CN2545589Y - High-performance strain alloy nanofilm pressure sensor - Google Patents
High-performance strain alloy nanofilm pressure sensor Download PDFInfo
- Publication number
- CN2545589Y CN2545589Y CN 02224077 CN02224077U CN2545589Y CN 2545589 Y CN2545589 Y CN 2545589Y CN 02224077 CN02224077 CN 02224077 CN 02224077 U CN02224077 U CN 02224077U CN 2545589 Y CN2545589 Y CN 2545589Y
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- garden shape
- pressure
- bearing cup
- strain
- nanofilm
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Abstract
A high-performance strain alloy nanofilm pressure sensor mainly consists of a circular shell, a circular pressure bearing cup, a support ring, a shore, a high-temperature circuit board, a high-temperature output line, a joint, a high-temperature conductive adhesive and an 'O'-shaped sealing ring. The utility model is characterized in that an insulation film playing the action of the insulation, a strain alloy nanofilm playing the role of insulation, a strain alloy nanofilm playing the role of resistance strain and a protective film playing the role of oxidation protection are deposited at the upper part of the circular pressure bearing cup by adopting the ion beam sputtering technology; in addition, a planar resistance grid pattern is formed on the strain alloy nanofilm through the photoetching technology and a wire leading film leading the signal out is deposited at a lead wire of the resistance grid. The utility model simultaneously has the advantages of high temperature, high pressure, high precision, good dynamic performance, long-term stability and reliability as well as small size, etc.
Description
Technical field: the utility model relates to a kind of device for pressure measurement, relates in particular to the technological improvement of high performance strained alloy nano membrane pressure sensor.
Background technology: existing diaphragm pressure sensor by impulse chew, elastic sensing element, spun gold lead-in wire, compensating circuit, outer cover etc. form, there is following deficiency in this structure: because of elastic sensing element is chewed far away from impulse, and impulse is chewed and the undamped characteristic, can't avoid the harmful effect of gaging pressure transient-upset to precision; Impulse chew and elastic body between unstressed release groove, can not eliminate sensor when installing and using external carbuncle to the harmful effect of sensor; Owing between elastic body and shell, only rely on welding to bear pressure and seal, be subjected to the sensor of the influence manufacturing high pressure of welding technology to bring difficulty; The sensitive element output signal adopts spun gold lead-in wire and general tin-welding process, can't be suitable for more than 200 ℃ and use in the hot environment.
Summary of the invention: the purpose of this utility model is exactly the shortcoming that will overcome prior art, and a kind of high performance strained alloy nano membrane pressure sensor that has characteristics such as high-temperature, high pressure, high precision, dynamic property is good, long-term stability is reliable simultaneously is provided.
For this reason, the technical solution of the utility model is: a kind of high performance strained alloy nano membrane pressure sensor, mainly form: garden shape housing (1) by following parts, its outer arm upwards has external thread (13) that connects pressure guiding pipe and " O " shape O-ring seal (9) that seals successively from openend, and its inner arm is useful on the protrusion arm rest (12) of support garden shape pressure-bearing cup (2); Garden shape pressure-bearing cup (2), in order to the pressure of accepting to introduce from garden shape housing (1) opening part, and (2-5) produces deformation and exports the electric signal corresponding with force value at the bottom of making its glass; Support ring (3), it is a top perforate and is welded in becket on the garden shape pressure-bearing cup (2), in order to support high temperature wiring board (5) by support column (4); High-temperature electric conduction glue (8); in order to give high temperature wiring board (5) with the electrical signal transfer of garden shape pressure-bearing cup (2) output; and by after the compensation adjustment of high temperature wiring board (5); outwards export by joint (7) by high temperature output line (6); it is characterized in that: the top of described garden shape pressure-bearing cup (2) adopts ion beam sputtering technology to be deposited with the dielectric film (2-1) of insulating effect successively; play the strain alloy nano film (2-2) of resistance effects of strain; play the diaphragm (2-3) of oxidation protection effect; in addition; strain alloy nano film (2-2) has formed the planar resistor gate pattern by photoetching process, and resistance grid lead-in wire place is deposited with the lead-in wire film (2-4) that strain signal is drawn.
Described garden shape pressure-bearing cup (2) after seal welding place (10) welding, leaves elimination produces stress because of external force stress relief grooves (11) near the inner protrusion arm rest (12) of garden shape housing (1) between the top of garden shape pressure-bearing cup (2) and the garden shape housing (1).
Owing to adopted the said structure improvement, sensitive element adopted ion beam sputtering technology and the multi-layer nano magnitude function film that generates, makes sensitive element itself have the characteristics of high precision (synthesis precision is better than 0.1 grade), high temperature resistant (medium temperature can reach 300 ℃), high stability, high reliability.Again since garden shape pressure-bearing cup to chew opening part apart from impulse very near, and opening is big again, so the sensor dynamic response characteristic improves.Garden shape pressure-bearing cup relies on the protrusion arm rest of garden shape housing inner arm simultaneously, and therefore, the weld of sensor only seals and need not bear pressure, and the range of sensor is big (as 100Mpa).Sensor sensing element output signal adopts high-temperature electric conduction glue to transfer to the high temperature wiring board, does not have common scolding tin welding technology, so sensor can be operated in the environment that high temperature reaches 250 ℃.In addition owing to increased stress relief grooves between garden shape housing and the sensitive element, greatly reduce sensor when installing and using external carbuncle to the influence of sensor.So the utility model is compared than like product, it has high precision, high-temperature, high stability, high reliability simultaneously, good, the anti-width of cloth of dynamic property is penetrated and distinguishing feature such as vibration.
Description of drawings: the utility model is further specified below in conjunction with accompanying drawing.
Fig. 1 is a general structure cross-sectional schematic of the present utility model.
Fig. 2 is a multi-layer film structure cross-sectional schematic of the present utility model.
Embodiment: as shown in Figure 1, 2, a kind of high performance strained alloy nano membrane pressure sensor mainly is made up of garden shape housing 1, garden shape pressure-bearing cup 2, support ring 3, support column 4, high temperature wiring board 5, high temperature output line 6, joint 7, high-temperature electric conduction glue 8, " O " shape O-ring seal 9 etc.Described garden shape housing 1 is a kind of Stainless Steel hollow body, and its outer arm upwards has external thread 13 that connects pressure guiding pipe and " O " shape O-ring seal 9 that seals successively from openend, and its inner arm upwards has the arm rest 12 of protrusion from opening part, and it is used to support garden shape pressure-bearing cup 2.After garden shape pressure-bearing cup 2 and garden shape housing 1 weld in seal welding place 10, bear medium by protrusion arm rest 12 and act on the power that produces in the contact place on the garden shape pressure-bearing cup 2, therefore, seal welding place 10 only seals, and can produce the wide range pressure transducer easily like this.Garden shape pressure-bearing cup 2 is a kind of garden shape flat diaphragm structures, its top adopt ion beam sputtering technology be deposited with successively insulating effect dielectric film 2-1, play the resistance effects of strain strain alloy nano film 2-2, play the diaphragm 2-3 of oxidation protection effect.Strain alloy nano film 2-2 has formed the planar resistor gate pattern by photoetching process, and resistance grid lead-in wire place is deposited with the lead-in wire film 2-4 that strain signal is drawn.After described garden shape housing 1 is introduced pressure medium from opening part, the cup end 2-5 of garden shape pressure-bearing cup 2 produces deformation, export the electric signal corresponding with force value, this electric signal (changes traditional handicraft by high-temperature electric conduction glue 8, do not re-use Herba Anoectochili roxburghii and common solder technology) transfer on the high temperature wiring board 5, and, outwards export by joint 7 by after the compensation adjustment of high temperature wiring board 5.Described support ring 3 is top perforates and is welded in becket on the garden shape pressure-bearing cup 2, in order to support high temperature wiring boards 5 by support column 4.Because adopted ion beam sputtering technology, and used high-temperature electric conduction glue and high temperature wiring board on the technology instead, therefore, the precision of sensor, stability, reliability, temperature applicable range, dynamic response characteristic all improve a lot.
Described garden shape pressure-bearing cup 2 protrusion arm rests 12 near shape housing 1 inside, garden.Leave elimination between the top of garden shape pressure-bearing cup 2 and the garden shape housing 1 and produce the stress relief grooves 11 of stress because of external force, can eliminate like this sensor when installing and using external carbuncle to the harmful effect of sensor.
