CN220869853U - Lower shaft capable of reducing oxygen content in monocrystalline silicon - Google Patents
Lower shaft capable of reducing oxygen content in monocrystalline silicon Download PDFInfo
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- CN220869853U CN220869853U CN202322506944.3U CN202322506944U CN220869853U CN 220869853 U CN220869853 U CN 220869853U CN 202322506944 U CN202322506944 U CN 202322506944U CN 220869853 U CN220869853 U CN 220869853U
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- water
- cooling
- lower shaft
- water cooling
- shaft
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- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims abstract description 37
- 229910052760 oxygen Inorganic materials 0.000 title claims abstract description 36
- 239000001301 oxygen Substances 0.000 title claims abstract description 36
- 229910021421 monocrystalline silicon Inorganic materials 0.000 title claims abstract description 24
- 238000001816 cooling Methods 0.000 claims abstract description 131
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 104
- 238000007789 sealing Methods 0.000 claims abstract description 13
- 230000001681 protective effect Effects 0.000 claims abstract description 9
- 238000010276 construction Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 15
- 230000007246 mechanism Effects 0.000 abstract description 12
- 229910000677 High-carbon steel Inorganic materials 0.000 abstract description 5
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 abstract description 5
- 239000011203 carbon fibre reinforced carbon Substances 0.000 abstract description 5
- 239000002131 composite material Substances 0.000 abstract description 5
- 238000000034 method Methods 0.000 description 14
- 239000013078 crystal Substances 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 5
- 230000007547 defect Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a lower shaft capable of reducing oxygen content in monocrystalline silicon, which comprises a lower shaft structure, wherein an upper corrugated pipe, a left water-cooling frame, a frame body, an upper water-cooling cover, a sealing element, a right water-cooling frame, an upper water-cooling structure, a water-cooling inner pipe, an upper water cooler, a lower corrugated pipe, a lower water-cooling cover, a positioning element, a lower water-cooling structure and a protective sleeve are positioned on the outer wall of the middle part of the lower shaft structure, and the left water-cooling frame and the right water-cooling frame are positioned on the outer side of the upper water-cooling structure. According to the lower shaft capable of reducing the oxygen content in monocrystalline silicon, the lower shaft mechanism is changed into a hollow structure, the water cooling pipe is additionally arranged at the central position and is a double-cooling mechanism, the central water cooling pipe is independently supplied with water, meanwhile, the lower shaft is sealed by adopting a corrugated pipe, the water cooling pipe is made of a high-temperature-resistant high-heat-conductivity material, the middle shaft is of a hollow structure, the material is made of a carbon-carbon composite material, the middle shaft bolt structure is connected through hollow external threads, and the material is made of T9 high-carbon steel.
Description
Technical Field
The utility model relates to the field of monocrystalline and semiconductor thermal fields, in particular to a lower shaft capable of reducing oxygen content in monocrystalline silicon.
Background
The lower axis capable of reducing the oxygen content in monocrystalline silicon is a monocrystalline and semiconductor thermal field, and along with the development of the solar cell industry, the quality requirement on the monocrystalline silicon is higher and higher. In order to set a threshold on the monocrystalline silicon market, the method can be realized by reducing the cost and improving the conversion efficiency of the battery. And the improvement of conversion efficiency and the reduction of oxygen content in monocrystalline silicon are key. This is because oxygen is the first unavoidable impurity in czochralski silicon, and in the solar energy application field, oxygen has a great hazard to the conversion efficiency of solar cells, 1) the oxygen donor effect, resulting in a P-type single crystal with a virtually high resistivity and an N-type single crystal with a virtually low resistivity; 2) Oxygen forms oxygen precipitation in the process of the battery technology to form secondary defects, so that minority carrier lifetime can be greatly reduced, and the secondary defects are represented as black heart pieces when serious; 3) Oxygen and boron combine to form a B-O complex, which causes the light attenuation effect of the P-type solar cell, so the oxygen reduction research is extremely important, and along with the continuous development of technology, the requirements of people on the manufacturing process of the lower shaft capable of reducing the oxygen content in monocrystalline silicon are also higher and higher.
The existing lower shaft capable of reducing the oxygen content in monocrystalline silicon has certain defects in use, 1, the shortened heater has larger influence on crystal pulling stability; 2. after the heater ring is shortened, the resistance cannot meet the requirement, and the requirement on raw materials is more severe; 3. after the heater ring is shortened, the power density is increased, so that the corrosion rate is increased, and the service life is reduced; 4. the furnace is shut down and can only be cooled through the exhaust holes and the furnace wall, the furnace disassembly temperature is too high, and the service life of a thermal field is reduced.
Disclosure of utility model
The technical problems to be solved are as follows: aiming at the defects of the prior art, the utility model provides the lower shaft capable of reducing the oxygen content in monocrystalline silicon, the lower shaft mechanism is changed into a hollow structure, the water cooling pipe is additionally arranged at the central position and is a double-cooling mechanism, the central water cooling pipe adopts independent water supply, the lower shaft is sealed by adopting a corrugated pipe, the water cooling pipe adopts a high-temperature-resistant high-heat-conductivity material, the middle shaft is of a hollow structure, the material is prepared by adopting a carbon-carbon composite material, the middle shaft bolt structure is connected through a hollow external thread, and the material is prepared by adopting T9 high-carbon steel, so that the problems in the background art can be effectively solved.
The technical scheme is as follows: in order to achieve the above purpose, the technical scheme adopted by the utility model is as follows: the utility model provides a lower axle that can reduce oxygen content in monocrystalline silicon, includes lower axle structure, lower axle structure's middle part outer wall location has bellows, left water-cooling frame, support body, goes up water-cooling cover, sealing member, right water-cooling frame, goes up water-cooling structure, water-cooling inner tube, goes up water cooler, bellows down, lower water-cooling cover, setting element, lower water-cooling structure and protective sleeve, left water-cooling frame, support body, go up water-cooling cover, sealing member and right water-cooling frame all are located the outside of going up water-cooling structure.
Preferably, the front end position of the lower shaft structure is positioned with a center shaft, the center shaft position of the front end position of the lower shaft structure is positioned with an external thread and a thread ring pad, the rear end of the lower shaft structure is positioned with a pipe body and a shaft seat, and the inside of the lower shaft structure is positioned with a water cooling pipe.
Preferably, the lower shaft structure is clamped, positioned and installed with the upper corrugated pipe, the left water cooling frame, the frame body, the upper water cooling cover, the sealing element, the right water cooling frame, the upper water cooling structure, the water cooling inner pipe, the upper water cooler, the lower corrugated pipe, the lower water cooling cover, the positioning element, the lower water cooling structure and the protective sleeve.
Preferably, the lower shaft structure and the middle shaft are positioned through external threads and a threaded ring pad, and the lower shaft structure is fixed with the shaft seat and the pipe body.
Preferably, the lower shaft structure is a hollow structure, and the middle position of the lower shaft structure is respectively provided with an upper water cooling structure and a lower water cooling structure.
Preferably, the upper water cooling structure and the lower water cooling structure on the lower shaft structure are independent water supply structures, and the upper water cooling structure and the lower water cooling structure are high-temperature-resistant high-heat conductivity structures.
The beneficial effects are that: compared with the prior art, the utility model provides the lower shaft capable of reducing the oxygen content in monocrystalline silicon, which has the following beneficial effects: the lower shaft capable of reducing the oxygen content in monocrystalline silicon is changed into a hollow structure, a water cooling pipe is additionally arranged at the central position and is a double-cooling mechanism, the water cooling pipe is independently supplied with water and is sealed at the lower shaft by a corrugated pipe, a water cooling pipe material is made of a high-temperature-resistant high-heat-conductivity material, a middle shaft is of a hollow structure, the material is made of a carbon-carbon composite material, a middle shaft bolt structure is connected through a hollow external thread, and the material is made of T9 high-carbon steel, so that the quality oxygen of monocrystalline products is reduced, the conversion efficiency is improved, the shutdown time is shortened, and the crystal pulling efficiency is improved. The design is that an extensible water cooling mechanism is added by changing the structures of a central shaft of a thermal field and a lower shaft of equipment, the temperature of the crucible bottom is controlled, and the generation of oxygen is inhibited; optimize lower axle construction, increase two water-cooling mechanism, through lifting center water-cooling mechanism, control water-cooled tube to crucible end distance, adjust discharge and temperature, control crucible bottom temperature to reach the oxygen effect that falls. In the furnace shutdown procedure, the temperature in the furnace can be reduced through a water cooling pipe, so that the aim of shortening working hours is fulfilled; the utility model utilizes the thought that the heat at 800 ℃ mainly takes radiation as the main component, designs the middle shaft and the lower shaft with cooling function, reduces the radiation of the heater to the bottom, and thus reduces the generation of oxygen in the crystal pulling process. Meanwhile, in the furnace shutdown process, the heat dissipation effect can be achieved, the whole lower shaft capable of reducing the oxygen content in monocrystalline silicon is simple in structure, convenient to operate and better in use effect compared with a traditional mode.
Drawings
FIG. 1 is a schematic diagram showing the overall structure of a lower shaft capable of reducing the oxygen content in single crystal silicon according to the present utility model.
In the figure: 1. a lower shaft structure; 2. a water-cooled tube; 3. a water cooling cover is arranged; 4. a water cooling structure is arranged; 5. a seal; 6. a lower water cooling structure; 7. a left water cooling frame; 8. feeding a water cooler; 9. a positioning piece; 10. a lower water cooling cover; 11. water-cooling the inner tube; 12. a right water cooling frame; 13. a protective sleeve; 14. a frame body; 15. an upper corrugated pipe; 16. a shaft seat; 17. a tube body; 18. a lower bellows; 19. a center shaft; 20. an external thread; 21. a thread ring pad.
Detailed Description
The technical solution of the present utility model will be clearly and completely described below with reference to the accompanying drawings and detailed description, but it will be understood by those skilled in the art that the examples described below are some, but not all, examples of the present utility model, and are intended to be illustrative of the present utility model only and should not be construed as limiting the scope of the present utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model. The specific conditions are not noted in the examples and are carried out according to conventional conditions or conditions recommended by the manufacturer. The reagents or apparatus used were conventional products commercially available without the manufacturer's attention.
In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
As shown in FIG. 1, a lower shaft capable of reducing oxygen content in monocrystalline silicon comprises a lower shaft structure 1, wherein an upper corrugated pipe 15, a left water cooling frame 7, a frame body 14, an upper water cooling cover 3, a sealing element 5, a right water cooling frame 12, an upper water cooling structure 4, a water cooling inner pipe 11, an upper water cooler 8, a lower corrugated pipe 18, a lower water cooling cover 10, a positioning element 9, a lower water cooling structure 6 and a protective sleeve 13 are positioned on the outer side of the upper water cooling structure 4, the left water cooling frame 7, the frame body 14, the upper water cooling cover 3, the sealing element 5 and the right water cooling frame 12 are all positioned on the outer side of the upper water cooling structure 4, the lower shaft structure is changed into a hollow structure, a water cooling pipe is added at the central position and is a double-cooling structure, the central water cooling pipe adopts independent water supply, the corrugated pipe is used for sealing the lower shaft, the water cooling pipe adopts a high-temperature resistant and high-thermal conductivity material, a central shaft is also a hollow structure, the central shaft is prepared by adopting a carbon-carbon composite material, the central shaft bolt structure is connected through a hollow external thread, and the material is made of T9 high-carbon steel.
Further, a central shaft 19 is positioned at the front end of the lower shaft structure 1, external threads 20 and a thread ring pad 21 are positioned at the central shaft 19 at the front end of the lower shaft structure 1, a pipe body 17 and a shaft seat 16 are positioned at the rear end of the lower shaft structure 1, and a water cooling pipe 2 is positioned inside the lower shaft structure 1.
Further, the lower shaft structure 1 is engaged with the upper corrugated pipe 15, the left water cooling frame 7, the frame body 14, the upper water cooling cover 3, the sealing element 5, the right water cooling frame 12, the upper water cooling structure 4, the water cooling inner pipe 11, the upper water cooler 8, the lower corrugated pipe 18, the lower water cooling cover 10, the positioning element 9, the lower water cooling structure 6 and the protective sleeve 13 for positioning and installation.
Further, the lower shaft structure 1 and the middle shaft 19 are positioned through the external threads 20 and the thread ring pad 21, and the lower shaft structure 1 is fixed with the shaft seat 16 and the pipe body 17.
Further, the lower shaft structure 1 is a hollow structure, and the middle position of the lower shaft structure 1 is respectively positioned with the upper water cooling structure 4 and the lower water cooling structure 6.
Further, the upper water cooling structure 4 and the lower water cooling structure 6 on the lower shaft structure 1 are independent water supply structures, and the upper water cooling structure 4 and the lower water cooling structure 6 are high temperature resistant and high thermal conductivity structures.
Working principle: the utility model comprises a lower shaft structure 1, a water cooling pipe 2, an upper water cooling cover 3, an upper water cooling structure 4, a sealing piece 5, a lower water cooling structure 6, a left water cooling frame 7, an upper water cooler 8, a positioning piece 9, a lower water cooling cover 10, a water cooling inner pipe 11, a right water cooling frame 12, a protective sleeve 13, a frame body 14, an upper corrugated pipe 15, a shaft seat 16, a pipe body 17, a lower corrugated pipe 18, a central shaft 19, an external thread 20 and a thread ring cushion 21, wherein the lower shaft structure is changed into a hollow structure, the water cooling pipe is added at the central position and is a double cooling mechanism, the central water cooling pipe adopts independent water supply, the corrugated pipe is adopted for sealing at the lower shaft, the water cooling pipe adopts a high-temperature-resistant high-heat-conductivity material, the central shaft is of which is of a hollow structure, the material is prepared by adopting a carbon-carbon composite material, the central shaft bolt structure is connected by the hollow external thread, and the material is made of T9 high-carbon steel, so that the quality oxygen of single crystal products is reduced, the conversion efficiency is improved, the crystal pulling time is shortened, and the shutdown efficiency is improved. The design is that an extensible water cooling mechanism is added by changing the structures of a central shaft of a thermal field and a lower shaft of equipment, the temperature of the crucible bottom is controlled, and the generation of oxygen is inhibited; optimize lower axle construction, increase two water-cooling mechanism, through lifting center water-cooling mechanism, control water-cooled tube to crucible end distance, adjust discharge and temperature, control crucible bottom temperature to reach the oxygen effect that falls. In the furnace shutdown procedure, the temperature in the furnace can be reduced through a water cooling pipe, so that the aim of shortening working hours is fulfilled; the utility model utilizes the thought that the heat at 800 ℃ mainly takes radiation as the main component, designs the middle shaft and the lower shaft with cooling function, reduces the radiation of the heater to the bottom, and thus reduces the generation of oxygen in the crystal pulling process. Meanwhile, in the furnace shutdown process, the heat dissipation effect can be achieved.
It should be noted that in this document, relational terms such as first and second (first and second), and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.
The foregoing has shown and described the basic principles and main features of the present utility model and the advantages of the present utility model. It will be understood by those skilled in the art that the present utility model is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present utility model, and various changes and modifications may be made without departing from the spirit and scope of the utility model, which is defined in the appended claims.
Claims (6)
1. Lower shaft capable of reducing oxygen content in monocrystalline silicon, comprising a lower shaft structure (1), characterized in that: the middle part outer wall of lower axle construction (1) is located bellows (15), left water-cooling frame (7), support body (14), goes up water-cooling cover (3), sealing member (5), right water-cooling frame (12), goes up water-cooling structure (4), water-cooling inner tube (11), goes up water cooler (8), bellows (18), lower water-cooling cover (10), setting element (9), lower water-cooling structure (6) and protective sleeve (13) down, left water-cooling frame (7), support body (14), go up water-cooling cover (3), sealing member (5) and right water-cooling frame (12) all are located the outside of going up water-cooling structure (4).
2. A lower shaft for reducing oxygen content in single crystal silicon according to claim 1, wherein: the front end position of the lower shaft structure (1) is positioned with a center shaft (19), the position of the center shaft (19) at the front end position of the lower shaft structure (1) is positioned with an external thread (20) and a thread ring pad (21), the rear end of the lower shaft structure (1) is positioned with a pipe body (17) and a shaft seat (16), and the inside of the lower shaft structure (1) is positioned with a water cooling pipe (2).
3. A lower shaft for reducing oxygen content in single crystal silicon according to claim 1, wherein: the lower shaft structure (1) is clamped, positioned and installed with an upper corrugated pipe (15), a left water cooling frame (7), a frame body (14), an upper water cooling cover (3), a sealing piece (5), a right water cooling frame (12), an upper water cooling structure (4), a water cooling inner pipe (11), an upper water cooler (8), a lower corrugated pipe (18), a lower water cooling cover (10), a positioning piece (9), a lower water cooling structure (6) and a protective sleeve (13).
4. A lower shaft for reducing oxygen content in single crystal silicon according to claim 2, wherein: the lower shaft structure (1) is positioned with the middle shaft (19) through external threads (20) and a thread ring pad (21), and the lower shaft structure (1) is fixed with the shaft seat (16) and the pipe body (17).
5. A lower shaft for reducing oxygen content in single crystal silicon according to claim 1, wherein: the lower shaft structure (1) is a hollow structure, and the middle position of the lower shaft structure (1) is respectively provided with an upper water cooling structure (4) and a lower water cooling structure (6).
6. A lower shaft for reducing oxygen content in single crystal silicon according to claim 1, wherein: the upper water cooling structure (4) and the lower water cooling structure (6) on the lower shaft structure (1) are independent water supply structures, and the upper water cooling structure (4) and the lower water cooling structure (6) are high-temperature-resistant high-heat conductivity structures.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322506944.3U CN220869853U (en) | 2023-09-15 | 2023-09-15 | Lower shaft capable of reducing oxygen content in monocrystalline silicon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322506944.3U CN220869853U (en) | 2023-09-15 | 2023-09-15 | Lower shaft capable of reducing oxygen content in monocrystalline silicon |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220869853U true CN220869853U (en) | 2024-04-30 |
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ID=90817953
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322506944.3U Active CN220869853U (en) | 2023-09-15 | 2023-09-15 | Lower shaft capable of reducing oxygen content in monocrystalline silicon |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220869853U (en) |
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2023
- 2023-09-15 CN CN202322506944.3U patent/CN220869853U/en active Active
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