CN103137515B - Control device and compensation method of motorized spindle thermal drift and dicing machine - Google Patents
Control device and compensation method of motorized spindle thermal drift and dicing machine Download PDFInfo
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- CN103137515B CN103137515B CN201110377546.5A CN201110377546A CN103137515B CN 103137515 B CN103137515 B CN 103137515B CN 201110377546 A CN201110377546 A CN 201110377546A CN 103137515 B CN103137515 B CN 103137515B
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Abstract
The invention provides a control device and a compensation method of motorized spindle thermal drift and a dicing machine. The control device comprises a temperature control module which is used for cooling the motorized spindle which is in high speed operation and a thermal drift compensation module which is used for obtaining thermal drift quantity which is generated by a cooled motorized spindle and performing compensation on the motorized spindle according to the thermal drift quantity. The control device and the compensation method of the motorized spindle thermal drift and the dicing machine have the advantages of being capable of efficiently cooling the motorized spindle when the dicing machine is incising a wafer and compensating the motorized spindle thermal drift through a PC (Personal Computer) which is configured on the dicing machine.
Description
Technical field
The present invention relates to integrated antenna package apparatus field, refer to a kind of control device of electro spindle thermal drift, compensation method and scribing machine especially.
Background technology
Scribing machine encapsulates key equipment after integrated circuit, and its effect is that wafer is divided into single circuit unit.Scribing machine generally adopts air static pressure electric spindle as core execution unit, realizes high-precision high-rate grinding manufacturing process.In this scribing machine, the rigidity of air static pressure electric spindle, running accuracy, the performance index such as power output and thermal drift directly determine the cutting-up precision of scribing machine.Along with integrated circuit manufacturing industry is to the develop rapidly in high accuracy and high-speed direction, wafer cutting-up quality requirements is more and more higher.
During scribing machine work, air static pressure electric spindle High Rotation Speed, is arranged on the wafer high-rate grinding of the diamond blade on electro spindle to rectilinear motion.In the process, the loss of the built-in high-frequency electric machines of electro spindle and the shearing friction of air bearing air film certainly lead to comparatively considerable heat accumulation.In the air static pressure electric spindle of main employing at present, usually only can the modes such as recirculated water be adopted to cool motor stator, rotating shaft cannot cause temperature rise and thermal drift occurs by effective dispersed heat fast, cause cutting-up groove to depart from wafer centre of figure, time serious, cause expensive wafer directly to scrap.
For in correlation technique because the thermal drift of scribing machine electro spindle causes the bad problem of even scrapping of wafer cutting-up quality, industry not yet proposes effective solution.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of control device of electro spindle thermal drift, compensation method and scribing machine, high efficiency cooling can be carried out to electro spindle when scribing machine cutting crystal wafer, control thermal drift amount, and by the PC that scribing machine configures, electro spindle thermal drift is compensated, thus effectively solve the bad problem of even scrapping of wafer cutting-up quality.
For solving the problems of the technologies described above, the invention provides a kind of control device of electro spindle thermal drift, comprising:
Temperature control modules, for cooling the electro spindle run up;
Thermal drift compensation module, for obtaining the thermal drift amount that cooled electro spindle produces, and compensates described electro spindle according to described thermal drift amount.
Preferably, described temperature control modules comprises:
Cooling fluid providing unit, for providing cooling fluid;
First cooling package, the Part I of cooling fluid to described electro spindle provided for utilizing described cooling fluid providing unit cools;
Second cooling package, for after the Part I of described first cooling package to described electro spindle cools, the Part II of cooling fluid to described electro spindle utilizing described first cooling package to export cools.
Preferably, described first cooling package comprises: the first shell and the first lining;
Described first shell is provided with at least one groove, and described groove extends along the axial of rotating shaft of described electro spindle at the inner surface of described first shell;
The outer surface of described first lining and the inner surface of described first shell are fixed and fit, and make the seal channel of groove formation for holding cooling fluid;
The outer surface of the inner surface of described first lining and the journal bearing of described electro spindle is fitted;
Described journal bearing is tubular, wherein accommodates described rotating shaft;
Described rotating shaft is provided with rotor.
Preferably, described second cooling package comprises: second housing and the second lining;
Described second lining is provided with at least one groove, and described groove extends along the axial of rotating shaft of described electro spindle at the outer surface of described second lining;
The seal channel of the reeded accommodation cooling fluid of tool is formed between the inner surface of described second housing and the outer surface of described second lining;
The inner surface of described second lining and the outer surface of motor stator are fitted;
Described motor stator is tubular, wherein accommodates described rotor;
Described rotor is arranged in described rotating shaft.
Preferably, described thermal drift compensation module comprises:
First temperature sensor, for detecting the temperature of described electro spindle, and exports first signal of telecommunication according to described temperature;
First filter circuit, for carrying out filtering to described first signal of telecommunication, obtains the signal of telecommunication after the first filtering;
First amplifying circuit, for amplifying the signal of telecommunication after described first filtering, obtains the signal of telecommunication after the first amplification;
Second temperature sensor, for detecting the ambient temperature of described electro spindle, and exports second signal of telecommunication according to described ambient temperature;
Second filter circuit, for carrying out filtering to described second signal of telecommunication, obtains the signal of telecommunication after the second filtering;
Second amplifying circuit, for amplifying the signal of telecommunication after described second filtering, obtains the signal of telecommunication after the second amplification;
Differential scaling circuit, amplifying for obtaining described first the difference that the rear signal of telecommunication and described second amplifies the rear signal of telecommunication, exporting the 3rd signal of telecommunication.
Preferably, described first filter circuit comprises: the first resistance, the first feedback resistance, the second resistance, the first electric capacity, the 3rd resistance, the second electric capacity and the first filter amplifier; Wherein, the positive input terminal series connection of the output of described first temperature sensor, described second resistance, described first electric capacity, described 3rd resistance and described first filter amplifier; Described second electric capacity one end ground connection, the other end is connected between described 3rd resistance and the positive input terminal of described first filter amplifier; Described first filter amplifier is connected with bias voltage; One end of described first feedback resistance is connected with the negative input end of described first filter amplifier, and the other end is connected with the output of described first filter amplifier; One end of described first resistance is connected with the first reference voltage end, and the other end is connected between the negative input end of described first feedback resistance and described first filter amplifier;
Described first amplifying circuit comprises: the 4th resistance, the second feedback resistance, the 5th resistance and the first operational amplifier; Wherein, one end of described 4th resistance is connected with the output of described first filter amplifier, and the other end is connected with the positive input terminal of described first operational amplifier; The negative input end of described first operational amplifier is through described 5th grounding through resistance; One end of described second feedback resistance is connected with the positive input terminal of described first operational amplifier, and the other end is connected with the output of described first operational amplifier;
Described second filter circuit comprises: the 6th resistance, the 3rd feedback resistance, the 7th resistance, the 3rd electric capacity, the 8th resistance, the 4th electric capacity and the second filter amplifier; Wherein, the positive input terminal series connection of the output of described second temperature sensor, described 7th resistance, described 3rd electric capacity, described 8th resistance and described second filter amplifier; Described 4th electric capacity one end ground connection, the other end is connected between described 8th resistance and the positive input terminal of described second filter amplifier; Described second filter amplifier is connected with bias voltage; The output of the negative input end of the second filter amplifier with the second filter amplifier is connected by the 3rd feedback resistance; One end of described 6th resistance is connected with the second reference voltage end, and the other end is connected between described 3rd feedback resistance and the negative input end of described second filter amplifier;
Described second amplifying circuit comprises: the 9th resistance, the 4th feedback resistance, the tenth resistance and the second operational amplifier; Wherein, one end of described 9th resistance is connected with the output of described second filter amplifier, and the other end is connected with the positive input terminal of described second operational amplifier; The negative input end of described second operational amplifier is through described tenth grounding through resistance; Described 4th feedback resistance one end is connected with the positive input terminal of described second operational amplifier, and the other end is connected with the output of described second operational amplifier;
Described differential scaling circuit comprises: the 11 resistance, the 12 resistance, the 13 resistance, the 5th feedback resistance and the 3rd operational amplifier; Wherein, one end of described 11 resistance is connected with the output of described first operational amplifier, and the other end is connected with the positive input terminal of described 3rd operational amplifier; One end ground connection of described 12 resistance, the other end is connected between the positive input terminal of described 11 resistance and described 3rd operational amplifier; One end of described 13 resistance is connected with the output of described second operational amplifier, and the other end is connected with the negative input end of described 3rd operational amplifier; One end of described 5th feedback resistance is connected with the negative input end of described 3rd operational amplifier, and the other end is connected with the output of described 3rd operational amplifier.
On the other hand, the present invention also provides a kind of compensation method of electro spindle thermal drift, comprising:
The electro spindle run up is cooled;
Obtain the thermal drift amount that cooled electro spindle produces;
According to described thermal drift amount, real-Time Compensation is carried out to described electro spindle.
Preferably, the step of the thermal drift amount of the cooled electro spindle generation of described acquisition comprises:
Detect the temperature of described electro spindle, and export first signal of telecommunication according to described temperature;
Filtering is carried out to described first signal of telecommunication, obtains the signal of telecommunication after filtered first filtering;
Amplify the signal of telecommunication after described first filtering, first after being amplified amplifies the rear signal of telecommunication;
Detect the ambient temperature of described electro spindle, and export second signal of telecommunication according to described ambient temperature;
Filtering is carried out to described second signal of telecommunication, obtains the signal of telecommunication after filtered second filtering;
Amplify the signal of telecommunication after described second filtering, second after being amplified amplifies the rear signal of telecommunication;
Obtain described first and amplify the difference that the rear signal of telecommunication and described second amplifies the rear signal of telecommunication;
Export the 3rd signal of telecommunication.
Preferably, also comprise after described output the 3rd signal of telecommunication:
According to described 3rd signal of telecommunication, obtain the thermal drift amount of electro spindle;
According to described thermal drift amount, real-Time Compensation is carried out to described electro spindle.
Again on the one hand, the present invention also provides a kind of scribing machine, comprises electro spindle, and the control device of electro spindle thermal drift as above.
The beneficial effect of technique scheme of the present invention is as follows:
In such scheme, high efficiency cooling can be carried out to electro spindle when scribing machine cutting crystal wafer by control device, control thermal drift amount, and by the PC that scribing machine configures, electro spindle thermal drift is compensated, thus effectively solve the bad problem of even scrapping of wafer cutting-up quality.
Accompanying drawing explanation
Fig. 1 is the structured flowchart of the control device of the electro spindle thermal drift of embodiments of the invention;
Fig. 2 is the concrete structure block diagram of the control device of the electro spindle thermal drift of another embodiment of the present invention;
Fig. 3 is the structural representation of the control device of the electro spindle thermal drift of another embodiment of the present invention;
Fig. 4 is the structural representation of the control device of the electro spindle thermal drift of one more embodiment of the present invention.
Embodiment
For making the technical problem to be solved in the present invention, technical scheme and advantage clearly, be described in detail below in conjunction with the accompanying drawings and the specific embodiments.
The present invention proposes a kind of control device of electro spindle thermal drift, compensation method and scribing machine, high efficiency cooling can be carried out when scribing machine cutting crystal wafer to electro spindle, control thermal drift amount, and by the PC that scribing machine configures, electro spindle thermal drift is compensated.
As shown in Figure 1: according to embodiments of the invention, provide a kind of control device of electro spindle thermal drift, comprising: temperature control modules, for cooling the electro spindle run up; Thermal drift compensation module, for obtaining the thermal drift amount that cooled electro spindle produces, and compensates described electro spindle according to described thermal drift amount.When the PC that this embodiment of the present invention configures on scribing machine is by driver control electro spindle High Rotation Speed, temperature control modules carries out high efficiency cooling to electro spindle, can control thermal drift amount; Meanwhile, thermal drift compensation module can obtain the thermal drift amount that cooled electro spindle produces, and compensates described electro spindle according to described thermal drift amount.Particularly, thermal drift compensation module can to PC input control signal.
As shown in Figure 2: according to another embodiment of the present invention, provide a kind of control device of electro spindle thermal drift, wherein, said temperature control module comprises: cooling fluid providing unit, the first cooling package and the second cooling package; Wherein, the first cooling package is arranged between cooling fluid providing unit and the second cooling package, for utilizing the Part I of cooling fluid to electro spindle from cooling fluid providing unit to cool, and for cooling fluid is delivered to the second cooling package; Second cooling package cools from the cooling fluid Part II to electro spindle of cooling fluid providing unit after the first cooling package for utilizing.
Wherein, above-mentioned thermal drift compensation module comprises: the first temperature sensor, for detecting the temperature of described electro spindle, and exports the first corresponding signal of telecommunication according to the temperature detected; First filter circuit, for carrying out filtering to described first signal of telecommunication, obtains the signal of telecommunication after the first filtering, to decay or to remove the ripple component in the described signal of telecommunication; First amplifying circuit, amplifies for the signal of telecommunication after the first filtering of exporting described first filter circuit, obtains the signal of telecommunication after the first amplification; Second temperature sensor, for detecting the ambient temperature of described electro spindle, and exports the second corresponding signal of telecommunication according to the ambient temperature detected; Second filter circuit, for carrying out filtering to described second signal of telecommunication, obtains the signal of telecommunication after the second filtering; Second amplifying circuit, amplifies for the signal of telecommunication after the second filtering of exporting described second filter circuit, obtains the signal of telecommunication after the second amplification; Differential scaling circuit, export for obtaining described first amplifying circuit first amplify after the second difference of amplifying the rear signal of telecommunication of exporting of the signal of telecommunication and described second amplifying circuit, output the 3rd signal of telecommunication; Above-mentioned thermal drift compensation module also comprises the Mathematical Modeling of electro spindle thermal drift and temperature rise, is arranged in PC, carries out the calculation of thermal drift gauge, and is applied to renewal control program further, carry out real-Time Compensation for PC after receiving the 3rd signal of telecommunication.
Exemplarily, the signal that the first temperature sensor exports according to the electro spindle temperature detected can be voltage signal or current signal.Similarly, the signal that the second temperature sensor exports according to the ambient temperature detected can be voltage signal or current signal.
Although it should be noted that in Fig. 2 and temperature sensor has been shown, the present invention is not limited to this, in actual applications, can adopt various can the instrument of detected temperatures or equipment, and by communication interface to PC signal transmission; In addition, the first temperature sensor of the present invention can adopt multiple, to gather the temperature data of electro spindle more accurately.
As shown in Figure 3: according to still another embodiment of the invention, provide a kind of control device of electro spindle thermal drift, wherein, said temperature control module specifically comprises: cooling fluid providing unit, the first cooling package and the second cooling package; Wherein, first cooling package is arranged between cooling fluid providing unit (not shown) and the second cooling package, for utilizing first shaft part of cooling fluid to electro spindle from cooling fluid providing unit (not shown) to cool, and for cooling fluid is delivered to the second cooling package; Wherein, the first shaft part is the shaft part holding journal bearing 12; Second cooling package cools for utilizing second shaft part of the cooling fluid after the first cooling package to electro spindle provided from cooling fluid providing unit; Wherein, the second shaft part is the shaft part holding motor stator 9.
Particularly, the first cooling package comprises the first shell 2 and the first lining 1; Wherein, first shell 2 is provided with at least one groove, groove extends along the axial of rotating shaft of described electro spindle at the inner surface of the first shell 2, and the outer surface of the first lining 1 and the inner surface of the first shell 2 are fixed and fit, and makes the seal channel 201 of groove formation for holding cooling fluid; The inner surface of the first lining 1 and the outer surface of journal bearing 12 are fitted; Journal bearing 12, in tubular, wherein accommodates rotating shaft 13; Rotating shaft 13 is provided with rotor 8.
Second cooling package comprises second housing 3 and the second lining 4, wherein, second lining 4 is provided with at least one groove, groove extends along the axial of rotating shaft of described electro spindle at the outer surface of the second lining 4, forms the seal channel 401 of the reeded accommodation cooling fluid of tool between the inner surface of second housing 3 and the outer surface of the second lining 4; The inner surface of the second lining 4 and the outer surface of motor stator 9 are fitted; Motor stator 9, in tubular, wherein accommodates rotor 8; Rotor 8 is arranged in rotating shaft 13.
Alternatively, cooling fluid from cooling fluid providing unit (not shown) enters the seal channel 201 of the cooling fluid of the first cooling package successively after the cooling passage 203 of cooling passage 303, first shell 2 of the cooling passage 502 of pipe joint 7, rear end cap 5, second housing 3, cools journal bearing 12, first lining 1 and the first shell 2 accommodating described rotating shaft 13.
Alternatively, the first cooling package is communicated with by the cooling passage 202 of the first shell 2, the cooling passage 301 of second housing 3 with the second cooling package.
Alternatively, from the cooling fluid of cooling fluid providing unit (not shown) after above-mentioned cooling passage, enter the seal channel 401 of the cooling fluid of the second cooling package, motor stator 9, second lining 4 and second housing 3 accommodating described rotor 8 is cooled.
Alternatively, the cooling fluid flowed out from the second cooling package is discharged successively after the cooling passage 302 of second housing 3, the cooling passage 501 of rear end cap 5 and pipe joint 6.
Alternatively, between different cooling passages, can sealing ring be set, between the boundary fitting face of seal channel, also can sealing ring be set, prevent the unexpected flowing of cooling fluid; Exemplarily, between cooling passage 303 and cooling passage 203, be provided with sealing ring 11, between second housing 3 and the second lining 4, sealing ring 10 is set.
By means of said apparatus, by arranging the first cooling package and the second cooling package, high efficiency cooling can be carried out when scribing machine cutting crystal wafer to electro spindle, reducing the temperature rise of electro spindle, the thermal drift amount of effective control electro spindle, thus the thermal stability and the machining accuracy that improve scribing machine.
As shown in Figure 4, in thermal drift compensation module:
First filter circuit can comprise: (the preferred model of this first filter amplifier is the filter amplifier of LM6132BIN for the first resistance R11, the first feedback resistance R14, the second resistance R12, the first electric capacity C11, the 3rd resistance R13, the second electric capacity C12 and the first filter amplifier, according to actual needs, the filter amplifier of other model can also be adopted) F11; Wherein, the positive input terminal series connection of the output of the first temperature sensor, the second resistance R12, the first electric capacity C11, the 3rd resistance R13 and the first filter amplifier F11; Second electric capacity C12 one end ground connection, the other end is connected between the positive input terminal of the 3rd resistance R13 and the first filter amplifier F11; First filter amplifier F11 is connected with bias voltage Vcc; One end of first feedback resistance R14 is connected with the negative input end of the first filter amplifier F11, and the other end is connected with the output of the first filter amplifier F11; One end of first resistance R11 holds (reference voltage end) to be connected with a REF, and the other end is connected between the negative input end of the first feedback resistance R14 and the first filter amplifier F11.
First amplifying circuit comprises: (the preferred model of this first operational amplifier is the operational amplifier chip of M54563P for the 4th resistance R15, the second feedback resistance R17, the 5th resistance R16 and the first operational amplifier, the model of this chip is not limited thereto, according to actual needs, the chip of other model can also be adopted) F12; Wherein, one end of the 4th resistance R15 is connected with the output of the first filter amplifier F11, and the other end is connected with the positive input terminal of the first operational amplifier F12; The negative input end of the first operational amplifier F12 is through the 5th resistance R16 ground connection; One end of second feedback resistance R17 is connected with the positive input terminal of the first operational amplifier F12, and the other end is connected with the output of the first operational amplifier.
Second filter circuit can comprise: (the preferred model of this second filter amplifier is the filter amplifier of LM6132BIN for the 6th resistance R21, the 3rd feedback resistance R24, the 7th resistance R22, the 3rd electric capacity C21, the 8th resistance R23, the 4th electric capacity C22 and the second filter amplifier, according to actual needs, the filter amplifier of other model can also be adopted) F21; Wherein, the output of the second temperature sensor, the 7th resistance R22, the 3rd electric capacity C21, the 8th resistance R23 connect with the positive input terminal of the second filter amplifier F21; 4th electric capacity C22 one end ground connection, the other end is connected between the positive input terminal of the 8th resistance R23 and the second filter amplifier F21; Second filter amplifier F21 is connected with bias voltage Vcc; One end of 3rd feedback resistance R24 is connected with the negative input end of the second filter amplifier F21, and the other end is connected with the output of the second filter amplifier F21; One end of 6th resistance R21 holds (reference voltage end) to be connected with the 2nd REF, and the other end is connected between the negative input end of the 3rd feedback resistance R24 and the second filter amplifier F21.
Second amplifying circuit comprises: (the preferred model of this second operational amplifier is the operational amplifier chip of M54563P for the 9th resistance R25, the 4th feedback resistance R27, the tenth resistance R26 and the second operational amplifier, the model of this chip is not limited thereto, according to actual needs, the chip of other models can also be adopted) F22; Wherein, one end of the 9th resistance R25 is connected to the output of the second filter amplifier F21, and the other end is connected to the positive input terminal of the second operational amplifier F22; The negative input end of the second operational amplifier F22 is through the tenth resistance R26 ground connection; One end of 4th feedback resistance R27 is connected with the positive input terminal of the second operational amplifier F22, and the other end is connected with the output of the second operational amplifier.
Differential scaling circuit comprises: (the preferred model of the 3rd operational amplifier is the operational amplifier chip of INA132 for the 11 resistance R18, the 12 resistance R19, the 13 resistance R28, the 5th feedback resistance R29 and the 3rd operational amplifier, the model of this chip is not limited thereto, according to actual needs, the chip of other model can also be adopted) F3; Wherein, one end of the 11 resistance R18 is connected with the output of the first operational amplifier F12, and the other end is connected with the positive input terminal of the 3rd operational amplifier F3; One end ground connection of the 12 resistance R19, the other end is connected between the positive input terminal of the 11 resistance R18 and the 3rd operational amplifier F3; One end of 13 resistance R28 is connected with the output of the second operational amplifier F22, and the other end is connected with the negative input end of the 3rd operational amplifier F3; One end of 5th feedback resistance R29 is connected with the negative input end of the 3rd operational amplifier F3, and the other end is connected with the output of the 3rd operational amplifier.
According to the technical scheme of the embodiment of the present invention, when the PC that scribing machine configures is by driver control electro spindle High Rotation Speed, first temperature sensor is installed in the first shell of electro spindle, and first signal of telecommunication of output enters the first input end of differential scaling circuit after the first filter circuit and the first amplifying circuit; Second temperature sensor can be installed on scribing machine pedestal (not shown), and second signal of telecommunication of output enters the second input of differential scaling circuit after the second filter circuit and the second amplifying circuit; After differential scaling circuit, export the 3rd signal of telecommunication, and input to PC; Thus determine the compensation rate of electro spindle thermal drift.
It should be pointed out that first, second filter circuit is not limited to the implementation in Fig. 4, other filter circuit also can be used for realizing first, second filter circuit as the embodiment of the present invention.Similarly, first, second amplifying circuit is not limited to the implementation in Fig. 4, and other amplifying circuit also can be used for realizing first, second amplifying circuit as the embodiment of the present invention; Differential scaling circuit is also not limited to the implementation in Fig. 4, and other differential scaling circuit also can be used for realizing the differential scaling circuit as the embodiment of the present invention.
Present invention also offers a kind of scribing machine, comprise electro spindle, and according to the control device of above-mentioned electro spindle thermal drift of the present invention.
The present invention comprises the temperature control modules of cooling fluid providing unit, the first cooling package and the second cooling package by arranging, carry out high efficiency cooling, can control thermal drift amount when scribing machine cutting crystal wafer to electro spindle; When the PC that scribing machine configures is by driver control electro spindle High Rotation Speed, thermal drift compensation module provided by the invention by the 3rd signal of telecommunication input PC, thus can determine the compensation rate of electro spindle thermal drift; And then to efficiently solve in correlation technique due to the bad problem of even scrapping of wafer cutting-up quality that the thermal drift of scribing machine electro spindle causes, improve prouctiveness.
The above is the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the prerequisite not departing from principle of the present invention; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (7)
1. a control device for electro spindle thermal drift, is characterized in that, comprising:
Temperature control modules, for cooling the electro spindle run up;
Thermal drift compensation module, for obtaining the thermal drift amount that cooled electro spindle produces, and compensates described electro spindle according to described thermal drift amount;
Described thermal drift compensation module comprises:
First temperature sensor, for detecting the temperature of described electro spindle, and exports first signal of telecommunication according to described temperature;
First filter circuit, for carrying out filtering to described first signal of telecommunication, obtains the signal of telecommunication after the first filtering;
First amplifying circuit, for amplifying the signal of telecommunication after described first filtering, obtains the signal of telecommunication after the first amplification;
Second temperature sensor, for detecting the ambient temperature of described electro spindle, and exports second signal of telecommunication according to described ambient temperature;
Second filter circuit, for carrying out filtering to described second signal of telecommunication, obtains the signal of telecommunication after the second filtering;
Second amplifying circuit, for amplifying the signal of telecommunication after described second filtering, obtains the signal of telecommunication after the second amplification;
Differential scaling circuit, amplifying for obtaining described first the difference that the rear signal of telecommunication and described second amplifies the rear signal of telecommunication, exporting the 3rd signal of telecommunication;
Described first filter circuit comprises: the first resistance, the first feedback resistance, the second resistance, the first electric capacity, the 3rd resistance, the second electric capacity and the first filter amplifier; Wherein, the positive input terminal series connection of the output of described first temperature sensor, described second resistance, described first electric capacity, described 3rd resistance and described first filter amplifier; Described second electric capacity one end ground connection, the other end is connected between described 3rd resistance and the positive input terminal of described first filter amplifier; Described first filter amplifier is connected with bias voltage; One end of described first feedback resistance is connected with the negative input end of described first filter amplifier, and the other end is connected with the output of described first filter amplifier; One end of described first resistance is connected with the first reference voltage end, and the other end is connected between the negative input end of described first feedback resistance and described first filter amplifier;
Described first amplifying circuit comprises: the 4th resistance, the second feedback resistance, the 5th resistance and the first operational amplifier; Wherein, one end of described 4th resistance is connected with the output of described first filter amplifier, and the other end is connected with the positive input terminal of described first operational amplifier; The negative input end of described first operational amplifier is through described 5th grounding through resistance; One end of described second feedback resistance is connected with the positive input terminal of described first operational amplifier, and the other end is connected with the output of described first operational amplifier;
Described second filter circuit comprises: the 6th resistance, the 3rd feedback resistance, the 7th resistance, the 3rd electric capacity, the 8th resistance, the 4th electric capacity and the second filter amplifier; Wherein, the positive input terminal series connection of the output of described second temperature sensor, described 7th resistance, described 3rd electric capacity, described 8th resistance and described second filter amplifier; Described 4th electric capacity one end ground connection, the other end is connected between described 8th resistance and the positive input terminal of described second filter amplifier; Described second filter amplifier is connected with bias voltage; The output of the negative input end of the second filter amplifier with the second filter amplifier is connected by the 3rd feedback resistance; One end of described 6th resistance is connected with the second reference voltage end, and the other end is connected between described 3rd feedback resistance and the negative input end of described second filter amplifier;
Described second amplifying circuit comprises: the 9th resistance, the 4th feedback resistance, the tenth resistance and the second operational amplifier; Wherein, one end of described 9th resistance is connected with the output of described second filter amplifier, and the other end is connected with the positive input terminal of described second operational amplifier; The negative input end of described second operational amplifier is through described tenth grounding through resistance; Described 4th feedback resistance one end is connected with the positive input terminal of described second operational amplifier, and the other end is connected with the output of described second operational amplifier;
Described differential scaling circuit comprises: the 11 resistance, the 12 resistance, the 13 resistance, the 5th feedback resistance and the 3rd operational amplifier; Wherein, one end of described 11 resistance is connected with the output of described first operational amplifier, and the other end is connected with the positive input terminal of described 3rd operational amplifier; One end ground connection of described 12 resistance, the other end is connected between the positive input terminal of described 11 resistance and described 3rd operational amplifier; One end of described 13 resistance is connected with the output of described second operational amplifier, and the other end is connected with the negative input end of described 3rd operational amplifier; One end of described 5th feedback resistance is connected with the negative input end of described 3rd operational amplifier, and the other end is connected with the output of described 3rd operational amplifier.
2. the control device of electro spindle thermal drift according to claim 1, is characterized in that, described temperature control modules comprises:
Cooling fluid providing unit, for providing cooling fluid;
First cooling package, the Part I of cooling fluid to described electro spindle provided for utilizing described cooling fluid providing unit cools;
Second cooling package, for after the Part I of described first cooling package to described electro spindle cools, the Part II of cooling fluid to described electro spindle utilizing described first cooling package to export cools.
3. the control device of electro spindle thermal drift according to claim 2, is characterized in that,
Described first cooling package comprises: the first shell and the first lining;
Described first shell is provided with at least one groove, and described groove extends along the axial of rotating shaft of described electro spindle at the inner surface of described first shell;
The outer surface of described first lining and the inner surface of described first shell are fixed and fit, and make the seal channel of groove formation for holding cooling fluid;
The outer surface of the inner surface of described first lining and the journal bearing of described electro spindle is fitted;
Described journal bearing is tubular, wherein accommodates described rotating shaft;
Described rotating shaft is provided with rotor.
4. the control device of electro spindle thermal drift according to claim 3, is characterized in that,
Described second cooling package comprises: second housing and the second lining;
Described second lining is provided with at least one groove, and described groove extends along the axial of rotating shaft of described electro spindle at the outer surface of described second lining;
The seal channel of the reeded accommodation cooling fluid of tool is formed between the inner surface of described second housing and the outer surface of described second lining;
The inner surface of described second lining and the outer surface of motor stator are fitted;
Described motor stator is tubular, wherein accommodates described rotor;
Described rotor is arranged in described rotating shaft.
5. a compensation method for electro spindle thermal drift, is characterized in that, comprising:
The electro spindle run up is cooled;
Obtain the thermal drift amount that cooled electro spindle produces;
According to described thermal drift amount, real-Time Compensation is carried out to described electro spindle;
The step of the thermal drift amount that the cooled electro spindle of described acquisition produces comprises:
Detect the temperature of described electro spindle, and export first signal of telecommunication according to described temperature;
Filtering is carried out to described first signal of telecommunication, obtains the signal of telecommunication after filtered first filtering;
Amplify the signal of telecommunication after described first filtering, first after being amplified amplifies the rear signal of telecommunication;
Detect the ambient temperature of described electro spindle, and export second signal of telecommunication according to described ambient temperature;
Filtering is carried out to described second signal of telecommunication, obtains the signal of telecommunication after filtered second filtering;
Amplify the signal of telecommunication after described second filtering, second after being amplified amplifies the rear signal of telecommunication;
Obtain described first and amplify the difference that the rear signal of telecommunication and described second amplifies the rear signal of telecommunication;
Export the 3rd signal of telecommunication.
6. the compensation method of electro spindle thermal drift according to claim 5, is characterized in that, also comprises after described output the 3rd signal of telecommunication:
According to described 3rd signal of telecommunication, obtain the thermal drift amount of electro spindle;
According to described thermal drift amount, real-Time Compensation is carried out to described electro spindle.
7. a scribing machine, comprises electro spindle, it is characterized in that, also comprises: the control device of the electro spindle thermal drift as described in any one of claim 1-4.
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| CN201110377546.5A CN103137515B (en) | 2011-11-23 | 2011-11-23 | Control device and compensation method of motorized spindle thermal drift and dicing machine |
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| CN116944593B (en) * | 2023-09-21 | 2023-12-01 | 沈阳和研科技股份有限公司 | Dicing precision control method, dicing saw and storage medium |
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|---|---|---|---|---|
| CN1638031A (en) * | 2004-01-05 | 2005-07-13 | 台湾积体电路制造股份有限公司 | Semiconductor assembly producing system and thermal compensation subsystem thereof |
| CN2868594Y (en) * | 2005-11-22 | 2007-02-14 | 沈阳仪表科学研究院 | Solar cell substrate cutting machine |
| CN201674349U (en) * | 2010-05-25 | 2010-12-15 | 北京精雕精密机械制造有限公司 | Internal-and-external-cooled high-speed electric spindle |
| CN102120266A (en) * | 2010-12-27 | 2011-07-13 | 东莞理工学院 | High-speed precise electric spindle cooling system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US7839201B2 (en) * | 2005-04-01 | 2010-11-23 | Raytheon Company | Integrated smart power switch |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1638031A (en) * | 2004-01-05 | 2005-07-13 | 台湾积体电路制造股份有限公司 | Semiconductor assembly producing system and thermal compensation subsystem thereof |
| CN2868594Y (en) * | 2005-11-22 | 2007-02-14 | 沈阳仪表科学研究院 | Solar cell substrate cutting machine |
| CN201674349U (en) * | 2010-05-25 | 2010-12-15 | 北京精雕精密机械制造有限公司 | Internal-and-external-cooled high-speed electric spindle |
| CN102120266A (en) * | 2010-12-27 | 2011-07-13 | 东莞理工学院 | High-speed precise electric spindle cooling system |
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