CN207623364U - Sensor based on MEMS capacitive micro-acceleration gauge and navigation attitude instrument - Google Patents
Sensor based on MEMS capacitive micro-acceleration gauge and navigation attitude instrument Download PDFInfo
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- CN207623364U CN207623364U CN201721890659.4U CN201721890659U CN207623364U CN 207623364 U CN207623364 U CN 207623364U CN 201721890659 U CN201721890659 U CN 201721890659U CN 207623364 U CN207623364 U CN 207623364U
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- mems capacitive
- capacitive micro
- acceleration gauge
- acceleration
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Abstract
The utility model discloses a kind of sensor based on MEMS capacitive micro-acceleration gauge and navigation attitude instrument, being somebody's turn to do the sensor based on MEMS capacitive micro-acceleration gauge includes：Pedestal；Multiple MEMS capacitive micro-acceleration gauges being arranged on the pedestal, and there is default angle between the axis of each MEMS capacitive micro-acceleration gauge；For the power module of each MEMS capacitive micro-acceleration gauge power supply.The above-mentioned sensor based on MEMS capacitive micro-acceleration gauge, it can be applied to bus location, fine farm machinery automobile navigation, forest zone fireproof unmanned plane, precision guided weapon, satellite sounding etc., good environmental adaptability, it varies with temperature smaller, more accurate current acceleration information can be obtained in real time, measurement accuracy is improved, and can continuously measure impact acceleration, and significant change will not occur for performance characteristics.
Description
Technical field
The utility model is related to sensor technical field, more particularly to a kind of based on MEMS capacitive micro-acceleration gauge
Sensor and navigation attitude instrument.
Background technology
Currently, the trend for measuring acceleration is tested in the timing of MEMS capacitive micro-acceleration now.The micro- acceleration of MEMS capacitive
Degree meter have many advantages, such as it is at low cost, small, light-weight, low in energy consumption, therefore consumer electronics, bus location, structural modal survey
Amount, guided weapon, satellite sounding etc. have very important application value.
Traditional high g value impact sensor takes the principle of pressure resistance type or piezoelectric type both at home and abroad, and precision, which disclosure satisfy that, to be wanted
It asks, and difficulty of processing is relatively low.But pressure resistance type shock transducer the shortcomings that having its own, if temperature characterisitic is poor, environment adapts to
Ability is limited, and the sensitivity index variation in complete warm range very greatly, directly affects engineering test precision.Piezoelectric type impact sensing
The Hz-KHz of device is wide, and dynamic characteristic is good, but its when continuously measuring high-impact acceleration can of short duration generations charge block and show
As influencing output accuracy, and pedestal is transferred to the machinery of crystal when the piezo-electric crystal inside piezoelectric type shock transducer is to installation
Stress abnormality is sensitive, can be had an impact to the performance of shock transducer.
Utility model content
In view of the above-mentioned deficiencies of the prior art, technical problem to be solved by the utility model is to provide one kind based on MEMS electricity
Hold the sensor and navigation attitude instrument, good environmental adaptability and high certainty of measurement of the accelerometer that declines.
In order to solve the above technical problems, technical solution adopted in the utility model is：
A kind of sensor based on MEMS capacitive micro-acceleration gauge, including：
Pedestal；
Multiple MEMS capacitive micro-acceleration gauges being arranged on the pedestal, and each micro- acceleration of the MEMS capacitive
It spends between the axis of meter with default angle；
For the power module of each MEMS capacitive micro-acceleration gauge power supply.
Preferably, the number of the MEMS capacitive micro-acceleration gauge is three.
Preferably, it is mutually perpendicular between the axis of three MEMS capacitive micro-acceleration gauges.
Preferably, each MEMS capacitive micro-acceleration gauge is arranged by cohesive mode on the pedestal.
Preferably, the MEMS capacitive micro-acceleration gauge is micro- using MEMS capacitive micro-acceleration gauge MSV6000 series
Accelerometer chip.
Preferably, further include：
Whole is in the shell of cuboid-type；The pedestal, the power module and each micro- acceleration of the MEMS capacitive
Degree meter is arranged in the shell.
Preferably, the shell is made of 304 stainless steel materials.
Preferably, further include：
To the output signal of each MEMS capacitive micro-acceleration gauge carries out capacitance/voltage conversion processing, signal is put
The functional circuit of big processing and sensitivity compensation and temperature-compensating processing.
A kind of navigation attitude instrument, including any of the above-described sensor based on MEMS capacitive micro-acceleration gauge.
It is using advantageous effect caused by above-mentioned technical proposal：It is fixed that the utility model embodiment can be applied to automobile
Position, fine farm machinery automobile navigation, forest zone fireproof unmanned plane, precision guided weapon, satellite sounding etc., by each
MEMS capacitive micro-acceleration gauge acquisition current acceleration information, and MEMS capacitive micro-acceleration gauge good environmental adaptability, with
Temperature change is smaller, therefore more accurate can obtain current acceleration information in real time, improves measurement accuracy.
Description of the drawings
It, below will be to embodiment or the prior art in order to illustrate more clearly of the technical scheme in the embodiment of the utility model
Attached drawing needed in description is briefly described, it should be apparent that, the accompanying drawings in the following description is only that this practicality is new
Some embodiments of type for those of ordinary skill in the art without having to pay creative labor, can be with
Obtain other attached drawings according to these attached drawings.
Fig. 1 is the assembling schematic diagram of the utility model；
Fig. 2 is the electrical diagram of the utility model.
Specific implementation mode
In being described below, for illustration and not for limitation, it is proposed that such as tool of particular system structure, technology etc
Body details, to understand thoroughly the utility model embodiment.However, it will be clear to one skilled in the art that there is no these
The utility model can also be realized in the other embodiments of detail.In other situations, omit to well-known system,
The detailed description of apparatus, circuit and method, in case unnecessary details interferes the description of the utility model.
In order to illustrate technical solution described in the utility model, illustrated below by specific embodiment.
As shown in Figure 1, for an a kind of implementation of sensor based on MEMS capacitive micro-acceleration gauge of the utility model
Example.Referring to Fig. 1, the sensor based on MEMS capacitive micro-acceleration gauge may include：Pedestal 100, power module (not shown)
With multiple MEMS capacitive micro-acceleration gauges 200.Wherein, the MEMS capacitive micro-acceleration gauge 200 on each pedestal is equal
It is arranged on pedestal 100, and the axis of each MEMS capacitive micro-acceleration gauge 200 has default angle.The power supply
Module is powered for each MEMS capacitive micro-acceleration gauge 200.
The above-mentioned sensor based on MEMS capacitive micro-acceleration gauge can be applied to bus location, fine farm machinery
Automobile navigation, forest zone fireproof unmanned plane, precision guided weapon, satellite sounding etc. add by the way that each MEMS capacitive is micro-
The acquisition current acceleration information of speedometer 200, and 200 good environmental adaptability of MEMS capacitive micro-acceleration gauge, vary with temperature
It is smaller, therefore more accurate current acceleration information can be obtained in real time, improve measurement accuracy.
Preferably, it is mutually perpendicular between the axis of each MEMS capacitive micro-acceleration gauge 200, can ensure that multiaxis is micro- and add
The orthogonality of speedometer is installed, and cross-couplings are reduced.
In one embodiment, the number of the MEMS capacitive micro-acceleration gauge 200 is three, and but it is not limited to this.Three
A MEMS capacitive micro-acceleration gauge 200 is separately positioned on the different location of pedestal 100, and three micro- acceleration of MEMS capacitive
The axis of degree meter 200 is mutually orthogonal, forms a three-axis reference.
Referring to Fig. 2, three MEMS capacitive micro-acceleration gauges 200 are respectively X-axis micro-acceleration gauge, Y-axis micro-acceleration gauge
With Z axis micro-acceleration gauge.Power module 300 is that three MEMS capacitive micro-acceleration gauges 200 are powered.X-axis micro-acceleration gauge is defeated
Go out X-axis output signal, characterizes the acceleration information in current X-direction.Y-axis micro-acceleration gauge exports Y-axis output signal, characterization
Acceleration information in current Y direction.Z axis micro-acceleration gauge exports Z axis output signal, characterizes adding in current Z-direction
Velocity information.
Preferably, the redundancy MEMS measuring devices can also include functional circuit (ASIC circuit).The functional circuit
For the output signal to each MEMS capacitive micro-acceleration gauge 200 to carry out C/V (capacitance/voltage) conversion processing, signal is put
Big processing and sensitivity compensation and temperature-compensating processing.
As a kind of embodiment, three MEMS capacitive micro-acceleration gauges 200 can be arranged by cohesive mode
On the inner wall of the ontology.Specifically, using different glue by three MEMS according to the mechanical environment that shock transducer uses
Capacitance microaccelerator 200 is affixed on pedestal 100, while reaching assembly intensity, to ensure that shock transducer can
More fully receive useful signal.
For example, the functional circuit is integrally disposed on circuit boards；Each MEMS capacitive micro-acceleration gauge 200 with it is described
Circuit board connects；The circuit board is fixed on by thermal conductive insulation glue on pedestal 100.By thermal conductive insulation glue by the circuit board
It is fixed on pedestal 100, damping effect can be played to MEMS capacitive micro-acceleration gauge 200, and can also ensure that the biography
Sensor can more fully receive useful signal.
Referring to Fig. 1, the sensor based on MEMS capacitive micro-acceleration gauge can also include shell 400.Shell 400 is whole
In cuboid-type.Pedestal 100, the power module and each MEMS capacitive micro-acceleration gauge 200 are arranged at shell 400
In.
Preferably, shell 400 is can to ensure high-impact acceleration test environment made of 304 stainless steel materials
The Structural strength calls of lower sensor, and optimize structure fixing resonance frequency, reduce the test measurement error that installation introduces.Shell
400 mounting means can ensure the measurement accuracy of the sensor under the premise of meeting installation strength.
Optionally, the MEMS capacitive micro-acceleration gauge of Maytag Co., Ltd may be used in MEMS capacitive micro-acceleration gauge 200
MSV6000 series micro-acceleration gauge chips mainly detect acceleration signal by MEMS micro mechanical structures, and pass through ASIC circuit
Carry out C/V conversion processings, signal enhanced processing and sensitivity compensation and temperature-compensating processing.The series micro-acceleration gauge passes through
Multiple model ground, flight test verification, reliability is high, and performance indicator is stable and has fully achieved production domesticization.
The above-mentioned sensor based on MEMS capacitive micro-acceleration gauge can be applied to bus location, fine farm machinery
Automobile navigation, forest zone fireproof unmanned plane, precision guided weapon, satellite sounding etc. add by the way that each MEMS capacitive is micro-
The acquisition current acceleration information of speedometer 200, and 200 good environmental adaptability of MEMS capacitive micro-acceleration gauge, vary with temperature
It is smaller, therefore more accurate current acceleration information can be obtained in real time, measurement accuracy is improved, and can continuously measure impact
Acceleration, and significant change will not occur for performance characteristics.
In one embodiment, navigation attitude instrument may include a kind of sensing based on MEMS capacitive micro-acceleration gauge of above-mentioned people
Device, and with all advantageous effects possessed by the above-mentioned sensor based on MEMS capacitive micro-acceleration gauge, therefore herein no longer
It repeats.
Embodiment described above is only to illustrate the technical solution of the utility model, rather than its limitations；Although with reference to before
Embodiment is stated the utility model is described in detail, it will be understood by those of ordinary skill in the art that：It still can be with
Technical scheme described in the above embodiments is modified or equivalent replacement of some of the technical features；And
These modifications or replacements, the spirit for various embodiments of the utility model technical solution that it does not separate the essence of the corresponding technical solution
And range, it should be included within the scope of protection of this utility model.
Claims (9)
1. a kind of sensor based on MEMS capacitive micro-acceleration gauge, which is characterized in that including：
Pedestal；
Multiple MEMS capacitive micro-acceleration gauges being arranged on the pedestal, and each MEMS capacitive micro-acceleration gauge
Axis between there is default angle；
For the power module of each MEMS capacitive micro-acceleration gauge power supply.
2. the sensor according to claim 1 based on MEMS capacitive micro-acceleration gauge, which is characterized in that the MEMS
The number of capacitance microaccelerator is three.
3. the sensor according to claim 2 based on MEMS capacitive micro-acceleration gauge, which is characterized in that described in three
It is mutually perpendicular between the axis of MEMS capacitive micro-acceleration gauge.
4. the sensor according to claim 1 based on MEMS capacitive micro-acceleration gauge, which is characterized in that each described
MEMS capacitive micro-acceleration gauge is arranged by cohesive mode on the pedestal.
5. the sensor according to claim 4 based on MEMS capacitive micro-acceleration gauge, which is characterized in that the MEMS
Capacitance microaccelerator uses MEMS capacitive micro-acceleration gauge MSV6000 series micro-acceleration gauge chips.
6. the sensor according to claim 1 based on MEMS capacitive micro-acceleration gauge, which is characterized in that further include：
Whole is in the shell of cuboid-type；The pedestal, the power module and each MEMS capacitive micro-acceleration gauge
It is arranged in the shell.
7. the sensor according to claim 6 based on MEMS capacitive micro-acceleration gauge, which is characterized in that the shell
It is made of 304 stainless steel materials.
8. the sensor according to claim 1 based on MEMS capacitive micro-acceleration gauge, which is characterized in that further include：
Capacitance/voltage conversion processing is carried out, at signal amplification to the output signal of each MEMS capacitive micro-acceleration gauge
The functional circuit of reason and sensitivity compensation and temperature-compensating processing.
9. a kind of navigation attitude instrument, which is characterized in that be based on the micro- acceleration of MEMS capacitive including claim 1 to 8 any one of them
Spend the sensor of meter.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721890659.4U CN207623364U (en) | 2017-12-28 | 2017-12-28 | Sensor based on MEMS capacitive micro-acceleration gauge and navigation attitude instrument |
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| CN201721890659.4U CN207623364U (en) | 2017-12-28 | 2017-12-28 | Sensor based on MEMS capacitive micro-acceleration gauge and navigation attitude instrument |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108089027A (en) * | 2017-12-28 | 2018-05-29 | 中国电子科技集团公司第十三研究所 | Sensor and navigation attitude instrument based on MEMS capacitive micro-acceleration gauge |
-
2017
- 2017-12-28 CN CN201721890659.4U patent/CN207623364U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108089027A (en) * | 2017-12-28 | 2018-05-29 | 中国电子科技集团公司第十三研究所 | Sensor and navigation attitude instrument based on MEMS capacitive micro-acceleration gauge |
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