CN221405744U - Resonant accelerometer - Google Patents
Resonant accelerometer Download PDFInfo
- Publication number
- CN221405744U CN221405744U CN202323423293.8U CN202323423293U CN221405744U CN 221405744 U CN221405744 U CN 221405744U CN 202323423293 U CN202323423293 U CN 202323423293U CN 221405744 U CN221405744 U CN 221405744U
- Authority
- CN
- China
- Prior art keywords
- structures
- resonator
- mass block
- anchor point
- resonator structures
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000001133 acceleration Effects 0.000 claims abstract description 28
- 230000007246 mechanism Effects 0.000 claims abstract description 24
- 238000013461 design Methods 0.000 claims description 8
- 238000013519 translation Methods 0.000 claims description 4
- 210000003205 muscle Anatomy 0.000 claims description 3
- 230000008859 change Effects 0.000 abstract description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 230000003321 amplification Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000003199 nucleic acid amplification method Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 230000009977 dual effect Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000001727 in vivo Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
Landscapes
- Micromachines (AREA)
Abstract
The utility model provides a resonant accelerometer, comprising: the mass block structure (1), the anchor point structure (2), the resonator structure (3) and the flexible rib (5); the mass block structures (1) are connected through two parallel resonator structures (3); two sides of the anchor point structure (2) are connected to the two mass block structures (1) through two flexible ribs (5), and the anchor point structure (2) is positioned on the symmetry axis of the two resonator structures (3); the mass block structure (1), the anchor point structure (2), the resonator structure (3) and the flexible rib (5) are integrally formed; when the two resonator structures (3) are sensitive to acceleration, the two mass block structures (1) generate frequency change according to tensile stress and compressive stress, and the frequency change is used for representing the acceleration; changing the magnification factor of the resonator by changing the distance between the resonator and the anchor point position; and eliminating a common mode error term by making a difference between the two resonators. The embodiment of the utility model has simple structure and is a weak amplifying mechanism.
Description
Technical Field
The utility model belongs to the technical field of integral structures of resonant sensors, and particularly relates to a resonant accelerometer.
Background
The inertial navigation system utilizes a gyroscope and an accelerometer to measure the angular velocity and the acceleration of the in-vivo motion at the same time, and calculates the gesture and the speed in the current three-dimensional space, thereby obtaining the needed navigation information. The performance index of the accelerometer as a core element of the inertial navigation system directly affects the overall performance of inertial navigation, so that the accelerometer technology is one of important technologies of inertial navigation.
Compared with the conventional pendulum type adder. The resonant silicon micro-accelerometer outputs according to the quasi-digital, has the advantages of high long-term repeatability precision, small volume, low power consumption and the like, and has larger advantages compared with the prior other types of MEMS accelerometers. Therefore, the resonant silicon micro-accelerometer is a research hot spot of high-precision accelerometers in recent years, and is also a research direction of next-generation high-precision accelerometers.
The working mechanism of the resonant silicon micro-accelerometer is that the mass block senses acceleration to generate inertia force and then generates load in the axial direction of the double-end fixed tuning fork, so that the resonant frequency of the double-end fixed tuning fork is changed, the change quantity of the resonant frequency is obtained through electrostatic excitation and capacitance detection, and then the acceleration value in the sensitive axis direction is obtained. Since the sensor is sensitive to the acceleration it is subjected to, it requires a value of the sensitive acceleration of the movable part and can be fed back to the resonator. The way in which acceleration is sensitive is therefore critical to the accuracy of the test of this type of sensor.
The current sensitivity mode of the silicon micro-resonance accelerometer is mainly to conduct acceleration sensitivity through mass block translation. In order to solve the problem that the output stress of the translation mode is smaller and the test precision of the sensor is lower, an attempt is made to increase a lever amplifying mechanism in front of the input end of the resonator so as to improve the test precision. Although the lever mechanism can improve the output stress to a certain extent, due to processing errors, the amplification factor changes when positive and negative acceleration is input, the nonlinearity of the sensor is increased, the structural complexity is increased, and the overall reliability is reduced, so that the finally measured resonant frequency of the resonant beam has a certain error.
Disclosure of utility model
The utility model provides a resonant accelerometer, which can reduce the complexity of a structure, reduce nonlinearity, improve the tolerance degree of the structure to processing errors, improve the acceleration measurement precision of the resonant silicon micro-accelerometer and improve the dynamic performance of the resonant silicon micro-accelerometer.
The utility model provides a resonant accelerometer, comprising: two mass structures 1, anchor point structure 2, two resonator structures 3, flexible muscle 5, wherein:
The two mass block structures 1 are connected through two parallel resonator structures 3;
Two sides of the anchor point structure 2 are connected to the two mass block structures 1 through two flexible ribs 5, and the anchor point structure 2 is positioned on the symmetry axis of the two resonator structures 3;
The two mass block structures 1, the anchor point structure 2, the two resonator structures 3 and the two flexible ribs 5 are integrally formed;
When the two resonator structures 3 are sensitive to acceleration, the two mass structures 1 generate frequency changes according to tensile stress and compressive stress, and the frequency changes are used for representing acceleration.
Optionally, the distance between the two resonator structures 3 is determined according to the design scale factor of the resonant accelerometer;
The larger the design scale factor the closer the distance between the two resonator structures 3.
Optionally, the resonant accelerometer further comprises: a limiting mechanism 4;
the limiting mechanism 4 is attached to the outer sides of the two mass block structures 1, and limits the translation of the two mass block structures 1 along the length direction of the two resonator structures 3.
Optionally, the number of the limiting mechanisms 4 is a plurality;
the limiting mechanism 4 is also used for limiting the movement of the two mass block structures 1 along the out-of-plane direction;
The out-of-plane direction is perpendicular to the length direction and the width direction of the two resonator structures 3; the width direction of the two resonator structures 3 is the sensitive axis of the resonant accelerometer.
Alternatively, the spacing mechanism 4 uses a loop beam structure.
Alternatively, the length of the two resonator structures 3 is determined according to the design reference frequency of the resonant accelerometer.
The utility model provides a resonant accelerometer, comprising: the device comprises two mass block structures 1, an anchor point structure 2, two resonator structures 3 and flexible ribs 5, wherein the two mass block structures 1 are connected with the two resonator structures 3 through the anchor point structure 2; the anchor point structure 2 is located in the middle of the two resonator structures 3; grooves are formed on two sides of the anchor point structure 2, and two flexible ribs 5 are formed on the anchor point structure 2; the two mass block structures 1, the anchor point structure 2 and the two resonator structures 3 are integrally formed; when the two resonator structures 3 are sensitive to acceleration, the two mass structures 1 generate frequency changes according to tensile stress and compressive stress, and the frequency changes are used for representing acceleration. The utility model can change the amplification times of the resonant accelerometer by changing the distance between the resonator structure and the anchor point structure, thereby omitting a lever amplification mechanism and reducing the influence of process errors.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following description will briefly explain the drawings required to be used in the embodiments of the present utility model, and it is obvious that the drawings described below are only some embodiments of the present utility model, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a resonant accelerometer according to an embodiment of the present utility model;
FIG. 2 is a schematic diagram of an acceleration sensing mode according to an embodiment of the present utility model;
Reference numerals illustrate:
the mass block structure 1, the anchor point structure 2, the resonator structure 3, the limiting mechanism 4 and the flexible rib 5.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present utility model more clear, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. It will be apparent that the described embodiments are some, but not all, embodiments of the utility model. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without making any inventive effort are intended to fall within the scope of the present utility model.
Features and exemplary embodiments of various aspects of the utility model are described in detail below. In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the utility model. It will be apparent, however, to one skilled in the art that the present utility model may be practiced without some of these specific details. The following description of the embodiments is merely intended to provide a better understanding of the utility model by showing examples of the utility model. The present utility model is in no way limited to any particular arrangement and method set forth below, but rather covers any adaptations, alternatives, and modifications of structure, method, and device without departing from the spirit of the utility model. In the drawings and the following description, well-known structures and techniques have not been shown in detail in order not to unnecessarily obscure the present utility model.
It should be noted that, without conflict, the embodiments of the present utility model and features of the embodiments may be combined with each other, and the embodiments may be referred to and cited with each other. The utility model will be described in detail below with reference to the drawings in connection with embodiments.
Fig. 1 is a schematic structural diagram of a resonant accelerometer according to an embodiment of the present utility model, and as shown in fig. 1, the present utility model provides a resonant accelerometer, including: mass block structure 1, anchor point structure 2, resonator structure 3, stop gear 4, flexible muscle 5, wherein:
the mass block structure 1 is divided into two parts;
The anchor point structure 2 is arranged in the middle of the mass block structure 1 and is connected with the mass block structure through flexible ribs 5;
The resonator structure 3 is fixed in the middle of the mass block structure 1 and is rigidly connected with the mass block 1; the two resonator structures 3 are arranged in parallel, and the anchor point structure 2 is arranged on the symmetry axis of the two resonator structures 3;
The limiting mechanism 4 is connected with the mass block 1.
The resonator structure 3 and the mass 1 are rigidly connected and fixed in an exemplary manner;
By varying the position between the resonator structures 3 and the mass 1 the accelerometer overall scale factor is varied, the larger the design scale factor the closer the distance between the two resonator structures 3.
Alternatively, the length of the two resonator structures 3 is determined according to the design reference frequency of the resonant accelerometer. The higher the reference frequency, the shorter the length.
The limiting mechanism 4 and the mass block 1 are rigidly connected and fixed in a fixed mode;
The limiting mechanism 4 limits the displacement of the mass block 1 in the non-sensitive axis direction.
The processing mode of all the structures is a dry etching technology based on MEMS technology.
Common mode errors are eliminated by making difference between the two resonator structures 3, so that the temperature coefficient is reduced, and the environmental adaptability is improved.
The limiting mechanism 4 is also used for adjusting the first-order mode of the sensitive axis direction of the mass block 1.
In order to realize accurate measurement of acceleration by the resonant accelerometer, the acceleration signal is converted into the change of the natural frequency of the resonator, and the sensitivity principle of the acceleration is introduced below.
The dual mass blocks of the accelerometer shown in fig. 2 can rotate around the central anchor point through the flexible ribs when the accelerometer is sensitive to acceleration, the acceleration is converted into the rotation of the mass blocks, the rotation of the mass blocks is converted into the change of the natural frequency of the resonator through the resonator fixedly connected with the mass blocks, the change of the natural frequency of the resonator is detected through the detection circuit and is converted into a digital signal, the detection of the acceleration borne by the measuring sensor is completed, and the limiting mechanism enables the acceleration to be higher in rigidity to the non-sensitive axis direction.
In some embodiments, the number of mass structures is 1, and one mass structure is connected to one end of the two resonator structures 3 and the anchor point structure 2, and the other end is fixed.
In some embodiments, the stop mechanism uses a return beam to limit its non-sensitive axis direction.
In some embodiments, a leverage mechanism is added between the resonator and the mass to further increase the scale factor.
In some embodiments, the spacing mechanism limits the position between the dual masses.
In some embodiments, the use of four sets of resonators may simultaneously sense both directional acceleration signals as well as one axis angular acceleration signals.
In one possible solution, the two resonator structures 3 between the two mass structures 1 are disconnected from the middle, and are connected by anchor points, so as to form 4 resonator structures, so that the magnitude of the angular acceleration to which the two mass structures 1 are subjected can be sensed by the two mass structures 1.
Through a large number of square formulas, tests are carried out. The result proves that the resonant accelerometer structure provided by the utility model can reduce the structural complexity, reduce nonlinearity, improve the tolerance degree of the structure to processing errors and has very high strength.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present utility model, but the scope of the present utility model is not limited thereto, and any person skilled in the art can easily think about various equivalent modifications or substitutions within the technical scope of the present utility model, and these modifications or substitutions should be covered in the scope of the present utility model.
Claims (6)
1. A resonant accelerometer, comprising: two mass block structures (1), anchor point structure (2), two resonator structures (3), two flexible muscle (5), wherein:
the two mass block structures (1) are connected through two parallel resonator structures (3);
Two sides of the anchor point structure (2) are connected to the two mass block structures (1) through two flexible ribs (5), and the anchor point structure (2) is positioned on the symmetry axis of the two resonator structures (3);
The two mass block structures (1), the anchor point structure (2), the two resonator structures (3) and the two flexible ribs (5) are integrally formed;
When the two resonator structures (3) are sensitive to acceleration, the two mass structures (1) generate frequency changes according to tensile stress and compressive stress, and the frequency changes are used for representing the acceleration.
2. A resonant accelerometer according to claim 1, characterized in that the distance between two resonator structures (3) is determined according to the design scale factor of the resonant accelerometer;
The larger the design scale factor the closer the distance between the two resonator structures (3) is.
3. The resonant accelerometer of claim 1, further comprising: a limit mechanism (4);
The limiting mechanism (4) is attached to the outer sides of the two mass block structures (1) and limits the translation of the two mass block structures (1) along the length directions of the two resonator structures (3).
4. A resonant accelerometer according to claim 3, characterized in that the number of limit mechanisms (4) is a plurality;
The limiting mechanism (4) is also used for limiting the movement of the two mass block structures (1) along the out-of-plane direction;
The out-of-plane direction is perpendicular to the length direction and the width direction of the two resonator structures (3); the width direction of the two resonator structures (3) is the sensitive axis of the resonant accelerometer.
5. The resonant accelerometer according to claim 1, characterized in that the stop mechanism (4) uses a return beam structure.
6. A resonant accelerometer according to claim 1, characterized in that the length of the two resonator structures (3) is determined according to the design reference frequency of the resonant accelerometer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323423293.8U CN221405744U (en) | 2023-12-15 | 2023-12-15 | Resonant accelerometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323423293.8U CN221405744U (en) | 2023-12-15 | 2023-12-15 | Resonant accelerometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221405744U true CN221405744U (en) | 2024-07-23 |
Family
ID=91919319
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202323423293.8U Active CN221405744U (en) | 2023-12-15 | 2023-12-15 | Resonant accelerometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221405744U (en) |
-
2023
- 2023-12-15 CN CN202323423293.8U patent/CN221405744U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107643423B (en) | Three-degree-of-freedom weak coupling resonant accelerometer based on modal localization effect | |
| CA2883200C (en) | Dual and triple axis inertial sensors and methods of inertial sensing | |
| CN102778583B (en) | Silicon substrate-based quartz resonance acceleration sensor chip with four-beam structure | |
| CN102109534B (en) | Two-axis resonant silicon micro-accelerometer | |
| CN102495236A (en) | High-sensitivity dual-axis silicon-micro resonance accelerometer | |
| CN104820113B (en) | A kind of quartzy twin beams power frequency resonator of integrated temperature sensitive unit | |
| CN105606845A (en) | Dual-mass-block high sensitivity silicon micro resonant accelerometer structure based on two-level micro-levers | |
| CN108089027A (en) | Sensor and navigation attitude instrument based on MEMS capacitive micro-acceleration gauge | |
| CN208140130U (en) | MEMS (micro-electromechanical system) micro-mechanical fully-decoupled closed-loop gyroscope structure | |
| CN106771358A (en) | A kind of full quartz resonance accelerometer of miniature differential formula | |
| CN102539832A (en) | Biaxially-resonant silicon-micromachined accelerometer structure in shape of Chinese character 'tian' | |
| CN104819710A (en) | Resonant mode silicon micro-machined gyroscope with temperature compensation structure | |
| CN201984082U (en) | Biaxial resonant silicon micro- accelerometer | |
| CN106771359A (en) | A kind of quartzy integral type Micromachined Accelerometer Based on Resonant Principle | |
| CN221405744U (en) | Resonant accelerometer | |
| CN116046026B (en) | Fiber-optic gyroscope performance measurement method and system based on stress factors | |
| CN103454449A (en) | Three-axis micro-mechanical accelerometer | |
| CN108398575B (en) | Electrostatic resonance accelerometer and acceleration measurement method | |
| CN112131768B (en) | Resonant accelerometer optimization method based on modes and frequencies | |
| CN113138292A (en) | Capacitance type micromechanical accelerometer | |
| CN207395752U (en) | A kind of micro- inertia component of tunnel magnetoresistive detection | |
| CN207623364U (en) | Sensor based on MEMS capacitive micro-acceleration gauge and navigation attitude instrument | |
| CN109239399B (en) | Resonant accelerometer based on double-fork resonant beam | |
| Wang et al. | Temperature compensation for gyroscope free micro inertial measurement unit | |
| CN101339026B (en) | All solid dual spindle gyroscopes possessing square through-hole piezoelectric vibrator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |