CN2228916Y - 磁控溅射-多弧多功能真空镀膜设备 - Google Patents
磁控溅射-多弧多功能真空镀膜设备 Download PDFInfo
- Publication number
- CN2228916Y CN2228916Y CN 95224085 CN95224085U CN2228916Y CN 2228916 Y CN2228916 Y CN 2228916Y CN 95224085 CN95224085 CN 95224085 CN 95224085 U CN95224085 U CN 95224085U CN 2228916 Y CN2228916 Y CN 2228916Y
- Authority
- CN
- China
- Prior art keywords
- vacuum
- equipment
- multi sphere
- controlled sputtering
- magneto
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 95224085 CN2228916Y (zh) | 1995-10-23 | 1995-10-23 | 磁控溅射-多弧多功能真空镀膜设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 95224085 CN2228916Y (zh) | 1995-10-23 | 1995-10-23 | 磁控溅射-多弧多功能真空镀膜设备 |
Publications (1)
Publication Number | Publication Date |
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CN2228916Y true CN2228916Y (zh) | 1996-06-12 |
Family
ID=33870972
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 95224085 Expired - Fee Related CN2228916Y (zh) | 1995-10-23 | 1995-10-23 | 磁控溅射-多弧多功能真空镀膜设备 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN2228916Y (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101949000A (zh) * | 2010-09-17 | 2011-01-19 | 温州市佳能真空电镀设备科技有限公司 | 真空磁控溅射多弧离子复合镀膜机 |
CN110284119A (zh) * | 2019-07-23 | 2019-09-27 | 沈阳拓荆科技有限公司 | 一套防止加热盘边缘热量损失的保温罩 |
CN115354300A (zh) * | 2022-08-25 | 2022-11-18 | 拓荆科技(上海)有限公司 | 薄膜沉积设备 |
-
1995
- 1995-10-23 CN CN 95224085 patent/CN2228916Y/zh not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101949000A (zh) * | 2010-09-17 | 2011-01-19 | 温州市佳能真空电镀设备科技有限公司 | 真空磁控溅射多弧离子复合镀膜机 |
CN110284119A (zh) * | 2019-07-23 | 2019-09-27 | 沈阳拓荆科技有限公司 | 一套防止加热盘边缘热量损失的保温罩 |
CN110284119B (zh) * | 2019-07-23 | 2021-08-10 | 拓荆科技股份有限公司 | 一套防止加热盘边缘热量损失的保温罩 |
CN115354300A (zh) * | 2022-08-25 | 2022-11-18 | 拓荆科技(上海)有限公司 | 薄膜沉积设备 |
CN115354300B (zh) * | 2022-08-25 | 2023-11-21 | 拓荆科技(上海)有限公司 | 薄膜沉积设备 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C53 | Correction of patent for invention or patent application | ||
COR | Change of bibliographic data |
Free format text: CORRECT: PATENTEE ADDRESS; FROM: NO. 1, DEWAIBEISHATAN, BEIJING CITY, 100083 TO: YARD 1, DESHENGMENWAIQIJIAHUOZIHUAYANBEILI, BEIJING CITY, 100029 |
|
CP03 | Change of name, title or address |
Address after: 100029 Beijing Deshengmen Qi Jia Huo Zi North Kegon Hospital No. 1 Cheng Guanghe turn Designer after: Liu Jigao Patentee after: Beijing Meikeya General Technology Co., Ltd. Address before: 100083 Beijing City, North Beach No. 1 Designer before: Liu Jigao Patentee before: Beijing Meikeya General Technology Co., Ltd. Designer before: Lu Fang |
|
C19 | Lapse of patent right due to non-payment of the annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |