CN215988687U - Full-automatic silicon wafer conveying mechanism - Google Patents
Full-automatic silicon wafer conveying mechanism Download PDFInfo
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- CN215988687U CN215988687U CN202122295993.8U CN202122295993U CN215988687U CN 215988687 U CN215988687 U CN 215988687U CN 202122295993 U CN202122295993 U CN 202122295993U CN 215988687 U CN215988687 U CN 215988687U
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Abstract
The utility model discloses a full-automatic silicon wafer conveying mechanism, and relates to the field of silicon wafer production. This full-automatic silicon chip conveying mechanism, the material loading machine is installed to the one end of conveyer main part, and the wafer separator is installed to the other end of conveyer main part, and first transmission belt, second transmission belt and third transmission belt are installed in proper order to the inside of conveyer main part, and the output transmission of electronic hydraulic stem is connected with the dwang, and the surface activity of dwang articulates there is the connecting rod, the top fixedly connected with movable transmission shaft of connecting rod. This full-automatic silicon chip conveying mechanism, when the silicon chip that has the flaw passes through first transmission belt, the output of electronic hydraulic stem outwards stretches out for the dwang rotates, and the connecting strip uses the second transmission shaft to rotate downwards as the axle center this moment, makes first transmission belt downwards, will have the silicon chip of flaw to transmit downwards this moment and break away from the conveyer main part.
Description
Technical Field
The utility model relates to the technical field of silicon wafer production, in particular to a full-automatic silicon wafer conveying mechanism.
Background
In the production process of semiconductor devices, silicon wafers, which are the main raw materials, must be strictly cleaned in order to remove surface contamination impurities, including organic and inorganic substances, which may cause various defects in an atomic state or an ionic state, or exist on the surface of the silicon wafers in a thin film form or a particle form, and both physical cleaning and chemical cleaning are methods for removing the contamination.
In the cleaning process, generally adopt pipelined automatic cleaning machine to all wash the both sides of silicon chip, then carry out the inserted sheet, simultaneously in this in-process, often there can be some unqualified silicon chips to exist, these unqualified silicon chips generally all screen the screening in transportation process, reject unqualified, and the common mode is rejected through artifical or arm, artifical ejection of compact efficiency is lower, the arm is rejected and then needs very accurate location and snatch the design, this makes manufacturing cost greatly reduced, consequently need provide a full-automatic silicon chip conveying mechanism in order to solve above-mentioned problem.
SUMMERY OF THE UTILITY MODEL
Technical problem to be solved
Aiming at the defects of the prior art, the utility model discloses a full-automatic silicon wafer conveying mechanism, which aims to solve the problems in the background technology.
(II) technical scheme
In order to achieve the purpose, the utility model is realized by the following technical scheme: full-automatic silicon chip conveying mechanism includes:
the automatic feeding device comprises a conveyor main body, wherein a feeding machine is installed at one end of the conveyor main body, a wafer separator is installed at the other end of the conveyor main body, and a first conveying belt, a second conveying belt and a third conveying belt are sequentially installed inside the conveyor main body;
the electronic hydraulic stem, the output transmission of electronic hydraulic stem is connected with the dwang, the surface activity hinge of dwang has the connecting rod, the top fixedly connected with movable transmission shaft of connecting rod.
Preferably, the electric hydraulic rod is fixedly installed on the outer surface of the conveyor main body, a second servo motor is fixedly installed on the side surface of the conveyor main body, a second transmission shaft is fixedly installed at the output end of the second servo motor, the second transmission shaft is rotatably connected inside the conveyor main body, and the second transmission shaft is in transmission connection with the movable transmission shaft through a first transmission belt.
Preferably, the outer surfaces of the two ends of the second transmission shaft are movably sleeved with connecting strips, the two ends of the movable transmission shaft are respectively and rotatably connected to the outer surfaces of the two groups of connecting strips, and the output end of the electric hydraulic rod is movably hinged with a transmission connecting sheet.
Preferably, the other end of the transmission connecting piece is fixedly sleeved on the outer surface of the end part of the movable transmission shaft, the middle part of the movable transmission shaft is fixedly connected with a fixing strip, and the bottom end of the connecting rod is movably hinged with the fixing strip.
Preferably, the side fixed mounting of conveyer main part has a servo motor, a servo motor's output fixed mounting has a transmission shaft, and the inside of conveyer main part rotates and is connected with the third transmission shaft, first transmission shaft passes through the second and transmits the belt and is connected with the transmission of third transmission shaft, the lower surface of wafer separator is equipped with the unloading pole, the third transmission shaft passes through the third and transmits the belt and is connected with the unloading pole transmission.
Preferably, the side fixed mounting of conveyer main part has third servo motor, third servo motor's output fixed mounting has the feeding pivot, the feeding pivot is connected with the material loading machine transmission through the belt.
Preferably, the side fixed mounting that just is located the feeding pivot in the inside of conveyer main part has last spray bar, the outer fixed surface who goes up spray bar installs the shower head, the inside of conveyer main part just is located the below of last spray bar and installs down spray bar.
The utility model discloses a full-automatic silicon wafer conveying mechanism, which has the following beneficial effects:
1. this full-automatic silicon chip conveying mechanism, when the silicon chip is through first transmission belt, if detect out that this silicon chip has the flaw, the inside control system of conveyer main part can the electronic hydraulic stem of automatic control's output outwards stretch out this moment, and drive the dwang through the transmission connection piece and rotate, the dwang passes through the connecting rod and drives the movable transmission shaft downstream this moment, the connecting strip uses the second transmission shaft to rotate downwards as the axle center this moment, make first transmission belt down, the silicon chip that will have the flaw this moment is downward transmitted and is broken away from the conveyer main part, accomplish the selection.
2. This full-automatic silicon chip conveying mechanism, through on placing the material loading machine with the silicon chip, the belt through material loading machine upper surface carries the silicon chip to the inside conveyer main part, and the silicon chip loops through first transmission belt, second transmission belt and third transmission belt and carries out the unloading to the wafer separator position, accomplishes the transport of silicon chip, and in transportation process, when the silicon chip passes through first transmission belt upper surface, further spray the washing through the shower head of spray bar and last spray bar surface down to the silicon chip this moment.
Drawings
FIG. 1 is a schematic view of the overall surface structure of the present invention;
FIG. 2 is a schematic view of the overall lower surface structure of the present invention;
FIG. 3 is a schematic view of the structure of the upper surface of the main body according to the present invention;
FIG. 4 is an enlarged view of portion A of FIG. 2 according to the present invention;
fig. 5 is an enlarged view of the portion B of fig. 3 according to the present invention.
In the figure: 1. a conveyor main body; 2. a wafer separator; 3. a feeding machine; 4. a first transfer belt; 5. a second transfer belt; 6. a third transfer belt; 7. an electro-hydraulic lever; 8. a lower spray bar; 9. a first drive shaft; 10. a first servo motor; 11. a second servo motor; 12. a third servo motor; 13. a feeding rotating shaft; 14. a second drive shaft; 15. a transmission connecting sheet; 16. a connecting strip; 17. a movable transmission shaft; 18. rotating the rod; 19. a connecting rod; 20. an upper spray bar; 21. a shower head; 22. and a third transmission shaft.
Detailed Description
The embodiment of the utility model discloses a full-automatic silicon wafer conveying mechanism, which comprises a conveyor main body 1, wherein a feeding machine 3 is installed at one end of the conveyor main body 1, a wafer separator 2 is installed at the other end of the conveyor main body 1, a first conveying belt 4, a second conveying belt 5 and a third conveying belt 6 are sequentially installed in the conveyor main body 1, and the conveyor main body 1 is used for conveying cleaned silicon wafers to the position of the wafer separator for wafer insertion;
meanwhile, the device further comprises an electric hydraulic rod 7, the output end of the electric hydraulic rod 7 is in transmission connection with a rotating rod 18, the outer surface of the rotating rod 18 is movably hinged with a connecting rod 19, and the top end of the connecting rod 19 is fixedly connected with a movable transmission shaft 17.
Referring to the attached drawings 1-3, an electric hydraulic rod 7 is fixedly installed on the outer surface of a conveyor main body 1, a second servo motor 11 is fixedly installed on the side surface of the conveyor main body 1, a second transmission shaft 14 is fixedly installed at the output end of the second servo motor 11, the second transmission shaft 14 is rotatably connected inside the conveyor main body 1, the second transmission shaft 14 is in transmission connection with a movable transmission shaft 17 through a first transmission belt 4, and the second transmission shaft 14 drives the movable transmission shaft 17 to rotate by starting the second servo motor 11.
Referring to the attached drawings 2-4, the outer surfaces of the two ends of the second transmission shaft 14 are movably sleeved with the connecting strips 16, the two ends of the movable transmission shaft 17 are respectively rotatably connected to the outer surfaces of the two groups of connecting strips 16, the output end of the electric hydraulic rod 7 is movably hinged with the transmission connecting piece 15, the other end of the transmission connecting piece 15 is fixedly sleeved on the outer surface of the end part of the movable transmission shaft 17, the middle part of the movable transmission shaft 17 is fixedly connected with the fixing strip, the bottom end of the connecting rod 19 is movably hinged with the fixing strip, when the output end of the electric hydraulic rod 7 extends outwards, the rotating rod 18 is driven by the transmission connecting piece 15 to rotate, at the moment, the rotating rod 18 drives the movable transmission shaft 17 to move downwards through the connecting rod 19, at the moment, the connecting strips 16 downwards rotate by taking the second transmission shaft 14 as an axis, and the first transmission belt 4 faces downwards.
Referring to the attached drawings 1-3, a first servo motor 10 is fixedly mounted on the side face of a conveyor main body 1, a first transmission shaft 9 is fixedly mounted at the output end of the first servo motor 10, a third transmission shaft 22 is rotatably connected to the interior of the conveyor main body 1, the first transmission shaft 9 is in transmission connection with the third transmission shaft 22 through a second transmission belt 5, a blanking rod is arranged on the lower surface of a slicing machine 2, the third transmission shaft 22 is in transmission connection with the blanking rod through a third transmission belt 6, the first servo motor 10 drives the third transmission shaft 22 to rotate through the first transmission shaft 9, and meanwhile the third transmission shaft 22 drives the blanking rod to rotate through the third transmission belt 6.
Referring to fig. 3, a third servo motor 12 is fixedly mounted on a side surface of the conveyor main body 1, a feeding rotating shaft 13 is fixedly mounted at an output end of the third servo motor 12, and the feeding rotating shaft 13 is in transmission connection with the feeding machine 3 through a belt.
Referring to fig. 3 and 5, an upper spray rod 20 is fixedly installed inside the conveyor main body 1 and on the side of the feeding rotating shaft 13, a spray head 21 is fixedly installed on the outer surface of the upper spray rod 20, a lower spray rod 8 is installed inside the conveyor main body 1 and below the upper spray rod 20, and when a silicon wafer passes through the upper surface of the first conveying belt 4, the silicon wafer is further sprayed and cleaned by the lower spray rod 8 and the spray head 21 on the outer surface of the upper spray rod 20.
The working principle is as follows: when the device is used, a first servo motor 10, a second servo motor 11 and a third servo motor 12 are started simultaneously, at the moment, a feeding rotating shaft 13 drives a feeding machine 3 to start running through a belt, at the same time, the second servo motor 11 drives a movable transmission shaft 17 to rotate through a second transmission shaft 14, the first servo motor 10 drives a third transmission shaft 22 to rotate through a first transmission shaft 9, at the same time, the third transmission shaft 22 drives a blanking rod to rotate through a third transmission belt 6, at the moment, a silicon wafer is placed on the feeding machine 3, the silicon wafer is conveyed to the inner part of a conveyor main body 1 through a belt on the upper surface of the feeding machine 3, the silicon wafer is conveyed to a wafer separator 2 through the first transmission belt 4, the second transmission belt 5 and the third transmission belt 6 in sequence to carry out blanking, the conveying of the silicon wafer is finished, and in the conveying process, when the silicon wafer passes through the upper surface of the first transmission belt 4, at the moment, the silicon wafer is further sprayed and cleaned through the spray heads 21 on the outer surfaces of the lower spray rod 8 and the upper spray rod 20;
meanwhile, in the using process, the detection part is installed above the conveyor main body 1 and is right opposite to the first transmission belt 4, when a silicon wafer passes through the first transmission belt 4, if the defect of the silicon wafer is detected, the output end of the electric hydraulic rod 7 can be automatically controlled by a control system in the conveyor main body 1 to extend outwards, the rotating rod 18 is driven to rotate through the transmission connecting piece 15, the rotating rod 18 drives the movable transmission shaft 17 to move downwards through the connecting rod 19, the connecting strip 16 rotates downwards by taking the second transmission shaft 14 as an axis, the first transmission belt 4 faces downwards, the silicon wafer with the defect is downwards transmitted and separated from the conveyor main body 1, and wafer selection is completed.
The foregoing shows and describes the general principles and broad features of the present invention and advantages thereof. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the utility model as claimed. The scope of the utility model is defined by the appended claims and equivalents thereof.
Claims (7)
1. Full-automatic silicon chip conveying mechanism, its characterized in that includes:
the automatic feeding device comprises a conveyor main body (1), wherein a feeding machine (3) is installed at one end of the conveyor main body (1), a wafer separator (2) is installed at the other end of the conveyor main body (1), and a first conveying belt (4), a second conveying belt (5) and a third conveying belt (6) are sequentially installed inside the conveyor main body (1);
electronic hydraulic stem (7), the output transmission of electronic hydraulic stem (7) is connected with dwang (18), the surface activity hinge of dwang (18) has connecting rod (19), the top fixedly connected with movable transmission shaft (17) of connecting rod (19).
2. The full-automatic silicon wafer conveying mechanism according to claim 1, characterized in that: electronic hydraulic stem (7) fixed mounting is at the surface of conveyer main part (1), the side fixed mounting of conveyer main part (1) has second servo motor (11), the output fixed mounting of second servo motor (11) has second transmission shaft (14), second transmission shaft (14) rotate to be connected in the inside of conveyer main part (1), second transmission shaft (14) are connected with movable transmission shaft (17) transmission through first transmission belt (4).
3. The full-automatic silicon wafer conveying mechanism according to claim 2, characterized in that: the outer surfaces of the two ends of the second transmission shaft (14) are movably sleeved with connecting strips (16), the two ends of the movable transmission shaft (17) are respectively rotatably connected to the outer surfaces of the two groups of connecting strips (16), and the output end of the electric hydraulic rod (7) is movably hinged with a transmission connecting sheet (15).
4. The full-automatic silicon wafer conveying mechanism according to claim 3, characterized in that: the other end of the transmission connecting piece (15) is fixedly sleeved on the outer surface of the end part of the movable transmission shaft (17), the middle part of the movable transmission shaft (17) is fixedly connected with a fixing strip, and the bottom end of the connecting rod (19) is movably hinged with the fixing strip.
5. The full-automatic silicon wafer conveying mechanism according to claim 1, characterized in that: the side fixed mounting of conveyer main part (1) has first servo motor (10), the output end fixed mounting of first servo motor (10) has first transmission shaft (9), and the inside rotation of conveyer main part (1) is connected with third transmission shaft (22), first transmission shaft (9) are connected with third transmission shaft (22) transmission through second transmission belt (5), the lower surface of wafer separator (2) is equipped with the unloading pole, third transmission shaft (22) are connected with the unloading pole transmission through third transmission belt (6).
6. The full-automatic silicon wafer conveying mechanism according to claim 1, characterized in that: the side fixed mounting of conveyer main part (1) has third servo motor (12), the output fixed mounting of third servo motor (12) has feeding pivot (13), feeding pivot (13) are connected with material loading machine (3) transmission through the belt.
7. The full-automatic silicon wafer conveying mechanism according to claim 6, characterized in that: the side fixed mounting that just is located feeding pivot (13) in the inside of conveyer main part (1) has spray bar (20), the outer fixed surface who goes up spray bar (20) installs shower head (21), spray bar (8) are installed down in the inside of conveyer main part (1) and the below that is located spray bar (20).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122295993.8U CN215988687U (en) | 2021-09-23 | 2021-09-23 | Full-automatic silicon wafer conveying mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122295993.8U CN215988687U (en) | 2021-09-23 | 2021-09-23 | Full-automatic silicon wafer conveying mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215988687U true CN215988687U (en) | 2022-03-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122295993.8U Active CN215988687U (en) | 2021-09-23 | 2021-09-23 | Full-automatic silicon wafer conveying mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215988687U (en) |
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2021
- 2021-09-23 CN CN202122295993.8U patent/CN215988687U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: Area A, Floor 3, Building 3, No. 79, Wuxiang Road, Xuhang Town, Jiading District, Shanghai, 201800 Patentee after: Shanghai Youdian Green Energy Automation Co.,Ltd. Address before: No. 89, Wuxiang Road, Xuxing Town, Jiading District, Shanghai Patentee before: Shanghai Junzhu Precision Machinery Co.,Ltd. |
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| CP03 | Change of name, title or address |