CN220339298U - Warp degree detection device - Google Patents

Abstract

The utility model is suitable for the technical field of detection equipment, and provides a warp detection device which comprises a support frame body, an adjusting moving piece, a spacing adjusting mechanism and a measuring unit. The position of the second plane is marked by combining the calculated values through the measuring unit, and then the distance adjusting mechanism drives the adjusting moving piece to move, so that the distance between the detecting gaps is consistent with the calculated values. And then sequentially placing the ceramic substrates to be detected into the detection gaps for detection, wherein if the ceramic substrates pass through the detection gaps, the ceramic substrates indicate that the warpage is qualified, and if the ceramic substrates cannot pass through the detection gaps, the ceramic substrates indicate that the warpage is unqualified. Compared with the mode that the measuring tool is adopted to measure the ceramic substrates one by one in the prior art, the quick detection of the ceramic substrates can be realized, and the device has the advantages of simple structure, high detection precision and high operation efficiency and is convenient to operate.

Description

Warp degree detection device

Technical Field

The utility model belongs to the technical field of detection equipment, and particularly relates to a warp detection device.

Background

In the technical field of hybrid microelectronics, the ceramic substrate produced by adopting the surface interconnection substrate technology or the multilayer interconnection substrate technology can be used as an assembly carrier of external patches such as an IC chip (Integrated Circuit Chip microelectronic chip), a chip element, a micro-encapsulation device, a micro-component and the like, and can also be used as a part of an assembly encapsulation shell to form a system-in-package structure, and has good application prospects in various fields of military use, industrial use and civil use. When the ceramic substrate is manufactured, the shrinkage of the conductor slurry and the shrinkage of the ceramic material are not matched, the ceramic substrate is easy to warp after sintering, the subsequent component installation is affected when serious, and the electrical performance and the reliability of the assembly are deteriorated. Therefore, it is necessary to detect the warp of the ceramic substrate by using a detection device to determine whether the ceramic substrate is acceptable. However, most existing warpage detection tools have the problem of low operation efficiency when in use, and the production efficiency of the ceramic substrate is seriously affected.

Disclosure of Invention

The utility model aims to provide a warpage detection device, which aims to solve the technical problems of complex structure and low operation efficiency of a warpage detection tool in the prior art when the warpage detection tool is used.

The utility model is realized in that a warp detection device comprises:

the support frame body is provided with a first plane;

the adjusting moving piece is movably arranged on the supporting frame body, a second plane which is opposite to the first plane is arranged on the adjusting moving piece, the second plane is parallel to the first plane, and a detection gap for the passing of the ceramic substrate is formed between the first plane and the second plane;

the distance adjusting mechanism is arranged on the support frame body, and the driving end of the distance adjusting mechanism is connected to the adjusting moving piece and used for driving the adjusting moving piece to move relative to the first plane so as to adjust the distance between the second plane and the first plane; and

and the measuring unit is arranged on the supporting frame body and is used for measuring the distance between the second plane and the first plane.

In an alternative embodiment, both the first plane and the second plane are arranged obliquely.

In an alternative embodiment, the warp detection device includes a sliding unit, the sliding unit is located between the adjusting moving member and the supporting frame body, and the adjusting moving member is movably disposed on the supporting frame body through the sliding unit.

In an alternative embodiment, the sliding unit includes a first sliding rail disposed on the supporting frame body, and a first sliding block disposed on the first sliding rail and capable of sliding along a length direction of the first sliding rail, and the adjusting moving member is connected to the first sliding block.

In an alternative embodiment, a connecting support block is further arranged on the first sliding block, and the adjusting moving piece is detachably connected with the connecting support block.

In an alternative embodiment, the interval adjusting mechanism comprises a threaded piece rotatably arranged on the supporting frame body, the length direction of the threaded piece is parallel to the first sliding rail, and the threaded piece is rotatably connected with the adjusting moving piece through threads.

In an alternative embodiment, the interval adjusting mechanism comprises a second sliding rail arranged on the supporting frame body, a second sliding block arranged on the second sliding rail in a sliding manner, and a threaded piece rotatably arranged on the supporting frame body, wherein the threaded piece is rotatably connected with the second sliding block through threads, and the adjusting moving piece is connected with the second sliding block.

In an alternative embodiment, the support frame body includes a first support member, a second support member, and a connecting beam, where the first support member and the second support member are disposed at a distance from each other, and the first support member is connected to the second support member through the connecting beam.

In an alternative embodiment, the adjusting moving member is disposed between the first supporting member and the second supporting member and below the connecting beam, the first plane is located on the bottom surface of the connecting beam, and the second plane is located on the top of the adjusting moving member.

In an alternative embodiment, the measuring unit comprises a micrometer screw, the main body of which is arranged on the supporting frame body, and the measuring axis of the micrometer screw extends towards the second plane and is arranged perpendicular to the second plane.

Compared with the prior art, the utility model has the technical effects that: the movable adjusting moving part is arranged on the supporting frame body, and the adjusting moving part can be driven to move through the interval adjusting mechanism arranged on the supporting frame body. The support frame body is provided with a first plane, the adjusting moving part is provided with a second plane, the second plane is parallel to the first plane, and a detection gap for the ceramic substrate to pass through is formed between the first plane and the second plane. When the ceramic substrate is measured, the maximum value of the detection gap in the standard range is calculated according to the theoretical thickness and the deviation level of the ceramic substrate, the position of the second plane is marked by combining the calculated values through the measuring unit, and then the distance adjusting mechanism drives the adjusting moving part to move, so that the distance of the detection gap is consistent with the calculated value. And then sequentially placing the ceramic substrates to be detected into the detection gaps for detection, wherein if the ceramic substrates pass through the detection gaps, the ceramic substrates indicate that the warpage is qualified, and if the ceramic substrates cannot pass through the detection gaps, the ceramic substrates indicate that the warpage is unqualified. Compared with the mode that the measuring tool is adopted to measure the ceramic substrates one by one in the prior art, the quick detection of the ceramic substrates can be realized, and the device has the advantages of simple structure, high detection precision and high operation efficiency and is convenient to operate.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following description will briefly explain the embodiments of the present utility model or the drawings used in the description of the prior art, and it is obvious that the drawings described below are only one embodiment of the present utility model, and other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic structural diagram of a warpage detection device according to an embodiment of the present utility model;

fig. 2 is a schematic structural diagram of a warpage detection device according to an embodiment of the present utility model;

FIG. 3 is a schematic view of a sliding unit according to an embodiment of the present utility model;

reference numerals illustrate:

1. a support frame body; 11. a first support; 12. a second support; 13. a connecting beam; 2. adjusting the moving member; 3. a spacing adjustment mechanism; 31. a screw; 32. a second slide rail; 33. a second slider; 4. a sliding unit; 41. a first slide rail; 42. a first slider; 5. a measuring unit; 6. a first plane; 7. a second plane; 8. avoiding the notch; 9. and the supporting block is connected.

Detailed Description

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative and intended to explain the present utility model and should not be construed as limiting the utility model.

In the description of the present utility model, it should be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate describing the present utility model and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present utility model, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

The present utility model will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present utility model more apparent.

Referring to fig. 1 to 3, in an embodiment of the present utility model, a warp detecting device is provided, which includes a supporting frame 1, an adjusting moving member 2, a spacing adjusting mechanism 3, and a measuring unit 5. The support body 1 is provided with a first plane 6. The adjusting moving part 2 is movably arranged on the supporting frame body 1, a second plane 7 which is opposite to the first plane 6 is arranged on the adjusting moving part 2, the second plane 7 is parallel to the first plane 6, and a detection gap for the ceramic substrate to pass through is formed between the first plane 6 and the second plane 7. The distance adjusting mechanism 3 is arranged on the support frame 1, and the driving end of the distance adjusting mechanism 3 is connected to the adjusting moving member 2 and used for driving the adjusting moving member 2 to move relative to the first plane 6 so as to adjust the distance between the second plane 7 and the first plane 6. The measuring unit 5 is arranged on the support body 1 for measuring the distance between the second plane 7 and the first plane 6.

In this embodiment, the adjusting moving member 2 is generally plate-shaped, block-shaped or other entity having a certain surface area, and it is only necessary to ensure that the outer portion of the adjusting moving member 2 has an area provided with the second plane 7.

The first plane 6 refers to a plane provided on the support body 1, and may be circular, rectangular or other figures having a certain boundary. The second plane 7 refers to a plane provided on the adjustment moving member 2, and likewise the shape of the second plane 7 may be a circle, a rectangle, or other figures having a certain boundary. The shape of the first plane 6 and the second plane 7 can be freely selected according to the shape of the ceramic substrate.

The detection gap refers to a gap between the first plane 6 and the second plane 7, and the ceramic substrate can pass through the gap.

The general main body of the spacing adjusting mechanism 3 is arranged on the supporting frame body 1, the driving end of the spacing adjusting mechanism 3 is connected with the adjusting moving piece 2, and the adjusting moving piece 2 is driven to move through the action of the driving end. The pitch adjustment mechanism 3 may be driven manually, such as by a screw drive or a lever press drive. The driving can be performed by an automatic control mode, such as an electric push rod or the like, a driving cylinder driving mode or a hydraulic cylinder driving mode, and the like, so that the automatic control device can be freely selected according to production requirements or installation environments.

The measuring unit 5 may select a physical measuring mode, such as a vernier caliper, a screw micrometer, etc., or may employ an electronic measuring mode, such as a laser ranging device for measuring.

The working flow of the warp detection device provided by the embodiment of the utility model is as follows:

firstly, confirming allowable deviation levels of the ceramic substrate according to customer requirements, wherein the deviation levels comprise the deviation range of thickness dimension and the maximum value of warping degree, and the deviation levels are based on the specification in the standard GB/T14619-2013. According to the standard deviation grade requirement, the thickness dimension of the qualified ceramic substrate is firstly within the allowable deviation range, and meanwhile, the warping degree cannot exceed the maximum value required by the standard. And then the ceramic substrate with the thickness dimension exceeding the deviation range is removed according to the requirements of the deviation grade. And then calculating the numerical value D of the detection gap according to the formula:

D＝H+(C×L)

where D is a pitch value of the detection gap, C is a maximum warp value defined in the deviation level, H is a maximum thickness dimension of the ceramic substrate within a range required for the deviation level, L is a maximum length dimension in a direction in which the ceramic substrate warps, for example, L is a length dimension of a diagonal line of the ceramic substrate if the ceramic substrate is rectangular, and L is a diameter length dimension of the ceramic substrate if the ceramic substrate is circular.

The measuring unit 5 is calibrated by using the standard gauge block, the position where the second plane 7 should be is measured by using the measuring unit 5 according to the calculated distance value D after the calibration is completed, the position is marked, and then the second plane 7 on the adjusting moving member 2 is moved to the marking position by the distance adjusting mechanism 3.

The steps are all preparation work, after the preparation work is finished, the ceramic substrate to be detected is placed in the detection gap in sequence for detection, if the ceramic substrate can pass through the detection gap, the warp degree is qualified, and if the ceramic substrate can not pass through the detection gap, the warp degree of the ceramic substrate is unqualified.

According to the warp detection device provided by the embodiment of the utility model, the movable adjusting and moving part 2 is arranged on the support frame body 1, and the adjusting and moving part 2 is driven to move through the interval adjusting mechanism 3 arranged on the support frame body 1. The support frame body 1 is provided with a first plane 6, the adjusting moving part 2 is provided with a second plane 7, the second plane 7 is parallel to the first plane 6, and a detection gap for the ceramic substrate to pass through is formed between the first plane 6 and the second plane 7. When the ceramic substrate is measured, the ceramic substrate to be detected is placed in the detection gap in sequence for detection, if the ceramic substrate can pass through the detection gap, the warp is qualified, and if the ceramic substrate can not pass through the detection gap, the warp of the ceramic substrate is unqualified. Compared with the mode that the ceramic substrates are measured one by using a measuring tool in the prior art, the ceramic substrates can be detected in batches, and the rapid detection of the ceramic substrates is realized. And the whole detection device has the advantages of simple structure, high detection precision and high detection operation efficiency of the ceramic substrate with convenient operation.

In one embodiment, as shown in fig. 1 and 2, the first plane 6 and the second plane 7 are both disposed obliquely. In particular, the inclined arrangement means that the first plane 6 and the second plane 7 are both inclined to the table top or horizontal plane. Under the general condition, the second plane 7 is located below the first plane 6, so that when the detection is performed, after the ceramic substrate is placed in the detection gap, the ceramic substrate falls onto the second plane 7 under the action of gravity, and due to the inclined arrangement of the second plane 7, the ceramic substrate can slide through the detection gap under the action of self gravity, so that the detection of the ceramic substrate is more convenient, and the detection convenience is improved.

In an alternative embodiment, as shown in fig. 1, the angle between the first plane 6 and the horizontal plane ranges from 30 ° to 60 °, wherein the angle value is typically chosen to be 45 °, and the second plane 7 is kept parallel to the first plane 6, so that the detection gap is also 45 ° from the horizontal plane. Can detect when ceramic substrate detects through detecting the clearance, owing to detect the clearance have certain angle slope, ceramic substrate gets into after detecting the clearance, can slide under self gravity effect and pass through detecting the clearance, also avoided because detecting the too big ceramic substrate sliding speed that causes of clearance inclination and drop the damage, make the detection safer.

In one embodiment, as shown in fig. 1 and 3, the warp detecting device further includes a sliding unit 4, where the sliding unit 4 is located between the adjusting moving member 2 and the supporting frame 1, and the adjusting moving member 2 is movably disposed on the supporting frame 1 through the sliding unit 4. In the present embodiment, the sliding unit 4 refers to a component provided between the adjustment moving member 2 and the support frame body 1, which can provide a guide for the movement of the adjustment moving member 2. The sliding unit 4 can be a finished product component and is directly arranged between the adjusting moving piece 2 and the supporting frame body 1, such as a linear sliding rail; the sliding unit 4 may be formed by arranging corresponding structures on the supporting frame 1 and the sliding unit 4, for example, a sliding groove or a sliding way formed by two parallel baffles is arranged outside the supporting frame 1, so that a part of the adjusting moving member 2 may slide along the sliding groove or the sliding way, and meanwhile, a roller may be arranged on the adjusting moving member 2 or inside the sliding way.

The sliding direction of the sliding unit 4 is along the direction perpendicular to the first plane 6, and the sliding unit 4 is arranged to enable the movement of the adjusting moving member 2 to be more stable and enable the moving distance of the adjusting moving member 2 to be more accurate.

In one embodiment, the number of the sliding units 4 is multiple, the sliding units 4 are distributed on the circumference of the adjusting moving member 2, the adjusting moving member 2 is located between the sliding units 4, and the sliding units 4 guide the movement of the adjusting moving member 2 at the same time, so that the sliding of the adjusting moving member 2 is smoother.

In an alternative embodiment, the number of the sliding units 4 is two, and the two sliding units 4 are respectively arranged on two side surfaces of the adjusting moving member 2, so that the sliding stability of the adjusting moving member 2 can be ensured, the cost of the whole warping degree detection device is reduced, and the structure of the whole warping degree detection device is simpler.

In one embodiment, as shown in fig. 3, the sliding unit 4 includes a first slide rail 41 provided on the support frame 1, and a first slider 42 provided on the first slide rail 41 and slidable along a length direction of the first slide rail 41, and the adjustment moving member 2 is connected to the first slider 42. Specifically, the first slider 42 refers to a block structure for connection with the adjustment moving member 2. The first sliding rail 41 is a strip or column structure for mounting the first sliding block 42, and the length direction of the first sliding rail 41 is generally along the direction perpendicular to the first plane 6, so that the adjusting moving member 2 can slide at the shortest distance during adjustment. The first slide rail 41 is fixed on the support frame 1, and the first slider 42 is slidably disposed on the first slide rail 41. The adjustment movement member 2 is connected to the first slider 42, so that a sliding connection between the adjustment movement member 2 and the support frame body 1 is achieved.

In one embodiment, as shown in fig. 3, the first slider 42 is further provided with a connection supporting block 9, and the adjusting moving member 2 is detachably connected to the connection supporting block 9. Specifically, the disassembly connection refers to non-fixed connection between the adjusting moving member 2 and the connection supporting block 9, and can be conveniently separated when disassembly is needed, and the disassembly connection mode comprises fixing by using a fastener or clamping by using an elastic component or other fixing modes capable of realizing disassembly connection. One part of the connection support block 9 is connected with the first slider 42, and the other part of the connection support block 9 is detachably connected with the adjustment moving member 2. The mode of adopting dismantlement connection is convenient to adjust the dismantlement change of moving member 2, can be when detecting the ceramic substrate of different specifications, changes the regulation moving member 2 that has different second plane areas according to ceramic substrate's size, has avoided to a certain extent because the detection error that second plane 7 and ceramic substrate's size mismatch probably caused on the regulation moving member 2.

It should be noted that, in the detection process, the second plane 7 is generally located below the first plane 6 and is used as a reference plane for supporting the ceramic substrate, when the area of the first plane 6 is not large enough, the ceramic substrate passing through the detection gap cannot be completely supported, so that the ceramic substrate is partially suspended, and thus the ceramic substrate may overturn or deflect in the sliding process, and further, the risk of inaccurate warp detection is caused.

In an alternative embodiment, the connection support block 9 comprises a first plate and a second plate, the first plate being arranged at an angle to the second plate. When the connection support block 9 is mounted, the first plate body is detachably connected to the bottom surface of the adjustment moving member 2, and the second plate body is fixed to the side surface of the first slider 42. The bottom surface of the adjusting moving member 2 is a surface with a larger area on the adjusting moving plate, and the first sliding block 42 can be connected with the bottom surface of the adjusting moving member 2 through the arrangement of the connecting supporting block 9, so that the unstable connection caused by the fact that the contact area between the adjusting moving member 2 and the first sliding block 42 is not large to a certain extent is avoided.

On the basis of the above-described characteristic sliding unit 4, as shown in fig. 2, the spacing adjustment mechanism 3 includes a screw member 31 rotatably provided on the support frame body 1, the length direction of the screw member 31 and the first slide rail 41 are disposed parallel to each other, and the screw member 31 is rotatably connected with the adjustment moving member 2 by screw. Specifically, the screw 31 means a rod or a column-like structural member provided with threads at the outside, by rotatably setting the screw 31 on the supporting frame body 1, and the screw 31 is rotatably connected with the adjustment moving member 2 by threads. Therefore, when the screw 31 rotates, the screw 31 can drive the adjusting moving member 2 to slide along the axial direction of the screw 31 through the screw, so that the position of the adjusting moving member 2 is adjusted, and the adjustment of the detection gap is more convenient and accurate.

In an alternative embodiment, as shown in fig. 2, a turning handle is also provided at the end of the screw 31. Specifically, the rotating handle is generally a columnar structure, and the diameter of the rotating handle is larger than that of the screw 31 itself, so that the screw 31 can be rotated more conveniently by the lever principle.

The circumference of the rotating handle is also provided with scale marks, the scale marks are arranged around the axis of the rotating handle and are matched with the corresponding parts of the supporting frame body 1, and the threaded piece 31 rotates more accurately.

According to the specific situation and requirements, in one embodiment, as shown in fig. 2, the spacing adjustment mechanism 3 may further include a second sliding rail 32 provided on the supporting frame 1, a second sliding block 33 slidably provided on the second sliding rail 32, and a screw member 31 rotatably provided on the supporting frame 1, where the screw member 31 is rotatably connected with the second sliding block 33 through a screw, and the adjustment moving member 2 is connected with the second sliding block 33. Specifically, the second slider 33 is a block structure for connecting to the adjustment moving member 2, and the second slide rail 32 is a bar-like or column-like structure for mounting the second slider 33. The screw 31 refers to a rod or a column-like structural member provided with threads on the outside. The second slide rail 32 is fixed on the support frame body 1 at the time of installation, the second slider 33 is slidably disposed on the second slide rail 32, and then the adjustment moving member 2 is connected with the second slider 33. Since the screw 31 is rotatably coupled with the second slider 33 by the screw, the screw 31 can drive the second slider 33 to slide in the axial direction of the screw 31 when the screw 31 rotates. And the second sliding block 33 moves to drive the adjusting moving member 2 to slide, so that the interval adjustment of the detection gap is more convenient.

In the present embodiment, the spacing adjustment mechanism 3 can be used alone, and realizes spacing adjustment of the adjustment moving member 2 and sliding of the adjustment moving member 2. Can also be used together with the sliding unit 4, and the sliding of the adjusting moving member 2 can be stabilized by the interval adjusting mechanism 3 and the sliding unit 4.

In a specific embodiment, as shown in fig. 2 and 3, the spacing adjustment mechanism 3 and the sliding unit 4 are respectively located at two sides of the adjustment moving member 2. Specifically, the distance adjusting mechanism 3 is arranged opposite to the sliding unit, so that two ends of the adjusting moving member 2 can be simultaneously supported, and when the adjusting moving member 2 moves, the adjustment of each part on the adjusting moving member 2 is kept synchronous, so that the distance adjustment of the detection gap is more accurate. In addition, the interval adjusting mechanism 3 and the sliding unit support the adjusting moving member 2 at two positions respectively, so that the mounting strength and the self strength of the adjusting moving member 2 are better, and deformation or inclination of the adjusting moving member 2 during moving is avoided to a certain extent.

In one embodiment, as shown in fig. 1 and 2, the support frame 1 includes a first support 11, a second support 12, and a connection beam 13, where the first support 11 and the second support 12 are spaced apart from each other, and the first support 11 is connected to the second support 12 through the connection beam 13. Specifically, the first plane 6 is generally disposed on the connecting beam 13, the first supporting member 11 and the second supporting member 12 refer to block-shaped structural members or plate-shaped structural members having a certain height, and the connecting beam 13 refers to block-shaped structural members or plate-shaped structural members having a certain length. The first supporting piece 11 is connected with the second supporting piece 12 through the connecting cross beam 13 to form a whole, so that the structural strength of the whole supporting frame body 1 is better. And the first support piece 11 and the second support piece 12 are arranged at intervals, an installation space for installing the adjusting moving piece 2 is formed between the first support piece 11 and the second support piece 12, two side faces of the adjusting moving piece 2 are respectively and movably connected to the first support piece 11 and the second support piece 12, and two sides of the adjusting moving piece 2 are supported so that installation is stable.

In an alternative embodiment, the first support 11 and the second support 12 are both plate-shaped, and the first support 11 and the second support 12 are disposed parallel to each other. The connecting beam 13 is also plate-shaped, the connecting beam 13 is positioned between the first supporting piece 11 and the second supporting piece 12, and the connecting beam 13, the first supporting piece 11 and the second supporting piece 12 form a door shape or an I shape, so that the whole structure of the supporting frame body 1 is firmer and lighter.

In a specific embodiment, as shown in fig. 1, the sliding unit 4 is disposed on the first supporting member 11, the spacing adjustment mechanism 3 is disposed on the second supporting member 12, and the second supporting member 12 is further provided with a avoiding notch 8, so that the mounting and yielding of the rotating handle at the end of the threaded member 31 can be provided by the arrangement of the avoiding notch 8, so that the interference between the rotating handle and the second supporting member 12 is avoided to a certain extent, and the rotating handle is more convenient to rotate.

In one embodiment, as shown in fig. 1, the adjustment movement 2 is arranged between the first support 11 and the second support 12 below the connecting beam 13, the first plane 6 being located on the bottom surface of the connecting beam 13 and the second plane 7 being located on top of the adjustment movement 2. Specifically, the second plane 7 is located below the first plane 6, and the area of the second plane 7 is generally larger than the area of the first plane 6. When the ceramic substrate passes through the detection gap, the ceramic substrate is supported by taking the second plane 7 as a reference, so that the measurement of the warpage of the ceramic substrate is more convenient and accurate.

In an alternative embodiment, the connecting beam 13 and the adjusting moving member 2 are plate-shaped, and the connecting beam 13 and the adjusting moving member 2 are inclined, and inclined surfaces for mounting the connecting beam 13 are provided at the top of the first support 11 and the second support 12, and the connecting beam 13 is detachably connected to the inclined surfaces by fasteners.

In another alternative embodiment, the connecting beam 13 and the adjusting member 2 are both made of marble. The plate shape can ensure the installation condition of the first plane 6 and the second plane 7, and simultaneously save more manufacturing materials. Meanwhile, the connecting beam 13 and the adjusting moving part 2 are marble, so that the surface of the connecting beam 13 and the surface of the adjusting moving part 2 can be processed into higher flatness and smoothness, and the detection of the ceramic substrate is more convenient and accurate.

In one embodiment, as shown in fig. 1, the measuring unit 5 includes a micrometer screw, the main body of which is provided on the supporting frame body 1, and the measuring axis of which extends toward the second plane 7 and is disposed perpendicular to the second plane 7. Specifically, the measuring unit 5 is arranged on the connecting beam 13, and the measuring unit 5 is arranged throughout the connecting beam 13, the measuring axis of the micrometer screw extends in the direction of the adjustment movement 2 after passing through the connecting beam 13 with the first plane 6 as zero point. When the size of the detection gap needs to be adjusted, the screw micrometer can be adjusted to the calculated value, and then the distance adjusting mechanism 3 drives the adjusting moving piece 2 until the measuring shaft of the screw micrometer abuts against the second plane 7, and the distance between the first plane 6 and the second plane 7 is the calculated value, so that the adjustment of the detection gap is more convenient, quick and accurate.

In addition, after the position adjustment of the adjustment moving member 2 is completed, the measuring shaft of the micrometer is retracted from the detection gap, so that the measuring shaft of the micrometer is prevented from obstructing the sliding of the ceramic substrate.

The foregoing description of the preferred embodiments of the utility model has been presented only to illustrate the principles of the utility model and not to limit its scope in any way. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model, and other embodiments of the present utility model as will occur to those skilled in the art without the exercise of inventive faculty, are intended to be included within the scope of the present utility model.

Claims (7)

1. A warp detection device, characterized by comprising:

the support frame body is provided with a first plane;

the adjusting moving piece is movably arranged on the supporting frame body, a second plane which is opposite to the first plane is arranged on the adjusting moving piece, the second plane is parallel to the first plane, and a detection gap for the passing of the ceramic substrate is formed between the first plane and the second plane;

the distance adjusting mechanism is arranged on the support frame body, and the driving end of the distance adjusting mechanism is connected to the adjusting moving piece and used for driving the adjusting moving piece to move relative to the first plane so as to adjust the distance between the second plane and the first plane; and

the measuring unit is arranged on the supporting frame body and is used for measuring the distance between the second plane and the first plane;

the first plane and the second plane are both obliquely arranged, and the included angle between the first plane and the horizontal plane ranges from 30 degrees to 60 degrees; the warping degree detection device comprises a sliding unit, wherein the sliding unit is positioned between the adjusting moving piece and the supporting frame body, and the adjusting moving piece is movably arranged on the supporting frame body through the sliding unit; the sliding unit comprises a first sliding rail arranged on the supporting frame body and a first sliding block which is arranged on the first sliding rail and can slide along the length direction of the first sliding rail, and the adjusting moving piece is connected with the first sliding block.

2. The warp detection device of claim 1, wherein the first slider is further provided with a connection supporting block, and the adjustment moving member is detachably connected with the connection supporting block.

3. The warp detection device according to claim 1, wherein the pitch adjustment mechanism comprises a screw member rotatably provided on the support frame body, the screw member is provided in parallel with the first slide rail in a longitudinal direction thereof, and the screw member is rotatably connected with the adjustment moving member by screw threads.

4. The warp detection device according to claim 1 or 2, wherein the pitch adjustment mechanism includes a second slide rail provided on the support frame body, a second slider slidably provided on the second slide rail, and a screw member rotatably provided on the support frame body, the screw member being rotatably connected with the second slider by screw threads, the adjustment moving member being connected with the second slider.

5. A warp detection device as claimed in any one of claims 1 to 3, wherein the support frame body includes a first support member, a second support member, and a connecting beam, the first support member and the second support member being disposed at a distance from each other, the first support member being connected to the second support member through the connecting beam.

6. The warp detection device of claim 5, wherein the adjustment moving member is disposed between the first support member and the second support member below the connecting beam, the first plane is located on a bottom surface of the connecting beam, and the second plane is located on a top of the adjustment moving member.

7. The warp detection device according to claim 1, wherein the measurement unit includes a micrometer screw, a main body portion of the micrometer screw is provided on the supporting frame body, and a measurement axis of the micrometer screw extends toward the second plane and is disposed perpendicular to the second plane.