CN103137515B - Control device and compensation method of motorized spindle thermal drift and dicing machine - Google Patents

Abstract

The invention provides a control device and a compensation method of motorized spindle thermal drift and a dicing machine. The control device comprises a temperature control module which is used for cooling the motorized spindle which is in high speed operation and a thermal drift compensation module which is used for obtaining thermal drift quantity which is generated by a cooled motorized spindle and performing compensation on the motorized spindle according to the thermal drift quantity. The control device and the compensation method of the motorized spindle thermal drift and the dicing machine have the advantages of being capable of efficiently cooling the motorized spindle when the dicing machine is incising a wafer and compensating the motorized spindle thermal drift through a PC (Personal Computer) which is configured on the dicing machine.

Description

Control device, compensation method and dicing machine for electric spindle thermal drift

technical field

The invention relates to the field of integrated circuit packaging equipment, in particular to a control device for thermal drift of an electric spindle, a compensation method and a dicing machine.

Background technique

The dicing machine is the key equipment for the post-packaging of integrated circuits, and its function is to divide the wafer into individual circuit units. The dicing machine generally uses an aerostatic electric spindle as the core executive component to achieve high-precision powerful grinding. In this kind of dicing machine, the performance indicators such as the stiffness, rotation accuracy, output power and thermal drift of the aerostatic electric spindle directly determine the cutting accuracy of the dicing machine. With the rapid development of the integrated circuit manufacturing industry in the direction of high precision and high speed, the quality requirements of wafer dicing are getting higher and higher.

When the dicing machine is working, the aerostatic electric spindle rotates at high speed, and the diamond blade installed on the electric spindle strongly grinds the linearly moving wafer. During this process, the loss of the built-in high-frequency motor of the electric spindle and the shear friction of the air bearing air film will inevitably produce considerable heat accumulation. In the currently mainly used aerostatic electric spindles, usually only the motor stator is cooled by means of circulating water, etc., and the heat that cannot be quickly and effectively dissipated on the rotating shaft causes temperature rise and thermal drift, causing the scribe groove to deviate from the wafer pattern In severe cases, expensive wafers are directly scrapped.

The industry has not yet proposed an effective solution to the problem in the related art that the wafer dicing quality is poor or even scrapped due to the thermal drift of the electrical spindle of the dicing machine.

Contents of the invention

The technical problem to be solved by the present invention is to provide a control device for the thermal drift of the electric spindle, a compensation method and a dicing machine, which can efficiently cool the electric spindle when the dicing machine cuts wafers, control the amount of thermal drift, and pass the scribing The PC configured on the chip machine compensates the thermal drift of the electric spindle, thus effectively solving the problem of poor wafer scribing quality or even scrapping.

In order to solve the above technical problems, the present invention provides a control device for thermal drift of the electric spindle, including:

The temperature control module is used to cool the high-speed electric spindle;

The thermal drift compensation module is used to obtain the thermal drift generated by the cooled electric spindle, and compensate the electric spindle according to the thermal drift.

Preferably, the temperature control module includes:

a coolant supply part, used for supplying coolant;

a first cooling assembly, configured to cool the first part of the electric spindle with the cooling liquid provided by the cooling liquid supply part;

The second cooling assembly is configured to cool the second portion of the electric spindle with the cooling liquid output by the first cooling assembly after the first cooling assembly cools the first portion of the electric spindle.

Preferably, the first cooling assembly includes: a first shell and a first bushing;

The first housing is provided with at least one groove, and the groove extends on the inner surface of the first housing along the axial direction of the rotating shaft of the electric spindle;

The outer surface of the first bush is fixed and bonded to the inner surface of the first shell, so that the groove forms a sealed channel for accommodating cooling liquid;

The inner surface of the first bush is in contact with the outer surface of the radial bearing of the electric spindle;

The radial bearing is in the shape of a cylinder, in which the rotating shaft is accommodated;

A motor rotor is arranged on the rotating shaft.

Preferably, the second cooling assembly includes: a second shell and a second bushing;

The second bush is provided with at least one groove, and the groove extends on the outer surface of the second bush along the axial direction of the rotating shaft of the electric spindle;

A sealed channel with a groove for containing cooling liquid is formed between the inner surface of the second shell and the outer surface of the second bush;

The inner surface of the second bush is attached to the outer surface of the motor stator;

The motor stator is in a cylindrical shape, and the motor rotor is accommodated therein;

The motor rotor is arranged on the rotating shaft.

Preferably, the thermal drift compensation module includes:

a first temperature sensor, configured to detect the temperature of the electric spindle, and output a first electrical signal according to the temperature;

a first filter circuit, configured to filter the first electrical signal to obtain a first filtered electrical signal;

a first amplifying circuit, configured to amplify the first filtered electrical signal to obtain a first amplified electrical signal;

a second temperature sensor, configured to detect the ambient temperature of the electric spindle, and output a second electrical signal according to the ambient temperature;

a second filter circuit, configured to filter the second electrical signal to obtain a second filtered electrical signal;

a second amplifying circuit, configured to amplify the second filtered electrical signal to obtain a second amplified electrical signal;

The differential proportional operation circuit is used to obtain the difference between the first amplified electrical signal and the second amplified electrical signal, and output a third electrical signal.

Preferably, the first filter circuit includes: a first resistor, a first feedback resistor, a second resistor, a first capacitor, a third resistor, a second capacitor, and a first filter amplifier; wherein, the first temperature sensor The output terminal, the second resistor, the first capacitor, the third resistor, and the positive input of the first filter amplifier are connected in series; one end of the second capacitor is grounded, and the other end is connected to the third resistor Between the positive input terminal of the first filter amplifier; the first filter amplifier is connected to the bias voltage; one end of the first feedback resistor is connected to the negative input terminal of the first filter amplifier, and the other end is connected to the negative input terminal of the first filter amplifier. The output end of the first filter amplifier is connected; one end of the first resistor is connected to the first reference voltage end, and the other end is connected between the first feedback resistor and the negative input end of the first filter amplifier;

The first amplifying circuit includes: a fourth resistor, a second feedback resistor, a fifth resistor, and a first operational amplifier; wherein, one end of the fourth resistor is connected to the output end of the first filter amplifier, and the other end is connected to the output end of the first filter amplifier. The positive input terminal of the first operational amplifier is connected; the negative input terminal of the first operational amplifier is grounded through the fifth resistor; one end of the second feedback resistor is connected with the positive input terminal of the first operational amplifier , the other end is connected to the output end of the first operational amplifier;

The second filter circuit includes: a sixth resistor, a third feedback resistor, a seventh resistor, a third capacitor, an eighth resistor, a fourth capacitor, and a second filter amplifier; wherein, the output terminal of the second temperature sensor, The seventh resistor, the third capacitor, the eighth resistor, and the positive input terminal of the second filter amplifier are connected in series; one end of the fourth capacitor is grounded, and the other end is connected to the eighth resistor and the Between the positive input terminals of the second filter amplifier; the second filter amplifier is connected to the bias voltage; the third feedback resistor connects the negative input terminal of the second filter amplifier to the output terminal of the second filter amplifier; the sixth One end of the resistor is connected to the second reference voltage end, and the other end is connected between the third feedback resistor and the negative input end of the second filter amplifier;

The second amplifying circuit includes: a ninth resistor, a fourth feedback resistor, a tenth resistor, and a second operational amplifier; wherein, one end of the ninth resistor is connected to the output end of the second filter amplifier, and the other end is connected to the output end of the second filter amplifier. The positive input terminal of the second operational amplifier is connected; the negative input terminal of the second operational amplifier is grounded through the tenth resistor; one end of the fourth feedback resistor is connected to the positive input terminal of the second operational amplifier, The other end is connected to the output end of the second operational amplifier;

The differential proportional operation circuit includes: an eleventh resistor, a twelfth resistor, a thirteenth resistor, a fifth feedback resistor and a third operational amplifier; wherein, one end of the eleventh resistor is connected to the first operational amplifier The output end of the amplifier is connected, and the other end is connected with the positive input end of the third operational amplifier; one end of the twelfth resistor is grounded, and the other end is connected to the eleventh resistor and the positive input end of the third operational amplifier. Between the input terminals; one end of the thirteenth resistor is connected to the output terminal of the second operational amplifier, and the other end is connected to the negative input terminal of the third operational amplifier; one end of the fifth feedback resistor is connected to the output terminal of the second operational amplifier; The negative input terminal of the third operational amplifier is connected, and the other end is connected with the output terminal of the third operational amplifier.

On the other hand, the present invention also provides a method for compensating the thermal drift of the electric spindle, including:

Cool the electric spindle running at high speed;

Obtain the thermal drift generated by the cooled electric spindle;

Real-time compensation is performed on the electric spindle according to the thermal drift.

Preferably, the step of obtaining the thermal drift generated by the cooled electric spindle comprises:

detecting the temperature of the electric spindle, and outputting a first electrical signal according to the temperature;

filtering the first electrical signal to obtain a filtered first filtered electrical signal;

amplifying the first filtered electrical signal to obtain an amplified first amplified electrical signal;

detecting the ambient temperature of the electric spindle, and outputting a second electrical signal according to the ambient temperature;

filtering the second electrical signal to obtain a filtered second filtered electrical signal;

amplifying the second filtered electrical signal to obtain an amplified second amplified electrical signal;

obtaining a difference between the first amplified electrical signal and the second amplified electrical signal;

output a third electrical signal.

Preferably, after outputting the third electrical signal, the method further includes:

Obtaining the thermal drift of the electric spindle according to the third electrical signal;

Real-time compensation is performed on the electric spindle according to the thermal drift.

In yet another aspect, the present invention also provides a dicing machine, including an electric spindle, and the above-mentioned device for controlling thermal drift of the electric spindle.

The beneficial effects of above-mentioned technical scheme of the present invention are as follows:

In the above solution, the control device can efficiently cool the electric spindle when the dicing machine cuts wafers, control the amount of thermal drift, and compensate the thermal drift of the electric spindle through the PC configured on the dicing machine, thereby effectively solving the problem of wafer scribing. All problems of poor quality or even scrapping.

Description of drawings

FIG. 1 is a structural block diagram of a control device for thermal drift of an electric spindle according to an embodiment of the present invention;

Fig. 2 is a specific structural block diagram of a control device for thermal drift of an electric spindle according to another embodiment of the present invention;

Fig. 3 is a structural schematic diagram of a control device for thermal drift of an electric spindle according to another embodiment of the present invention;

FIG. 4 is a schematic structural diagram of a device for controlling thermal drift of an electric spindle according to another embodiment of the present invention.

Detailed ways

In order to make the technical problems, technical solutions and advantages to be solved by the present invention clearer, the following will describe in detail with reference to the drawings and specific embodiments.

The present invention proposes a control device, a compensation method and a dicing machine for the thermal drift of the electric spindle, which can efficiently cool the electric spindle when the dicing machine cuts wafers, control the amount of thermal drift, and pass the PC configured on the dicing machine Compensate for thermal drift of the electro-spindle.

As shown in Figure 1: According to an embodiment of the present invention, a control device for thermal drift of an electric spindle is provided, including: a temperature control module for cooling a high-speed electric spindle; a thermal drift compensation module for obtaining The thermal drift generated by the cooled electric spindle, and the electric spindle is compensated according to the thermal drift. In this embodiment of the present invention, when the PC configured on the dicing machine controls the high-speed rotation of the electric spindle through the driver, the temperature control module efficiently cools the electric spindle to control the amount of thermal drift; at the same time, the thermal drift compensation module can obtain the cooled electric spindle. thermal drift generated by the spindle, and compensate the electric spindle according to the thermal drift. Specifically, the thermal drift compensation module can input a control signal to the PC.

As shown in FIG. 2 : according to another embodiment of the present invention, a control device for thermal drift of an electric spindle is provided, wherein the temperature control module includes: a coolant supply part, a first cooling assembly, and a second cooling assembly; Wherein, the first cooling assembly is arranged between the cooling liquid supply part and the second cooling assembly, and is used for cooling the first part of the electric spindle with the cooling liquid from the cooling liquid supply part, and for delivering the cooling liquid to the second The cooling assembly; the second cooling assembly is used for cooling the second part of the electric spindle with the cooling liquid from the cooling liquid supply part passing through the first cooling assembly.

Wherein, the above-mentioned thermal drift compensation module includes: a first temperature sensor, used to detect the temperature of the electric spindle, and output a corresponding first electrical signal according to the detected temperature; a first filter circuit, used to Filtering the electrical signal to obtain a first filtered electrical signal, so as to attenuate or remove the pulsating component in the electrical signal; a first amplification circuit, configured to amplify the first filtered electrical signal output by the first filtering circuit , to obtain the first amplified electrical signal; the second temperature sensor is used to detect the ambient temperature of the electric spindle, and output the corresponding second electrical signal according to the detected ambient temperature; the second filter circuit is used to control the Filtering the second electrical signal to obtain a second filtered electrical signal; a second amplifying circuit configured to amplify the second filtered electrical signal output by the second filtering circuit to obtain a second amplified electrical signal; differential A proportional operation circuit, used to obtain the difference between the first amplified electrical signal output by the first amplifying circuit and the second amplified electrical signal output by the second amplifying circuit, and output a third electrical signal; the above thermal drift compensation The module also includes the mathematical model of thermal drift and temperature rise of the electric spindle, which is set in the PC for calculating the thermal drift after the PC receives the third electrical signal, and is further applied to update the control program for real-time compensation.

Exemplarily, the signal output by the first temperature sensor according to the detected temperature of the electric spindle may be a voltage signal or a current signal. Similarly, the signal output by the second temperature sensor according to the detected ambient temperature may be a voltage signal or a current signal.

It should be noted that although a temperature sensor is shown in Figure 2, the present invention is not limited thereto. In practical applications, various instruments or equipment capable of detecting temperature can be used, and the signals are transmitted to the PC through the communication interface; in addition, Multiple first temperature sensors of the present invention can be used in order to collect the temperature data of the electric spindle more accurately.

As shown in Figure 3: according to another embodiment of the present invention, a control device for thermal drift of an electric spindle is provided, wherein the above-mentioned temperature control module specifically includes: a coolant supply part, a first cooling assembly and a second cooling assembly ; Wherein, the first cooling assembly is arranged between the cooling liquid supply part (not shown) and the second cooling assembly, for using the cooling liquid from the cooling liquid supply part (not shown) to the first shaft section of the electric spindle cooling, and used to deliver cooling liquid to the second cooling assembly; wherein, the first shaft section is the shaft section that accommodates the radial bearing 12; the second cooling assembly is used to utilize the first cooling provided from the cooling liquid supply part The coolant after the assembly cools the second shaft section of the electric spindle; wherein, the second shaft section is the shaft section that accommodates the motor stator 9 .

Specifically, the first cooling assembly includes a first casing 2 and a first bushing 1; wherein, the first casing 2 is provided with at least one groove, and the groove is arranged on the first casing 2 along the axial direction of the rotation axis of the electric spindle. The inner surface extends, and the outer surface of the first bushing 1 is fixed and attached to the inner surface of the first shell 2, so that the groove forms a sealed channel 201 for containing the cooling liquid; the inner surface of the first bushing 1 and the radial direction The outer surface of the bearing 12 is bonded; the radial bearing 12 is in the shape of a cylinder, and a rotating shaft 13 is accommodated therein; the motor rotor 8 is arranged on the rotating shaft 13 .

The second cooling assembly includes a second housing 3 and a second bushing 4, wherein the second bushing 4 is provided with at least one groove, and the groove is outside the second bushing 4 along the axial direction of the rotating shaft of the electric spindle. Surface extension, between the inner surface of the second housing 3 and the outer surface of the second bushing 4 forms a sealed channel 401 with a groove to accommodate the cooling liquid; the inner surface of the second bushing 4 is in close contact with the outer surface of the motor stator 9 Together; the motor stator 9 is cylindrical, which accommodates the motor rotor 8; the motor rotor 8 is set on the shaft 13.

Optionally, the cooling liquid from the cooling liquid supply part (not shown) sequentially passes through the pipe joint 7, the cooling liquid channel 502 of the rear end cover 5, the cooling liquid channel 303 of the second shell 3, and the cooling liquid channel of the first shell 2 After 203 , the coolant enters the sealed channel 201 of the first cooling assembly to cool the radial bearing 12 , the first bush 1 and the first housing 2 that accommodate the rotating shaft 13 .

Optionally, the first cooling assembly communicates with the second cooling assembly through the cooling liquid channel 202 of the first shell 2 and the cooling liquid channel 301 of the second shell 3 .

Optionally, the cooling liquid from the cooling liquid supply part (not shown) enters the sealed passage 401 of the cooling liquid of the second cooling assembly after passing through the above-mentioned cooling liquid channel, and the motor stator 9, The second bush 4 and the second casing 3 are cooled.

Optionally, the cooling liquid flowing out from the second cooling assembly passes through the cooling liquid channel 302 of the second housing 3 , the cooling liquid channel 501 of the rear end cover 5 and the pipe joint 6 and then is discharged.

Optionally, sealing rings can be provided between different cooling liquid passages, and sealing rings can also be provided between the boundary mating surfaces of the sealing passages to prevent unexpected flow of cooling liquid; for example, the cooling liquid passage 303 and the cooling liquid passage A sealing ring 11 is arranged between 203 , and a sealing ring 10 is arranged between the second shell 3 and the second bushing 4 .

With the help of the above device, by setting the first cooling assembly and the second cooling assembly, the electric spindle can be efficiently cooled when the dicing machine cuts the wafer, the temperature rise of the electric spindle can be reduced, and the thermal drift of the electric spindle can be effectively controlled, thereby Improve the thermal stability and processing accuracy of the dicing machine.

As shown in Figure 4, in the thermal drift compensation module:

The first filter circuit may include: a first resistor R11, a first feedback resistor R14, a second resistor R12, a first capacitor C11, a third resistor R13, a second capacitor C12 and a first filter amplifier (the preferred model of the first filter amplifier It is the filter amplifier of LM6132BIN, according to actual needs, other types of filter amplifiers) F11 can also be used; wherein, the output terminal of the first temperature sensor, the second resistor R12, the first capacitor C11, the third resistor R13 and the first filter amplifier The positive input terminal of F11 is connected in series; one end of the second capacitor C12 is grounded, and the other end is connected between the third resistor R13 and the positive input terminal of the first filter amplifier F11; the first filter amplifier F11 is connected to the bias voltage Vcc; the first feedback One end of the resistor R14 is connected to the negative input terminal of the first filter amplifier F11, and the other end is connected to the output terminal of the first filter amplifier F11; one end of the first resistor R11 is connected to the first REF terminal (reference voltage terminal), and the other end is connected to Between the first feedback resistor R14 and the negative input terminal of the first filter amplifier F11.

The first amplifying circuit comprises: the fourth resistor R15, the second feedback resistor R17, the fifth resistor R16 and a first operational amplifier (the preferred model of the first operational amplifier is an operational amplifier chip of M54563P, the model of this chip is not limited thereto, according to In actual needs, other types of chips can also be used) F12; wherein, one end of the fourth resistor R15 is connected to the output end of the first filter amplifier F11, and the other end is connected to the positive input end of the first operational amplifier F12; the first operational amplifier The negative input terminal of F12 is grounded through the fifth resistor R16; one end of the second feedback resistor R17 is connected to the positive input terminal of the first operational amplifier F12, and the other end is connected to the output terminal of the first operational amplifier.

The second filter circuit may include: a sixth resistor R21, a third feedback resistor R24, a seventh resistor R22, a third capacitor C21, an eighth resistor R23, a fourth capacitor C22, and a second filter amplifier (the second filter amplifier preferably has a model It is the filter amplifier of LM6132BIN, according to actual needs, other types of filter amplifiers can also be used) F21; wherein, the output terminal of the second temperature sensor, the seventh resistor R22, the third capacitor C21, the eighth resistor R23 and the second filter amplifier The positive input terminal of F21 is connected in series; one end of the fourth capacitor C22 is grounded, and the other end is connected between the eighth resistor R23 and the positive input terminal of the second filter amplifier F21; the second filter amplifier F21 is connected to the bias voltage Vcc; the third feedback One end of the resistor R24 is connected to the negative input terminal of the second filter amplifier F21, and the other end is connected to the output terminal of the second filter amplifier F21; one end of the sixth resistor R21 is connected to the second REF terminal (reference voltage terminal), and the other end is connected to Between the third feedback resistor R24 and the negative input terminal of the second filter amplifier F21.

The second amplifying circuit comprises: the ninth resistor R25, the fourth feedback resistor R27, the tenth resistor R26 and a second operational amplifier (the preferred model of the second operational amplifier is an operational amplifier chip of M54563P, the model of the chip is not limited thereto, according to In actual needs, other types of chips can also be used) F22; wherein, one end of the ninth resistor R25 is connected to the output end of the second filter amplifier F21, and the other end is connected to the positive input end of the second operational amplifier F22; the second operational amplifier The negative input terminal of F22 is grounded through the tenth resistor R26; one end of the fourth feedback resistor R27 is connected to the positive input terminal of the second operational amplifier F22, and the other end is connected to the output terminal of the second operational amplifier.

The differential proportional operation circuit includes: the eleventh resistor R18, the twelfth resistor R19, the thirteenth resistor R28, the fifth feedback resistor R29 and the third operational amplifier (the preferred model of the third operational amplifier is an operational amplifier chip of INA132, The model of this chip is not limited to this, according to actual needs, also can adopt the chip of other models) F3; Wherein, one end of the eleventh resistance R18 is connected with the output terminal of the first operational amplifier F12, and the other end is connected with the output terminal of the third operational amplifier F3 One end of the twelfth resistor R19 is connected to the ground, and the other end is connected between the eleventh resistor R18 and the positive input end of the third operational amplifier F3; one end of the thirteenth resistor R28 is connected to the second operational amplifier F22 The output terminal of the fifth feedback resistor R29 is connected with the negative input terminal of the third operational amplifier F3, and the other end is connected with the negative input terminal of the third operational amplifier F3, and the other end is connected with the output terminal of the third operational amplifier F3.

According to the technical solution of the embodiment of the present invention, when the PC configured on the dicing machine controls the high-speed rotation of the electric spindle through the driver, the first temperature sensor is installed in the first shell of the electric spindle, and the output first electrical signal passes through the first filter circuit After entering the first input end of the differential proportional operation circuit with the first amplifying circuit; the second temperature sensor can be installed on the dicing machine base (not shown), and the second electrical signal output passes through the second filter circuit and the first The second amplifying circuit enters the second input terminal of the differential proportional operation circuit; after passing through the differential proportional operation circuit, the third electrical signal is output and input to the PC; thereby determining the compensation amount of the electric spindle thermal drift.

It should be noted that the first and second filter circuits are not limited to the implementation manner shown in FIG. 4 , and other filter circuits may also be used to implement the first and second filter circuits as embodiments of the present invention. Similarly, the first and second amplifying circuits are not limited to the implementation in Fig. 4, and other amplifying circuits can also be used to realize the first and second amplifying circuits as embodiments of the present invention; the differential proportional operation circuit is not limited to Fig. 4 In the implementation manner, other differential proportional operation circuits can also be used to realize the differential proportional operation circuit as the embodiment of the present invention.

The present invention also provides a dicing machine, including an electric spindle, and the above-mentioned electric spindle thermal drift control device according to the present invention.

In the present invention, by setting a temperature control module including a cooling liquid supply part, a first cooling assembly, and a second cooling assembly, the electric spindle is efficiently cooled when the dicing machine cuts wafers, and the amount of thermal drift can be controlled; it is configured on the dicing machine When the PC controls the high-speed rotation of the electric spindle through the driver, the thermal drift compensation module provided by the present invention can input the third electrical signal into the PC, thereby determining the compensation amount of the electric spindle thermal drift; Wafer dicing quality is poor or even scrapped due to thermal drift, which improves production efficiency.

The above description is a preferred embodiment of the present invention, it should be pointed out that for those of ordinary skill in the art, without departing from the principle of the present invention, some improvements and modifications can also be made, and these improvements and modifications can also be made. It should be regarded as the protection scope of the present invention.

Claims (7)

1. a control device for electro spindle thermal drift, is characterized in that, comprising:

Temperature control modules, for cooling the electro spindle run up;

Thermal drift compensation module, for obtaining the thermal drift amount that cooled electro spindle produces, and compensates described electro spindle according to described thermal drift amount;

Described thermal drift compensation module comprises:

First temperature sensor, for detecting the temperature of described electro spindle, and exports first signal of telecommunication according to described temperature;

First filter circuit, for carrying out filtering to described first signal of telecommunication, obtains the signal of telecommunication after the first filtering;

First amplifying circuit, for amplifying the signal of telecommunication after described first filtering, obtains the signal of telecommunication after the first amplification;

Second temperature sensor, for detecting the ambient temperature of described electro spindle, and exports second signal of telecommunication according to described ambient temperature;

Second filter circuit, for carrying out filtering to described second signal of telecommunication, obtains the signal of telecommunication after the second filtering;

Second amplifying circuit, for amplifying the signal of telecommunication after described second filtering, obtains the signal of telecommunication after the second amplification;

Differential scaling circuit, amplifying for obtaining described first the difference that the rear signal of telecommunication and described second amplifies the rear signal of telecommunication, exporting the 3rd signal of telecommunication;

Described first filter circuit comprises: the first resistance, the first feedback resistance, the second resistance, the first electric capacity, the 3rd resistance, the second electric capacity and the first filter amplifier; Wherein, the positive input terminal series connection of the output of described first temperature sensor, described second resistance, described first electric capacity, described 3rd resistance and described first filter amplifier; Described second electric capacity one end ground connection, the other end is connected between described 3rd resistance and the positive input terminal of described first filter amplifier; Described first filter amplifier is connected with bias voltage; One end of described first feedback resistance is connected with the negative input end of described first filter amplifier, and the other end is connected with the output of described first filter amplifier; One end of described first resistance is connected with the first reference voltage end, and the other end is connected between the negative input end of described first feedback resistance and described first filter amplifier;

Described first amplifying circuit comprises: the 4th resistance, the second feedback resistance, the 5th resistance and the first operational amplifier; Wherein, one end of described 4th resistance is connected with the output of described first filter amplifier, and the other end is connected with the positive input terminal of described first operational amplifier; The negative input end of described first operational amplifier is through described 5th grounding through resistance; One end of described second feedback resistance is connected with the positive input terminal of described first operational amplifier, and the other end is connected with the output of described first operational amplifier;

Described second filter circuit comprises: the 6th resistance, the 3rd feedback resistance, the 7th resistance, the 3rd electric capacity, the 8th resistance, the 4th electric capacity and the second filter amplifier; Wherein, the positive input terminal series connection of the output of described second temperature sensor, described 7th resistance, described 3rd electric capacity, described 8th resistance and described second filter amplifier; Described 4th electric capacity one end ground connection, the other end is connected between described 8th resistance and the positive input terminal of described second filter amplifier; Described second filter amplifier is connected with bias voltage; The output of the negative input end of the second filter amplifier with the second filter amplifier is connected by the 3rd feedback resistance; One end of described 6th resistance is connected with the second reference voltage end, and the other end is connected between described 3rd feedback resistance and the negative input end of described second filter amplifier;

Described second amplifying circuit comprises: the 9th resistance, the 4th feedback resistance, the tenth resistance and the second operational amplifier; Wherein, one end of described 9th resistance is connected with the output of described second filter amplifier, and the other end is connected with the positive input terminal of described second operational amplifier; The negative input end of described second operational amplifier is through described tenth grounding through resistance; Described 4th feedback resistance one end is connected with the positive input terminal of described second operational amplifier, and the other end is connected with the output of described second operational amplifier;

Described differential scaling circuit comprises: the 11 resistance, the 12 resistance, the 13 resistance, the 5th feedback resistance and the 3rd operational amplifier; Wherein, one end of described 11 resistance is connected with the output of described first operational amplifier, and the other end is connected with the positive input terminal of described 3rd operational amplifier; One end ground connection of described 12 resistance, the other end is connected between the positive input terminal of described 11 resistance and described 3rd operational amplifier; One end of described 13 resistance is connected with the output of described second operational amplifier, and the other end is connected with the negative input end of described 3rd operational amplifier; One end of described 5th feedback resistance is connected with the negative input end of described 3rd operational amplifier, and the other end is connected with the output of described 3rd operational amplifier.

2. the control device of electro spindle thermal drift according to claim 1, is characterized in that, described temperature control modules comprises:

Cooling fluid providing unit, for providing cooling fluid;

First cooling package, the Part I of cooling fluid to described electro spindle provided for utilizing described cooling fluid providing unit cools;

Second cooling package, for after the Part I of described first cooling package to described electro spindle cools, the Part II of cooling fluid to described electro spindle utilizing described first cooling package to export cools.

3. the control device of electro spindle thermal drift according to claim 2, is characterized in that,

Described first cooling package comprises: the first shell and the first lining;

Described first shell is provided with at least one groove, and described groove extends along the axial of rotating shaft of described electro spindle at the inner surface of described first shell;

The outer surface of described first lining and the inner surface of described first shell are fixed and fit, and make the seal channel of groove formation for holding cooling fluid;

The outer surface of the inner surface of described first lining and the journal bearing of described electro spindle is fitted;

Described journal bearing is tubular, wherein accommodates described rotating shaft;

Described rotating shaft is provided with rotor.

4. the control device of electro spindle thermal drift according to claim 3, is characterized in that,

Described second cooling package comprises: second housing and the second lining;

Described second lining is provided with at least one groove, and described groove extends along the axial of rotating shaft of described electro spindle at the outer surface of described second lining;

The seal channel of the reeded accommodation cooling fluid of tool is formed between the inner surface of described second housing and the outer surface of described second lining;

The inner surface of described second lining and the outer surface of motor stator are fitted;

Described motor stator is tubular, wherein accommodates described rotor;

Described rotor is arranged in described rotating shaft.

5. a compensation method for electro spindle thermal drift, is characterized in that, comprising:

The electro spindle run up is cooled;

Obtain the thermal drift amount that cooled electro spindle produces;

According to described thermal drift amount, real-Time Compensation is carried out to described electro spindle;

The step of the thermal drift amount that the cooled electro spindle of described acquisition produces comprises:

Detect the temperature of described electro spindle, and export first signal of telecommunication according to described temperature;

Filtering is carried out to described first signal of telecommunication, obtains the signal of telecommunication after filtered first filtering;

Amplify the signal of telecommunication after described first filtering, first after being amplified amplifies the rear signal of telecommunication;

Detect the ambient temperature of described electro spindle, and export second signal of telecommunication according to described ambient temperature;

Filtering is carried out to described second signal of telecommunication, obtains the signal of telecommunication after filtered second filtering;

Amplify the signal of telecommunication after described second filtering, second after being amplified amplifies the rear signal of telecommunication;

Obtain described first and amplify the difference that the rear signal of telecommunication and described second amplifies the rear signal of telecommunication;

Export the 3rd signal of telecommunication.

6. the compensation method of electro spindle thermal drift according to claim 5, is characterized in that, also comprises after described output the 3rd signal of telecommunication:

According to described 3rd signal of telecommunication, obtain the thermal drift amount of electro spindle;

According to described thermal drift amount, real-Time Compensation is carried out to described electro spindle.

7. a scribing machine, comprises electro spindle, it is characterized in that, also comprises: the control device of the electro spindle thermal drift as described in any one of claim 1-4.