Now further specify its principle of work in conjunction with the accompanying drawings:
After measured medium enters garden shape pressure-bearing cup 2, its pressure acts on the cup end 2-5 of garden shape pressure-bearing cup 2, the strain alloy nano film 2-2 on shape pressure-bearing cup 2 tops, garden produces deformation, make the strain resistor grid electric bridge of making by photoetching process lose out balance, 2-4 is input to voltage signal on the high temperature wiring board 5 by high-temperature electric conduction glue 8 from the lead-in wire film, and by after the compensation adjustment processing of circuit on the high temperature wiring board 5, outside garden shape housing 1, export through joint 7 by high temperature output line 6, realize the accurate measurement of corresponding pressure.Owing to adopted the ion beam sputtering deposition technology, its sensitive element multilayer film are formed by the function film deposit of nanometer scale, thereby have improved performances such as the precision of sensor, high temperature resistant, stable, reliability greatly.In addition, because sensor construction is reasonable in design, increased the protrusion arm rest 12 of shape housing 1 inside, garden, and the stress relief grooves 11 between garden shape pressure-bearing cup 2 and the garden shape housing 1, and adopted high-temperature electric conduction glue 8, high temperature wiring board 5 and high temperature output line 6, make sensor have also that good, the anti-width of cloth of dynamic property is penetrated and distinguishing feature such as vibration, zero point drift are minimum, long service life, volume are little.
Claims (2)
1, a kind of high performance strained alloy nano membrane pressure sensor, mainly form: garden shape housing (1) by following parts, its outer arm upwards has external thread (13) that connects pressure guiding pipe and " O " shape O-ring seal (9) that seals successively from openend, and its inner arm is useful on the protrusion arm rest (12) of support garden shape pressure-bearing cup (2); Garden shape pressure-bearing cup (2), in order to the pressure of accepting to introduce from garden shape housing (1) opening part, and (2-5) produces deformation and exports the electric signal corresponding with force value at the bottom of making its glass; Support ring (3), it is a top perforate and is welded in becket on the garden shape pressure-bearing cup (2), in order to support high temperature wiring board (5) by support column (4); High-temperature electric conduction glue (8); in order to give high temperature wiring board (5) with the electrical signal transfer of garden shape pressure-bearing cup (2) output; and by after the compensation adjustment of high temperature wiring board (5); outwards export by joint (7) by high temperature output line (6); it is characterized in that: the top of described garden shape pressure-bearing cup (2) adopts ion beam sputtering technology to be deposited with the dielectric film (2-1) of insulating effect successively; play the strain alloy nano film (2-2) of resistance effects of strain; play the diaphragm (2-3) of oxidation protection effect; in addition; strain alloy nano film (2-2) has formed the planar resistor gate pattern by photoetching process, and resistance grid lead-in wire place is deposited with the lead-in wire film (2-4) that strain signal is drawn.
2, high performance strained alloy nano membrane pressure sensor according to claim 1, it is characterized in that: described garden shape pressure-bearing cup (2) is near the inner protrusion arm rest (12) of garden shape housing (1), after seal welding place (10) welding, leave elimination produces stress because of external force stress relief grooves (11) between the top of garden shape pressure-bearing cup (2) and the garden shape housing (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02224077 CN2545589Y (en) | 2002-05-21 | 2002-05-21 | High-performance strain alloy nanofilm pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02224077 CN2545589Y (en) | 2002-05-21 | 2002-05-21 | High-performance strain alloy nanofilm pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2545589Y true CN2545589Y (en) | 2003-04-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02224077 Expired - Fee Related CN2545589Y (en) | 2002-05-21 | 2002-05-21 | High-performance strain alloy nanofilm pressure sensor |
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|---|---|
| CN (1) | CN2545589Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103226047A (en) * | 2012-01-30 | 2013-07-31 | 大陆汽车系统公司 | Semiconductor sensing device to minimize thermal noise |
| CN108195502A (en) * | 2017-12-21 | 2018-06-22 | 中国电子科技集团公司第四十八研究所 | A kind of engine sensor |
| CN110514330A (en) * | 2019-08-08 | 2019-11-29 | 西安中星测控有限公司 | A kind of passive two-dimensional code pressure sensor and preparation method thereof |
-
2002
- 2002-05-21 CN CN 02224077 patent/CN2545589Y/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103226047A (en) * | 2012-01-30 | 2013-07-31 | 大陆汽车系统公司 | Semiconductor sensing device to minimize thermal noise |
| CN103226047B (en) * | 2012-01-30 | 2018-02-06 | 大陆汽车系统公司 | Minimize the semiconductor sensor device of thermal noise |
| CN108195502A (en) * | 2017-12-21 | 2018-06-22 | 中国电子科技集团公司第四十八研究所 | A kind of engine sensor |
| CN110514330A (en) * | 2019-08-08 | 2019-11-29 | 西安中星测控有限公司 | A kind of passive two-dimensional code pressure sensor and preparation method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |