CN107727051B - Inversion method straightness measuring device based on six-dimensional adjustment - Google Patents
Inversion method straightness measuring device based on six-dimensional adjustment Download PDFInfo
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- CN107727051B CN107727051B CN201711214332.XA CN201711214332A CN107727051B CN 107727051 B CN107727051 B CN 107727051B CN 201711214332 A CN201711214332 A CN 201711214332A CN 107727051 B CN107727051 B CN 107727051B
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- 238000000034 method Methods 0.000 title claims abstract description 24
- 238000006073 displacement reaction Methods 0.000 claims abstract description 98
- 238000005259 measurement Methods 0.000 claims abstract description 22
- 238000005096 rolling process Methods 0.000 claims description 3
- 238000000926 separation method Methods 0.000 abstract description 7
- 239000000758 substrate Substances 0.000 description 6
- 239000004579 marble Substances 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007405 data analysis Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/22—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes
- G01B21/24—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes for testing alignment of axes
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
The invention relates to a straightness measuring device, in particular to a reverse method straightness measuring device based on six-dimensional repeated positioning, which comprises a six-dimensional adjusting platform, a reverse leveling ruler and a micro-displacement sensor. Through the six-dimensional adjustment platform, six-dimensional posture adjustment of the reverse straight line can be realized; the two ends of the reversing flat ruler are provided with the linear two-point marking balls, the positions of the reversing straight lines are determined by measuring the linear two-point marking balls through the micro-displacement sensor, the high-precision repeated positioning of the reversing straight lines before and after reversing is realized, and the high-precision straightness error separation measurement is further realized.
Description
Technical Field
The invention belongs to the field of geometric measurement, and particularly relates to a straightness measuring device, in particular to a reverse straightness measuring device based on six-dimensional adjustment.
Background
The straightness measuring method is mainly divided into two major categories, namely a standard type and a no-standard type. The reference straightness measurement method is limited by reference accuracy, and it is difficult to maintain high-accuracy measurement even in a large size. The basic principle of the standard-free straightness measuring method is an error separation method, and the reverse method is one of the error separation methods. In principle, the straightness measurement accuracy of the inversion method is not limited, however, the repeated positioning accuracy of the inversion line in the actual use process can limit the error separation accuracy, so that the straightness measurement method of the inversion method is not ideal in the actual use process.
Disclosure of Invention
The invention mainly solves the technical problem of providing a six-dimensional adjustment-based inversion method straightness measuring device and an inversion straight line identification measuring and positioning method, which effectively solve the problem of repeated positioning accuracy in inversion method straightness measurement and further realize high-accuracy absolute measurement of large-size straightness.
The invention relates to a six-dimensional adjustment-based reversing method straightness measuring device which comprises a sensor mounting arm, a sensor mounting seat, a micro-displacement sensor, a reversing leveling rod and a six-dimensional adjustment platform, and is characterized in that the micro-displacement sensor is mounted on the sensor mounting seat, the sensor mounting seat is fixed on the sensor mounting arm, and the sensor mounting arm is mounted on a tested guide rail sliding table and can move along with the tested guide rail sliding table; the six-dimensional adjustment platform base consists of three supporting legs and a substrate, wherein two supporting legs are symmetrically distributed on one side of the substrate, and the other supporting leg is distributed in the middle of the other side of the substrate; the six-dimensional adjustment platform main adjustment whole consists of two three-dimensional micro-displacement platforms and three flat ruler supporting balls, wherein the three-dimensional micro-displacement platforms are fixed on two sides of a substrate, and 2 and 1 flat ruler supporting balls are respectively fixed on the base surfaces of the two three-dimensional micro-displacement platforms; the reversing flat ruler is arranged on the three flat ruler supporting balls; two ends of the reversing flat ruler are provided with straight line two-point marking balls.
The reverse straight line six-dimensional posture adjustment is realized by a six-dimensional adjustment platform and is realized by three support feet at the bottom and two three-dimensional micro-displacement platforms above; the specific adjustment process is as follows: the supporting feet on the side of the bottom double supporting feet are adjusted, and the rolling angle beta of the reversing flat ruler can be adjusted; the two three-dimensional micro displacement tables are synchronously adjusted, and the displacement of the reverse leveling ruler X, Y, Z in three directions can be adjusted; one of the three-dimensional micro displacement tables is adjusted along the X direction, and the deflection angle theta of the reversing flat ruler can be adjusted; one of the three-dimensional micro displacement tables is adjusted along the Z direction, and the pitch angle alpha of the reversing leveling rod can be adjusted.
The two ends of the reversing flat ruler are provided with straight line two-point marking balls, and the position measurement and positioning of the reversing straight line are carried out through the spherical surface.
The position measurement and positioning of the reversing straight line are carried out by adopting the following steps:
A. moving the guide rail sliding table to enable the micro-displacement sensor to be aligned with the linear two-point marking balls of the termination point, and adjusting two three-dimensional micro-displacement tables on the six-dimensional adjustment platform to enable the linear two-point marking balls to be in the measuring range of the micro-displacement sensor;
B. moving the guide rail sliding table to enable the micro-displacement sensor to be aligned with the linear two-point marking ball at the other end, and adjusting the six-dimensional adjusting platform to enable the linear two-point marking ball to be in the measuring range of the micro-displacement sensor;
C. moving the guide rail sliding table to enable the measuring point of the micro-displacement sensor to be positioned on the leveling ruler, adjusting two three-dimensional micro-displacement tables in the Z direction, observing the indication value of the micro-displacement sensor, and adjusting the supporting feet at the bottom of the six-dimensional adjustment platform if the indication value is changed until the indication value is kept unchanged when the micro-displacement sensor moves in the vertical direction;
D. moving the guide rail sliding table to enable the micro-displacement sensor to be aligned with the two-point marking balls of the straight line of the starting point, observing the indication value of the micro-displacement sensor, and adjusting the six-dimensional adjustment platform along the Z direction to enable the two-point marking balls of the straight line to move in the vertical direction until the indication value of the micro-displacement sensor is adjusted to the minimum value position;
E. d, moving the guide rail sliding table to enable the micro-displacement sensor to be aligned with the other end of the straight line two-point marking ball, and repeating the operation of the step D;
F. and moving the guide rail sliding table to enable the micro-displacement sensor to be aligned with the linear two-point marking balls at the starting point and adjust the six-dimensional adjustment platform along the movement direction of the guide rail, so that the linear two-point marking balls move in a small range along the movement direction of the guide rail until the micro-displacement sensor shows a minimum value position.
The beneficial effects of the invention are as follows:
and 1, the six-dimensional position and posture of the reversing flat ruler are adjusted through three supporting feet at the bottom of the six-dimensional adjusting platform and two micro-displacement platforms, so that the reversing flat ruler is simple in structure and rapid in adjustment, and high-precision repeated positioning before and after reversing is conveniently realized.
2) The straight line is positioned by adopting the straight line two-point marking ball, and the repeated positioning accuracy of the reversed straight line is high;
3) The same displacement sensor is used for realizing twice reversal linear positioning measurement and reversal linear contour measurement, so that positioning errors caused by change of a reversal linear position measurement reference system are reduced, and accuracy of reversal method straightness error separation measurement is improved.
Drawings
FIG. 1 is a schematic general construction of the present invention;
FIG. 2 is an exploded view of FIG. 1, 2, according to the present invention;
FIG. 3 is an exploded view of FIGS. 4 and 5 of FIG. 1 in accordance with the present invention;
in the figure: 1. the sensor mounting arm 2, the sensor mounting seat 3, the butterfly nut 4, the reverse leveling rod 5, the six-dimensional adjustment platform 6, the marble platform 7, the guide rail sliding table 8, the compression bolt 21, the opening jacket 22, the bolt 23, the nut 24, the wire groove 25, the sensor connecting rod 26, the bolt 27, the micro-displacement sensor 42, the straight line two-point marking ball 43, the reverse straight line 51, the leveling rod supporting ball 52, the three-dimensional micro-displacement platform 53, the supporting leg 54, the substrate 55 and the bolt.
Detailed Description
The device according to the invention will be described in detail with reference to fig. 1 to 3. So that the advantages and features of the invention may be more readily understood by those skilled in the art, the scope of the invention may be more clearly and clearly defined.
The invention relates to a six-dimensional adjustment-based inversion method straightness measuring device, which comprises a sensor mounting arm 1, a sensor mounting seat 2, a micro-displacement sensor 27, an inversion leveling rod 4 and a six-dimensional adjustment platform 5, and is characterized in that the micro-displacement sensor 27 is mounted on the sensor mounting seat, a sensor is fixed on the sensor mounting arm 1, and the sensor mounting arm 1 is mounted on a tested guide rail sliding table 7 and can move along with the tested guide rail sliding table; the six-dimensional adjustment platform 5 base consists of three supporting legs 53 and a base plate 54, wherein the two supporting legs are symmetrically distributed on one side of the base plate, and the other supporting leg is distributed in the middle of the other side of the base plate; the six-dimensional adjustment platform 5 is characterized in that the main adjustment whole is composed of two three-dimensional micro-displacement platforms 52 and three flat ruler supporting balls 51, the three-dimensional micro-displacement platforms 52 are fixed on two sides of a base plate 54, and 1 flat ruler supporting balls 51 and 2 flat ruler supporting balls 51 are respectively fixed on the base surfaces of the two three-dimensional micro-displacement platforms 52; the reverse square 4 is placed on three square support balls 51; the two ends of the reverse flat ruler 4 are provided with straight line two-point marking balls 42.
The reverse straight line six-dimensional posture adjustment is realized by a six-dimensional adjustment platform 5 and is realized by three support legs 53 at the bottom and two three-dimensional micro-displacement platforms 52 above; the specific adjustment process is as follows: the rolling angle beta of the reversing flat ruler 4 can be adjusted by adjusting the supporting legs 53 on the side of the bottom double supporting legs 53; the two three-dimensional micro displacement tables 52 are synchronously adjusted, and the displacement of the reverse leveling rod 4X, Y, Z in three directions can be adjusted; one of the three-dimensional micro displacement tables 52 is adjusted along the X direction, and the deflection angle theta of the reverse leveling rod 4 can be adjusted; one of the three-dimensional micro displacement stages 52 is adjusted in the Z direction, and the pitch angle α of the reverse leveling rod 4 can be adjusted.
The inversion flat rule 4 has two straight line two point marking balls 42 at both ends, and the position measurement and positioning of the inversion straight line 43 are performed by the spherical surface.
The position measurement and positioning of the inversion straight line 43 adopts the following steps:
A. moving the guide rail sliding table 7 to enable the micro-displacement sensor 27 to be aligned with the end point linear two-point marking balls 42, and adjusting the two three-dimensional micro-displacement tables 52 on the six-dimensional adjustment platform 5 to enable the linear two-point marking balls 42 to be in the measuring range of the micro-displacement sensor 27;
B. moving the guide rail sliding table 7 to enable the micro-displacement sensor 27 to be aligned with the linear two-point marking ball 42 at the other end, and adjusting the six-dimensional adjusting platform 5 to enable the linear two-point marking ball 42 to be in the measuring range of the micro-displacement sensor 27;
C. moving the guide rail sliding table 7 to enable the measuring point of the micro-displacement sensor 27 to be on a flat ruler, adjusting two three-dimensional micro-displacement tables 52 in the Z direction, observing the indication value of the micro-displacement sensor 27, and adjusting the supporting leg 53 at the bottom of the six-dimensional adjustment platform 5 if the indication value is changed until the indication value is kept unchanged when the micro-displacement sensor 27 moves in the vertical direction;
D. moving the sliding table 7 of the guide rail 7 to enable the micro-displacement sensor 27 to be aligned with the straight line two-point marking balls 42 of the starting point, observing the indication value of the micro-displacement sensor 27, and adjusting the six-dimensional adjustment platform 5 along the Z direction to enable the straight line two-point marking balls 42 to move vertically until the indication value of the micro-displacement sensor 27 is adjusted to the minimum value position;
E. moving the guide rail sliding table 7 to enable the micro-displacement sensor 27 to be aligned with the other end of the straight line two-point marking ball 42, and repeating the operation of the step D;
F. and moving the guide rail sliding table 7 to enable the micro-displacement sensor 27 to align with the linear two-point marking balls 42 at the starting point and adjust the six-dimensional adjustment platform 5 along the guide rail movement direction, and enabling the linear two-point marking balls 42 to move in a small range along the guide rail movement direction until the position of the minimum value of the indication value of the micro-displacement sensor 27 is adjusted.
The six-dimensional adjustment-based inversion method straightness measuring device is used for measuring the same straight line on the inversion flat ruler twice before and after inversion, and high-precision straightness measurement can be realized through error separation. The device can realize the straightness measurement of square and guide rail simultaneously.
The reversing method straightness measuring device based on six-dimensional adjustment comprises a six-dimensional adjustment platform, a reversing flat ruler and a micro-displacement sensor. Three supporting feet are arranged at the bottom of the six-dimensional adjustment platform, and two three-dimensional micro-displacement platforms are arranged on the six-dimensional adjustment platform; the three-dimensional micro-displacement platform is fixed on two sides of the substrate of the six-dimensional adjustment platform by bolts, and three flat ruler supporting balls are arranged on the three-dimensional micro-displacement platform; the reversing flat ruler is arranged on the three flat ruler supporting balls, and two ends of the reversing flat ruler are fixed with straight line two-point marking balls; the micro-displacement sensor is arranged on a sensor mounting seat, the sensor mounting seat is fixed on a sensor mounting arm, and the sensor mounting arm is fixed on a detected guide rail sliding table and can move along with a guide rail.
The steps of straightness measurement by adopting the measuring device in the embodiment are as follows:
1. straight line positioning and measurement before inversion:
(1) when in use, the micro-displacement sensor is arranged on the sensor mounting seat; fixing the sensor mounting base on one side of the sensor mounting arm; the sensor mounting arm is secured to the rail.
(2) Placing a six-dimensional adjustment platform on the marble platform; and placing the reversing flat ruler with the straight line two-point marking balls on three flat ruler supporting balls at the top of the six-dimensional adjusting platform, so that the working surface of the reversing flat ruler is opposite to the measuring surface of the micro-displacement sensor.
(3) And adjusting the supporting feet at the bottom of the six-dimensional adjusting platform to enable the measuring surface of the reverse leveling ruler to be parallel to the measuring surface of the micro-displacement sensor.
(4) The micro-displacement sensor moves to the center of one of the linear two-point marking balls and is static by the moving guide rail, and the two three-dimensional micro-displacement tables on the six-dimensional adjustment platform are adjusted to enable the linear two-point marking balls to be in the measuring range of the micro-displacement sensor.
(5) And adjusting the three-dimensional micro-displacement table to a position with extremely small indication value of the micro-displacement sensor along the vertical direction, wherein the sensor is opposite to the position of the sphere center of the straight line two-point identification sphere.
(6) The micro displacement sensor moves to the center position of the marking ball at two points on the other side of the straight line and is static by the moving guide rail.
(7) Repeating the steps (5) and (6).
(8) And measuring the profile of the single-side straight line.
2. Linear positioning and measurement after inversion:
(1) and the sensor mounting seat and the micro-displacement sensor (the sensor mounting seat and the micro-displacement sensor are not required to be assembled or disassembled) are removed and fixed on the other side of the sensor mounting arm.
(2) And reversing the reversing flat rule around the Y axis by 180 degrees, so that the measuring surface of the reversing flat rule is opposite to the measuring surface of the micro-displacement sensor.
(3) Repeating the linear positioning and measuring (3) - (7) before reversing.
(4) And performing the linear contour measurement after inversion.
3. Data analysis:
and the straightness error separation of the measurement data by adopting a reversal method can obtain the straightness of the flat ruler and the straightness of the vertical surface of the guide rail.
The foregoing description is only illustrative of the present invention and is not intended to limit the scope of the invention, and all equivalent structures or equivalent processes or direct or indirect application in other related technical fields are included in the scope of the present invention.
Claims (2)
1. The reversing method straightness measuring device based on six-dimensional adjustment comprises a sensor mounting arm (1), a sensor mounting seat (2), a butterfly nut (3), a micro-displacement sensor (27), a reversing leveling ruler (4) and a six-dimensional adjustment platform (5), and is characterized in that the micro-displacement sensor (27) is mounted on the sensor mounting seat, the sensor mounting seat (2) is fixed on the sensor mounting arm (1), and the sensor mounting arm (1) is mounted on a tested guide rail sliding table (7) and can move along with the tested guide rail sliding table; the six-dimensional adjusting platform (5) base consists of three supporting legs (53) and a base plate (54), wherein the two supporting legs are symmetrically distributed on one side of the base plate, and the other supporting leg is distributed in the middle of the other side of the base plate; the six-dimensional adjusting platform (5) is characterized in that the main adjusting body is composed of two three-dimensional micro-displacement platforms (52) and three flat ruler supporting balls (51), the three-dimensional micro-displacement platforms (52) are fixed on two sides of a base plate (54), and the base surfaces of the two three-dimensional micro-displacement platforms (52) are respectively fixed with 1 flat ruler supporting balls and 2 flat ruler supporting balls (51); the reversing flat ruler (4) is arranged on three flat ruler supporting balls (51); two ends of the reversing flat ruler (4) are provided with straight line two-point marking balls (42);
the reverse linear six-dimensional posture adjustment is realized by a six-dimensional adjustment platform (5), and is realized by three support feet (53) at the bottom and two three-dimensional micro-displacement tables (52) above; the specific adjustment process is as follows: the supporting leg (53) on the side of the bottom double supporting leg (53) is adjusted, and the rolling angle beta of the reversing flat ruler (4) can be adjusted; the two three-dimensional micro displacement tables (52) are synchronously adjusted, and the displacement of the reversing flat rule (4) X, Y, Z in three directions can be adjusted; one of the three-dimensional micro displacement tables (52) is adjusted along the X direction, and the deflection angle theta of the reversing flat ruler (4) can be adjusted; one of the three-dimensional micro displacement tables (52) is adjusted along the Z direction, and the pitch angle alpha of the reverse leveling rod (4) can be adjusted;
the two ends of the reversing flat ruler (4) are provided with straight line two-point marking balls (42), and the position of the reversing straight line (43) is measured and positioned through the spherical surface.
2. The six-dimensional adjustment-based inversion straightness measuring device according to claim 1, wherein: the position measurement and positioning of the inversion straight line (43) are carried out by adopting the following steps:
A. moving the guide rail sliding table (7) to enable the micro-displacement sensor (27) to be aligned with the linear two-point marking ball (42) of the termination point, and adjusting two three-dimensional micro-displacement tables (52) on the six-dimensional adjustment platform (5) to enable the linear two-point marking ball (42) to be in the measuring range of the micro-displacement sensor (27);
B. moving the guide rail sliding table (7) to enable the micro-displacement sensor (27) to be aligned with the other end of the linear two-point marking ball (42), and adjusting the six-dimensional adjusting platform (5) to enable the linear two-point marking ball (42) to be in the measuring range of the micro-displacement sensor (27);
C. moving the guide rail sliding table (7) to enable the measuring point of the micro-displacement sensor (27) to be positioned on a flat ruler, adjusting two three-dimensional micro-displacement tables (52) in the Z direction, observing the indication value of the micro-displacement sensor (27), and adjusting the supporting feet (53) at the bottom of the six-dimensional adjustment platform (5) if the indication value changes until the indication value of the micro-displacement sensor (27) keeps unchanged when moving in the vertical direction;
D. moving the guide rail sliding table (7) to enable the micro-displacement sensor (27) to be aligned with the linear two-point marking balls (42) at the starting point, observing the indication value of the micro-displacement sensor (27), and adjusting the six-dimensional adjusting platform (5) along the Z direction to enable the linear two-point marking balls (42) to move in the vertical direction until the indication value of the micro-displacement sensor (27) is adjusted to the minimum value position;
E. d, moving the guide rail sliding table (7) to enable the micro-displacement sensor (27) to be aligned with the other end of the straight line two-point marking ball (42), and repeating the operation of the step D;
F. and moving the guide rail sliding table (7) to enable the micro-displacement sensor (27) to be aligned with the linear two-point marking balls (42) at the starting point and adjust the six-dimensional adjustment platform (5) along the movement direction of the guide rail, so that the linear two-point marking balls (42) move in a small range along the movement direction of the guide rail until the micro-displacement sensor (27) shows a minimum value position.
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| CN201711214332.XA CN107727051B (en) | 2017-11-28 | 2017-11-28 | Inversion method straightness measuring device based on six-dimensional adjustment |
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| CN201711214332.XA CN107727051B (en) | 2017-11-28 | 2017-11-28 | Inversion method straightness measuring device based on six-dimensional adjustment |
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| CN107727051B true CN107727051B (en) | 2024-02-13 |
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| CN110006322B (en) * | 2019-04-25 | 2024-01-30 | 中国工程物理研究院机械制造工艺研究所 | Device and method for detecting perpendicularity between two linear axes of machine tool |
| CN112964169A (en) * | 2021-03-11 | 2021-06-15 | 中国工程物理研究院机械制造工艺研究所 | High-precision measuring device and method for straightness of cylindrical bus |
| CN113390340B (en) * | 2021-06-15 | 2022-07-22 | 中国工程物理研究院机械制造工艺研究所 | Method for detecting spatial position of spherical center of corner spherical surface in discontinuous region |
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