CN218698994U - Mechanical arm calibration and motion precision detection assembly - Google Patents

Abstract

The utility model discloses a mechanical arm calibration and motion precision detection component, wherein a calibration measuring device is positioned on a base plate or positioned on the base plate through a linear motion platform; the calibration measuring device comprises a base, a connecting seat, a sensor fixing seat and a displacement sensor; the sensor fixing seat is provided with at least three displacement sensors which are arranged at a certain angle, the displacement measuring axis of each displacement sensor forms an alpha angle with the normal direction of a horizontal plane, and the alpha is more than or equal to 0 degree and less than or equal to 90 degrees; the calibrated measuring device is connected with the mechanical arm and is a 3D measuring ball rod or a 6D measuring head, the 3D measuring ball rod is positioned on the calibrated measuring device, and the position error quantity of the ball center of the 3D measuring ball rod is detected when the mechanical arm makes a point-winding motion through a displacement sensor; the 6D measuring head is positioned on the calibration measuring device and is matched with the displacement sensor through the linear motion platform to detect the pose error of the 6D measuring head when the mechanical arm does translational motion. The utility model discloses can accomplish the demarcation and the linear motion precision measurement of robot simultaneously.

Description

A mechanical arm calibration and motion accuracy detection component

technical field

The utility model belongs to the field of measuring instruments, in particular to a mechanical arm calibration and movement precision detection assembly.

Background technique

The repetitive positioning accuracy of the robot is generally very high, but the absolute positioning accuracy is usually low due to the influence of processing and assembly errors, rod deformation, etc., and will gradually decrease with the increase of use time. To improve the absolute positioning accuracy of the robot, generally Calibration of kinematic parameters is required, and accurate parameters of the robot model need to be identified using high-precision measuring equipment and appropriate parameter identification methods.

At present, laser trackers and other measuring equipment are mostly used for robot calibration and measurement. Such equipment usually has a measurement accuracy of μm level, so the calibration accuracy is very high, but such equipment is usually very expensive. At the same time, in some production sites, due to the There are guardrails on the outside of the robot, which cannot provide an open calibration environment, and it is easy to block the line of sight. The robot needs to be disassembled and transported to an open environment for calibration, which will greatly limit its application.

Chinese utility model patent CN 202110278848.0 discloses a robot calibration device based on multi-station measurement. The calibration device of the present application can quickly calibrate the robot at any time on the industrial site. Chinese utility model patent CN202111142498.1 discloses a robotic arm calibration and accuracy measurement device based on a linear motion table, which provides a low-cost robot dynamic accuracy measurement device to improve the efficiency and quality of robot research and development work, but the above two The utility model has a single function and cannot simultaneously perform the functions of calibration and linear motion precision measurement. The positioning elements of the above two utility models are positioning pins and positioning holes, and the positioning accuracy is low, which affects the overall measurement accuracy of the calibration measurement device. Therefore measures need to be taken to make up for the deficiencies of the prior art.

Utility model content

An object of the present utility model is to provide a mechanical arm calibration and motion precision detection assembly, which can simultaneously complete robot calibration and linear motion precision measurement.

The technical scheme of the utility model is as follows:

A mechanical arm calibration and motion accuracy detection assembly, including a substrate, also includes

Calibration measurement device, which is positioned on the substrate or positioned on the substrate by a linear motion platform; the calibration measurement device includes a base, a sensor holder and a displacement sensor connected in sequence from bottom to top; the displacement measurement axis of the displacement sensor is in a 0- 90° included angle;

The calibrated measuring device is connected to the end of the mechanical arm, the calibrated measuring device is a 3D measuring ball rod, the 3D measuring ball rod is provided with a spherical surface, and the spherical surface is in contact with the probes of the three displacement sensors of the calibration measuring device at the same time, The displacement sensor detects the position error of the center of the sphere when the mechanical arm moves around the center of the sphere;

Or the calibrated measuring device is a 6D measuring head, and the 6D measuring head is provided with at least 6 measuring planes, and the 6 measuring planes are in contact with the probes of the 6 displacement sensors of the calibrated measuring device at the same time, and the linear motion table and the displacement sensor The position and orientation error of the 6D measuring head when the robot arm is used for translational movement.

Further, there are at least three displacement sensors fixedly mounted on the sensor fixing seat at a certain angle,

The displacement sensor is a contact displacement sensor, and the head probe of the contact displacement sensor is a flat probe or a ball probe;

Or the displacement sensor is a laser type non-contact displacement sensor.

Further, the 3D measuring ball rod includes a measuring ball and an extension rod, the diameter of the measuring ball is 10-100mm, and the roundness error of the measuring ball is less than 20 microns; when performing 3D measurement, the contact displacement sensor The head probe is a flat probe or a ball probe, and the measuring ball is always tangent to the flat probe or ball probe to realize the measurement of the 3D displacement of the center of the ball;

The 6D measuring head is provided with multiple measuring planes and extension rods, the flatness error of each measuring plane is less than 0.1 mm, and the multiple measuring planes are distributed at a certain angle, and the range of the angle is 0°-150°; When performing 6D measurement, the head probe of the contact displacement sensor is a ball probe, and each ball probe is tangent to one of the measurement planes to realize point measurement on the measurement plane.

Further, there are multiple sensor fixing seats, and the angle between the axis of the displacement sensor and the horizontal plane is adjusted by replacing different sensor fixing seats; Adjust the angle between the entire sensor fixing seat and the horizontal plane through the adjustment mechanism of the angle adjustment part.

Further, the sensor fixing seat is provided with an expansion interface, and an expansion board is installed through the expansion interface, each expansion board is provided with a displacement sensor, and the number of displacement sensors is expanded to at least six through the expansion interface, and a positioning element is provided on the expansion interface It is used to ensure the relative positional relationship between different displacement sensors, so as to realize the 6D pose measurement of the 6D measuring head; or the sensor fixing base is equipped with six displacement sensors.

Further, the six displacement sensors can be divided into three groups. The directions of measurement axes of different displacement sensors of the same group are parallel to each other and the distance between the axes is 30-300 mm. a certain angle; each group includes two displacement sensors; or three groups include one, two and three displacement sensors respectively.

Further, a positioning component is used for positioning between the base and the base plate, and the positioning component is positioned using a positioning method in which three sets of positioning points form a positioning surface, and the calibration measurement device is fastened by a fastening component, and the fastening component is The components are one or a combination of clamps, threaded fasteners, snaps.

Further, a set of first positioning elements is provided on the base, and a positioning method is adopted in which three sets of positioning points form a positioning surface;

The first positioning element is a triangular arrangement of positioning pins or positioning balls, or double positioning pins, or double positioning balls, or V-shaped blocks;

The double positioning pins are two positioning pins arranged at intervals, the cylindrical surface or conical surface of the positioning pins protrudes from the bottom surface of the base, and the axes of the double positioning pins face the center of the triangular arrangement;

The double positioning balls are two positioning balls arranged at a distance, the spherical surface of the positioning balls protrudes from the bottom surface of the base, and the perpendicular line of the line connecting the centers of the two positioning balls faces the center of the triangular arrangement;

The direction of the V-shaped groove of the V-shaped block is toward the center of the triangular arrangement.

Further, the substrate is provided with a plurality of mounting positions, each mounting position is correspondingly provided with a set of second positioning elements, and each set of second positioning elements corresponds to a set of first positioning elements;

The second positioning element is a triangular arrangement of positioning pins or positioning balls, or double positioning pins, or double positioning balls;

The double positioning pins are two positioning pins arranged at intervals, the cylindrical surface or conical surface of the positioning pins protrudes from the upper surface of the substrate, and the axes of the double positioning pins face the center of the triangular arrangement;

The double positioning balls are two positioning balls arranged at a distance, the spherical surface of the positioning balls protrudes from the upper surface of the substrate, and the perpendicular line of the line connecting the centers of the two positioning balls faces the center of the triangular arrangement;

The direction of the V-shaped groove of the V-shaped block is toward the center of the triangular arrangement.

Further, the linear motion table includes a table body, a slide rail mounted on the table body, a slide table mounted on the slide rail, a third positioning element mounted on the bottom of the table body, and a fourth positioning element mounted on the slide table. components and position measuring components mounted on the platform,

The slide table can slide linearly under the guidance of the slide rail, and the position measuring element measures the displacement of the slide, and the position measuring element is a grating ruler, a pull wire encoder or a capacitive sensor; the third positioning element and the Corresponding to the second positioning element, three sets of positioning points are used to form a positioning surface; and the fastening of the table body and the substrate is realized through the second fastening component, and the second fastening component is a clamp, a threaded fastener, One or a combination of buckles;

The fourth positioning element corresponds to the first positioning element on the base, adopts a positioning method in which three sets of positioning points form a positioning surface; The component is one or a combination of clamps, threaded fasteners, and buckles;

The third positioning element is a triangular arrangement of positioning pins or positioning balls, or double positioning pins, or double positioning balls, or V-shaped blocks;

The fourth positioning element is a triangular arrangement of positioning pins or positioning balls, or double positioning pins, or double positioning balls, or V-shaped blocks.

The utility model has the following beneficial effects:

The calibration measuring device of the utility model is positioned on the base plate or positioned on the base plate through a linear motion table, and the positioning is realized by using a positioning method in which three sets of positioning points form a positioning surface. Three sets of positioning points can form a positioning surface. The three sets of positioning points have a triangular structure, and three sets of positioning pins or three sets of positioning balls are respectively embedded in the three sets of positioning points, that is, each set of positioning pins is tangent to two positioning balls to form a positioning point, or each set of positioning balls is respectively connected to the positioning points. The two positioning pins are tangent to form a positioning point. When the three sets of positioning pins or positioning balls are respectively placed and positioned to the corresponding points, the positioning is completed. This positioning principle can quickly place the positioning parts to different preset positions. , Easy and fast installation and disassembly, saving time and effort, high positioning accuracy.

There are multiple sensor holders in the calibration measurement device of the present invention, and the α angles of different displacement sensors can be adjusted by replacing different sensor holders; or the bottom of the sensor holder is provided with an angle adjustment locking mechanism, which can be adjusted The angle between the entire sensor fixing seat and the horizontal plane is locked and fixed; in this way, the spatial pose of the calibration measuring device or the calibrated measuring device can be adapted to the range of motion of the robot arm, and the distribution of the measurement pose of the robot arm in real space The range is as large as possible, and the calibration accuracy is high, so that the movement of the extension rod driven by the mechanical arm is not limited, which is more conducive to calibration and detection.

The utility model expands the number of displacement sensors from three to at least six through the expansion interface, so that the detection component can not only detect the position error when the mechanical arm moves around the point, but also detect the position and posture of the mechanical arm when it moves in translation The error amount has a wide application range and is convenient for commercial promotion.

Description of drawings

Fig. 1 is one of the structural schematic diagrams of Embodiment 1 provided by the utility model.

Fig. 2 is the second structural diagram of the first embodiment provided by the utility model.

Fig. 3 is a partial structural schematic diagram of the calibration measurement device provided by the present invention.

Fig. 4 is a structural schematic diagram of the calibration measurement device provided by the present invention and the substrate after positioning.

Fig. 5 is one of the structural schematic diagrams of the second embodiment provided by the utility model.

Fig. 6 is the second structural schematic diagram of the second embodiment provided by the utility model.

Fig. 7 is a structural schematic diagram of another alternative solution of the calibration measurement device provided by the present invention.

Fig. 8 is a schematic structural diagram of the elastic locking assembly in the second embodiment.

In Figures 1 to 8: 2—base plate; 4—locating pin; 5—locating ball; 6—fastening assembly; 7—base; 8—connecting seat; 9—sensor fixing seat; 10— —displacement sensor; 11—electric control box; 12—measuring ball; 13—extension rod; 14—flat probe; 15—calibration point; 16—adapter; 18—table body; 19— —Slide rail; 20—Sliding table; 22—Position measuring element; 23—Elastic block; 24—Locking screw; 25—Rubber pad; 26—Central connection block; 27—First direction measurement board; 28—the second direction measuring board; 29—the third direction measuring board.

Detailed ways

In order to make the purposes, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments It is a part of the embodiments of this application, not all of them. The components of the embodiments of the application generally described and illustrated in the figures herein may be arranged and designed in a variety of different configurations.

Accordingly, the following detailed description of the embodiments of the application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of the application. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of this application.

In the description of this application, it should also be explained that, unless otherwise clearly specified and limited, the terms "setting", "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed The connection can also be a detachable connection or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediary, and it can be the internal communication of two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in this application in specific situations.

In order to complete the calibration of the robot, it is often necessary to measure multiple measurement poses of the robot in the real space, and then compare them with the virtual pose determined by the robot controller, and use the difference between the two to optimize the kinematic parameters and realize the robot model parameters. calibration. In the above process, the larger the distribution range of the robot's measurement pose in real space, the higher the calibration accuracy is usually. However, how to measure the pose of the robot in a large range, with high precision and at low cost is a difficult problem. This problem also occurs in the precision inspection of the robot, because the accuracy inspection also requires the robot to move a longer distance as much as possible, and then the difference between the actual trajectory of the robot and the virtual trajectory is measured by an external device. The greater the difference, the robot The lower the movement accuracy.

