沛斯(常州)能源科技有限公司 | Photovoltaic cell automation cutting separation equipment |
| CN108994905A (en) * | 2018-07-11 | 2018-12-14 | 张明明 | A kind of building board cutting machine |
| CN109397056A (en) * | 2018-12-21 | 2019-03-01 | 沈阳仪表科学研究院有限公司 | A kind of cutting method and its scribing machine of chip wafer |
| CN112792899A (en) * | 2021-04-15 | 2021-05-14 | 苏州维嘉科技股份有限公司 | Board separator |
| CN112792900A (en) * | 2021-04-15 | 2021-05-14 | 苏州维嘉科技股份有限公司 | Board separator |
| CN112792900B (en) * | 2021-04-15 | 2021-06-25 | 苏州维嘉科技股份有限公司 | Board separator |
| CN112792899B (en) * | 2021-04-15 | 2021-06-25 | 苏州维嘉科技股份有限公司 | Board separator |
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Legal Events
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |