CN221057380U - Boat structure, silicon wafer carrying mechanism and processing device - Google Patents

Abstract

The utility model belongs to the technical field of solar cell processing, and discloses a boat structure, a silicon wafer carrying mechanism and a processing device, wherein the boat structure comprises a boat body, a first boat ear, a second boat ear and a third boat ear, wherein the first boat ear, the second boat ear and the third boat ear are arranged on the boat body; the silicon wafer carrying mechanism comprises a carrying assembly, a paddle and the boat structure, the processing device comprises the silicon wafer carrying mechanism and a furnace body, and when the boat structure is assembled and disassembled, the first boat ear and the second boat ear are matched with the carrying assembly; when the boat structure is placed on the paddle, the part of the carrying assembly matched with the first boat ear is matched with one side of the paddle, and the third boat ear is matched with the other side of the paddle, so that the boat structure is conveniently placed on the paddle, and the carrying assembly is removed.

Description

Boat structure, silicon wafer carrying mechanism and processing device

Technical Field

The utility model relates to the technical field of solar cell processing, in particular to a boat structure, a silicon wafer carrying mechanism and a processing device.

Background

In the film plating process of the silicon wafer, the silicon wafer needs to be carried by a boat structure, and a plurality of boat structures are also required to be uniformly carried on a paddle by a carrying assembly (such as a boat support and the like). The boat support is used as a carrier for supporting and transferring the boat structure, and the boat support enters the reaction furnace along with the boat structure, if the boat support is large in size, the occupied space of the boat support in the reaction furnace is large, so that the process reaction efficiency is influenced. The boat support structure is optimally designed according to the problems in the prior art, the split boat support is used for uniformly carrying the boat structures on the paddles, and then part of components of the boat support are removed, so that the volume of the boat support entering the reaction furnace is reduced, and the occupied space of the boat support in the reaction furnace is reduced. However, the existing boat structure is not suitable for the split type carrying assembly, so that a boat structure is required to be designed to meet the split type boat support.

Disclosure of utility model

One of the purposes of the present utility model is to provide a boat structure that facilitates removal of the handling assembly after the boat structure is placed on the paddle.

To achieve the purpose, the utility model adopts the following technical scheme:

The boat structure is configured to be matched with the carrying assembly and comprises a boat body and a boat ear arranged on the boat body;

The boat ears comprise a first boat ear, a second boat ear and a third boat ear, the first boat ear and the second boat ear are respectively arranged on two opposite sides of the boat body, the second boat ear and the third boat ear are positioned on the same side of the boat body, and the second boat ear and the third boat ear have a height difference in the up-down direction of the boat body;

When the boat structure is assembled and disassembled, the first boat ear and the second boat ear are matched with the carrying assembly; when the boat structure is placed on the paddle, the part of the carrying assembly matched with the first boat ear is matched with one side of the paddle, and the third boat ear is matched with the other side of the paddle.

Through above-mentioned structure, after carrying the boat structure to the oar, the part that supports first boat ear cooperates with one side of oar, and the opposite side of oar supports the third boat ear, because there is the difference in height second boat ear and third boat ear, carry the subassembly when carrying the boat structure on the oar, can avoid being located the transport subassembly of homonymy and the oar emergence interference, conveniently support the transport subassembly part of second boat ear and demolish.

In one possible implementation, the height position of the first navicular is located between the height position of the second navicular and the height position of the third navicular.

Through the above-mentioned high-low staggered's horn setting, the boat is more stable when placing on handling assembly and oar, avoids appearing rocking of the boat body.

In one possible implementation, the second navicular is arranged above the third navicular, and the dimension of the second navicular in the left-right direction of the navicular body is L1; the third lower navicular has a dimension L2 in the left-right direction of the navicular body; wherein L1 is less than L2.

Through the size of the second boat ear being smaller than that of the third boat ear, the structure of the furnace body in the prior art can be applied, the design is considered in cooperation with the safety margin of the boat structure in and out of the furnace body or the furnace body, the situation that the size of the second boat ear is too large to touch the inner wall of the furnace body or the furnace body is avoided, and the safety of the boat structure in and out of the furnace body or the furnace body is ensured.

In one possible implementation manner, the boat body includes a first end plate, a second end plate and supporting members, the first end plate is arranged with the second end plate at intervals, a plurality of supporting members are arranged between the first end plate and the second end plate to form a bearing space for placing the silicon wafer, a bearing groove is arranged on one side of the supporting members facing the bearing space, and the boat ear is arranged on one side of the supporting members facing away from the bearing space.

In one possible implementation, the boat ear is detachably connected to the support member.

The detachable mode can improve the adaptability to different carrying assemblies and paddles, and the application range is expanded.

In one possible implementation, the support members include four, two of which are located on one side of the first end plate and two other of which are located on the other side of the first end plate, the first boat ear connecting two of the adjacent support members, the second boat ear and the third boat ear connecting the two other adjacent support members.

The four supporting pieces can enable the overall structure of the boat body to be more stable, and each boat ear is connected with two adjacent supporting pieces, so that the boat ears are connected more stably.

In one possible implementation, the first end plate and/or the second end plate is provided with holes, which communicate with the carrying space.

Through the structure, on one hand, the whole quality of the boat structure can be reduced, on the other hand, the obstruction to the reaction gas in the furnace body is also conveniently reduced, the reaction gas can rapidly enter and exit the bearing space, and the reaction efficiency is improved.

The application also provides a silicon wafer carrying mechanism, which comprises a carrying assembly, a paddle and the boat structure, wherein the carrying assembly comprises a carrying piece and a carrying piece which are detachably connected, the carrying piece supports a first boat ear, the carrying piece supports a second boat ear, the paddle comprises a first paddle and a second paddle which are arranged at intervals, the first paddle is positioned below the carrying piece to support the carrying piece, and the second paddle is used for supporting a third boat ear.

Through above-mentioned silicon chip transport mechanism, after carrying the silicon chip in the furnace body, can tear down the transport piece in the transport subassembly, make the transport piece not get into the furnace body to can save the space in the furnace body, promote technology reaction efficiency.

In one possible implementation, both the carrier and the carrier are provided with mounting locations for accommodating the boat ears.

By adopting the structure, the stability of the boat structure can be ensured when the carrying assembly carries.

The application also provides a processing device, which comprises the silicon wafer carrying mechanism.

The silicon wafer is placed in the furnace body to react through the silicon wafer carrying mechanism, so that the space in the furnace body is saved, and the process reaction efficiency is improved.

The utility model has the beneficial effects that:

after carrying the boat structure to the oar, the part that supports first boat ear cooperates with one side of oar, and the opposite side of oar supports the third boat ear, because there is the difference in height second boat ear and third boat ear, carrying the subassembly when carrying the oar with boat structure, can avoid being located the carrying subassembly of homonymy and the oar and take place to interfere, conveniently support the carrying subassembly part of second boat ear to demolish, saves the space in the furnace body, promotes technology reaction efficiency.

Drawings

FIG. 1 is a schematic view of one view of the boat structure of the present utility model;

FIG. 2 is a schematic view of another view of the boat structure of the present utility model;

FIG. 3 is a side view of the boat structure of the present utility model;

FIG. 4 is a schematic view of the handling assembly of the present utility model handling a plurality of boat structures;

FIG. 5 is a schematic view of a carrier in the handling assembly of the present utility model;

FIG. 6 is a schematic view of a carrier member of the carrier assembly of the present utility model;

FIG. 7 is a schematic view of a silicon wafer handling mechanism of the present utility model;

FIG. 8 is a schematic view of a first paddle of the present utility model;

fig. 9 is a schematic view of a second paddle of the present utility model.

In the figure:

10. a boat structure;

1. A boat body; 11. a first end plate; 12. a second end plate; 13. a support; 14. a carrying groove; 15. a hole;

2. A navicular ear; 21. a first navicular; 22. a second navicular; 23. a third navicular;

20. A handling assembly; 201. a carrier; 202. a carrying member; 203. a mounting position;

30. A paddle; 301. a first paddle; 302. a second paddle; 303. a bearing position; 304. and (5) supporting the position.

Detailed Description

The utility model is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the utility model and are not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present utility model are shown in the drawings.

In the description of the present utility model, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

In the present utility model, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "left", "right", etc., azimuth or positional relationship are based on the azimuth or positional relationship shown in the drawings, and are merely for convenience of description and simplification of operations, and do not indicate or imply that the apparatus or element referred to must have a specific azimuth, be constructed and operated in a specific azimuth, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.

As shown in fig. 1 and 4, the present application provides a boat structure 10, which can be used together with a carrying assembly 20, wherein the boat structure 10 comprises a boat body 1 and a boat ear 2 arranged on the boat body 1, the boat ear 2 comprises a first boat ear 21, a second boat ear 22 and a third boat ear 23, the first boat ear 21 and the second boat ear 22 are respectively arranged on two opposite sides of the boat body 1, the second boat ear 22 and the third boat ear 23 are positioned on the same side of the boat body 1, and the second boat ear 22 and the third boat ear 23 have a height difference in the up-down direction of the boat body 1; when the boat structure 10 is assembled and disassembled, the first boat ear 21 and the second boat ear 22 are engaged with the carrying assembly 20; when boat structure 10 is placed on paddle 30, the portion of carrier assembly 20 that mates with first boat 21 mates with one side of paddle 30 and third boat 23 mates with the other side of paddle 30.

The boat structure 10 is carried by the carrying assembly 20 by respectively supporting the first boat ear 21 and the second boat ear 22 which are positioned on two opposite sides of the boat body 1, after the boat structure is carried to the paddle 30, the part of the carrying assembly 20 supporting the first boat ear 21 is matched with one side of the paddle 30, and the other side of the paddle 30 supports the third boat ear 23, because the second boat ear 22 and the third boat ear 23 have a height difference, when the carrying assembly 20 carries the boat structure 10 on the paddle 30, the carrying assembly 20 positioned on the same side can be prevented from interfering with the paddle 30, the part of the carrying assembly 20 supporting the second boat ear 22 is conveniently removed, and then the carrying assembly is carried into the furnace body, so that the boat structure 10 can be adapted to the detachable carrying assembly 20, and the carrying assembly 20 is conveniently removed.

As shown in fig. 1 to 3, in some embodiments, the height position of the first boat ear 21 is located between the height position of the second boat ear 22 and the height position of the third boat ear 23, so that the boat body 1 can ensure stability of the boat structure 10 when it is located on the handling assembly 20 or the paddle 30 by the staggered arrangement. Further, the second boat ear 22 is disposed above the third boat ear 23, and the dimension of the second boat ear 22 in the left-right direction of the boat body 1 is L1, and the dimension of the third boat ear 23 located below in the left-right direction of the boat body 1 is L2; wherein L1 is less than L2; that is, the second boat ear 22 protrudes horizontally in a direction away from the boat body 1, the third boat ear 23 protrudes horizontally in a direction away from the boat body 1, and the third boat ear 23 is shorter than the second boat ear 22 in the upper portion than the third boat ear 23 in the lower portion, so as to adapt to the structure of the furnace body in the prior art, so that the second boat ear 22 is left with a margin when entering and exiting the furnace body or the furnace tube, and the safety of entering and exiting the furnace body or the furnace tube of the boat structure 10 is ensured.

In some embodiments, the boat body 1 includes a first end plate 11, a second end plate 12, and supporting members 13, where the first end plate 11 and the second end plate 12 are disposed at intervals, and a plurality of supporting members 13 are disposed between the first end plate 11 and the second end plate 12 to enclose and form a carrying space for placing silicon wafers, one side of the supporting member 13 facing the carrying space is provided with a plurality of carrying grooves 14 for inserting silicon wafers, and the carrying grooves 14 are disposed at intervals along the up-down direction of the supporting member 13, so that the silicon wafers located in the carrying space can be disposed at intervals, so as to facilitate the flow of gas. The first and second and third navicular 21, 22 and 23 are disposed on the side of the supporting member 13 facing away from the bearing space, so as to avoid interference of the first and second navicular 21, 22 and 23 with silicon wafers, and facilitate supporting of the handling assembly 20 and the paddle 30.

In some embodiments, the first, second and third navicular 21, 22 and 23 are detachably connected to the support 13, so as to facilitate replacement and maintenance of the navicular 2 or 1, and save costs; in addition, the detachable arrangement can also be used for adjusting the height direction of the first boat ear 21, the second boat ear 22 and the third boat ear 23 in the supporting piece 13, so that the adaptability to different carrying assemblies 20 and paddles 30 can be improved, and the application range is expanded.

In some embodiments, the supports 13 on the boat body 1 comprise four, wherein two supports 13 are located on one side of the first end plate 11, and the other two supports 13 are located on the other side of the first end plate 11, so that the stability of the entire boat body 1 is enhanced; on the basis, the first boat ear 21 is connected with two adjacent supporting pieces 13, the second boat ear 22 and the third boat ear 23 are connected with the other two adjacent supporting pieces 13, so that the stability of the connection of the boat ears 2 can be ensured, and the boat structure 10 can be kept stable in the carrying process. Illustratively, the connection of the boat ear 2 to the support 13 is not limited to a plug-in, screw-in, or the like detachable manner.

In some embodiments, the first end plate 11 is provided with a hole 15, or the second end plate 12 is provided with a hole 15, or the first end plate 11 and the second end plate 12 are both provided with holes 15, and the holes 15 are communicated with a bearing space, so that on one hand, the quality of the boat body 1 can be reduced through the arrangement of the holes 15, and therefore, when the carrying assembly 20 or the paddle 30 carries, the weight can be reduced, and the service life can be prolonged; on the other hand, through the arrangement of the holes 15, the obstruction to the reaction gas can be reduced when the reaction is carried out in the furnace body, so that the reaction gas can more rapidly enter and exit the bearing space for placing the silicon wafer, and the reaction efficiency is improved.

As shown in fig. 4 to 9, the present application also provides a silicon wafer handling mechanism, which includes a handling assembly 20, paddles 30, and the boat structure 10 described above, so that silicon wafers can be transported into a furnace body through the three.

As shown in fig. 4 to 6, the handling assembly 20 includes a detachable carrier 201 and a handling member 202, wherein the carrier 201 can support the first boat 21, and the handling member 202 can support the second boat 22, so as to support the entire boat structure 10 for handling; it should be noted that, the carrying member 201 and the carrying member 202 may be detachably connected by, but not limited to, inserting or overlapping each other; illustratively, the carrier 201 is spaced from the handle 202 to form a space capable of receiving the boat structure 10. Further, in order to secure stability of the boat structure 10 at the time of conveyance, the carrier 201 and the conveyance member 202 are each provided with a mounting position 203 for accommodating the boat 2. Illustratively, the mounting locations 203 are recesses that receive the boat ears 2 to avoid rattling of the boat structure 10. Further, the mounting locations 203 may be spaced along the lengths of the carriers 201 and the carriers 202 to correspond to different boat structures 10, respectively, to enable the multiple boat structures 10 to be carried at once.

As shown in fig. 7 to 9, the paddle 30 includes a first paddle 301 and a second paddle 302 disposed at intervals, the first paddle 301 is located below the carrier 201 to be capable of supporting the carrier 201, and the second paddle 302 is capable of supporting the third boat ear 23 of the boat structure 10, so that the carrier 202 in the carrier assembly 20 can be detached from the boat structure 10 when the carrier assembly 20 places the boat structure 10 on the paddle 30, and the support of the carrier 202 is replaced by the second paddle 302, so that the second paddle 302, the first paddle 301 and the carrier 201 carry the boat structure 10 into the furnace body, so that space in the furnace body can be saved, and the process reaction efficiency is improved. Further, the surface of the first paddle 301 is provided with a bearing location 303 for accommodating the bearing 201, and the surface of the second paddle 302 is provided with a plurality of bearing locations 304 for bearing the third boat ear 23, so as to avoid shaking. Illustratively, the bearing locations 303 and the holding locations 304 are grooves.

The application also provides a processing device which comprises the silicon wafer carrying mechanism and the furnace body, and the silicon wafer is placed in the furnace body for reaction through the silicon wafer carrying mechanism, so that the space in the furnace body is saved, and the process reaction efficiency is improved.

It is to be understood that the above examples of the present utility model are provided for clarity of illustration only and are not limiting of the embodiments of the present utility model. Various obvious changes, rearrangements and substitutions can be made by those skilled in the art without departing from the scope of the utility model. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are desired to be protected by the following claims.

Claims (10)

1. A boat structure configured to cooperate with the handling assembly (20), characterized in that,

The boat structure (10) comprises a boat body (1) and a boat ear (2) arranged on the boat body (1);

The boat ear (2) comprises a first boat ear (21), a second boat ear (22) and a third boat ear (23), wherein the first boat ear (21) and the second boat ear (22) are respectively arranged on two opposite sides of the boat body (1), the second boat ear (22) and the third boat ear (23) are positioned on the same side of the boat body (1), and the second boat ear (22) and the third boat ear (23) have a height difference in the up-down direction of the boat body (1);

When the boat structure (10) is assembled and disassembled, the first boat ear (21) and the second boat ear (22) are matched with the conveying assembly (20); when the boat structure (10) is placed on a paddle (30), the portion of the carrying assembly (20) which is matched with the first boat ear (21) is matched with one side of the paddle (30), and the third boat ear (23) is matched with the other side of the paddle (30).

2. The boat structure according to claim 1, characterized in that the height position of the first boat ear (21) is located between the height position of the second boat ear (22) and the height position of the third boat ear (23).

3. The boat structure according to claim 2, characterized in that the second boat ear (22) is provided above the third boat ear (23), and the second boat ear (22) has a dimension L1 in the left-right direction of the boat body (1); the third boat ear (23) positioned below has a dimension L2 in the left-right direction of the boat body (1); wherein L1 is less than L2.

4. The boat structure according to claim 1, wherein the boat body (1) comprises a first end plate (11), a second end plate (12) and supporting pieces (13), the first end plate (11) and the second end plate (12) are arranged at intervals, a plurality of the supporting pieces (13) are arranged between the first end plate (11) and the second end plate (12) to form a bearing space for placing silicon wafers, a bearing groove (14) is formed in one side of the supporting pieces (13) facing the bearing space, and the boat ears (2) are arranged on one side of the supporting pieces (13) facing away from the bearing space.

5. Boat structure according to claim 4, characterized in that the boat ear (2) is detachably connected with the support (13).

6. The boat structure according to claim 4, characterized in that the support members (13) include four, two of the support members (13) being located on one side of the first end plate (11), the other two support members (13) being located on the other side of the first end plate (11), the first boat ear (21) connecting two of the support members (13) adjacent thereto, the second boat ear (22) and the third boat ear (23) connecting the other two adjacent support members (13).

7. Boat structure according to claim 4, characterized in that the first end plate (11) and/or the second end plate (12) are provided with holes (15), which holes (15) communicate with the carrying space.

8. Silicon wafer handling mechanism, characterized by, including handling subassembly (20), oar (30) and the boat structure of any one of claims 1-7, handling subassembly (20) are including detachable carrier (201) and carrier (202) of connecting, carrier (201) bearing first boat ear (21), carrier (202) bearing second boat ear (22), oar (30) are including first oar (301) and second oar (302) that the interval set up, first oar (301) are located carrier (201) below is in order to support carrier (201), second oar (302) are used for the bearing third boat ear (23).

9. Silicon wafer handling mechanism according to claim 8, characterized in that the carrier (201) and the carrier (202) are each provided with a mounting location (203) for accommodating the boat (2).

10. A processing apparatus comprising the silicon wafer handling mechanism according to claim 8 or 9.