Embodiment 1, as shown in Figures 1 to 4, a mechanical arm calibration and motion accuracy detection assembly, including a substrate 2, the substrate 2 is a square plate,

It also includes a calibration measurement device; the calibration measurement device is positioned on the substrate 2; the calibration measurement device includes a base 7, a connection base 8, a sensor holder 9 and a displacement sensor 10 connected in sequence from bottom to top; the sensor holder is installed with At least three displacement sensors that form a certain angle with each other, the displacement measurement axis of the displacement sensor and the normal direction of the horizontal plane form an angle of α, and 0°≤α≤90°; the base 7 is installed on the base plate 2 using a fastening component 6 Above; the base 7 and the base plate 2 are positioned by using three sets of positioning points to form a positioning surface, and the calibration measurement device is fastened by the fastening component 6 .

The calibrated measuring device; the calibrated measuring device is a 3D measuring ball, the 3D measuring ball is provided with a spherical surface, the 3D measuring ball is placed on the calibration measuring device and the 3D measuring ball is detected by the displacement sensor 10 when the mechanical arm moves around the point The amount of error in the position of the center of the rod. In this embodiment, the 3D measuring ball rod includes a top measuring ball 12 and an extension rod 13, the head measuring head of the contact displacement sensor is a flat measuring head 14, and the measuring ball 12 is always tangent to the flat measuring head 14, so as to realize the The measurement of the 3D displacement of the center of the ball; the measuring ball 12 is connected with a mechanical arm (not shown in this embodiment) through an extension rod 13 .

The displacement sensor 10 includes at least three displacement sensors arranged at a certain angle, the displacement sensor is a contact displacement sensor, and the head probe of the contact displacement sensor is a flat probe or a ball probe; or the displacement sensor It is a laser non-contact displacement sensor. The displacement sensor of this embodiment adopts three displacement sensors arranged orthogonally.

Among the three orthogonally arranged displacement sensors, two of the displacement sensor axes have the same angle with the horizontal plane, and the angle between the plane formed by these two axes and the horizontal plane is recorded as the measurement angle, and there are multiple sensor holders 9, The measuring angle can be adjusted by changing different sensor fixing bases 9; or the bottom of the sensor fixing base 9 is provided with an angle adjustment and locking mechanism, which can adjust the measuring angle and lock and fix it.

The base 7 is provided with a group of first positioning elements, using three sets of positioning points to form a positioning surface; the first positioning element is a triangular arrangement of positioning pins or positioning balls, or double positioning pins, or double positioning balls The double positioning pins are two positioning pins arranged in parallel, the cylindrical surface or the conical surface of the positioning pins protrude from the bottom surface of the base 7, and the axes of the double positioning pins face the center of the triangular arrangement; the double positioning balls are arranged at a distance Two positioning balls, the spherical surface of the positioning ball protrudes from the bottom surface of the base 7, and the perpendicular line of the center line of the two positioning balls is towards the center of the triangular arrangement.

The base plate 2 is provided with a plurality of mounting positions, and each mounting position is correspondingly provided with a set of second positioning elements, and each set of second positioning elements corresponds to a set of first positioning elements; the second positioning elements are triangularly arranged Locating pins or locating balls, or double locating pins, or double locating balls; the double locating pins are two locating pins arranged in parallel, the cylindrical surface or conical surface of the locating pins protrudes from the upper surface of the substrate 2, and the axis of the double locating pins Toward the center of the triangular arrangement; the double positioning balls are two positioning balls arranged at a distance, the spherical surface of the positioning ball protrudes from the upper surface of the substrate 2, and the perpendicular line of the line connecting the centers of the two positioning balls faces the center of the triangular arrangement .

In this embodiment, the first positioning element on the base 7 is a triangular arrangement of positioning pins 4, and the second positioning element on the base plate 2 is a triangular arrangement of double positioning balls 5, that is, a formation between the two positioning balls 5 can Clamp the positioning holes of the positioning pins 4, each set of positioning balls 5 is embedded on the base plate 2, the three sets of positioning pins 4 have a triangular structure, each set of positioning pins 4 can be embedded in the corresponding positioning holes, and each set of positioning balls 5 5 tangent to form an anchor point.

In this embodiment, an electric control box 11 is installed on the side of the connection base 8 .

In this embodiment, the base 7 has a triangular structure, and the positioning balls 5 are installed in the positioning holes in the base plate 2. A positioning point is formed between every two adjacent positioning balls 5, and a positioning surface can be formed by three positioning points. The three positioning points have a triangular structure, and three sets of positioning pins 4 are respectively embedded in the three positioning points, that is, the positioning pins 4 at the bottom of the triangular base 7 are respectively tangent to the positioning ball 5 on the substrate 2 to form positioning points. After the positioning pins 4 are respectively placed and positioned on the corresponding points on the substrate 2, the positioning of the base 7 is completed. Therefore, the base 7 can be quickly placed in different preset positions through this positioning principle, and precise positioning can be realized.

A plurality of calibration measurement positions are provided on the substrate 2 for extending the calibration measurement range. Each calibration measurement position can be positioned at the corresponding calibration measurement position by moving the calibration measurement device, and each calibration measurement position is passed through a calibration measurement position. The group fastening assembly 6 fastens the base 7 and the base plate 2, so that each calibration measurement position can be positioned and fastened, and the above-mentioned positioning method is used to install and disassemble very quickly, save trouble, and the positioning is accurate and the positioning accuracy is high.

The displacement sensor 10 is an electronic ruler, and a group of electronic rulers are respectively installed on three mutually perpendicular planes. The front end of the probe of each group of electronic rulers is connected with a flat probe 14, and the three groups of flat probes 14 are respectively connected to the measuring ball 12. Tangential contact; when the measuring ball 12 is driven by the mechanical arm to move around the center of the circle, its micromomentum value can be recorded by the probes of the electronic scale in three directions in tangential contact with it. Calibration points 15 are installed symmetrically on each plane and both sides of the flat probe 14. When the probe of the electronic ruler is reset, the flat probe 14 can first contact the calibration points 15 for calibration, so as to ensure the angular error and the installation angle of the electronic ruler. The parallelism error is within the allowable range, avoiding problems such as loose installation of the electronic ruler after a long time of use, and the accuracy and linearity of the electronic ruler are guaranteed through the calibration point 15.

The working process of Embodiment 1 is as follows: the measuring ball 12 has a standard spherical surface, the measuring ball 12 is located in the calibration measuring device, and the calibration measuring device is provided with three groups of electronic rulers, and the probes of each group of electronic rulers push the flat measuring head 14 to contact the measuring ball 12. During the measurement process, the flat probe 14 is always in tangential contact with the measuring ball 12. When the measuring ball 12 rotates under the action of the mechanical arm, the center of the ball pushes the flat measuring head 14 in the X, Y, and Z directions to generate displacement, and the electronic scale collects the displacement, and calculates the movement of the center of the ball around the point through the mathematical geometric model time position error.

Embodiment 2, as shown in accompanying drawings 1 to 8, a mechanical arm calibration and motion accuracy detection assembly, including a substrate 2, the substrate 2 is a square plate, and also includes a calibration measurement device; the calibration measurement device is positioned on the substrate by a linear motion platform 2 above; the calibration measurement device includes a base 7, a connecting seat 8, a sensor holder 9 and a displacement sensor 10 connected successively from bottom to top; the sensor holder 9 includes at least three mutually perpendicular planes, and the displacement sensor 10 is installed on the sensor fixed On the three mutually perpendicular planes on the base 9, and the axis of the displacement sensor 10 forms an angle α with the normal direction of the horizontal plane, and 0°<α<90°. The base 7 is positioned on the linear motion platform in a positioning manner in which three sets of positioning points form a positioning surface. The slide table 20 is positioned on the base plate 2 in a positioning manner in which three sets of positioning points form a positioning surface. The positioning method is the same as that in Embodiment 1, and will not be repeated here.

In order to obtain a better and more convenient measurement angle, the calibration measurement device of this embodiment can adopt another alternative, as shown in Figure 7. The sensor fixing base 9 is used to adjust the measurement angle; or the bottom of the sensor fixing base 9 is provided with an angle adjustment locking mechanism, which can adjust the measurement angle and lock and fix it. This embodiment adopts the adapter 16, which can be connected by the adapter 16 to replace different sensor holders 9 to adjust the measurement angle, so that the angles between the three mutually vertical planes and the horizontal plane on the sensor holder 9 can be adjusted, so that the mechanical arm is driven by During the movement of the calibration measurement device, it is detected at a more favorable motion angle, laying the foundation for accurate measurement.

Each mutually perpendicular plane on the sensor holder 9 is respectively extended and connected to an expansion board through an expansion interface. The displacement sensor 10 includes six displacement sensors, and the head probe of the contact displacement sensor is a ball probe. The measuring head can be tangent to the three measuring boards, and the 6D pose measurement of the 6D measuring head can be realized by measuring six points.

The six displacement sensors are arranged on three expansion boards, and two displacement sensors are arranged on average on each group of expansion boards; or one is arranged on the first expansion board, two are arranged on the second expansion board, and the third Three are arranged on the expansion board; and the axial distance between any two parallel displacement sensors on the same expansion board is 30-300mm.

The calibrated measuring device; the calibrated measuring device is a 6D measuring head, and the 6D measuring head is located on the calibrated measuring device and cooperates with the displacement sensor 10 to detect the position and orientation error of the calibration object during translational movement.

The 6D measuring head includes three measuring boards and extension rods arranged orthogonally on the top. The head measuring head of the contact displacement sensor is a ball head, which can be tangent to the three measuring boards to realize the measurement Point measurement of the plate. In this embodiment, three measuring boards are mounted on the central connecting block 26, and the three measuring boards are the first direction measuring board 27, the second direction measuring board 28 and the third direction measuring board 28 connected vertically to each other on the central connecting block 26. A direction measuring board 29 , the central connection block 26 is connected to the mechanical arm through the extension rod 13 . In other embodiments, the structure of the 6D measuring head can also be that six corresponding planes are machined from one integral part.

Among the three orthogonally arranged displacement sensors, two of the displacement sensor axes have the same angle with the horizontal plane, and the angle between the plane formed by these two axes and the horizontal plane is recorded as the measurement angle, and there are multiple sensor holders 9, The measuring angle can be adjusted by changing different sensor fixing bases 9; or the bottom of the sensor fixing base 9 is provided with an angle adjustment and locking mechanism, which can adjust the measuring angle and lock and fix it.

The base 7 is provided with a group of first positioning elements, using three sets of positioning points to form a positioning surface; the first positioning element is a triangular arrangement of positioning pins or positioning balls, or double positioning pins, or double positioning balls The double positioning pins are two positioning pins arranged in parallel, the cylindrical surface or the conical surface of the positioning pins protrude from the bottom surface of the base 7, and the axes of the double positioning pins face the center of the triangular arrangement; the double positioning balls are arranged at a distance Two positioning balls, the spherical surface of the positioning ball protrudes from the bottom surface of the base 7, and the perpendicular line of the center line of the two positioning balls is towards the center of the triangular arrangement.

The base plate 2 is provided with a plurality of mounting positions, and each mounting position is correspondingly provided with a set of second positioning elements, and each set of second positioning elements corresponds to a set of first positioning elements; the second positioning elements are triangularly arranged Locating pins or locating balls, or double locating pins, or double locating balls; the double locating pins are two locating pins arranged in parallel, the cylindrical surface or conical surface of the locating pins protrudes from the upper surface of the substrate 2, and the axis of the double locating pins Toward the center of the triangular arrangement; the double positioning balls are two positioning balls arranged at a distance, the spherical surface of the positioning ball protrudes from the upper surface of the substrate 2, and the perpendicular line of the line connecting the centers of the two positioning balls faces the center of the triangular arrangement .

The linear motion table includes a table body 18, a slide rail 19 mounted on the table body 18, a slide table 20 mounted on the slide rail 19, a third positioning element mounted on the bottom of the table body 18, and a third positioning element mounted on the slide table 20. The fourth positioning element and the position measuring element 22 installed on the table body 18, the slide table 20 can slide linearly under the guidance of the slide rail 19, the position measuring element 22 measures the sliding displacement, and the position measuring element 22 is Grating scale, wire draw encoder or capacitive sensor. In this embodiment, a grating ruler is selected. A group of position measuring elements 22 are installed on the table body 18 and between the two groups of slide rails 19. The base 7 and the slide table 20 are positioned by using three sets of positioning points to form a positioning surface, and the slide table 20 is equipped with There is a group of said fastening components 6 that can fasten the base 7 and the slide table 20 .

The third positioning element corresponds to the second positioning element on the substrate 2 , and adopts a positioning method in which three sets of positioning points form a positioning surface; the fourth positioning element corresponds to the first positioning element on the base 7 . Three sets of positioning points are used to form the positioning surface;

The third positioning element is a triangular arrangement of positioning pins or positioning balls, or double positioning pins, or double positioning balls; the fourth positioning element is a triangular arrangement of positioning pins or positioning balls, or double positioning pins, or double positioning ball;

The positioning method that three sets of positioning points are used to form a positioning surface between the substrate 2 and the platform 18 is also used to complete the positioning, and the substrate 2 and the platform 18 are connected by an elastic locking assembly, and the elastic locking assembly includes a fixed Multiple sets of elastic blocks 23 and multiple sets of locking screws 24 between the table body 18 and the base plate 2, the locking screws 24 pass through the base body 18, and the middle part of the locking screw 24 is located between the table body 18 and the base plate 2 The part without thread, the threaded part of the lower part of the locking screw 24 is connected on the base plate 2, and a rubber pad 25 is installed between the shoulder of the locking screw 24 and the table body 18 . In this embodiment, the table body 18 is a marble slab and has a large weight. Therefore, multiple groups of elastic blocks 23 are installed between the base plate 2 and the table body 18. The elastic blocks 23 offset most of the gravity of the table body and avoid the weight of the table body. All are applied on the positioning piece, and the relative position between the substrate 2 and the table body 18 is not completely locked and fixed. Due to the action of the elastic block 23 and the rubber pad 25, the slight floating change value of the table body 18 relative to the substrate 2 passes through The elastic cushioning of elastic block 23 and rubber pad 25 is adjusted.

In this embodiment, the six displacement sensors are arranged on three expansion boards, and two electronic scales are arranged on average on each group of expansion boards; and the first direction measuring board 27, the second direction measuring board 28 and the third direction measuring board 29 Set parallel to three mutually perpendicular planes respectively, the probes of each group of electronic rulers are respectively in real-time contact with the corresponding first direction measuring board 27, second direction measuring board 28 or third direction measuring board 29, when the mechanical arm is driven by When the calibration measurement device moves in translation, the probes of each group of electronic scales measure and calculate the pose error amount during translation in real time.

The working process of Embodiment 2 is as follows: In this embodiment, six groups of displacement sensors form a six-dimensional measurement space, and the grating ruler is arranged between two slide rails 19. Sliding up to measure the motion length of the slide table 20 relative to the base plate 2. At the same time, during the movement process, under the joint action of the calibration measurement device and the linear motion table, the six-dimensional measurement space can accurately measure the pose in the actual motion track The amount of change can be calculated, and the difference between the actual motion trajectory and the virtual motion trajectory can be calculated, and the pose error of the manipulator when it is doing translational motion can be detected.

The above-mentioned embodiment is a specific description of the utility model, only to further illustrate the utility model, and can not be understood as limiting the protection scope of the utility model. Those skilled in the art make some non-essential improvements and adjustments according to the content of the utility model All fall within the protection scope of the present utility model.

The above descriptions are only preferred embodiments of the present utility model, and are not intended to limit the present utility model. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present utility model shall be included in this utility model. within the scope of protection of utility models.

Claims (10)

1. A mechanical arm calibration and motion accuracy detection assembly, including a substrate, is characterized in that it also includes Calibration measurement device, which is positioned on the substrate or positioned on the substrate by a linear motion platform; the calibration measurement device includes a base, a sensor holder and a displacement sensor connected in sequence from bottom to top; the displacement measurement axis of the displacement sensor is in a 0- 90° included angle; The calibrated measuring device is connected to the end of the mechanical arm, the calibrated measuring device is a 3D measuring ball rod, the 3D measuring ball rod is provided with a spherical surface, and the spherical surface is in contact with the probes of the three displacement sensors of the calibration measuring device at the same time, The displacement sensor detects the position error of the center of the sphere when the mechanical arm moves around the center of the sphere; Or the calibrated measuring device is a 6D measuring head, and the 6D measuring head is provided with at least 6 measuring planes, and the 6 measuring planes are in contact with the probes of the 6 displacement sensors of the calibrated measuring device at the same time, and the linear motion table and the displacement sensor The position and orientation error of the 6D measuring head when the robot arm is used for translational movement. 2. A mechanical arm calibration and motion accuracy detection assembly according to claim 1, characterized in that there are at least three displacement sensors fixed at a certain angle on the sensor holder, The displacement sensor is a contact displacement sensor, and the head probe of the contact displacement sensor is a flat probe or a ball probe; Or the displacement sensor is a laser type non-contact displacement sensor. 3. A mechanical arm calibration and movement accuracy detection assembly according to claim 2, characterized in that, the 3D measuring ball rod includes a measuring ball and an extension rod, the diameter of the measuring ball is 10-100 mm, and the measurement The roundness error of the ball is less than 20 microns; when performing 3D measurement, the head probe of the contact displacement sensor is a flat probe or a ball probe, and the measuring ball is always tangent to the flat probe or ball probe , to realize the measurement of the 3D displacement of the center of the sphere; The 6D measuring head is provided with multiple measuring planes and extension rods, the flatness error of each measuring plane is less than 0.1 mm, and the multiple measuring planes are distributed at a certain angle, and the range of the angle is 0°-150°; When performing 6D measurement, the head probe of the contact displacement sensor is a ball probe, and each ball probe is tangent to one of the measurement planes to realize point measurement on the measurement plane. 4. A mechanical arm calibration and movement accuracy detection assembly according to claim 3, characterized in that there are multiple sensor holders, and the clamp between the axis of the displacement sensor and the horizontal plane can be adjusted by replacing different sensor holders. or the bottom of the sensor fixing seat is provided with an angle adjustment part, and the angle between the entire sensor fixing seat and the horizontal plane can be adjusted by replacing different angle adjustment parts or through the adjustment mechanism of the angle adjustment part. 5. A mechanical arm calibration and motion accuracy detection assembly according to claim 3, characterized in that the sensor holder is provided with an expansion interface, through which expansion boards are installed, and each expansion board is provided with a displacement sensor, The number of displacement sensors is expanded to at least six through the expansion interface, and positioning elements are provided on the expansion interface to ensure the relative positional relationship between different displacement sensors, thereby realizing the 6D pose measurement of the 6D measuring head; or the sensor The fixed seat is equipped with six displacement sensors. 6. A mechanical arm calibration and motion accuracy detection assembly according to claim 5, wherein the six displacement sensors can be divided into three groups, and the directions of measurement axes between different displacement sensors of the same group are parallel to each other And the distance between the axes is 30-300mm, and the measuring axis directions of the displacement sensors of different groups form a certain angle with each other; each group includes two displacement sensors; or three groups respectively include one, two and three displacement sensors. 7. A mechanical arm calibration and motion accuracy detection assembly according to claim 1, characterized in that a positioning assembly is used for positioning between the base and the substrate, and the positioning assembly uses three sets of positioning points to form a positioning surface The positioning method is used to locate and fasten the calibration measurement device through a fastening component, and the fastening component is one or a combination of clamps, threaded fasteners, and buckles. 8. A mechanical arm calibration and motion accuracy detection assembly according to claim 7, characterized in that, the base is provided with a set of first positioning elements, and three sets of positioning points are used to form a positioning surface; The first positioning element is a triangular arrangement of positioning pins or positioning balls, or double positioning pins, or double positioning balls, or V-shaped blocks; The double positioning pins are two positioning pins arranged at intervals, the cylindrical surface or conical surface of the positioning pins protrudes from the bottom surface of the base, and the axes of the double positioning pins face the center of the triangular arrangement; The double positioning balls are two positioning balls arranged at a distance, the spherical surface of the positioning balls protrudes from the bottom surface of the base, and the perpendicular line of the line connecting the centers of the two positioning balls faces the center of the triangular arrangement; The direction of the V-shaped groove of the V-shaped block is toward the center of the triangular arrangement. 9. A mechanical arm calibration and motion accuracy detection assembly according to claim 8, wherein a plurality of mounting positions are provided on the substrate, and each mounting position is correspondingly provided with a group of second positioning elements, each group The second positioning element corresponds to a set of first positioning elements; The second positioning element is a triangular arrangement of positioning pins or positioning balls, or double positioning pins, or double positioning balls; The double positioning pins are two positioning pins arranged at intervals, the cylindrical surface or conical surface of the positioning pins protrudes from the upper surface of the substrate, and the axes of the double positioning pins face the center of the triangular arrangement; The double positioning balls are two positioning balls arranged at a distance, the spherical surface of the positioning balls protrudes from the upper surface of the substrate, and the perpendicular line of the line connecting the centers of the two positioning balls faces the center of the triangular arrangement; The direction of the V-shaped groove of the V-shaped block is toward the center of the triangular arrangement. 10. A mechanical arm calibration and motion accuracy detection assembly according to claim 9, wherein the linear motion table comprises a table body, a slide rail mounted on the table body, and a slide table mounted on the slide rail , the third positioning element installed on the bottom of the platform, the fourth positioning element installed on the slide table and the position measuring element installed on the platform, The slide table can slide linearly under the guidance of the slide rail, and the position measuring element measures the displacement of the slide, and the position measuring element is a grating ruler, a pull wire encoder or a capacitive sensor; the third positioning element and the Corresponding to the second positioning element, three sets of positioning points are used to form a positioning surface; and the fastening of the table body and the substrate is realized through the second fastening component, and the second fastening component is a clamp, a threaded fastener, One or a combination of buckles; The fourth positioning element corresponds to the first positioning element on the base, adopts a positioning method in which three sets of positioning points form a positioning surface; The component is one or a combination of clamps, threaded fasteners, and buckles; The third positioning element is a triangular arrangement of positioning pins or positioning balls, or double positioning pins, or double positioning balls, or V-shaped blocks; The fourth positioning element is a triangular arrangement of positioning pins or positioning balls, or double positioning pins, or double positioning balls, or V-shaped blocks.

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