CN103158070B - Grinding coolant input mechanism of motorized main shaft and thinner - Google Patents
Grinding coolant input mechanism of motorized main shaft and thinner Download PDFInfo
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- CN103158070B CN103158070B CN201110411105.2A CN201110411105A CN103158070B CN 103158070 B CN103158070 B CN 103158070B CN 201110411105 A CN201110411105 A CN 201110411105A CN 103158070 B CN103158070 B CN 103158070B
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- rotating shaft
- electro spindle
- fixed
- grinding coolant
- feed liquor
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Abstract
The invention provides a grinding coolant input mechanism of a motorized mian shaft and a thinner. The grinding coolant input mechanism comprises a liquid guiding column with a liquid inlet, wherein the liquid guiding column is sealed with a gap of a grinding coolant input central hole of a rotating shaft of the motorized main shaft. The grinding coolant input mechanism of the motorized main shaft and the thinner has the advantages of guiding grinding coolant into the motorized main shaft without reducing static beat accuracy and dynamic balance accuracy of the motorized main shaft.
Description
Technical field
The present invention relates to integrated antenna package equipment, refer to a kind of grinding coolant feed liquor mechanism of electro spindle and thinning machine especially.
Background technology
Thinning machine is the equipment using emery wheel crystal column surface to be carried out to grinding, is the rear sealed in unit of most critical in integrated circuit manufacture process.The working mechanism of thinning machine is high-rate grinding, and electro spindle is the execution unit of high-rate grinding.Electro spindle is the inside stator of motor, rotor directly being loaded spindle assemblies, sometimes also referred to as Direct driver main shaft (Direct Drive Spindle), is built-in electric motor main shaft.
In order to ensure the Grinding Machining Quality of wafer, requiring that electro spindle possesses high rotating speed, high accuracy and high stability, usually adopting air static pressure electric spindle.
During thinning machine work, grinding coolant enters from spindle central, is entered the surface of emery wheel and wafer contacts by the aperture on emery wheel, takes away the heat produced in grinding process.Common electro spindle adopts swivel joint that grinding coolant is incorporated into spindle central, and turning of swivel joint is connected with rotating shaft, on-rotatably moving part and turn to fit tightly and realize sealing.Adopt swivel joint, to turn and sealing contact stress between on-rotatably moving part will to rotating shaft imposed load, because air static pressure electric spindle rigidity is low, the static state that the load that sealing contact stress applies will affect rotating shaft is beated precision, and turning of swivel joint also can reduce the dynamic balance accuracy of rotating shaft simultaneously.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of grinding coolant feed liquor mechanism of electro spindle and thinning machine, can realize importing grinding coolant to electro spindle, and the static state simultaneously not reducing electro spindle is beated precision and dynamic balance accuracy.
For solving the problems of the technologies described above, embodiments of the invention provide a kind of grinding coolant feed liquor mechanism of electro spindle, comprising:
The one drain post being provided with inlet;
The grinding coolant feed liquor centre bore clearance seal of the rotating shaft of described drain post and described electro spindle.
Preferably, the grinding coolant feed liquor mechanism of above-mentioned electro spindle, also comprises: a sealed bearing and a bonnet;
Be provided with gap between described sealed bearing and described rotating shaft, described sealed bearing is fixed on described bonnet;
Be covered with the air inlet in the gap between described sealed bearing and described rotating shaft after described, after entering gas in described gap, between described sealed bearing and described rotating shaft, form air seal;
Described bonnet is also provided with leakage fluid dram.
Preferably, the grinding coolant feed liquor mechanism of above-mentioned electro spindle, also comprises: a switching fixed disk;
Described drain post is fixed on described switching fixed disk;
Described switching fixed disk is fixed on described bonnet.
Preferably, the grinding coolant feed liquor mechanism of above-mentioned electro spindle, also comprises: radial axle bearing sleeve and a shell body;
Described bonnet is fixed on described journal bearing and puts, and described radial axle bearing sleeve is fixed on described shell body.
Preferably, described drain post is fixed by screws on described switching fixed disk;
Described switching fixed disk and described sealed bearing are fixed by screws on described bonnet;
Described bonnet is fixed by screws in described journal bearing and puts;
Described radial axle bearing sleeve is fixed by screws on described shell body.
Preferably, the grinding coolant feed liquor mechanism of above-mentioned electro spindle, also comprises: a journal bearing;
Be provided with gap between described journal bearing and described rotating shaft, and be located at below described sealed bearing.
Preferably, the grinding coolant feed liquor mechanism of above-mentioned electro spindle, also comprises: a rotating shaft back shroud;
Described rotating shaft back shroud is arranged at the top of described sealed bearing, and and between described sealed bearing, be provided with the gap of labyrinth structure, form labyrinth seal.
Preferably, described rotating shaft back shroud is fixed on the rear end face of described rotating shaft.
Preferably, described rotating shaft back shroud is fixed by screws in the rear end face of described rotating shaft.
On the other hand, embodiments of the invention also provide a kind of thinning machine, comprise the grinding coolant feed liquor mechanism of electro spindle and above-mentioned electro spindle.
The beneficial effect of technique scheme of the present invention is as follows:
In such scheme, grinding coolant feed liquor mechanism can be that electro spindle imports grinding coolant, and can not countershaft imposed load, precision and dynamic balance accuracy thus the static state that can not reduce electro spindle is beated.
Accompanying drawing explanation
Fig. 1 is the structural representation of the grinding coolant feed liquor mechanism of the electro spindle of embodiments of the invention.
Detailed description of the invention
For making the technical problem to be solved in the present invention, technical scheme and advantage clearly, be described in detail below in conjunction with the accompanying drawings and the specific embodiments.
As shown in Figure 1, the grinding coolant feed liquor structural scheme of mechanism of electro spindle in embodiments of the invention.This grinding coolant feed liquor mechanism comprises: a drain post 1 being provided with inlet A, and preferably, this inlet is for importing cooling water, drain post 1 is water guide post, certainly, being not limited in embodiments of the invention be cooling water, can also be other the liquid with cooling effect; Be provided with minim gap between grinding coolant feed liquor centre bore in the rotating shaft 8 of described drain post 1 and described electro spindle, and form clearance seal.In this embodiment, insert inlet A by pipe joint and import grinding coolant to electro spindle, can reduce upwards to overflow when grinding coolant is obstructed, owing to not contacting between drain post 1 with rotating shaft 8, drain post 1 can not countershaft 8 imposed load while importing cooling fluid, precision and dynamic balance accuracy thus the static state that can not reduce electro spindle is beated.
Further, in the embodiment shown in fig. 1, the grinding coolant feed liquor mechanism of above-mentioned electro spindle can also comprise: sealed bearing 4 and a bonnet 5; Be provided with minim gap between described sealed bearing 4 and described rotating shaft 8, described sealed bearing 4 is fixed on described bonnet 5, and preferably, described sealed bearing 4 is fixed by screws on described bonnet 5; Described bonnet 5 is provided with the air inlet C in the gap between described sealed bearing 4 and described rotating shaft 8, after entering gas, forms air seal between described sealed bearing 4 and described rotating shaft 8 in described gap; Described bonnet is also provided with leakage fluid dram B, in time grinding coolant is upwards overflowed part and discharges electro spindle, avoid grinding coolant in bonnet 5 accumulated inside by the pipe joint of inserting this leakage fluid dram B.
Further, in the embodiment shown in fig. 1, the grinding coolant feed liquor mechanism of above-mentioned electro spindle can also comprise: a switching fixed disk 2; Described drain post 1 is fixed on described switching fixed disk 2; Described switching fixed disk 2 is fixed on described bonnet 5; Preferably, described drain post 1 is fixed by screws on described switching fixed disk 2, and described switching fixed disk 2 is fixed by screws on described bonnet 5.
Further, above-mentioned embodiment illustrated in fig. 1 in, the grinding coolant feed liquor mechanism of above-mentioned electro spindle can also comprise: a radial axle bearing sleeve 6 and shell body 7; Described bonnet 5 is fixed on described radial axle bearing sleeve 6, and described journal bearing 6 cover is fixed on described shell body 7; Preferably, described bonnet 5 is fixed by screws on described radial axle bearing sleeve 6; Described radial axle bearing sleeve 6 is fixed by screws on described shell body 7.
Further, above-mentioned embodiment illustrated in fig. 1 in, the grinding coolant feed liquor mechanism of above-mentioned electro spindle can also comprise: a journal bearing 9; Gap is provided with between described journal bearing 9 and described rotating shaft 8, and be located at below described sealed bearing 4, air seal between sealed bearing 4 and rotating shaft 8, enters into the gap between journal bearing 9 and rotating shaft 8 after can grinding coolant being stoped further upwards to overflow.
Further, above-mentioned embodiment illustrated in fig. 1 in, the grinding coolant feed liquor mechanism of above-mentioned electro spindle can also comprise: a rotating shaft back shroud 3; Described rotating shaft back shroud 3 is arranged at the top of described sealed bearing 4, and and between described sealed bearing 4, be provided with the gap of labyrinth structure, form labyrinth seal, can reduce to enter into gap between journal bearing 9 and rotating shaft 8 after grinding cooling water upwards overflows; Wherein, described rotating shaft back shroud 3 is fixed on the rear end face of described rotating shaft 8; Preferably, described rotating shaft back shroud 3 is fixed by screws in the rear end face of described rotating shaft 8.
Embodiments of the invention also provide a kind of thinning machine comprising the grinding coolant feed liquor mechanism of the electro spindle shown in above-mentioned Fig. 1, and this thinning machine also comprises electro spindle; Wherein, relation all embodiments relevant with this feed liquor mechanism described above of electro spindle and this feed liquor mechanism, thus making the electro spindle of this thinning machine can not increase load by countershaft while importing cooling fluid, the static state that can not reduce electro spindle is beated precision and dynamic balance accuracy.
The above is the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the prerequisite not departing from principle of the present invention; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (9)
1. a grinding coolant feed liquor mechanism for electro spindle, is characterized in that, comprising:
The one drain post being provided with inlet;
The grinding coolant feed liquor centre bore clearance seal of the rotating shaft of described drain post and described electro spindle; One sealed bearing and a bonnet;
Be provided with gap between described sealed bearing and described rotating shaft, described sealed bearing is fixed on described bonnet;
Be covered with the air inlet in the gap between described sealed bearing and described rotating shaft after described, after entering gas in described gap, between described sealed bearing and described rotating shaft, form air seal;
Described bonnet is also provided with leakage fluid dram.
2. the grinding coolant feed liquor mechanism of electro spindle according to claim 1, is characterized in that, also comprise: a switching fixed disk;
Described drain post is fixed on described switching fixed disk;
Described switching fixed disk is fixed on described bonnet.
3. the grinding coolant feed liquor mechanism of electro spindle according to claim 2, is characterized in that, also comprise: radial axle bearing sleeve and a shell body;
Described bonnet is fixed on described journal bearing and puts, and described radial axle bearing sleeve is fixed on described shell body.
4. the grinding coolant feed liquor mechanism of electro spindle according to claim 3, is characterized in that,
Described drain post is fixed by screws on described switching fixed disk;
Described switching fixed disk and described sealed bearing are fixed by screws on described bonnet;
Described bonnet is fixed by screws in described journal bearing and puts;
Described radial axle bearing sleeve is fixed by screws on described shell body.
5. the grinding coolant feed liquor mechanism of electro spindle according to claim 1, is characterized in that, also comprise: a journal bearing;
Be provided with gap between described journal bearing and described rotating shaft, and be located at below described sealed bearing.
6. the grinding coolant feed liquor mechanism of electro spindle according to claim 1, is characterized in that, also comprise: a rotating shaft back shroud;
Described rotating shaft back shroud is arranged at the top of described sealed bearing, and and between described sealed bearing, be provided with the gap of labyrinth structure, form labyrinth seal.
7. the grinding coolant feed liquor mechanism of electro spindle according to claim 6, it is characterized in that, described rotating shaft back shroud is fixed on the rear end face of described rotating shaft.
8. the grinding coolant feed liquor mechanism of electro spindle according to claim 7, it is characterized in that, described rotating shaft back shroud is fixed by screws in the rear end face of described rotating shaft.
9. a thinning machine, comprises electro spindle, it is characterized in that, also comprises the grinding coolant feed liquor mechanism of the electro spindle as described in any one of claim 1-8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110411105.2A CN103158070B (en) | 2011-12-12 | 2011-12-12 | Grinding coolant input mechanism of motorized main shaft and thinner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110411105.2A CN103158070B (en) | 2011-12-12 | 2011-12-12 | Grinding coolant input mechanism of motorized main shaft and thinner |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103158070A CN103158070A (en) | 2013-06-19 |
| CN103158070B true CN103158070B (en) | 2015-07-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110411105.2A Active CN103158070B (en) | 2011-12-12 | 2011-12-12 | Grinding coolant input mechanism of motorized main shaft and thinner |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104174880A (en) * | 2014-08-27 | 2014-12-03 | 江苏星晨高速电机有限公司 | Non-contact hollow water draining device applied to horizontal type electric spindle and used for replacing rotary joint |
| CN106493617B (en) * | 2016-11-28 | 2018-12-11 | 北京中电科电子装备有限公司 | A kind of center leads to the electro spindle and thinned machine of coolant liquid cooling |
| CN108406588A (en) * | 2018-05-04 | 2018-08-17 | 深圳市速锋科技股份有限公司 | The cooling structure and its electro spindle and cooling means of a kind of electro spindle |
| CN109571063B (en) * | 2018-11-22 | 2021-11-16 | 广州市昊志机电股份有限公司 | Tool changing electric spindle with built-in central water outlet cylinder |
| CN113997197A (en) * | 2021-10-29 | 2022-02-01 | 华海清科股份有限公司 | A main shaft assembly and base plate attenuate device for base plate attenuate |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU921826A1 (en) * | 1980-01-11 | 1982-04-23 | Ленинградское Специальное Конструкторское Бюро Шлифовального Оборудования | Device for feeding cutting fluid into working zone |
| CN102114613A (en) * | 2010-11-11 | 2011-07-06 | 东南大学 | Efficient inner-cooling electric spindle |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0790443B2 (en) * | 1987-01-14 | 1995-10-04 | 松下電器産業株式会社 | Spindle device |
| JPH02298464A (en) * | 1989-05-12 | 1990-12-10 | Matsushita Electric Ind Co Ltd | Spindle device |
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2011
- 2011-12-12 CN CN201110411105.2A patent/CN103158070B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU921826A1 (en) * | 1980-01-11 | 1982-04-23 | Ленинградское Специальное Конструкторское Бюро Шлифовального Оборудования | Device for feeding cutting fluid into working zone |
| CN102114613A (en) * | 2010-11-11 | 2011-07-06 | 东南大学 | Efficient inner-cooling electric spindle |
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| CN103158070A (en) | 2013-06-19 |
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