CN103137515A - Control device and compensation method of motorized spindle thermal drift and dicing machine - Google Patents
Control device and compensation method of motorized spindle thermal drift and dicing machine Download PDFInfo
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- CN103137515A CN103137515A CN2011103775465A CN201110377546A CN103137515A CN 103137515 A CN103137515 A CN 103137515A CN 2011103775465 A CN2011103775465 A CN 2011103775465A CN 201110377546 A CN201110377546 A CN 201110377546A CN 103137515 A CN103137515 A CN 103137515A
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Abstract
The invention provides a control device and a compensation method of motorized spindle thermal drift and a dicing machine. The control device comprises a temperature control module which is used for cooling the motorized spindle which is in high speed operation and a thermal drift compensation module which is used for obtaining thermal drift quantity which is generated by a cooled motorized spindle and performing compensation on the motorized spindle according to the thermal drift quantity. The control device and the compensation method of the motorized spindle thermal drift and the dicing machine have the advantages of being capable of efficiently cooling the motorized spindle when the dicing machine is incising a wafer and compensating the motorized spindle thermal drift through a PC (Personal Computer) which is configured on the dicing machine.
Description
Technical field
The present invention relates to the integrated antenna package apparatus field, refer to especially a kind of control device, compensation method and scribing machine of electric main shaft thermal drift.
Background technology
Scribing machine is to encapsulate key equipment after integrated circuit, and its effect is that wafer is divided into single circuit unit.Scribing machine generally adopts air static pressure electric spindle as the core execution unit, realizes high-precision high-rate grinding manufacturing process.In this scribing machine, the performance index such as the rigidity of air static pressure electric spindle, running accuracy, power output and thermal drift have directly determined the cutting-up precision of scribing machine.Along with the develop rapidly of integrated circuit manufacturing industry to high accuracy and high-speed direction, wafer cutting-up quality requirements is more and more higher.
In scribing machine when work,, the air static pressure electric spindle High Rotation Speed is arranged on diamond blade on electric main shaft to straight-line wafer high-rate grinding.In this process, the loss of the built-in high-frequency electric machines of electric main shaft and the shearing friction of air bearing air film certainly lead to comparatively considerable heat accumulation.In the air static pressure electric spindle of main employing at present, usually only can adopt motor stator the modes such as recirculated water to carry out cooling, can't be fast in rotating shaft effectively dispersed heat cause temperature rise and thermal drift occur, cause the cutting-up groove to depart from the wafer centre of figure, cause when serious that the wafer of costliness is directly scrapped.
For in correlation technique because the dynamo-electric main shaft thermal drift of scribing causes the bad problem of even scrapping of wafer cutting-up quality, industry not yet proposes effective solution.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of control device, compensation method and scribing machine of electric main shaft thermal drift, can carry out high efficiency cooling to electric main shaft when the scribing machine cutting crystal wafer, control the thermal drift amount, and by the PC that configures on scribing machine, electric main shaft thermal drift is compensated, thereby effectively solve the bad problem of even scrapping of wafer cutting-up quality.
For solving the problems of the technologies described above, the invention provides a kind of control device of electric main shaft thermal drift, comprising:
Temperature control modules is used for carrying out cooling to the electric main shaft that runs up;
The thermal drift compensating module is used for obtaining the thermal drift amount that cooled electric main shaft produces, and according to described thermal drift amount, described electric main shaft is compensated.
Preferably, described temperature control modules comprises:
Cooling fluid provides section, is used for providing cooling fluid;
The first cooling package is used for utilizing cooling fluid that the described cooling fluid section of providing provides to carry out cooling to the first of described electric main shaft;
The second cooling package, be used for described the first cooling package the first of described electric main shaft is carried out cooling after, the cooling fluid of utilizing described the first cooling package output is carried out cooling to the second portion of described electric main shaft.
Preferably, described the first cooling package comprises: the first shell and the first lining;
Described the first shell is provided with at least one groove, and described groove extends along the axial inner surface at described the first shell of the rotating shaft of described electric main shaft;
The inner surface of the outer surface of described the first lining and described the first shell is fixed and is fitted, and makes groove be formed for holding the seal channel of cooling fluid;
The outer surface of the inner surface of described the first lining and the journal bearing of described electric main shaft is fitted;
Described journal bearing is tubular, wherein accommodates described rotating shaft;
Be provided with rotor in described rotating shaft.
Preferably, described the second cooling package comprises: second housing and the second lining;
Described the second lining is provided with at least one groove, and described groove extends along the axial outer surface at described the second lining of the rotating shaft of described electric main shaft;
Form the reeded seal channel that holds cooling fluid of tool between the outer surface of the inner surface of described second housing and described the second lining;
The inner surface of described the second lining and the outer surface of motor stator are fitted;
Described motor stator is tubular, wherein accommodates described rotor;
Described rotor is arranged in described rotating shaft.
Preferably, described thermal drift compensating module comprises:
The first temperature sensor, for detection of the temperature of described electric main shaft, and according to described temperature output first signal of telecommunication;
The first filter circuit is used for described first signal of telecommunication is carried out filtering, obtains the signal of telecommunication after the first filtering;
The first amplifying circuit is used for the signal of telecommunication after described the first filtering is amplified, and obtains first and amplifies the rear signal of telecommunication;
The second temperature sensor, for detection of the ambient temperature of described electric main shaft, and according to described ambient temperature output second signal of telecommunication;
The second filter circuit is used for described second signal of telecommunication is carried out filtering, obtains the signal of telecommunication after the second filtering;
The second amplifying circuit is used for the signal of telecommunication after described the second filtering is amplified, and obtains second and amplifies the rear signal of telecommunication;
Differential scale operation circuit is used for obtaining described first and amplifies the rear signal of telecommunication and the described second difference of amplifying the rear signal of telecommunication, output the 3rd signal of telecommunication.
Preferably, described the first filter circuit comprises: the first resistance, the first feedback resistance, the second resistance, the first electric capacity, the 3rd resistance, the second electric capacity and the first filter amplifier; Wherein, the positive input terminal of the output of described the first temperature sensor, described the second resistance, described the first electric capacity, described the 3rd resistance and described the first filter amplifier series connection; Described the second electric capacity one end ground connection, the other end is connected between the positive input terminal of described the 3rd resistance and described the first filter amplifier; Described the first filter amplifier is connected with bias voltage; One end of described the first feedback resistance is connected with the negative input end of described the first filter amplifier, and the other end is connected with the output of described the first filter amplifier; One end of described the first resistance is connected with the first reference voltage end, and the other end is connected between the negative input end of described the first feedback resistance and described the first filter amplifier;
Described the first amplifying circuit comprises: the 4th resistance, the second feedback resistance, the 5th resistance and the first operational amplifier; Wherein, an end of described the 4th resistance is connected with the output of described the first filter amplifier, and the other end is connected with the positive input terminal of described the first operational amplifier; The negative input end of described the first operational amplifier is through described the 5th grounding through resistance; One end of described the second feedback resistance is connected with the positive input terminal of described the first operational amplifier, and the other end is connected with the output of described the first operational amplifier;
Described the second filter circuit comprises: the 6th resistance, the 3rd feedback resistance, the 7th resistance, the 3rd electric capacity, the 8th resistance, the 4th electric capacity and the second filter amplifier; Wherein, the positive input terminal of the output of described the second temperature sensor, described the 7th resistance, described the 3rd electric capacity, described the 8th resistance and described the second filter amplifier series connection; Described the 4th electric capacity one end ground connection, the other end is connected between the positive input terminal of described the 8th resistance and described the second filter amplifier; Described the second filter amplifier is connected with bias voltage; The 3rd feedback resistance is connected the negative input end of the second filter amplifier with the output of the second filter amplifier; One end of described the 6th resistance is connected with the second reference voltage end, and the other end is connected between the negative input end of described the 3rd feedback resistance and described the second filter amplifier;
Described the second amplifying circuit comprises: the 9th resistance, the 4th feedback resistance, the tenth resistance and the second operational amplifier; Wherein, an end of described the 9th resistance is connected with the output of described the second filter amplifier, and the other end is connected with the positive input terminal of described the second operational amplifier; The negative input end of described the second operational amplifier is through described the tenth grounding through resistance; Described the 4th feedback resistance one end is connected with the positive input terminal of described the second operational amplifier, and the other end is connected with the output of described the second operational amplifier;
Described differential scale operation circuit comprises: the 11 resistance, the 12 resistance, the 13 resistance, the 5th feedback resistance and the 3rd operational amplifier; Wherein, an end of described the 11 resistance is connected with the output of described the first operational amplifier, and the other end is connected with the positive input terminal of described the 3rd operational amplifier; One end ground connection of described the 12 resistance, the other end are connected between the positive input terminal of described the 11 resistance and described the 3rd operational amplifier; One end of described the 13 resistance is connected with the output of described the second operational amplifier, and the other end is connected with the negative input end of described the 3rd operational amplifier; One end of described the 5th feedback resistance is connected with the negative input end of described the 3rd operational amplifier, and the other end is connected with the output of described the 3rd operational amplifier.
On the other hand, the present invention also provides a kind of compensation method of electric main shaft thermal drift, comprising:
Carry out cooling to the electric main shaft that runs up;
Obtain the thermal drift amount that cooled electric main shaft produces;
According to described thermal drift amount, described electric main shaft is carried out real-Time Compensation.
Preferably, the step of the thermal drift amount of the cooled electric main shaft generation of described acquisition comprises:
Detect the temperature of described electric main shaft, and according to described temperature output first signal of telecommunication;
Described first signal of telecommunication is carried out filtering, obtain the signal of telecommunication after filtered the first filtering;
The signal of telecommunication after described the first filtering is amplified the signal of telecommunication after first after being amplified amplified;
Detect the ambient temperature of described electric main shaft, and according to described ambient temperature output second signal of telecommunication;
Described second signal of telecommunication is carried out filtering, obtain the signal of telecommunication after filtered the second filtering;
The signal of telecommunication after described the second filtering is amplified the signal of telecommunication after second after being amplified amplified;
Obtain described first and amplify the rear signal of telecommunication and the described second difference of amplifying the rear signal of telecommunication;
Export the 3rd signal of telecommunication.
Preferably, also comprise after described output the 3rd signal of telecommunication:
According to described the 3rd signal of telecommunication, obtain the thermal drift amount of electric main shaft;
According to described thermal drift amount, described electric main shaft is carried out real-Time Compensation.
On the one hand, the present invention also provides a kind of scribing machine, comprises electric main shaft, and the control device of electric main shaft thermal drift as above again.
The beneficial effect of technique scheme of the present invention is as follows:
In such scheme, can carry out high efficiency cooling to electric main shaft when the scribing machine cutting crystal wafer by control device, control the thermal drift amount, and by the PC that configures on scribing machine, electric main shaft thermal drift is compensated, thereby effectively solve the bad problem of even scrapping of wafer cutting-up quality.
Description of drawings
Fig. 1 is the structured flowchart of control device of the electric main shaft thermal drift of embodiments of the invention;
Fig. 2 is the concrete structure block diagram of control device of the electric main shaft thermal drift of another embodiment of the present invention;
Fig. 3 is the structural representation of control device of the electric main shaft thermal drift of another embodiment of the present invention;
Fig. 4 is the structural representation of control device of the electric main shaft thermal drift of an embodiment more of the present invention.
Embodiment
For making the technical problem to be solved in the present invention, technical scheme and advantage clearer, be described in detail below in conjunction with the accompanying drawings and the specific embodiments.
The present invention proposes a kind of control device, compensation method and scribing machine of electric main shaft thermal drift, can carry out high efficiency cooling to electric main shaft when the scribing machine cutting crystal wafer, control the thermal drift amount, and by the PC that configures on scribing machine, electric main shaft thermal drift is compensated.
As shown in Figure 1: according to embodiments of the invention, provide a kind of control device of electric main shaft thermal drift, having comprised: temperature control modules is used for carrying out cooling to the electric main shaft that runs up; The thermal drift compensating module is used for obtaining the thermal drift amount that cooled electric main shaft produces, and according to described thermal drift amount, described electric main shaft is compensated.When the PC that this embodiment of the present invention configures on scribing machine passed through driver control electricity main shaft High Rotation Speed, temperature control modules carried out high efficiency cooling to electric main shaft, can control the thermal drift amount; Simultaneously, the thermal drift compensating module can obtain the thermal drift amount that cooled electric main shaft produces, and according to described thermal drift amount, described electric main shaft is compensated.Particularly, the thermal drift compensating module can be to the PC input control signal.
As shown in Figure 2: according to another embodiment of the present invention, provide a kind of control device of electric main shaft thermal drift, wherein, the said temperature control module comprises: cooling fluid provides section, the first cooling package and the second cooling package; Wherein, the first cooling package is arranged at cooling fluid and provides between section and the second cooling package, and the cooling fluid that is used for being used to providing section from cooling fluid is carried out cooling to the first of electric main shaft, and is used for cooling fluid is delivered to the second cooling package; The second cooling package is used for being used to providing the cooling fluid of section after the first cooling package to carry out cooling to the second portion of electric main shaft from cooling fluid.
Wherein, above-mentioned thermal drift compensating module comprises: the first temperature sensor, and for detection of the temperature of described electric main shaft, and according to first signal of telecommunication corresponding to detected temperature output; The first filter circuit is used for described first signal of telecommunication is carried out filtering, obtains the signal of telecommunication after the first filtering, with decay or remove ripple component in the described signal of telecommunication; The first amplifying circuit is used for the signal of telecommunication after the first filtering of described the first filter circuit output is amplified, and obtains first and amplifies the rear signal of telecommunication; The second temperature sensor, for detection of the ambient temperature of described electric main shaft, and according to second signal of telecommunication corresponding to detected ambient temperature output; The second filter circuit is used for described second signal of telecommunication is carried out filtering, obtains the signal of telecommunication after the second filtering; The second amplifying circuit is used for the signal of telecommunication after the second filtering of described the second filter circuit output is amplified, and obtains second and amplifies the rear signal of telecommunication; Differential scale operation circuit for the difference of the signal of telecommunication after the second amplification of the signal of telecommunication after the first amplification that obtains described the first amplifying circuit output and described the second amplifying circuit output, is exported the 3rd signal of telecommunication; Above-mentioned thermal drift compensating module also comprises the Mathematical Modeling of electric main shaft thermal drift and temperature rise, is arranged in PC, is used for PC and carries out the calculating of thermal drift amount after receiving the 3rd signal of telecommunication, and further be applied to upgrade control program, carries out real-Time Compensation.
Exemplarily, the first temperature sensor can be voltage signal or current signal according to the signal of detected electric main shaft temperature output.Similarly, the second temperature sensor can be voltage signal or current signal according to the signal of detected ambient temperature output.
Although should be noted that temperature sensor has been shown in Fig. 2, the present invention is not limited to this, in actual applications, can adopt various instrument or equipment that can detected temperatures, and by communication interface to the PC signal transmission; In addition, the first temperature sensor of the present invention can adopt a plurality of, in order to gather more accurately the temperature data of electric main shaft.
As shown in Figure 3: according to still another embodiment of the invention, provide a kind of control device of electric main shaft thermal drift, wherein, the said temperature control module specifically comprises: cooling fluid provides section, the first cooling package and the second cooling package; Wherein, the first cooling package is arranged at cooling fluid and provides between section's (not shown) and the second cooling package, the cooling fluid that is used for being used to providing section's (not shown) from cooling fluid is carried out cooling to the first shaft part of electric main shaft, and is used for cooling fluid is delivered to the second cooling package; Wherein, the first shaft part is the shaft part that holds journal bearing 12; The second cooling package is used for being used to the cooling fluid after the first cooling package that provides from the cooling fluid section of providing and carries out cooling to the second shaft part of electric main shaft; Wherein, the second shaft part is the shaft part that holds motor stator 9.
Particularly, the first cooling package comprises the first shell 2 and the first lining 1; Wherein, the first shell 2 is provided with at least one groove, groove extends along the axial inner surface at the first shell 2 of the rotating shaft of described electric main shaft, and the inner surface of the outer surface of the first lining 1 and the first shell 2 is fixed and fits, and makes groove be formed for holding the seal channel 201 of cooling fluid; The outer surface of the inner surface of the first lining 1 and journal bearing 12 is fitted; Journal bearing 12 is tubular, wherein accommodates rotating shaft 13; Be provided with rotor 8 in rotating shaft 13.
The second cooling package comprises second housing 3 and the second lining 4, wherein, the second lining 4 is provided with at least one groove, groove extends along the axial outer surface at the second lining 4 of the rotating shaft of described electric main shaft, forms the reeded seal channel 401 that holds cooling fluid of tool between the outer surface of the inner surface of second housing 3 and the second lining 4; The outer surface of the inner surface of the second lining 4 and motor stator 9 is fitted; Motor stator 9 is tubular, wherein accommodates rotor 8; Rotor 8 is arranged in rotating shaft 13.
Alternatively, the cooling fluid that provides section's (not shown) from cooling fluid enters the seal channel 201 of the cooling fluid of the first cooling package successively after the cooling passage 203 of the cooling passage 303 of the cooling passage 502 of pipe joint 7, rear end cap 5, second housing 3, the first shell 2, carry out cooling to journal bearing 12, the first lining 1 and the first shell 2 that accommodates described rotating shaft 13.
Alternatively, the first cooling package is communicated with by the cooling passage 202 of the first shell 2, the cooling passage 301 of second housing 3 with the second cooling package.
Alternatively, provide the cooling fluid of section's (not shown) through after above-mentioned cooling passage from cooling fluid, enter the seal channel 401 of the cooling fluid of the second cooling package, carry out cooling to motor stator 9, the second lining 4 and the second housing 3 that accommodates described rotor 8.
Alternatively, the cooling fluid that flows out from the second cooling package is discharged after the cooling passage 501 of the cooling passage 302 of second housing 3, rear end cap 5 and pipe joint 6 successively.
Alternatively, between different cooling passages, sealing ring can be set, also sealing ring can be set between the boundary fitting face of seal channel, prevent that the unexpected of cooling fluid from flowing; Exemplarily, be provided with sealing ring 11 between cooling passage 303 and cooling passage 203, between second housing 3 and the second lining 4, sealing ring 10 be set.
By means of said apparatus, by the first cooling package and the second cooling package are set, can carry out high efficiency cooling to electric main shaft when the scribing machine cutting crystal wafer, reduce the temperature rise of electric main shaft, effectively control the thermal drift amount of electric main shaft, thereby improve thermal stability and the machining accuracy of scribing machine.
As shown in Figure 4, in the thermal drift compensating module:
The first filter circuit can comprise: (the preferred model of this first filter amplifier is the filter amplifier of LM6132BIN for the first resistance R 11, the first feedback resistance R14, the second resistance R 12, the first capacitor C 11, the 3rd resistance R 13, the second capacitor C 12 and the first filter amplifier, according to actual needs, also can adopt the filter amplifier of other model) F11; Wherein, the positive input terminal of the output of the first temperature sensor, the second resistance R 12, the first capacitor C 11, the 3rd resistance R 13 and the first filter amplifier F11 series connection; The second capacitor C 12 1 end ground connection, the other end is connected between the positive input terminal of the 3rd resistance R 13 and the first filter amplifier F11; The first filter amplifier F11 is connected with bias voltage Vcc; The end of the first feedback resistance R14 is connected with the negative input end of the first filter amplifier F11, and the other end is connected with the output of the first filter amplifier F11; One end of the first resistance R 11 holds (reference voltage end) to be connected with a REF, and the other end is connected between the negative input end of the first feedback resistance R14 and the first filter amplifier F11.
The first amplifying circuit comprises: (the preferred model of this first operational amplifier is the operational amplifier chip of M54563P for the 4th resistance R 15, the second feedback resistance R17, the 5th resistance R 16 and the first operational amplifier, the model of this chip is not limited to this, according to actual needs, also can adopt the chip of other model) F12; Wherein, an end of the 4th resistance R 15 is connected with the output of the first filter amplifier F11, and the other end is connected with the positive input terminal of the first operational amplifier F12; The negative input end of the first operational amplifier F12 is through the 5th resistance R 16 ground connection; The end of the second feedback resistance R17 is connected with the positive input terminal of the first operational amplifier F12, and the other end is connected with the output of the first operational amplifier.
The second filter circuit can comprise: (the preferred model of this second filter amplifier is the filter amplifier of LM6132BIN for the 6th resistance R 21, the 3rd feedback resistance R24, the 7th resistance R 22, the 3rd capacitor C 21, the 8th resistance R 23, the 4th capacitor C 22 and the second filter amplifier, according to actual needs, also can adopt the filter amplifier of other model) F21; Wherein, the output of the second temperature sensor, the 7th resistance R 22, the 3rd capacitor C 21, the 8th resistance R 23 are connected with the positive input terminal of the second filter amplifier F21; The 4th capacitor C 22 1 end ground connection, the other end is connected between the positive input terminal of the 8th resistance R 23 and the second filter amplifier F21; The second filter amplifier F21 is connected with bias voltage Vcc; The end of the 3rd feedback resistance R24 is connected with the negative input end of the second filter amplifier F21, and the other end is connected with the output of the second filter amplifier F21; One end of the 6th resistance R 21 holds (reference voltage end) to be connected with the 2nd REF, and the other end is connected between the negative input end of the 3rd feedback resistance R24 and the second filter amplifier F21.
The second amplifying circuit comprises: (the preferred model of this second operational amplifier is the operational amplifier chip of M54563P for the 9th resistance R 25, the 4th feedback resistance R27, the tenth resistance R 26 and the second operational amplifier, the model of this chip is not limited to this, according to actual needs, also can adopt the chip of other models) F22; Wherein, an end of the 9th resistance R 25 is connected to the output of the second filter amplifier F21, and the other end is connected to the positive input terminal of the second operational amplifier F22; The negative input end of the second operational amplifier F22 is through the tenth resistance R 26 ground connection; The end of the 4th feedback resistance R27 is connected with the positive input terminal of the second operational amplifier F22, and the other end is connected with the output of the second operational amplifier.
Differential scale operation circuit comprises: (the 3rd preferred model of operational amplifier is the operational amplifier chip of INA132 for the 11 resistance R 18, the 12 resistance R 19, the 13 resistance R 28, the 5th feedback resistance R29 and the 3rd operational amplifier, the model of this chip is not limited to this, according to actual needs, also can adopt the chip of other model) F3; Wherein, an end of the 11 resistance R 18 is connected with the output of the first operational amplifier F12, and the other end is connected with the positive input terminal of the 3rd operational amplifier F3; One end ground connection of the 12 resistance R 19, the other end are connected between the positive input terminal of the 11 resistance R 18 and the 3rd operational amplifier F3; One end of the 13 resistance R 28 is connected with the output of the second operational amplifier F22, and the other end is connected with the negative input end of the 3rd operational amplifier F3; The end of the 5th feedback resistance R29 is connected with the negative input end of the 3rd operational amplifier F3, and the other end is connected with the output of the 3rd operational amplifier.
Technical scheme according to the embodiment of the present invention, when the PC that configures on scribing machine passes through driver control electricity main shaft High Rotation Speed, the first temperature sensor is installed in the first shell of electric main shaft, and first signal of telecommunication of output enters the first input end of differential scale operation circuit after through the first filter circuit and the first amplifying circuit; The second temperature sensor can be installed on scribing machine pedestal (not shown), and second signal of telecommunication of output enters the second input of differential scale operation circuit after through the second filter circuit and the second amplifying circuit; Through output the 3rd signal of telecommunication after differential scale operation circuit, and input to PC; Thereby determine the compensation rate of electric main shaft thermal drift.
Should be pointed out that first, second filter circuit is not limited to the implementation in Fig. 4, other filter circuit also can be used for realizing first, second filter circuit as the embodiment of the present invention.Similarly, first, second amplifying circuit is not limited to the implementation in Fig. 4, and other amplifying circuit also can be used for realizing first, second amplifying circuit as the embodiment of the present invention; Differential scale operation circuit also is not limited to the implementation in Fig. 4, and other differential scale operation circuit also can be used for realizing the differential scale operation circuit as the embodiment of the present invention.
The present invention also provides a kind of scribing machine, comprises electric main shaft, and according to the control device of above-mentioned electric main shaft thermal drift of the present invention.
The present invention comprises that by setting cooling fluid provides the temperature control modules of section, the first cooling package and the second cooling package, when the scribing machine cutting crystal wafer, electric main shaft is carried out high efficiency cooling, can control the thermal drift amount; When the PC that configures on scribing machine passed through driver control electricity main shaft High Rotation Speed, thermal drift compensating module provided by the invention can be inputted PC with the 3rd signal of telecommunication, thereby determines the compensation rate of electric main shaft thermal drift; And then efficiently solve in correlation technique the bad problem of even scrapping of wafer cutting-up quality that the thermal drift due to the dynamo-electric main shaft of scribing causes, improved prouctiveness.
The above is the preferred embodiment of the present invention; should be pointed out that for those skilled in the art, under the prerequisite that does not break away from principle of the present invention; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (10)
1. the control device of an electric main shaft thermal drift, is characterized in that, comprising:
Temperature control modules is used for carrying out cooling to the electric main shaft that runs up;
The thermal drift compensating module is used for obtaining the thermal drift amount that cooled electric main shaft produces, and according to described thermal drift amount, described electric main shaft is compensated.
2. the control device of electric main shaft thermal drift according to claim 1, is characterized in that, described temperature control modules comprises:
Cooling fluid provides section, is used for providing cooling fluid;
The first cooling package is used for utilizing cooling fluid that the described cooling fluid section of providing provides to carry out cooling to the first of described electric main shaft;
The second cooling package, be used for described the first cooling package the first of described electric main shaft is carried out cooling after, the cooling fluid of utilizing described the first cooling package output is carried out cooling to the second portion of described electric main shaft.
3. the control device of electric main shaft thermal drift according to claim 2, is characterized in that,
Described the first cooling package comprises: the first shell and the first lining;
Described the first shell is provided with at least one groove, and described groove extends along the axial inner surface at described the first shell of the rotating shaft of described electric main shaft;
The inner surface of the outer surface of described the first lining and described the first shell is fixed and is fitted, and makes groove be formed for holding the seal channel of cooling fluid;
The outer surface of the inner surface of described the first lining and the journal bearing of described electric main shaft is fitted;
Described journal bearing is tubular, wherein accommodates described rotating shaft;
Be provided with rotor in described rotating shaft.
4. the control device of electric main shaft thermal drift according to claim 3, is characterized in that,
Described the second cooling package comprises: second housing and the second lining;
Described the second lining is provided with at least one groove, and described groove extends along the axial outer surface at described the second lining of the rotating shaft of described electric main shaft;
Form the reeded seal channel that holds cooling fluid of tool between the outer surface of the inner surface of described second housing and described the second lining;
The inner surface of described the second lining and the outer surface of motor stator are fitted;
Described motor stator is tubular, wherein accommodates described rotor;
Described rotor is arranged in described rotating shaft.
5. the control device of according to claim 2,3 or 4 described electric main shaft thermal drifts, is characterized in that, described thermal drift compensating module comprises:
The first temperature sensor, for detection of the temperature of described electric main shaft, and according to described temperature output first signal of telecommunication;
The first filter circuit is used for described first signal of telecommunication is carried out filtering, obtains the signal of telecommunication after the first filtering;
The first amplifying circuit is used for the signal of telecommunication after described the first filtering is amplified, and obtains first and amplifies the rear signal of telecommunication;
The second temperature sensor, for detection of the ambient temperature of described electric main shaft, and according to described ambient temperature output second signal of telecommunication;
The second filter circuit is used for described second signal of telecommunication is carried out filtering, obtains the signal of telecommunication after the second filtering;
The second amplifying circuit is used for the signal of telecommunication after described the second filtering is amplified, and obtains second and amplifies the rear signal of telecommunication;
Differential scale operation circuit is used for obtaining described first and amplifies the rear signal of telecommunication and the described second difference of amplifying the rear signal of telecommunication, output the 3rd signal of telecommunication.
6. the control device of electric main shaft thermal drift according to claim 5, is characterized in that,
Described the first filter circuit comprises: the first resistance, the first feedback resistance, the second resistance, the first electric capacity, the 3rd resistance, the second electric capacity and the first filter amplifier; Wherein, the positive input terminal of the output of described the first temperature sensor, described the second resistance, described the first electric capacity, described the 3rd resistance and described the first filter amplifier series connection; Described the second electric capacity one end ground connection, the other end is connected between the positive input terminal of described the 3rd resistance and described the first filter amplifier; Described the first filter amplifier is connected with bias voltage; One end of described the first feedback resistance is connected with the negative input end of described the first filter amplifier, and the other end is connected with the output of described the first filter amplifier; One end of described the first resistance is connected with the first reference voltage end, and the other end is connected between the negative input end of described the first feedback resistance and described the first filter amplifier;
Described the first amplifying circuit comprises: the 4th resistance, the second feedback resistance, the 5th resistance and the first operational amplifier; Wherein, an end of described the 4th resistance is connected with the output of described the first filter amplifier, and the other end is connected with the positive input terminal of described the first operational amplifier; The negative input end of described the first operational amplifier is through described the 5th grounding through resistance; One end of described the second feedback resistance is connected with the positive input terminal of described the first operational amplifier, and the other end is connected with the output of described the first operational amplifier;
Described the second filter circuit comprises: the 6th resistance, the 3rd feedback resistance, the 7th resistance, the 3rd electric capacity, the 8th resistance, the 4th electric capacity and the second filter amplifier; Wherein, the positive input terminal of the output of described the second temperature sensor, described the 7th resistance, described the 3rd electric capacity, described the 8th resistance and described the second filter amplifier series connection; Described the 4th electric capacity one end ground connection, the other end is connected between the positive input terminal of described the 8th resistance and described the second filter amplifier; Described the second filter amplifier is connected with bias voltage; The 3rd feedback resistance is connected the negative input end of the second filter amplifier with the output of the second filter amplifier; One end of described the 6th resistance is connected with the second reference voltage end, and the other end is connected between the negative input end of described the 3rd feedback resistance and described the second filter amplifier;
Described the second amplifying circuit comprises: the 9th resistance, the 4th feedback resistance, the tenth resistance and the second operational amplifier; Wherein, an end of described the 9th resistance is connected with the output of described the second filter amplifier, and the other end is connected with the positive input terminal of described the second operational amplifier; The negative input end of described the second operational amplifier is through described the tenth grounding through resistance; Described the 4th feedback resistance one end is connected with the positive input terminal of described the second operational amplifier, and the other end is connected with the output of described the second operational amplifier;
Described differential scale operation circuit comprises: the 11 resistance, the 12 resistance, the 13 resistance, the 5th feedback resistance and the 3rd operational amplifier; Wherein, an end of described the 11 resistance is connected with the output of described the first operational amplifier, and the other end is connected with the positive input terminal of described the 3rd operational amplifier; One end ground connection of described the 12 resistance, the other end are connected between the positive input terminal of described the 11 resistance and described the 3rd operational amplifier; One end of described the 13 resistance is connected with the output of described the second operational amplifier, and the other end is connected with the negative input end of described the 3rd operational amplifier; One end of described the 5th feedback resistance is connected with the negative input end of described the 3rd operational amplifier, and the other end is connected with the output of described the 3rd operational amplifier.
7. the compensation method of an electric main shaft thermal drift, is characterized in that, comprising:
Carry out cooling to the electric main shaft that runs up;
Obtain the thermal drift amount that cooled electric main shaft produces;
According to described thermal drift amount, described electric main shaft is carried out real-Time Compensation.
8. the compensation method of electric main shaft thermal drift according to claim 7, is characterized in that, the step of the thermal drift amount that the cooled electric main shaft of described acquisition produces comprises:
Detect the temperature of described electric main shaft, and according to described temperature output first signal of telecommunication;
Described first signal of telecommunication is carried out filtering, obtain the signal of telecommunication after filtered the first filtering;
The signal of telecommunication after described the first filtering is amplified the signal of telecommunication after first after being amplified amplified;
Detect the ambient temperature of described electric main shaft, and according to described ambient temperature output second signal of telecommunication;
Described second signal of telecommunication is carried out filtering, obtain the signal of telecommunication after filtered the second filtering;
The signal of telecommunication after described the second filtering is amplified the signal of telecommunication after second after being amplified amplified;
Obtain described first and amplify the rear signal of telecommunication and the described second difference of amplifying the rear signal of telecommunication;
Export the 3rd signal of telecommunication.
9. the compensation method of electric main shaft thermal drift according to claim 8, is characterized in that, also comprises after described output the 3rd signal of telecommunication:
According to described the 3rd signal of telecommunication, obtain the thermal drift amount of electric main shaft;
According to described thermal drift amount, described electric main shaft is carried out real-Time Compensation.
10. a scribing machine, comprise electric main shaft, it is characterized in that, also comprises: as the control device of the described electric main shaft thermal drift of claim 1-6 any one.
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| CN201110377546.5A CN103137515B (en) | 2011-11-23 | 2011-11-23 | Control device and compensation method of motorized spindle thermal drift and dicing machine |
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| CN103137515B CN103137515B (en) | 2015-07-01 |
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| CN116944593A (en) * | 2023-09-21 | 2023-10-27 | 沈阳和研科技股份有限公司 | Dicing precision control method, dicing saw and storage medium |
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| CN103137515B (en) | 2015-07-01 |
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