CN220489515U

CN220489515U - Discharging and cooling mechanism of sorting machine

Info

Publication number: CN220489515U
Application number: CN202322046572.0U
Authority: CN
Inventors: 朱仁德; 周裕吉
Original assignee: Wuxi Rongneng Semiconductor Material Co ltd
Current assignee: Wuxi Rongneng Semiconductor Material Co ltd
Priority date: 2023-08-01
Filing date: 2023-08-01
Publication date: 2024-02-13
Anticipated expiration: 2033-08-01

Abstract

The utility model relates to a blanking cooling mechanism of a sorting machine, which comprises a frame and a conveying mechanism arranged on the inner side of the frame, wherein a cross rod is arranged on the inner side of the frame and positioned at the front end of the conveying mechanism, a limit rod and a proximity switch are symmetrically arranged at the far end of the cross rod, an air knife is arranged at the far end of the cross rod corresponding to a basket, the conveying mechanism conveys the basket for loading silicon chips until the basket is limited by the limit rod and triggers the proximity switch, and the air knife is used for blowing and cooling the silicon chips in the basket.

Description

Discharging and cooling mechanism of sorting machine

Technical Field

The utility model relates to the technical field of silicon wafer production equipment, in particular to a blanking cooling mechanism of a sorting machine.

Background

The silicon wafer must be cleaned during the production and manufacture process to remove the surface contamination impurities of the silicon wafer, including organic matters and inorganic matters. Some of these impurities exist in an atomic state or an ionic state, and some exist in a thin film form or a particle form on the surface of the silicon wafer. The method for removing the pollution comprises two methods of physical cleaning and chemical cleaning. And (3) placing the silicon wafer on a basket in a physical cleaning manner, and placing the basket in a cleaning pool to clean the silicon wafer.

The cleaning and drying steps of the silicon wafer need high temperature, and the silicon wafer needs to be cooled after drying, otherwise, the conductivity of the silicon wafer is increased. The existing cooling device is air curtain type cooling, the air curtain type cooling has more dust, the quality of the silicon wafer is easy to influence, the drying is slow, and the power consumption is high.

Therefore, a blanking cooling mechanism of a sorting machine with good cooling effect and energy saving is needed to solve the problems.

Disclosure of Invention

In view of the foregoing drawbacks of the prior art, an object of the present utility model is to provide a blanking cooling mechanism of a sorting machine, so as to solve one or more problems in the prior art.

In order to achieve the above purpose, the technical scheme of the utility model is as follows:

the utility model provides a sorter unloading cooling mechanism, sorter unloading cooling mechanism includes the frame, sets up the inboard conveying mechanism of frame, the frame inboard is located conveying mechanism front end and sets up the horizontal pole, horizontal pole distal end symmetry sets up gag lever post and proximity switch, the horizontal pole distal end corresponds basket department and sets up the air knife, conveying mechanism carries the basket of loading silicon chip, until the basket is spacing by the gag lever post and trigger proximity switch, the air knife be used for to the cooling of blowing of silicon chip in the basket.

Furthermore, the limiting rod and the proximity switch are obliquely arranged relative to the conveying direction of the flower basket, so that the flower basket can be in parallel abutting connection with the cross rod during conveying.

Further, the far end of the cross rod is provided with a bracket, and the bracket is provided with a proximity switch.

Further, the two groups of limiting rods, the support and the air knife are coaxially arranged.

Further, the support and the limiting rod are welded on the cross rod.

Further, the frame comprises two vertical rods, a cross rod connected to the front ends of the vertical rods and a foot connected to the proximal ends of the vertical rods.

Further, the conveying mechanism comprises a gear motor arranged on the side face of the vertical rod, the output end of the gear motor is connected with a rotating shaft, the rotating shaft rotatably penetrates through the vertical rod, two belt wheels are arranged on the rotating shaft, and a belt is sleeved on the outer side of each belt wheel.

Further, two fixing rods are arranged at the front end of the cross rod, and the two fixing rods are connected with the air knife.

Further, the front end of the air knife is provided with an air pipe, the air pipe is provided with an electromagnetic valve and a flowmeter, and the other end of the air pipe is connected with an air pump.

Further, the blanking cooling mechanism of the sorting machine further comprises a controller and a relay, wherein the controller is electrically connected with the proximity switch and the relay, and the relay is electrically connected with the electromagnetic valve.

Compared with the prior art, the utility model has the following beneficial technical effects:

according to the overlooking structure of the blanking cooling mechanism of the sorting machine, the conveying mechanism is arranged on the frame, the limiting rods and the proximity switches are symmetrically arranged at the far ends of the cross rods, so that the basket for conveying and loading the silicon wafers by the conveying mechanism is limited by the limiting rods and triggers the proximity switches, and the air knife blows air to cool the silicon wafers in the basket, so that the structure is simple, the cooling effect is good, and the pollution to the silicon wafers is small.

And (II) further, receiving a detection signal of the proximity switch through the controller, outputting high-level and low-level signals according to the detection result to control the on-off of the relay, wherein the relay is used for controlling the on-off of the electromagnetic valve so as to control when to discharge air and the air quantity, and reducing the energy consumption.

And thirdly, the limiting rod and the proximity switch are obliquely arranged relative to the conveying direction of the flower basket, and the two limiting rods, the bracket and the air knife are coaxially arranged, so that when the flower basket is in parallel butt joint with the cross rod, the flower basket, the limiting rod, the bracket and the air knife are on the same axis, and the blowing effect is ensured.

Drawings

Fig. 1 shows a schematic top view of a blanking cooling mechanism of a sorting machine according to an embodiment of the present utility model.

Fig. 2 is a schematic side view of a blanking cooling mechanism of a sorting machine according to an embodiment of the present utility model.

Fig. 3 is a schematic structural view of a basket in a blanking cooling mechanism of a sorting machine according to an embodiment of the present utility model.

Fig. 4 shows a connection diagram of a blanking cooling mechanism of a sorting machine according to an embodiment of the present utility model.

The reference numerals in the drawings:

1. a conveying mechanism; 11. a speed reducing motor; 12. a rotating shaft; 13. a belt wheel; 14. a belt; 21. a cross bar; 211. a fixed rod; 22. a vertical rod; 23. a footing; 3. flower basket; 31. a bottom plate; 32. a toothed bar; 4. a controller; 5. a limit rod; 6. a proximity switch; 61. a bracket; 7. an air knife; 71. an air pipe; 72. an electromagnetic valve; 73. a flow meter; 74. an air pump; 8. a relay; 9. and (3) a silicon wafer.

Detailed Description

For a better understanding of the utility model with objects, features and advantages, refer to the drawings. It should be understood that the structures, proportions, sizes, etc. shown in the drawings are for illustration purposes only and should not be construed as limiting the utility model to the extent that any modifications, changes in the proportions, or adjustments of the sizes of structures, proportions, or otherwise, used in the practice of the utility model, are included in the spirit and scope of the utility model which is otherwise, without departing from the spirit or essential characteristics thereof.

In the description of the present utility model, the positional or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc. are based on the positional or positional relationship shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

To more clearly describe the structure of the blanking cooling mechanism of the sorting machine, the utility model defines the terms of a far end and a near end, specifically, the far end refers to an end far away from the ground, the near end refers to an end close to the ground, taking fig. 1 as an example, the lower end of the rack in fig. 1 is the near end, and the upper end of the rack in fig. 1 is the far end.

Example 1

Please refer to fig. 1, 2 and 3, a sorting machine blanking cooling mechanism, the sorting machine blanking cooling mechanism includes a frame, a conveying mechanism 1 arranged on the inner side of the frame, a cross bar 21 is arranged on the inner side of the frame and positioned at the front end of the conveying mechanism 1, a limit rod 5 and a proximity switch 6 are symmetrically arranged on the far end of the cross bar 21, an air knife 7 is arranged on the far end of the cross bar 21 corresponding to the flower basket 3, the conveying mechanism 1 conveys the flower basket 3 loaded with silicon chips 9 until the flower basket 3 is limited by the limit rod 5 and triggers the proximity switch 6, and the air knife 7 is used for blowing and cooling the silicon chips 9 in the flower basket 3.

Referring to fig. 1 and 2, further, the limit rod 5 and the proximity switch 6 are disposed obliquely with respect to the conveying direction of the basket 3, so that the basket 3 can be guided by the limit rod 5 during conveying, and finally, the basket 3 is abutted against the cross rod 21 in parallel. When the bottom plates 31 at the two ends of the basket 3 are in parallel abutting connection with the cross bar 21, the proximity switch 6 is triggered.

Referring to fig. 1 and 2, further, a bracket 61 is disposed at a distal end of the cross bar 21, and a proximity switch 6 is disposed on the bracket 61. The proximity switch 6 is preferably a baruf capacitive proximity switch 6.

Referring to fig. 1 and 2, further, the two sets of the limiting rods 5, the support 61 and the air knife 7 are coaxially arranged, so that when the basket 3 is in parallel contact with the cross bar 21, the basket 3, the limiting rods 5, the support 61 and the air knife 7 are on the same axis, thereby ensuring the blowing effect.

Further, the support 61 and the limit rod 5 are welded on the cross rod 21, so that the firmness of the support 61 and the limit rod 5 is improved.

Referring to fig. 1 and 2, further, the frame includes two vertical rods 22, a cross rod 21 connected to the front ends of the vertical rods 22, and a foot 23 connected to the proximal ends of the vertical rods 22.

Referring to fig. 1 and 2, further, the conveying mechanism 1 includes a gear motor 11 disposed on a side surface of the vertical rod 22, an output end of the gear motor 11 is connected with a rotating shaft 12, the rotating shaft 12 rotatably passes through the vertical rod 22, two pulleys 13 are disposed on the rotating shaft 12, and a belt 14 is sleeved on an outer side of each pulley 13.

Referring to fig. 3, further, the basket 3 includes two bottom plates 31 and a toothed bar 32 disposed between the two bottom plates 31, and the bottom plates 31 and the toothed bar 32 enclose a space for accommodating the silicon wafer 9.

Referring to fig. 1 and 2, further, two fixing bars 211 are disposed at the front end of the cross bar 21, and the two fixing bars 211 are connected to the air knife 7.

Referring to fig. 1 and 4, further, an air pipe 71 is disposed at the front end of the air knife 7, an electromagnetic valve 72 and a flow meter 73 are disposed on the air pipe 71, and an air pump 74 is connected to the other end of the air pipe 71.

Referring to fig. 1 and 4, further, the separator blanking cooling mechanism further includes a controller 4 and a relay 8, the controller 4 is electrically connected with the proximity switch 6 and the relay 8, and the relay 8 is electrically connected with the electromagnetic valve 72. The controller 4 is configured to receive a detection signal of the proximity switch 6, output a high level signal and a low level signal according to a detection result, control on-off of the relay 8, and control on-off of the electromagnetic valve 72 by the relay 8.

The specific working procedure of the utility model is as follows:

the gear motor 11 drives the rotating shaft 12 to rotate, the rotating shaft 12 drives the belt pulley 13 and the belt 14 to rotate and convey the flower basket 3 for loading the silicon wafers 9, and the flower basket 3 can be guided by the limiting rod 5 when conveyed to be close to the limiting rod 5 and finally is in parallel abutting connection with the cross rod 21. When the bottom plates 31 at two ends of the flower basket 3 are in parallel butt against the cross rod 21, the proximity switch 6 is triggered, the proximity switch 6 sends a detection result to the controller 4, the controller 4 receives the detection signal of the proximity switch 6 and outputs a high-level signal to control the relay 8 to be attracted, the electromagnetic valve 72 is opened, the air knife 7 blows air to the silicon wafers 9 in the flower basket 3 for cooling, after a certain period of time, the controller 4 outputs a low-level signal to control the relay 8 to be disconnected, the electromagnetic valve 72 is closed, and the cooled silicon wafers 9 are lifted away by the mechanical arm.

The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The above examples illustrate only a few embodiments of the utility model, which are described in detail and are not to be construed as limiting the scope of the utility model. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model. Accordingly, the scope of protection of the present utility model is to be determined by the appended claims.

Claims

1. The utility model provides a sorter unloading cooling mechanism which characterized in that: the blanking cooling mechanism of the sorting machine comprises a frame and a conveying mechanism arranged on the inner side of the frame, wherein a cross rod is arranged on the inner side of the frame and positioned at the front end of the conveying mechanism, a limit rod and a proximity switch are symmetrically arranged at the far end of the cross rod, an air knife is arranged at the far end of the cross rod corresponding to the basket, the conveying mechanism conveys the basket for loading the silicon wafers until the basket is limited by the limit rod and triggers the proximity switch, and the air knife is used for blowing and cooling the silicon wafers in the basket.

2. A sorter feed cooling mechanism as in claim 1 wherein: the limiting rod and the proximity switch are obliquely arranged relative to the conveying direction of the flower basket, so that the flower basket can be in parallel abutting connection with the cross rod during conveying.

3. A sorter feed cooling mechanism as in claim 2 wherein: the far end of the cross rod is provided with a bracket, and the bracket is provided with a proximity switch.

4. A sorter feed cooling mechanism as in claim 3 wherein: the two groups of limiting rods, the support and the air knife are coaxially arranged.

5. A sorter feed cooling mechanism as in claim 3 wherein: the support and the limiting rod are welded on the cross rod.

6. A sorter feed cooling mechanism as in claim 1 wherein: the frame comprises two vertical rods, a cross rod connected to the front ends of the vertical rods and a foot connected to the proximal ends of the vertical rods.

7. The separator blanking cooling mechanism of claim 6, wherein: the conveying mechanism comprises a gear motor arranged on the side face of the vertical rod, the output end of the gear motor is connected with a rotating shaft, the rotating shaft rotatably penetrates through the vertical rod, two belt pulleys are arranged on the rotating shaft, and a belt is sleeved on the outer side of each belt pulley.

8. A sorter feed cooling mechanism as in claim 1 wherein: the front end of the cross rod is provided with two fixing rods, and the two fixing rods are connected with the air knife.

9. A sorter feed cooling mechanism as in claim 8 wherein: the air knife is characterized in that an air pipe is arranged at the front end of the air knife, an electromagnetic valve and a flowmeter are arranged on the air pipe, and the other end of the air pipe is connected with an air pump.

10. A sorter feed cooling mechanism as in claim 9 wherein: the blanking cooling mechanism of the sorting machine further comprises a controller and a relay, wherein the controller is electrically connected with the proximity switch and the relay, and the relay is electrically connected with the electromagnetic valve.