CN106680333A - Humidity sensitive capacitor and manufacturing method thereof - Google Patents
Humidity sensitive capacitor and manufacturing method thereof Download PDFInfo
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- CN106680333A CN106680333A CN201710076264.9A CN201710076264A CN106680333A CN 106680333 A CN106680333 A CN 106680333A CN 201710076264 A CN201710076264 A CN 201710076264A CN 106680333 A CN106680333 A CN 106680333A
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- humidity
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- humicap
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 239000003990 capacitor Substances 0.000 title abstract 4
- 239000000758 substrate Substances 0.000 claims abstract description 35
- 238000000034 method Methods 0.000 claims abstract description 20
- 229920000620 organic polymer Polymers 0.000 claims abstract description 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 4
- 238000005229 chemical vapour deposition Methods 0.000 claims abstract description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical group N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 12
- 229910000838 Al alloy Inorganic materials 0.000 claims description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 8
- 239000004020 conductor Substances 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 230000005611 electricity Effects 0.000 claims description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 241000218202 Coptis Species 0.000 claims description 4
- 235000002991 Coptis groenlandica Nutrition 0.000 claims description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 239000002253 acid Substances 0.000 claims description 4
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 4
- ZXTFQUMXDQLMBY-UHFFFAOYSA-N alumane;molybdenum Chemical group [AlH3].[Mo] ZXTFQUMXDQLMBY-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 239000004411 aluminium Substances 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 239000011651 chromium Substances 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- 238000009713 electroplating Methods 0.000 claims description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 239000010931 gold Substances 0.000 claims description 4
- 150000002739 metals Chemical class 0.000 claims description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 239000011733 molybdenum Substances 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- 229910052758 niobium Inorganic materials 0.000 claims description 4
- 239000010955 niobium Substances 0.000 claims description 4
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 4
- 239000004332 silver Substances 0.000 claims description 4
- 229910052715 tantalum Inorganic materials 0.000 claims description 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 4
- 239000010936 titanium Substances 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 3
- 239000004642 Polyimide Substances 0.000 claims description 3
- 239000012670 alkaline solution Substances 0.000 claims description 3
- 238000005520 cutting process Methods 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 238000001259 photo etching Methods 0.000 claims description 3
- 229920001721 polyimide Polymers 0.000 claims description 3
- 239000000243 solution Substances 0.000 claims description 3
- 238000007738 vacuum evaporation Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- -1 Hydroxyl ethyl Chemical group 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 7
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract description 3
- 230000007774 longterm Effects 0.000 abstract description 2
- 239000012528 membrane Substances 0.000 abstract 6
- 239000010408 film Substances 0.000 description 35
- 239000000463 material Substances 0.000 description 6
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- 238000002604 ultrasonography Methods 0.000 description 2
- 241000196324 Embryophyta Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229920002521 macromolecule Polymers 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/227—Sensors changing capacitance upon adsorption or absorption of fluid components, e.g. electrolyte-insulator-semiconductor sensors, MOS capacitors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
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- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Pathology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Engineering & Computer Science (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201710076264.9A CN106680333A (en) | 2017-02-13 | 2017-02-13 | Humidity sensitive capacitor and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201710076264.9A CN106680333A (en) | 2017-02-13 | 2017-02-13 | Humidity sensitive capacitor and manufacturing method thereof |
Publications (1)
Publication Number | Publication Date |
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CN106680333A true CN106680333A (en) | 2017-05-17 |
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Family Applications (1)
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CN201710076264.9A Pending CN106680333A (en) | 2017-02-13 | 2017-02-13 | Humidity sensitive capacitor and manufacturing method thereof |
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CN (1) | CN106680333A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111909376A (en) * | 2020-06-21 | 2020-11-10 | 浙江大学 | Oil liquid corrosion resistant dynamic absorption-dehydration high polymer composite sensitive material and preparation method thereof |
CN112710706A (en) * | 2020-12-08 | 2021-04-27 | 北京智芯微电子科技有限公司 | Humidity sensor |
CN113390931A (en) * | 2021-05-28 | 2021-09-14 | 苏州锐光科技有限公司 | Upper electrode material for capacitive humidity sensor and preparation method thereof |
Citations (18)
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US4343688A (en) * | 1979-11-22 | 1982-08-10 | U.S. Philips Corporation | Method of making humidity sensors |
CN1117196A (en) * | 1994-07-16 | 1996-02-21 | 东南大学 | Inorganic thin film humidity-sensitive element with high performance and its producing method |
JP2000009635A (en) * | 1998-06-25 | 2000-01-14 | Sanyo Electric Co Ltd | Water content sensor and organic material treatment apparatus using the same |
JP2000046785A (en) * | 1998-07-27 | 2000-02-18 | Sanyo Electric Co Ltd | Water content sensor and organic material treating apparatus using the same |
CN2397609Y (en) * | 1999-09-02 | 2000-09-20 | 清华同方股份有限公司 | High-capacity high-molecular humidity sensitive element |
CN1455250A (en) * | 2003-06-12 | 2003-11-12 | 东南大学 | Capacitance type relative humidity sensor |
CN1577866A (en) * | 2003-07-25 | 2005-02-09 | 台湾积体电路制造股份有限公司 | Capacitor with improved capacitance density and method of manufacture |
WO2007115915A1 (en) * | 2006-04-10 | 2007-10-18 | Robert Bosch Gmbh | Component with a semiconductor substrate, and method for manufacturing it |
US20080176966A1 (en) * | 2005-03-16 | 2008-07-24 | Shigeharu Takagi | Graft Polymer |
CN102590291A (en) * | 2012-01-16 | 2012-07-18 | 中国科学院上海微系统与信息技术研究所 | Method for manufacturing improved humidity sensor |
CN202837224U (en) * | 2012-10-31 | 2013-03-27 | 中国电子科技集团公司第四十九研究所 | Capacitive high molecular humidity sensor with micron grid-shaped porous electrode |
CN103149246A (en) * | 2012-09-27 | 2013-06-12 | 中国石油大学(华东) | Graphene film humidity sensor |
US20140116122A1 (en) * | 2012-10-25 | 2014-05-01 | Robert Bosch Tool Corporation | Combined pressure and humidity sensor |
CN104409485A (en) * | 2014-12-05 | 2015-03-11 | 国家电网公司 | Planar gate IGBT with low-reverse transfer capacitance and anti-latch-up structure and manufacturing method of planar gate IGBT |
CN104810283A (en) * | 2015-05-13 | 2015-07-29 | 国网智能电网研究院 | IGBT (Insulated Gate Bipolar Transistor) chip manufacturing method for crimped type package |
CN104914138A (en) * | 2015-07-03 | 2015-09-16 | 深圳市共进电子股份有限公司 | Humidity sensor, humidity sensor array and preparation method thereof |
CN106298897A (en) * | 2015-05-15 | 2017-01-04 | 国网智能电网研究院 | A kind of planar gate IGBT with separate type colelctor electrode and preparation method thereof |
CN206557144U (en) * | 2017-02-13 | 2017-10-13 | 广州奥松电子有限公司 | A kind of humicap |
-
2017
- 2017-02-13 CN CN201710076264.9A patent/CN106680333A/en active Pending
Patent Citations (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4343688A (en) * | 1979-11-22 | 1982-08-10 | U.S. Philips Corporation | Method of making humidity sensors |
CN1117196A (en) * | 1994-07-16 | 1996-02-21 | 东南大学 | Inorganic thin film humidity-sensitive element with high performance and its producing method |
JP2000009635A (en) * | 1998-06-25 | 2000-01-14 | Sanyo Electric Co Ltd | Water content sensor and organic material treatment apparatus using the same |
JP2000046785A (en) * | 1998-07-27 | 2000-02-18 | Sanyo Electric Co Ltd | Water content sensor and organic material treating apparatus using the same |
CN2397609Y (en) * | 1999-09-02 | 2000-09-20 | 清华同方股份有限公司 | High-capacity high-molecular humidity sensitive element |
CN1455250A (en) * | 2003-06-12 | 2003-11-12 | 东南大学 | Capacitance type relative humidity sensor |
CN1577866A (en) * | 2003-07-25 | 2005-02-09 | 台湾积体电路制造股份有限公司 | Capacitor with improved capacitance density and method of manufacture |
US20080176966A1 (en) * | 2005-03-16 | 2008-07-24 | Shigeharu Takagi | Graft Polymer |
WO2007115915A1 (en) * | 2006-04-10 | 2007-10-18 | Robert Bosch Gmbh | Component with a semiconductor substrate, and method for manufacturing it |
CN102590291A (en) * | 2012-01-16 | 2012-07-18 | 中国科学院上海微系统与信息技术研究所 | Method for manufacturing improved humidity sensor |
CN103149246A (en) * | 2012-09-27 | 2013-06-12 | 中国石油大学(华东) | Graphene film humidity sensor |
US20140116122A1 (en) * | 2012-10-25 | 2014-05-01 | Robert Bosch Tool Corporation | Combined pressure and humidity sensor |
CN202837224U (en) * | 2012-10-31 | 2013-03-27 | 中国电子科技集团公司第四十九研究所 | Capacitive high molecular humidity sensor with micron grid-shaped porous electrode |
CN104409485A (en) * | 2014-12-05 | 2015-03-11 | 国家电网公司 | Planar gate IGBT with low-reverse transfer capacitance and anti-latch-up structure and manufacturing method of planar gate IGBT |
CN104810283A (en) * | 2015-05-13 | 2015-07-29 | 国网智能电网研究院 | IGBT (Insulated Gate Bipolar Transistor) chip manufacturing method for crimped type package |
CN106298897A (en) * | 2015-05-15 | 2017-01-04 | 国网智能电网研究院 | A kind of planar gate IGBT with separate type colelctor electrode and preparation method thereof |
CN104914138A (en) * | 2015-07-03 | 2015-09-16 | 深圳市共进电子股份有限公司 | Humidity sensor, humidity sensor array and preparation method thereof |
CN206557144U (en) * | 2017-02-13 | 2017-10-13 | 广州奥松电子有限公司 | A kind of humicap |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111909376A (en) * | 2020-06-21 | 2020-11-10 | 浙江大学 | Oil liquid corrosion resistant dynamic absorption-dehydration high polymer composite sensitive material and preparation method thereof |
CN111909376B (en) * | 2020-06-21 | 2021-06-01 | 浙江大学 | Oil liquid corrosion resistant dynamic absorption-dehydration high polymer composite sensitive material and preparation method thereof |
CN112710706A (en) * | 2020-12-08 | 2021-04-27 | 北京智芯微电子科技有限公司 | Humidity sensor |
CN113390931A (en) * | 2021-05-28 | 2021-09-14 | 苏州锐光科技有限公司 | Upper electrode material for capacitive humidity sensor and preparation method thereof |
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CB02 | Change of applicant information |
Address after: 510530 building 3, No. 17, Yunjun Road, Huangpu District, Guangzhou City, Guangdong Province Applicant after: Guangzhou Aosong Electronics Co.,Ltd. Applicant after: Zhang Bin Address before: 510470 No. 56, Da Ma Lu, Renhe Town, Guangzhou, Guangdong Applicant before: AOSONG (GUANGZHOU) ELECTRONICS Co.,Ltd. Applicant before: Zhang Bin |
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CB02 | Change of applicant information | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20211220 Address after: 510530 building 3, No. 17, Yunjun Road, Huangpu District, Guangzhou City, Guangdong Province Applicant after: Guangzhou Aosong Electronics Co.,Ltd. Address before: 510530 building 3, No. 17, Yunjun Road, Huangpu District, Guangzhou City, Guangdong Province Applicant before: Guangzhou Aosong Electronics Co.,Ltd. Applicant before: Zhang Bin |
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RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170517 |