CN103137515B - Control device and compensation method of motorized spindle thermal drift and dicing machine - Google Patents
Control device and compensation method of motorized spindle thermal drift and dicing machine Download PDFInfo
- Publication number
- CN103137515B CN103137515B CN201110377546.5A CN201110377546A CN103137515B CN 103137515 B CN103137515 B CN 103137515B CN 201110377546 A CN201110377546 A CN 201110377546A CN 103137515 B CN103137515 B CN 103137515B
- Authority
- CN
- China
- Prior art keywords
- resistance
- telecommunication
- signal
- electro spindle
- thermal drift
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 12
- 238000001816 cooling Methods 0.000 claims abstract description 44
- 238000001914 filtration Methods 0.000 claims description 18
- 230000003321 amplification Effects 0.000 claims description 3
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 3
- 239000012809 cooling fluid Substances 0.000 claims 7
- 230000004308 accommodation Effects 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000000110 cooling liquid Substances 0.000 description 37
- 239000003990 capacitor Substances 0.000 description 16
- 235000012431 wafers Nutrition 0.000 description 14
- 239000002826 coolant Substances 0.000 description 6
- 238000007789 sealing Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000013178 mathematical model Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Auxiliary Devices For Machine Tools (AREA)
Abstract
Description
技术领域 technical field
本发明涉及集成电路封装设备领域,特别是指一种电主轴热漂移的控制装置、补偿方法及划片机。The invention relates to the field of integrated circuit packaging equipment, in particular to a control device for thermal drift of an electric spindle, a compensation method and a dicing machine.
背景技术 Background technique
划片机是集成电路后封装关键设备,其作用是将晶圆分割成单个的电路单元。划片机一般采用空气静压电主轴作为核心执行部件,实现高精度的强力磨削加工手段。在这种划片机中,空气静压电主轴的刚度、旋转精度、输出功率及热漂移等性能指标直接决定了划片机的划切精度。随着集成电路制造业向高精度和高速度方向的飞速发展,晶圆划切品质要求越来越高。The dicing machine is the key equipment for the post-packaging of integrated circuits, and its function is to divide the wafer into individual circuit units. The dicing machine generally uses an aerostatic electric spindle as the core executive component to achieve high-precision powerful grinding. In this kind of dicing machine, the performance indicators such as the stiffness, rotation accuracy, output power and thermal drift of the aerostatic electric spindle directly determine the cutting accuracy of the dicing machine. With the rapid development of the integrated circuit manufacturing industry in the direction of high precision and high speed, the quality requirements of wafer dicing are getting higher and higher.
划片机工作时,空气静压电主轴高速旋转,安装在电主轴上的金刚石刀片对直线运动的晶圆强力磨削。在此过程中,电主轴内置高频电机的损耗和空气轴承气膜的剪切摩擦必然产生较为可观的热量积聚。在目前主要采用的空气静压电主轴中,通常仅会对电机定子采用循环水等方式进行冷却,转轴上无法快速有效散失的热量引起温升而发生热漂移,造成划切槽偏离晶圆图形中心,严重时引起昂贵的晶圆直接报废。When the dicing machine is working, the aerostatic electric spindle rotates at high speed, and the diamond blade installed on the electric spindle strongly grinds the linearly moving wafer. During this process, the loss of the built-in high-frequency motor of the electric spindle and the shear friction of the air bearing air film will inevitably produce considerable heat accumulation. In the currently mainly used aerostatic electric spindles, usually only the motor stator is cooled by means of circulating water, etc., and the heat that cannot be quickly and effectively dissipated on the rotating shaft causes temperature rise and thermal drift, causing the scribe groove to deviate from the wafer pattern In severe cases, expensive wafers are directly scrapped.
针对相关技术中由于划片机电主轴热漂移导致晶圆划切质量不良甚至报废的问题,业界尚未提出有效的解决方案。The industry has not yet proposed an effective solution to the problem in the related art that the wafer dicing quality is poor or even scrapped due to the thermal drift of the electrical spindle of the dicing machine.
发明内容 Contents of the invention
本发明要解决的技术问题是提供一种电主轴热漂移的控制装置、补偿方法及划片机,能够在划片机切割晶圆时对电主轴进行高效冷却,控制热漂移量,并通过划片机上配置的PC对电主轴热漂移进行补偿,从而有效解决晶圆划切质量不良甚至报废的问题。The technical problem to be solved by the present invention is to provide a control device for the thermal drift of the electric spindle, a compensation method and a dicing machine, which can efficiently cool the electric spindle when the dicing machine cuts wafers, control the amount of thermal drift, and pass the scribing The PC configured on the chip machine compensates the thermal drift of the electric spindle, thus effectively solving the problem of poor wafer scribing quality or even scrapping.
为解决上述技术问题,本发明提供一种电主轴热漂移的控制装置,包括:In order to solve the above technical problems, the present invention provides a control device for thermal drift of the electric spindle, including:
温度控制模块,用于对高速运转的电主轴进行冷却;The temperature control module is used to cool the high-speed electric spindle;
热漂移补偿模块,用于获得冷却后的电主轴产生的热漂移量,并根据所述热漂移量对所述电主轴进行补偿。The thermal drift compensation module is used to obtain the thermal drift generated by the cooled electric spindle, and compensate the electric spindle according to the thermal drift.
优选的,所述温度控制模块包括:Preferably, the temperature control module includes:
冷却液提供部,用于提供冷却液;a coolant supply part, used for supplying coolant;
第一冷却组件,用于利用所述冷却液提供部提供的冷却液对所述电主轴的第一部分进行冷却;a first cooling assembly, configured to cool the first part of the electric spindle with the cooling liquid provided by the cooling liquid supply part;
第二冷却组件,用于在所述第一冷却组件对所述电主轴的第一部分进行冷却后,利用所述第一冷却组件输出的冷却液对所述电主轴的第二部分进行冷却。The second cooling assembly is configured to cool the second portion of the electric spindle with the cooling liquid output by the first cooling assembly after the first cooling assembly cools the first portion of the electric spindle.
优选的,所述第一冷却组件包括:第一外壳和第一衬套;Preferably, the first cooling assembly includes: a first shell and a first bushing;
所述第一外壳设置有至少一个凹槽,所述凹槽沿所述电主轴的转轴的轴向在所述第一外壳的内表面延伸;The first housing is provided with at least one groove, and the groove extends on the inner surface of the first housing along the axial direction of the rotating shaft of the electric spindle;
所述第一衬套的外表面与所述第一外壳的内表面固定并贴合,使凹槽形成用于容纳冷却液的密封通道;The outer surface of the first bush is fixed and bonded to the inner surface of the first shell, so that the groove forms a sealed channel for accommodating cooling liquid;
所述第一衬套的内表面与所述电主轴的径向轴承的外表面贴合;The inner surface of the first bush is in contact with the outer surface of the radial bearing of the electric spindle;
所述径向轴承呈筒状,其中容纳有所述转轴;The radial bearing is in the shape of a cylinder, in which the rotating shaft is accommodated;
所述转轴上设置有电机转子。A motor rotor is arranged on the rotating shaft.
优选的,所述第二冷却组件包括:第二外壳和第二衬套;Preferably, the second cooling assembly includes: a second shell and a second bushing;
所述第二衬套设置有至少一个凹槽,所述凹槽沿所述电主轴的转轴的轴向在所述第二衬套的外表面延伸;The second bush is provided with at least one groove, and the groove extends on the outer surface of the second bush along the axial direction of the rotating shaft of the electric spindle;
所述第二外壳的内表面与所述第二衬套的外表面之间形成具有凹槽的容纳冷却液的密封通道;A sealed channel with a groove for containing cooling liquid is formed between the inner surface of the second shell and the outer surface of the second bush;
所述第二衬套的内表面与电机定子的外表面贴合;The inner surface of the second bush is attached to the outer surface of the motor stator;
所述电机定子呈筒状,其中容纳有所述电机转子;The motor stator is in a cylindrical shape, and the motor rotor is accommodated therein;
所述电机转子设置于所述转轴上。The motor rotor is arranged on the rotating shaft.
优选的,所述热漂移补偿模块包括:Preferably, the thermal drift compensation module includes:
第一温度传感器,用于检测所述电主轴的温度,并根据所述温度输出第一电信号;a first temperature sensor, configured to detect the temperature of the electric spindle, and output a first electrical signal according to the temperature;
第一滤波电路,用于对所述第一电信号进行滤波,得到第一滤波后电信号;a first filter circuit, configured to filter the first electrical signal to obtain a first filtered electrical signal;
第一放大电路,用于对所述第一滤波后电信号进行放大,得到第一放大后电信号;a first amplifying circuit, configured to amplify the first filtered electrical signal to obtain a first amplified electrical signal;
第二温度传感器,用于检测所述电主轴的环境温度,并根据所述环境温度输出第二电信号;a second temperature sensor, configured to detect the ambient temperature of the electric spindle, and output a second electrical signal according to the ambient temperature;
第二滤波电路,用于对所述第二电信号进行滤波,得到第二滤波后电信号;a second filter circuit, configured to filter the second electrical signal to obtain a second filtered electrical signal;
第二放大电路,用于对所述第二滤波后电信号进行放大,得到第二放大后电信号;a second amplifying circuit, configured to amplify the second filtered electrical signal to obtain a second amplified electrical signal;
差动比例运算电路,用于获得所述第一放大后电信号与所述第二放大后电信号的差值,输出第三电信号。The differential proportional operation circuit is used to obtain the difference between the first amplified electrical signal and the second amplified electrical signal, and output a third electrical signal.
优选的,所述第一滤波电路包括:第一电阻、第一反馈电阻、第二电阻、第一电容、第三电阻、第二电容和第一滤波放大器;其中,所述第一温度传感器的输出端、所述第二电阻、所述第一电容、所述第三电阻以及所述第一滤波放大器的正输入端串联;所述第二电容一端接地,另一端连接至所述第三电阻与所述第一滤波放大器的正输入端之间;所述第一滤波放大器与偏置电压连接;所述第一反馈电阻的一端与所述第一滤波放大器的负输入端连接,另一端与所述第一滤波放大器的输出端连接;所述第一电阻的一端与第一参考电压端连接,另一端连接至所述第一反馈电阻与所述第一滤波放大器的负输入端之间;Preferably, the first filter circuit includes: a first resistor, a first feedback resistor, a second resistor, a first capacitor, a third resistor, a second capacitor, and a first filter amplifier; wherein, the first temperature sensor The output terminal, the second resistor, the first capacitor, the third resistor, and the positive input of the first filter amplifier are connected in series; one end of the second capacitor is grounded, and the other end is connected to the third resistor Between the positive input terminal of the first filter amplifier; the first filter amplifier is connected to the bias voltage; one end of the first feedback resistor is connected to the negative input terminal of the first filter amplifier, and the other end is connected to the negative input terminal of the first filter amplifier. The output end of the first filter amplifier is connected; one end of the first resistor is connected to the first reference voltage end, and the other end is connected between the first feedback resistor and the negative input end of the first filter amplifier;
所述第一放大电路包括:第四电阻、第二反馈电阻、第五电阻和第一运算放大器;其中,所述第四电阻的一端与所述第一滤波放大器的输出端连接,另一端与所述第一运算放大器的正输入端连接;所述第一运算放大器的负输入端经所述第五电阻接地;所述第二反馈电阻的一端与所述第一运算放大器的正输入端连接,另一端与所述第一运算放大器的输出端连接;The first amplifying circuit includes: a fourth resistor, a second feedback resistor, a fifth resistor, and a first operational amplifier; wherein, one end of the fourth resistor is connected to the output end of the first filter amplifier, and the other end is connected to the output end of the first filter amplifier. The positive input terminal of the first operational amplifier is connected; the negative input terminal of the first operational amplifier is grounded through the fifth resistor; one end of the second feedback resistor is connected with the positive input terminal of the first operational amplifier , the other end is connected to the output end of the first operational amplifier;
所述第二滤波电路包括:第六电阻、第三反馈电阻、第七电阻、第三电容、第八电阻、第四电容和第二滤波放大器;其中,所述第二温度传感器的输出端、所述第七电阻、所述第三电容、所述第八电阻以及所述第二滤波放大器的正输入端串联;所述第四电容一端接地,另一端连接至所述第八电阻与所述第二滤波放大器的正输入端之间;所述第二滤波放大器与偏置电压连接;第三反馈电阻将第二滤波放大器的负输入端与第二滤波放大器的输出端连接;所述第六电阻的一端与第二参考电压端连接,另一端连接至所述第三反馈电阻与所述第二滤波放大器的负输入端之间;The second filter circuit includes: a sixth resistor, a third feedback resistor, a seventh resistor, a third capacitor, an eighth resistor, a fourth capacitor, and a second filter amplifier; wherein, the output terminal of the second temperature sensor, The seventh resistor, the third capacitor, the eighth resistor, and the positive input terminal of the second filter amplifier are connected in series; one end of the fourth capacitor is grounded, and the other end is connected to the eighth resistor and the Between the positive input terminals of the second filter amplifier; the second filter amplifier is connected to the bias voltage; the third feedback resistor connects the negative input terminal of the second filter amplifier to the output terminal of the second filter amplifier; the sixth One end of the resistor is connected to the second reference voltage end, and the other end is connected between the third feedback resistor and the negative input end of the second filter amplifier;
所述第二放大电路包括:第九电阻、第四反馈电阻、第十电阻和第二运算放大器;其中,所述第九电阻的一端与所述第二滤波放大器的输出端连接,另一端与所述第二运算放大器的正输入端连接;所述第二运算放大器的负输入端经所述第十电阻接地;所述第四反馈电阻一端与所述第二运算放大器的正输入端连接,另一端与所述第二运算放大器的输出端连接;The second amplifying circuit includes: a ninth resistor, a fourth feedback resistor, a tenth resistor, and a second operational amplifier; wherein, one end of the ninth resistor is connected to the output end of the second filter amplifier, and the other end is connected to the output end of the second filter amplifier. The positive input terminal of the second operational amplifier is connected; the negative input terminal of the second operational amplifier is grounded through the tenth resistor; one end of the fourth feedback resistor is connected to the positive input terminal of the second operational amplifier, The other end is connected to the output end of the second operational amplifier;
所述差动比例运算电路包括:第十一电阻、第十二电阻、第十三电阻、第五反馈电阻和第三运算放大器;其中,所述第十一电阻的一端与所述第一运算放大器的输出端连接,另一端与所述第三运算放大器的正输入端连接;所述第十二电阻的一端接地,另一端连接至所述第十一电阻与所述第三运算放大器的正输入端之间;所述第十三电阻的一端与所述第二运算放大器的输出端连接,另一端与所述第三运算放大器的负输入端连接;所述第五反馈电阻的一端与所述第三运算放大器的负输入端连接,另一端与所述第三运算放大器的输出端连接。The differential proportional operation circuit includes: an eleventh resistor, a twelfth resistor, a thirteenth resistor, a fifth feedback resistor and a third operational amplifier; wherein, one end of the eleventh resistor is connected to the first operational amplifier The output end of the amplifier is connected, and the other end is connected with the positive input end of the third operational amplifier; one end of the twelfth resistor is grounded, and the other end is connected to the eleventh resistor and the positive input end of the third operational amplifier. Between the input terminals; one end of the thirteenth resistor is connected to the output terminal of the second operational amplifier, and the other end is connected to the negative input terminal of the third operational amplifier; one end of the fifth feedback resistor is connected to the output terminal of the second operational amplifier; The negative input terminal of the third operational amplifier is connected, and the other end is connected with the output terminal of the third operational amplifier.
另一方面,本发明还提供一种电主轴热漂移的补偿方法,包括:On the other hand, the present invention also provides a method for compensating the thermal drift of the electric spindle, including:
对高速运转的电主轴进行冷却;Cool the electric spindle running at high speed;
获得冷却后的电主轴产生的热漂移量;Obtain the thermal drift generated by the cooled electric spindle;
根据所述热漂移量对所述电主轴进行实时补偿。Real-time compensation is performed on the electric spindle according to the thermal drift.
优选的,所述获得冷却后的电主轴产生的热漂移量的步骤包括:Preferably, the step of obtaining the thermal drift generated by the cooled electric spindle comprises:
检测所述电主轴的温度,并根据所述温度输出第一电信号;detecting the temperature of the electric spindle, and outputting a first electrical signal according to the temperature;
对所述第一电信号进行滤波,得到滤波后的第一滤波后电信号;filtering the first electrical signal to obtain a filtered first filtered electrical signal;
对所述第一滤波后电信号进行放大,得到放大后的第一放大后电信号;amplifying the first filtered electrical signal to obtain an amplified first amplified electrical signal;
检测所述电主轴的环境温度,并根据所述环境温度输出第二电信号;detecting the ambient temperature of the electric spindle, and outputting a second electrical signal according to the ambient temperature;
对所述第二电信号进行滤波,得到滤波后的第二滤波后电信号;filtering the second electrical signal to obtain a filtered second filtered electrical signal;
对所述第二滤波后电信号进行放大,得到放大后的第二放大后电信号;amplifying the second filtered electrical signal to obtain an amplified second amplified electrical signal;
获得所述第一放大后电信号与所述第二放大后电信号的差值;obtaining a difference between the first amplified electrical signal and the second amplified electrical signal;
输出第三电信号。output a third electrical signal.
优选的,所述输出第三电信号后还包括:Preferably, after outputting the third electrical signal, the method further includes:
根据所述第三电信号,获得电主轴的热漂移量;Obtaining the thermal drift of the electric spindle according to the third electrical signal;
根据所述热漂移量对所述电主轴进行实时补偿。Real-time compensation is performed on the electric spindle according to the thermal drift.
再一方面,本发明还提供一种划片机,包括电主轴,以及如上所述的电主轴热漂移的控制装置。In yet another aspect, the present invention also provides a dicing machine, including an electric spindle, and the above-mentioned device for controlling thermal drift of the electric spindle.
本发明的上述技术方案的有益效果如下:The beneficial effects of above-mentioned technical scheme of the present invention are as follows:
上述方案中,通过控制装置能够在划片机切割晶圆时对电主轴进行高效冷却,控制热漂移量,并通过划片机上配置的PC对电主轴热漂移进行补偿,从而有效解决晶圆划切质量不良甚至报废的问题。In the above solution, the control device can efficiently cool the electric spindle when the dicing machine cuts wafers, control the amount of thermal drift, and compensate the thermal drift of the electric spindle through the PC configured on the dicing machine, thereby effectively solving the problem of wafer scribing. All problems of poor quality or even scrapping.
附图说明 Description of drawings
图1为本发明的实施例的电主轴热漂移的控制装置的结构框图;FIG. 1 is a structural block diagram of a control device for thermal drift of an electric spindle according to an embodiment of the present invention;
图2为本发明的另一实施例的电主轴热漂移的控制装置的具体结构框图;Fig. 2 is a specific structural block diagram of a control device for thermal drift of an electric spindle according to another embodiment of the present invention;
图3为本发明的又一实施例的电主轴热漂移的控制装置的结构示意图;Fig. 3 is a structural schematic diagram of a control device for thermal drift of an electric spindle according to another embodiment of the present invention;
图4为本发明的再一实施例的电主轴热漂移的控制装置的结构示意图。FIG. 4 is a schematic structural diagram of a device for controlling thermal drift of an electric spindle according to another embodiment of the present invention.
具体实施方式 Detailed ways
为使本发明要解决的技术问题、技术方案和优点更加清楚,下面将结合附图及具体实施例进行详细描述。In order to make the technical problems, technical solutions and advantages to be solved by the present invention clearer, the following will describe in detail with reference to the drawings and specific embodiments.
本发明提出了一种电主轴热漂移的控制装置、补偿方法及划片机,能够在划片机切割晶圆时对电主轴进行高效冷却,控制热漂移量,并通过划片机上配置的PC对电主轴热漂移进行补偿。The present invention proposes a control device, a compensation method and a dicing machine for the thermal drift of the electric spindle, which can efficiently cool the electric spindle when the dicing machine cuts wafers, control the amount of thermal drift, and pass the PC configured on the dicing machine Compensate for thermal drift of the electro-spindle.
如图1所示:根据本发明的实施例,提供了一种电主轴热漂移的控制装置,包括:温度控制模块,用于对高速运转的电主轴进行冷却;热漂移补偿模块,用于获得冷却后的电主轴产生的热漂移量,并根据所述热漂移量对所述电主轴进行补偿。本发明的该实施例在划片机上配置的PC通过驱动器控制电主轴高速旋转时,温度控制模块对电主轴进行高效冷却,可以控制热漂移量;同时,热漂移补偿模块能够获得冷却后的电主轴产生的热漂移量,并根据所述热漂移量对所述电主轴进行补偿。具体地,热漂移补偿模块可以向PC输入控制信号。As shown in Figure 1: According to an embodiment of the present invention, a control device for thermal drift of an electric spindle is provided, including: a temperature control module for cooling a high-speed electric spindle; a thermal drift compensation module for obtaining The thermal drift generated by the cooled electric spindle, and the electric spindle is compensated according to the thermal drift. In this embodiment of the present invention, when the PC configured on the dicing machine controls the high-speed rotation of the electric spindle through the driver, the temperature control module efficiently cools the electric spindle to control the amount of thermal drift; at the same time, the thermal drift compensation module can obtain the cooled electric spindle. thermal drift generated by the spindle, and compensate the electric spindle according to the thermal drift. Specifically, the thermal drift compensation module can input a control signal to the PC.
如图2所示:根据本发明的另一实施例,提供了一种电主轴热漂移的控制装置,其中,上述温度控制模块包括:冷却液提供部、第一冷却组件和第二冷却组件;其中,第一冷却组件设置于冷却液提供部与第二冷却组件之间,用于利用来自冷却液提供部的冷却液对电主轴的第一部分进行冷却,并且用于将冷却液输送至第二冷却组件;第二冷却组件用于利用来自冷却液提供部经第一冷却组件后的冷却液对电主轴的第二部分进行冷却。As shown in FIG. 2 : according to another embodiment of the present invention, a control device for thermal drift of an electric spindle is provided, wherein the temperature control module includes: a coolant supply part, a first cooling assembly, and a second cooling assembly; Wherein, the first cooling assembly is arranged between the cooling liquid supply part and the second cooling assembly, and is used for cooling the first part of the electric spindle with the cooling liquid from the cooling liquid supply part, and for delivering the cooling liquid to the second The cooling assembly; the second cooling assembly is used for cooling the second part of the electric spindle with the cooling liquid from the cooling liquid supply part passing through the first cooling assembly.
其中,上述热漂移补偿模块包括:第一温度传感器,用于检测所述电主轴的温度,并根据检测出的温度输出对应的第一电信号;第一滤波电路,用于对所述第一电信号进行滤波,得到第一滤波后电信号,以衰减或去除所述电信号中的脉动成分;第一放大电路,用于对所述第一滤波电路输出的第一滤波后电信号进行放大,得到第一放大后电信号;第二温度传感器,用于检测所述电主轴的环境温度,并根据检测出的环境温度输出对应的第二电信号;第二滤波电路,用于对所述第二电信号进行滤波,得到第二滤波后电信号;第二放大电路,用于对所述第二滤波电路输出的第二滤波后电信号进行放大,得到第二放大后电信号;差动比例运算电路,用于获得所述第一放大电路输出的第一放大后电信号与所述第二放大电路输出的第二放大后电信号的差值,输出第三电信号;上述热漂移补偿模块还包括电主轴热漂移与温升的数学模型,设置于PC中,用于PC在接收到第三电信号后进行热漂移量计算,并进一步应用于更新控制程序,进行实时补偿。Wherein, the above-mentioned thermal drift compensation module includes: a first temperature sensor, used to detect the temperature of the electric spindle, and output a corresponding first electrical signal according to the detected temperature; a first filter circuit, used to Filtering the electrical signal to obtain a first filtered electrical signal, so as to attenuate or remove the pulsating component in the electrical signal; a first amplification circuit, configured to amplify the first filtered electrical signal output by the first filtering circuit , to obtain the first amplified electrical signal; the second temperature sensor is used to detect the ambient temperature of the electric spindle, and output the corresponding second electrical signal according to the detected ambient temperature; the second filter circuit is used to control the Filtering the second electrical signal to obtain a second filtered electrical signal; a second amplifying circuit configured to amplify the second filtered electrical signal output by the second filtering circuit to obtain a second amplified electrical signal; differential A proportional operation circuit, used to obtain the difference between the first amplified electrical signal output by the first amplifying circuit and the second amplified electrical signal output by the second amplifying circuit, and output a third electrical signal; the above thermal drift compensation The module also includes the mathematical model of thermal drift and temperature rise of the electric spindle, which is set in the PC for calculating the thermal drift after the PC receives the third electrical signal, and is further applied to update the control program for real-time compensation.
示例性地,第一温度传感器根据检测出的电主轴温度输出的信号可以是电压信号或电流信号。类似地,第二温度传感器根据检测出的环境温度输出的信号可以是电压信号或电流信号。Exemplarily, the signal output by the first temperature sensor according to the detected temperature of the electric spindle may be a voltage signal or a current signal. Similarly, the signal output by the second temperature sensor according to the detected ambient temperature may be a voltage signal or a current signal.
应当注意,尽管图2中示出了温度传感器,但是本发明并不限于此,在实际应用中,可以采用各种能够检测温度的仪器或设备,并通过通信接口向PC机传输信号;另外,本发明的第一温度传感器可以采用多个,以便更精确地采集电主轴的温度数据。It should be noted that although a temperature sensor is shown in Figure 2, the present invention is not limited thereto. In practical applications, various instruments or equipment capable of detecting temperature can be used, and the signals are transmitted to the PC through the communication interface; in addition, Multiple first temperature sensors of the present invention can be used in order to collect the temperature data of the electric spindle more accurately.
如图3所示:根据本发明的又一实施例,提供了一种电主轴热漂移的控制装置,其中,上述温度控制模块具体包括:冷却液提供部、第一冷却组件和第二冷却组件;其中,第一冷却组件设置于冷却液提供部(未示出)与第二冷却组件之间,用于利用来自冷却液提供部(未示出)的冷却液对电主轴的第一轴段进行冷却,并且用于将冷却液输送至第二冷却组件;其中,第一轴段为容纳径向轴承12的轴段;第二冷却组件用于利用来自冷却液提供部提供的经第一冷却组件后的冷却液对电主轴的第二轴段进行冷却;其中,第二轴段为容纳电机定子9的轴段。As shown in Figure 3: according to another embodiment of the present invention, a control device for thermal drift of an electric spindle is provided, wherein the above-mentioned temperature control module specifically includes: a coolant supply part, a first cooling assembly and a second cooling assembly ; Wherein, the first cooling assembly is arranged between the cooling liquid supply part (not shown) and the second cooling assembly, for using the cooling liquid from the cooling liquid supply part (not shown) to the first shaft section of the electric spindle cooling, and used to deliver cooling liquid to the second cooling assembly; wherein, the first shaft section is the shaft section that accommodates the radial bearing 12; the second cooling assembly is used to utilize the first cooling provided from the cooling liquid supply part The coolant after the assembly cools the second shaft section of the electric spindle; wherein, the second shaft section is the shaft section that accommodates the motor stator 9 .
具体地,第一冷却组件包括第一外壳2和第一衬套1;其中,第一外壳2设置有至少一个凹槽,凹槽沿所述电主轴的转轴的轴向在第一外壳2的内表面延伸,第一衬套1的外表面与第一外壳2的内表面固定并贴合,使凹槽形成用于容纳冷却液的密封通道201;第一衬套1的内表面与径向轴承12的外表面贴合;径向轴承12呈筒状,其中容纳有转轴13;转轴13上设置有电机转子8。Specifically, the first cooling assembly includes a first casing 2 and a first bushing 1; wherein, the first casing 2 is provided with at least one groove, and the groove is arranged on the first casing 2 along the axial direction of the rotation axis of the electric spindle. The inner surface extends, and the outer surface of the first bushing 1 is fixed and attached to the inner surface of the first shell 2, so that the groove forms a sealed channel 201 for containing the cooling liquid; the inner surface of the first bushing 1 and the radial direction The outer surface of the bearing 12 is bonded; the radial bearing 12 is in the shape of a cylinder, and a rotating shaft 13 is accommodated therein; the motor rotor 8 is arranged on the rotating shaft 13 .
第二冷却组件包括第二外壳3和第二衬套4,其中,第二衬套4设置有至少一个凹槽,凹槽沿所述电主轴的转轴的轴向在第二衬套4的外表面延伸,第二外壳3的内表面与第二衬套4的外表面之间形成具有凹槽的容纳冷却液的密封通道401;第二衬套4的内表面与电机定子9的外表面贴合;电机定子9呈筒状,其中容纳有电机转子8;电机转子8设置于转轴13上。The second cooling assembly includes a second housing 3 and a second bushing 4, wherein the second bushing 4 is provided with at least one groove, and the groove is outside the second bushing 4 along the axial direction of the rotating shaft of the electric spindle. Surface extension, between the inner surface of the second housing 3 and the outer surface of the second bushing 4 forms a sealed channel 401 with a groove to accommodate the cooling liquid; the inner surface of the second bushing 4 is in close contact with the outer surface of the motor stator 9 Together; the motor stator 9 is cylindrical, which accommodates the motor rotor 8; the motor rotor 8 is set on the shaft 13.
可选地,来自冷却液提供部(未示出)的冷却液依次经管接头7、后端盖5的冷却液通道502、第二外壳3的冷却液通道303、第一外壳2的冷却液通道203后进入第一冷却组件的冷却液的密封通道201,对容纳有所述转轴13的径向轴承12、第一衬套1以及第一外壳2进行冷却。Optionally, the cooling liquid from the cooling liquid supply part (not shown) sequentially passes through the pipe joint 7, the cooling liquid channel 502 of the rear end cover 5, the cooling liquid channel 303 of the second shell 3, and the cooling liquid channel of the first shell 2 After 203 , the coolant enters the sealed channel 201 of the first cooling assembly to cool the radial bearing 12 , the first bush 1 and the first housing 2 that accommodate the rotating shaft 13 .
可选地,第一冷却组件与第二冷却组件通过第一外壳2的冷却液通道202、第二外壳3的冷却液通道301连通。Optionally, the first cooling assembly communicates with the second cooling assembly through the cooling liquid channel 202 of the first shell 2 and the cooling liquid channel 301 of the second shell 3 .
可选地,来自冷却液提供部(未示出)的冷却液经过上述冷却液通道后,进入第二冷却组件的冷却液的密封通道401,对容纳有所述电机转子8的电机定子9、第二衬套4以及第二外壳3进行冷却。Optionally, the cooling liquid from the cooling liquid supply part (not shown) enters the sealed passage 401 of the cooling liquid of the second cooling assembly after passing through the above-mentioned cooling liquid channel, and the motor stator 9, The second bush 4 and the second casing 3 are cooled.
可选地,从第二冷却组件流出的冷却液依次经第二外壳3的冷却液通道302、后端盖5的冷却液通道501和管接头6后排出。Optionally, the cooling liquid flowing out from the second cooling assembly passes through the cooling liquid channel 302 of the second housing 3 , the cooling liquid channel 501 of the rear end cover 5 and the pipe joint 6 and then is discharged.
可选地,不同的冷却液通道之间可以设置密封圈,密封通道的边界配合面之间也可以设置密封圈,防止冷却液的非预期流动;示例性地,冷却液通道303与冷却液通道203之间设置有密封圈11,第二外壳3和第二衬套4之间设置密封圈10。Optionally, sealing rings can be provided between different cooling liquid passages, and sealing rings can also be provided between the boundary mating surfaces of the sealing passages to prevent unexpected flow of cooling liquid; for example, the cooling liquid passage 303 and the cooling liquid passage A sealing ring 11 is arranged between 203 , and a sealing ring 10 is arranged between the second shell 3 and the second bushing 4 .
借助于上述装置,通过设置第一冷却组件和第二冷却组件,能够在划片机切割晶圆时对电主轴进行高效冷却,降低电主轴的温升,有效控制电主轴的热漂移量,从而提高划片机的热稳定性和加工精度。With the help of the above device, by setting the first cooling assembly and the second cooling assembly, the electric spindle can be efficiently cooled when the dicing machine cuts the wafer, the temperature rise of the electric spindle can be reduced, and the thermal drift of the electric spindle can be effectively controlled, thereby Improve the thermal stability and processing accuracy of the dicing machine.
如图4所示,在热漂移补偿模块中:As shown in Figure 4, in the thermal drift compensation module:
第一滤波电路可以包括:第一电阻R11、第一反馈电阻R14、第二电阻R12、第一电容C11、第三电阻R13、第二电容C12和第一滤波放大器(该第一滤波放大器优选型号为LM6132BIN的滤波放大器,根据实际需要,也可以采用其它型号的滤波放大器)F11;其中,第一温度传感器的输出端、第二电阻R12、第一电容C11、第三电阻R13以及第一滤波放大器F11的正输入端串联;第二电容C12一端接地,另一端连接至第三电阻R13与第一滤波放大器F11的正输入端之间;第一滤波放大器F11与偏置电压Vcc连接;第一反馈电阻R14的一端与第一滤波放大器F11的负输入端连接,另一端与第一滤波放大器F11的输出端连接;第一电阻R11的一端与第一REF端(参考电压端)连接,另一端连接至第一反馈电阻R14与第一滤波放大器F11的负输入端之间。The first filter circuit may include: a first resistor R11, a first feedback resistor R14, a second resistor R12, a first capacitor C11, a third resistor R13, a second capacitor C12 and a first filter amplifier (the preferred model of the first filter amplifier It is the filter amplifier of LM6132BIN, according to actual needs, other types of filter amplifiers) F11 can also be used; wherein, the output terminal of the first temperature sensor, the second resistor R12, the first capacitor C11, the third resistor R13 and the first filter amplifier The positive input terminal of F11 is connected in series; one end of the second capacitor C12 is grounded, and the other end is connected between the third resistor R13 and the positive input terminal of the first filter amplifier F11; the first filter amplifier F11 is connected to the bias voltage Vcc; the first feedback One end of the resistor R14 is connected to the negative input terminal of the first filter amplifier F11, and the other end is connected to the output terminal of the first filter amplifier F11; one end of the first resistor R11 is connected to the first REF terminal (reference voltage terminal), and the other end is connected to Between the first feedback resistor R14 and the negative input terminal of the first filter amplifier F11.
第一放大电路包括:第四电阻R15、第二反馈电阻R17、第五电阻R16和第一运算放大器(该第一运算放大器优选型号为M54563P的运算放大器芯片,该芯片的型号不限于此,根据实际需要,也可以采用其它型号的芯片)F12;其中,第四电阻R15的一端与第一滤波放大器F11的输出端连接,另一端与第一运算放大器F12的正输入端连接;第一运算放大器F12的负输入端经第五电阻R16接地;第二反馈电阻R17的一端与第一运算放大器F12的正输入端连接,另一端与第一运算放大器的输出端连接。The first amplifying circuit comprises: the fourth resistor R15, the second feedback resistor R17, the fifth resistor R16 and a first operational amplifier (the preferred model of the first operational amplifier is an operational amplifier chip of M54563P, the model of this chip is not limited thereto, according to In actual needs, other types of chips can also be used) F12; wherein, one end of the fourth resistor R15 is connected to the output end of the first filter amplifier F11, and the other end is connected to the positive input end of the first operational amplifier F12; the first operational amplifier The negative input terminal of F12 is grounded through the fifth resistor R16; one end of the second feedback resistor R17 is connected to the positive input terminal of the first operational amplifier F12, and the other end is connected to the output terminal of the first operational amplifier.
第二滤波电路可以包括:第六电阻R21、第三反馈电阻R24、第七电阻R22、第三电容C21、第八电阻R23、第四电容C22和第二滤波放大器(该第二滤波放大器优选型号为LM6132BIN的滤波放大器,根据实际需要,也可以采用其它型号的滤波放大器)F21;其中,第二温度传感器的输出端、第七电阻R22、第三电容C21、第八电阻R23与第二滤波放大器F21的正输入端串联;第四电容C22一端接地,另一端连接至第八电阻R23与第二滤波放大器F21的正输入端之间;第二滤波放大器F21与偏置电压Vcc连接;第三反馈电阻R24的一端与第二滤波放大器F21的负输入端连接,另一端与第二滤波放大器F21的输出端连接;第六电阻R21的一端与第二REF端(参考电压端)连接,另一端连接至第三反馈电阻R24与第二滤波放大器F21的负输入端之间。The second filter circuit may include: a sixth resistor R21, a third feedback resistor R24, a seventh resistor R22, a third capacitor C21, an eighth resistor R23, a fourth capacitor C22, and a second filter amplifier (the second filter amplifier preferably has a model It is the filter amplifier of LM6132BIN, according to actual needs, other types of filter amplifiers can also be used) F21; wherein, the output terminal of the second temperature sensor, the seventh resistor R22, the third capacitor C21, the eighth resistor R23 and the second filter amplifier The positive input terminal of F21 is connected in series; one end of the fourth capacitor C22 is grounded, and the other end is connected between the eighth resistor R23 and the positive input terminal of the second filter amplifier F21; the second filter amplifier F21 is connected to the bias voltage Vcc; the third feedback One end of the resistor R24 is connected to the negative input terminal of the second filter amplifier F21, and the other end is connected to the output terminal of the second filter amplifier F21; one end of the sixth resistor R21 is connected to the second REF terminal (reference voltage terminal), and the other end is connected to Between the third feedback resistor R24 and the negative input terminal of the second filter amplifier F21.
第二放大电路包括:第九电阻R25、第四反馈电阻R27、第十电阻R26和第二运算放大器(该第二运算放大器优选型号为M54563P的运算放大器芯片,该芯片的型号不限于此,根据实际需要,也可以采用其他型号的芯片)F22;其中,第九电阻R25的一端连接至第二滤波放大器F21的输出端,另一端连接至第二运算放大器F22的正输入端;第二运算放大器F22的负输入端经第十电阻R26接地;第四反馈电阻R27的一端与第二运算放大器F22的正输入端连接,另一端与第二运算放大器的输出端连接。The second amplifying circuit comprises: the ninth resistor R25, the fourth feedback resistor R27, the tenth resistor R26 and a second operational amplifier (the preferred model of the second operational amplifier is an operational amplifier chip of M54563P, the model of the chip is not limited thereto, according to In actual needs, other types of chips can also be used) F22; wherein, one end of the ninth resistor R25 is connected to the output end of the second filter amplifier F21, and the other end is connected to the positive input end of the second operational amplifier F22; the second operational amplifier The negative input terminal of F22 is grounded through the tenth resistor R26; one end of the fourth feedback resistor R27 is connected to the positive input terminal of the second operational amplifier F22, and the other end is connected to the output terminal of the second operational amplifier.
差动比例运算电路包括:第十一电阻R18、第十二电阻R19、第十三电阻R28、第五反馈电阻R29和第三运算放大器(该第三运算放大器优选型号为INA132的运算放大器芯片,该芯片的型号不限于此,根据实际需要,也可以采用其它型号的芯片)F3;其中,第十一电阻R18的一端与第一运算放大器F12的输出端连接,另一端与第三运算放大器F3的正输入端连接;第十二电阻R19的一端接地,另一端连接至第十一电阻R18与第三运算放大器F3的正输入端之间;第十三电阻R28的一端与第二运算放大器F22的输出端连接,另一端与第三运算放大器F3的负输入端连接;第五反馈电阻R29的一端与第三运算放大器F3的负输入端连接,另一端与第三运算放大器的输出端连接。The differential proportional operation circuit includes: the eleventh resistor R18, the twelfth resistor R19, the thirteenth resistor R28, the fifth feedback resistor R29 and the third operational amplifier (the preferred model of the third operational amplifier is an operational amplifier chip of INA132, The model of this chip is not limited to this, according to actual needs, also can adopt the chip of other models) F3; Wherein, one end of the eleventh resistance R18 is connected with the output terminal of the first operational amplifier F12, and the other end is connected with the output terminal of the third operational amplifier F3 One end of the twelfth resistor R19 is connected to the ground, and the other end is connected between the eleventh resistor R18 and the positive input end of the third operational amplifier F3; one end of the thirteenth resistor R28 is connected to the second operational amplifier F22 The output terminal of the fifth feedback resistor R29 is connected with the negative input terminal of the third operational amplifier F3, and the other end is connected with the negative input terminal of the third operational amplifier F3, and the other end is connected with the output terminal of the third operational amplifier F3.
根据本发明实施例的技术方案,在划片机上配置的PC通过驱动器控制电主轴高速旋转时,第一温度传感器安装于电主轴的第一外壳内,输出的第一电信号经过第一滤波电路和第一放大电路后进入差动比例运算电路的第一输入端;第二温度传感器可以安装于划片机基座(未示出)上,输出的第二电信号经过第二滤波电路和第二放大电路后进入差动比例运算电路的第二输入端;经过差动比例运算电路后输出第三电信号,并输入至PC机;从而确定电主轴热漂移的补偿量。According to the technical solution of the embodiment of the present invention, when the PC configured on the dicing machine controls the high-speed rotation of the electric spindle through the driver, the first temperature sensor is installed in the first shell of the electric spindle, and the output first electrical signal passes through the first filter circuit After entering the first input end of the differential proportional operation circuit with the first amplifying circuit; the second temperature sensor can be installed on the dicing machine base (not shown), and the second electrical signal output passes through the second filter circuit and the first The second amplifying circuit enters the second input terminal of the differential proportional operation circuit; after passing through the differential proportional operation circuit, the third electrical signal is output and input to the PC; thereby determining the compensation amount of the electric spindle thermal drift.
应当指出,第一、第二滤波电路不限于图4中的实现方式,其它滤波电路也可用于实现作为本发明实施例的第一、第二滤波电路。同样地,第一、第二放大电路不限于图4中的实现方式,其它放大电路也可用于实现作为本发明实施例的第一、第二放大电路;差动比例运算电路也不限于图4中的实现方式,其它差动比例运算电路也可用于实现作为本发明实施例的差动比例运算电路。It should be noted that the first and second filter circuits are not limited to the implementation manner shown in FIG. 4 , and other filter circuits may also be used to implement the first and second filter circuits as embodiments of the present invention. Similarly, the first and second amplifying circuits are not limited to the implementation in Fig. 4, and other amplifying circuits can also be used to realize the first and second amplifying circuits as embodiments of the present invention; the differential proportional operation circuit is not limited to Fig. 4 In the implementation manner, other differential proportional operation circuits can also be used to realize the differential proportional operation circuit as the embodiment of the present invention.
本发明还提供了一种划片机,包括电主轴,以及根据本发明的上述电主轴热漂移的控制装置。The present invention also provides a dicing machine, including an electric spindle, and the above-mentioned electric spindle thermal drift control device according to the present invention.
本发明通过设置包括冷却液提供部、第一冷却组件和第二冷却组件的温度控制模块,在划片机切割晶圆时对电主轴进行高效冷却,可以控制热漂移量;在划片机上配置的PC通过驱动器控制电主轴高速旋转时,本发明提供的热漂移补偿模块能够将第三电信号输入PC,从而确定电主轴热漂移的补偿量;进而有效解决了相关技术中由于划片机电主轴的热漂移造成的晶圆划切质量不良甚至报废的问题,提高了生产效能。In the present invention, by setting a temperature control module including a cooling liquid supply part, a first cooling assembly, and a second cooling assembly, the electric spindle is efficiently cooled when the dicing machine cuts wafers, and the amount of thermal drift can be controlled; it is configured on the dicing machine When the PC controls the high-speed rotation of the electric spindle through the driver, the thermal drift compensation module provided by the present invention can input the third electrical signal into the PC, thereby determining the compensation amount of the electric spindle thermal drift; Wafer dicing quality is poor or even scrapped due to thermal drift, which improves production efficiency.
以上所述是本发明的优选实施方式,应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明所述原理的前提下,还可以作出若干改进和润饰,这些改进和润饰也应视为本发明的保护范围。The above description is a preferred embodiment of the present invention, it should be pointed out that for those of ordinary skill in the art, without departing from the principle of the present invention, some improvements and modifications can also be made, and these improvements and modifications can also be made. It should be regarded as the protection scope of the present invention.
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110377546.5A CN103137515B (en) | 2011-11-23 | 2011-11-23 | Control device and compensation method of motorized spindle thermal drift and dicing machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110377546.5A CN103137515B (en) | 2011-11-23 | 2011-11-23 | Control device and compensation method of motorized spindle thermal drift and dicing machine |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103137515A CN103137515A (en) | 2013-06-05 |
CN103137515B true CN103137515B (en) | 2015-07-01 |
Family
ID=48497158
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201110377546.5A Active CN103137515B (en) | 2011-11-23 | 2011-11-23 | Control device and compensation method of motorized spindle thermal drift and dicing machine |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN103137515B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116944593B (en) * | 2023-09-21 | 2023-12-01 | 沈阳和研科技股份有限公司 | Dicing precision control method, dicing saw and storage medium |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1638031A (en) * | 2004-01-05 | 2005-07-13 | 台湾积体电路制造股份有限公司 | Semiconductor component manufacturing system and its thermal compensation subsystem |
CN2868594Y (en) * | 2005-11-22 | 2007-02-14 | 沈阳仪表科学研究院 | Solar cell substrate cutting machine |
CN201674349U (en) * | 2010-05-25 | 2010-12-15 | 北京精雕精密机械制造有限公司 | Internal-and-external-cooled high-speed electric spindle |
CN102120266A (en) * | 2010-12-27 | 2011-07-13 | 东莞理工学院 | High-speed precise electric spindle cooling system |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7839201B2 (en) * | 2005-04-01 | 2010-11-23 | Raytheon Company | Integrated smart power switch |
-
2011
- 2011-11-23 CN CN201110377546.5A patent/CN103137515B/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1638031A (en) * | 2004-01-05 | 2005-07-13 | 台湾积体电路制造股份有限公司 | Semiconductor component manufacturing system and its thermal compensation subsystem |
CN2868594Y (en) * | 2005-11-22 | 2007-02-14 | 沈阳仪表科学研究院 | Solar cell substrate cutting machine |
CN201674349U (en) * | 2010-05-25 | 2010-12-15 | 北京精雕精密机械制造有限公司 | Internal-and-external-cooled high-speed electric spindle |
CN102120266A (en) * | 2010-12-27 | 2011-07-13 | 东莞理工学院 | High-speed precise electric spindle cooling system |
Also Published As
Publication number | Publication date |
---|---|
CN103137515A (en) | 2013-06-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN201674349U (en) | Internal-and-external-cooled high-speed electric spindle | |
CN106984836A (en) | A kind of built-in dynamic/static piezoelectric main shaft of high-speed, high precision | |
US20160339553A1 (en) | Machine tool having cleaning unit | |
CN201087935Y (en) | Spindle device | |
CN106493617B (en) | A kind of center leads to the electro spindle and thinned machine of coolant liquid cooling | |
CN103137515B (en) | Control device and compensation method of motorized spindle thermal drift and dicing machine | |
CN105195764A (en) | Self-lubricating self-sealing graphite gas-floatation electrostatic pressure spindle structure | |
CN102476194A (en) | Aerostatic motorized spindle and cooling device for aerostatic motorized spindle | |
Xu et al. | Model-based vibration response analysis and experimental verification of lathe spindle-housing-belt system with rubbing | |
CN210115464U (en) | Precise outer rotor air-float main shaft | |
US20160040545A1 (en) | Method for producing a rotor of a charging apparatus | |
JP2006336826A (en) | Hydrostatic gas bearing spindle | |
CN209140700U (en) | The contact of accurate abrasive wheel cutting machine surveys the high control system of high and contactless survey | |
CN104029119B (en) | Workhead hydrostatic spindle of bearing ring grinder | |
CN113427400B (en) | High-speed air-float grinding main shaft | |
JP2009068649A (en) | Spindle device | |
CN105798334A (en) | High-efficiency machine tool spindle capable of quickly entering steady state | |
CN102343634A (en) | Overheat protecting device and method of motorized spindle and cutter | |
CN103158070A (en) | Grinding coolant input mechanism of motorized main shaft and thinner | |
CN103128864B (en) | A kind of thrust bearing and electro spindle | |
CN103138489B (en) | A kind of cooling device of electro spindle built-in motor and scribing machine | |
CN109015107B (en) | Method for quickly keeping thermal displacement of main shaft constant | |
CN110170910A (en) | A kind of scribing machine air-floating main shaft structure of the double positioning of cutterhead | |
CN107877370B (en) | Double-end main shaft | |
JP2009197942A (en) | Gas bearing spindle |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant |