CN101571374A - Error detecting system of minitype high accuracy three coordinate measuring machine - Google Patents

Error detecting system of minitype high accuracy three coordinate measuring machine Download PDF

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Publication number
CN101571374A
CN101571374A CNA2009101169783A CN200910116978A CN101571374A CN 101571374 A CN101571374 A CN 101571374A CN A2009101169783 A CNA2009101169783 A CN A2009101169783A CN 200910116978 A CN200910116978 A CN 200910116978A CN 101571374 A CN101571374 A CN 101571374A
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China
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axis
axial
mirror
longitudinal edge
error
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CNA2009101169783A
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Chinese (zh)
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陈晓怀
夏瑞雪
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合肥工业大学
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Priority to CNA2009101169783A priority Critical patent/CN101571374A/en
Publication of CN101571374A publication Critical patent/CN101571374A/en

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Abstract

The invention relates to an error detecting system of a minitype high accuracy three-coordinate measuring machine, which is characterized by comprising an X/Y axis target lens, an optical transition target lens, a Z axis target lens, a vertical edge laser interferometer having optical axis being parallel to X axis direction and a transverse edge laser interferometer having optical axis being parallel to Y axis direction. The error detecting system is synchronously tested by multiple items of high accuracy geometrical error, and can realize nanoscale precision detection for the geometrical error of the three-coordinate measuring machine. Furthermore, the error detecting system has high working efficiency and simple operating way.

Description

Error detecting system of minitype high accuracy three coordinate measuring machine
Technical field
The present invention relates to a kind of error calibrating installation and method that is used for the three coordinate measuring machine of miniature high measurement accuracy.
Background technology
In order to adapt to the research demand in high hard-core technology field,, micron even nano level requirement have been proposed the components and parts machining precision along with the appearance of micro-nano continuous advancement in technology and various minute manufacturing methods.Thereby research nanoscale measuring technique becomes the most important thing of metrology and measurement field work, and in recent years, the many countries in the world all drop into a large amount of manpowers, financial resources, and development has the three coordinate measuring machine of nano-precision and volume microminiaturization.On the basis of hardware guarantee, adopt error separating technology, further the method by software compensation improves the three coordinate measuring machine precision, be a kind of effectively and the method for high performance-price ratio.Adopting the first step of error separating technology is exactly the geometric error of examining and determine out three coordinate measuring machine.Usually the calibration method that adopts has, and uses the two-frequency laser interferometer method, 22 collimation methods, the one dimension spherical column method, two-dimentional cubing method, magnetic bulb rod method, Renishaw check gauge method etc., but at the measuring accuracy height of miniature high-precision three coordinate measuring machine, the characteristic that the measurement space scope is little, these method calibration accuracies do not reach requirement, the target mirror or the cubing volume that use are excessive, quality is overweight, therefore, can not be used to the error calibrating of miniature high-precision three coordinate measuring machine.
Summary of the invention
The present invention is for avoiding existing weak point in the above-mentioned prior art, and a kind of error detecting system of minitype high accuracy three coordinate measuring machine and calibration method that is particularly suited for miniature high-precision three coordinate measuring engine measurement precision height, characteristic that the measurement space scope is little is provided.
The technical scheme that technical solution problem of the present invention is adopted is:
Error detecting system of minitype high accuracy three coordinate measuring machine of the present invention, its design feature are that system's formation comprises:
The axial target mirror of one X/Y, have minute surface and Y-axis to parallel longitudinal edge plane mirror, the minute surface horizontal edge plane mirror parallel with X axis, and the axial target microscope base of X/Y that is used to support described longitudinal edge plane mirror and horizontal edge plane mirror, the axial target microscope base of described X/Y can be placed on the copline twin shaft locating platform of three coordinate measuring machine;
One light path turnover target mirror, have the light path turning mirror and the light path turnover target microscope base that be used to support described light path turning mirror of minute surface horizontal by 45, described light path turnover target microscope base can be placed on the copline twin shaft locating platform of three coordinate measuring machine;
The axial target mirror of one Z, being suspends is provided with on the axle bottom face of Z axle axial drive system, be on the facade of the axial target microscope base of Z, minute surface and Y-axis be set respectively to parallel Z axle axial drive system longitudinal edge plane mirror and the minute surface Z axle axial drive system horizontal edge plane mirror parallel with X axis; Z axle axial drive system surface level catoptron is set on the base plane of the axial target microscope base of Z;
The longitudinal edge laser interferometer that one optical axis is parallel with X axis, described longitudinal edge laser interferometer be arranged on by longitudinal edge laser head attitude adjusting bracket be in the pedestal of copline twin shaft locating platform Y-axis to longitudinal edge on, the Z axial height of described longitudinal edge laser interferometer on described longitudinal edge laser head attitude adjusting bracket is adjustable;
One optical axis and Y-axis are to parallel horizontal edge laser interferometer, described horizontal edge laser interferometer is arranged on by horizontal edge laser head attitude adjusting bracket in the pedestal of copline twin shaft locating platform and is on the horizontal edge of X axis, and the Z axial height of described horizontal edge laser interferometer on described horizontal edge laser head attitude adjusting bracket is adjustable.
Compared with the prior art, beneficial effect of the present invention is embodied in:
1, system of the present invention can realize the calibrating of nano-precision by the synchronous verification of the multinomial geometric error of high precision for the geometric error of three coordinate measuring machine; With respect to each individual event geometric error of calibrating item by item of two-frequency laser interferometer method, the present invention has improved calibrating efficient greatly by the multinomial geometric error of synchronous verification; Then simplified verification step with respect to 22 collimation methods, simple to operate, easy to understand is grasped.
2, target mirror of the present invention is with respect to the target mirror of two-frequency laser interferometer method, and one dimension spherical column method, two dimension cubing method, magnetic bulb rod method, Renishaw check gauge methods etc. are the cubing of calibration method fast, have that volume is little, the advantage of light weight, the measurement space that meets the miniature high-precision three coordinate measuring machine is little, the actual characteristic that the worktable bearing capacity is little.
3, longitudinal edge laser interferometer (1) and horizontal edge laser interferometer are respectively that horizontal edge laser head attitude adjusting bracket by longitudinal edge laser head attitude adjusting bracket is installed on the pedestal of copline twin shaft locating platform among the present invention, can be along with the miniature high-precision three coordinate measuring machine is placed in the climatic chamber jointly, under the three coordinate measuring machine actual working environment, geometric error is examined and determine, and it is as the part of three coordinate measuring machine, need not repeated disassembled and assembled, further reduced the influence of extraneous factor thus the error verification result.
Description of drawings
Fig. 1 is copline twin shaft locating platform error calibrating principle schematic of the present invention.
Fig. 2 is copline twin shaft locating platform error calibrating structural representation of the present invention.
Fig. 3 is Z axle axial drive system error calibrating principle schematic of the present invention.
Fig. 4 is Z axle axial drive system error calibrating structural representation of the present invention.
Fig. 5 is the axial target mirror of an X/Y of the present invention structural representation.
Fig. 6 is light path turnover target mirror structural representation of the present invention.
Fig. 7 is the axial target mirror of a Z of the present invention structural representation.
Fig. 8 is a laser head attitude adjusting bracket structural representation of the present invention.
Number in the figure: 1 longitudinal edge laser interferometer, 2 longitudinal edge laser head attitude adjusting brackets, 3 horizontal edge laser interferometer, 4 horizontal edge laser head attitude adjusting brackets, 5 copline twin shaft locating platforms, 6 longitudinal edge plane mirrors, 7 horizontal edge plane mirrors, 8 pedestals, 9 crane span structures, 10 is Z axle axial drive system, 11 is the axial target mirror of X/Y, 12 light paths turnover target microscope base, 13 light path turning mirrors, 14 is Z axle axial drive system surface level catoptron, 15 is Z axle axial drive system longitudinal edge plane mirror, 16 is Z axle axial drive system horizontal edge plane mirror, 17 light paths turnover target mirror, 18 is the axial target mirror of Z, 19 is the axial target microscope base of X/Y, 20 fine setting screw thread pair a, 21 fine setting screw thread pair b, 22 fine setting screw thread pair c, 23 fine setting screw thread pair d, 24 fine setting screw thread pair e, 25 is the axial target microscope base of Z, 26 fine setting screw thread pair f, 27 fine setting screw thread pair g, 28 fine setting screw thread pair h, 29 fine setting screw thread pair i, 30 fine setting screw thread pair j, 31 translation assemblies, 32 scissor lift platforms, 33 supporting components, 34 connections tighten up assembly.
Below pass through embodiment, and the invention will be further described in conjunction with the accompanying drawings.
Embodiment
As Fig. 1, Fig. 2 and shown in Figure 5, the axial target mirror 11 of X/Y has minute surface and Y-axis to parallel longitudinal edge plane mirror 6, the minute surface horizontal edge plane mirror 7 parallel with X axis, and the axial target microscope base 19 of X/Y that is used to support longitudinal edge plane mirror 6 and horizontal edge plane mirror 7, the axial target microscope base 19 of X/Y can be placed on the copline twin shaft locating platform 5 of three coordinate measuring machine;
As Fig. 3, Fig. 4 and shown in Figure 7, light path turnover target mirror 17 has the light path turning mirror 13 and the light path turnover target microscope base 12 that be used to support light path turning mirror 13 of minute surface horizontal by 45, and light path turnover target microscope base 12 can be placed on the copline twin shaft locating platform 5 of three coordinate measuring machine;
As Fig. 2, Fig. 4 and shown in Figure 7, the axial target mirror 18 of Z is on the facade of the axial target microscope base 25 of Z, minute surface and Y-axis are set to parallel Z axle axial drive system longitudinal edge plane mirror 15 respectively, and the minute surface Z axle axial drive system horizontal edge plane mirror 16 parallel with X axis; Z axle axial drive system surface level catoptron 14 is set on the base plane of the axial target microscope base 25 of Z; In Fig. 3, the three coordinate measuring machine shown in Figure 4, Z axle axial drive system 10 is the tops that are positioned at crane span structure 9, and crane span structure 9 is arranged on the pedestal 8.
As shown in Figure 1 and Figure 2, the optical axis longitudinal edge laser interferometer 1 parallel with X axis be arranged on by longitudinal edge laser head attitude adjusting bracket 2 be in the pedestal 8 of copline twin shaft locating platform Y-axis to longitudinal edge on, the Z axial height of longitudinal edge laser interferometer 1 on longitudinal edge laser head attitude adjusting bracket 2 is adjustable; Optical axis and Y-axis are on the horizontal edge of X axis to parallel horizontal edge laser interferometer 3 is arranged on the pedestal 8 of copline twin shaft locating platform by horizontal edge laser head attitude adjusting bracket 4 in, and the Z axial height of horizontal edge laser interferometer 3 on horizontal edge laser head attitude adjusting bracket 4 is adjustable;
The corresponding structure form also comprises in concrete the enforcement:
Longitudinal edge laser interferometer 1 and horizontal edge laser interferometer 3 adopt three light beam miniature laser interferometer SP2000, its linear measure longimetry resolution 1.24nm, 0.01 rad of measurement of angle resolution.
The target mirror adopts small-sized scalable composite design, uses the small-sized plane catoptron and the fine setting screw thread pair of high manufacturing accuracy, and the target microscope base of aluminum alloy material; As shown in Figure 5, in the axial target mirror 11 of X/Y, the axial target microscope base 19 of X/Y of aluminum alloy material is set at longitudinal edge plane mirror 6 and horizontal edge plane mirror 7, adopt fine setting screw thread pair structure, comprise fine setting screw thread pair a 20 and fine setting screw thread pair b 21 are set, to realize the inching of the relative position between plane mirror and the laser beam; Shown in Figure 6, be with of the adjustment of fine setting screw thread pair structure realization light path turning mirror 13 equally in the light path turnover target mirror 17, comprise fine setting screw thread pair c 22, fine setting screw thread pair d 23 and fine setting screw thread pair e24, laser optical path transferred 90 ° by light path turning mirror 13 with the relative position of laser beam.
As shown in Figure 8, adopt scissor lift platform structure at laser head attitude adjusting bracket, translation assembly 31, supporting component 33 are set and are connected and tighten up assembly 34, regulate and respectively finely tune screw thread pair f 26, fine setting screw thread pair g 27, fine setting screw thread pair h 28, fine setting screw thread pair i 29 and fine setting screw thread pair j 30, and by of the adjusting of scissor lift platform, to satisfy the calibrating requirement to laser head attitude realization beat, pitching, translation and lifting.
Present embodiment adopts the multinomial geometric error synchronous verification of high precision, use three beam plane mirror miniature laser interferometers of nano-precision, in conjunction with corresponding target mirror, respectively the copline twin shaft locating platform of miniature high-precision three coordinate measuring machine and the geometric error of Z axle axial drive system are examined and determine, but the multinomial geometric error of synchronous verification once comprises:
As Fig. 3, Fig. 4, Fig. 6 and shown in Figure 7, use longitudinal edge laser interferometer 1, horizontal edge laser interferometer 3, light path turnover target mirror 17 and the axial target mirror 18 of Z respectively the Z axial location sum of errors straightness error of Z axle axial drive system 10 to be examined and determine.When carrying out the straightness error calibrating, regulate the scissor lift platform of laser head attitude adjusting bracket shown in Figure 8, make laser beam can inject Z axle axial drive system longitudinal edge plane mirror 15 and Z axle axial drive system horizontal edge plane mirror 16 respectively.
Utilize the present embodiment error detecting system of minitype high accuracy three coordinate measuring machine to realize that the method for miniature high-precision three coordinate measuring machine error calibrating comprises:
The positioning error of X axis in the copline twin shaft locating platform 5:
The X axis positioning error is that the error of indication by two dimensional surface grating chi causes, the displacement measurement of longitudinal edge laser interferometer 1 and the indicating value of two dimensional surface grating chi are compared, and draws X axis positioning error δ x(x).
As Fig. 1, Fig. 2, Fig. 5, shown in Figure 8, at first use the high precision right-angle prism, its two right angles face is coated with reflectance coating, pass through anchor clamps, be fixed in the center of copline twin shaft locating platform 5, regulate and respectively to finely tune screw thread pair on the laser head attitude adjusting bracket, observe with oscillograph that laser interferometer is connected in figure, make the laser beam of laser interferometer be parallel to 5 incidents of copline twin shaft locating platform, and vertical mutually.By anchor clamps the axial target mirror of X/Y is fixed in copline twin shaft locating platform 5 then; In like manner, make longitudinal edge plane mirror 6 vertical with the laser beam of longitudinal edge laser interferometer 1 by regulating the fine setting screw thread pair, the reflection back forms the interferometry loop.Adjust the measurement light path in the range ability, drive copline twin shaft locating platform 5 with the piezoelectric ceramic actuator in the three coordinate measuring machine and move, drive the axial target mirror of X/Y position thus and change, read the displacement measurement in the longitudinal edge laser interferometer 1.
When X axis is measured, need equidistantly to drive Y-axis to piezoelectric ceramic actuator, plane double shaft locating platform 5 is stopped at the diverse location place that Y-axis makes progress.When placing the diverse location place, equidistantly drive the X axis piezoelectric ceramic actuator, in range ability, come and go to measure, write down the displacement measurement of longitudinal edge laser interferometer 1 of each target location and the indicating value of two dimensional surface grating chi, 3~5 groups of duplicate measurementss, average calculated difference.When being stopped at the diverse location place that Y-axis makes progress according to plane double shaft locating platform 5, the X axis of gained is respectively organized positioning error, realize the equidistant discrete sampling in plane at X axis, use the bicubic spline method of interpolation that sampled point is carried out the curved surface interpolation fitting, draw toroidal function, be the X axis positioning error δ that examines and determine out x(x).
In like manner, can examine and determine Y-axis to positioning error δ y(y).
Though take the copline design in the present embodiment, between the portrayal face of copline twin shaft locating platform 5 and two dimensional surface grating chi, have the Abbe distance, so need examine and determine to the axial angle of pitch of X/Y and deflection angle error.The three beams of laser bundle perforation hole of the miniature laser interferometer SP2000 that adopts in the present embodiment triangle that meets at right angles distributes, when carrying out displacement measurement, by formula θ=arctan[(L A-L B)/L AB] (L in the formula AAnd L BBe respectively the displacement measurement of two bundle laser beam, L ABBe two bundle laser beam the perforation hole hole heart apart from), calculate respectively up and down and about two bundle laser beam, can carry out angular metric and measure.So when the X axis positioning error is examined and determine, but synchronous verification X axis angle of pitch sum of errors deflection angle error by the corresponding angle of pitch and deflection angle numerical value display window are set in Survey Software INFASNTC, can read synchronously.
With X axis positioning error calibration method, draw toroidal function, be the X axis angle of pitch error ε that examines and determine out y(x) and deflection angle error ε z(x).
In like manner, can examine and determine Y-axis to angle of pitch error ε x(y) and deflection angle error ε z(y).
The X-motion of copline twin shaft locating platform 5 will cause Y-axis to guide rail line value error.Adopt two laser interferometer simultaneously, examine and determine when axial changing copline twin shaft locating platform error on the one hand, can avoid repeatedly laser head being carried out dismounting, and light path is adjusted, can realize that on the other hand high precision synchronous measures.As shown in Figure 1 and Figure 2, when longitudinal edge laser interferometer 2 positioned error, the calibrating of angle of pitch sum of errors deflection angle error, horizontal edge laser interferometer 3 can be carried out the straightness error calibrating synchronously, and vice versa.
Carry out geometric error when calibrating on X axis, in range ability, write down the displacement measurement of horizontal edge laser interferometer 3 on the Y direction of each target location simultaneously, 3~5 groups of duplicate measurementss are averaged.In theory, the laser beam of horizontal edge laser interferometer 3 is vertical with horizontal edge plane mirror 7, but owing to there is angular error inevitably, carries out least square linear fit so need that gained is respectively organized measured value, and getting corresponding difference is straightness error.
With X axis positioning error calibration method, draw toroidal function, be the X axis straightness error δ that examines and determine out y(x).
In like manner, can examine and determine Y-axis to straightness error δ x(y).
Z axial location error in the present embodiment is that the error of indication by the one-dimensional grating chi causes, the displacement measurement of longitudinal edge laser interferometer 1 and the indicating value of one-dimensional grating chi are compared, and draws the axial positioning error δ of Z z(z).
As Fig. 3, Fig. 4, Fig. 6, shown in Figure 7, after using the high precision right-angle prism that laser head attitude adjusting bracket position is edited, pass through anchor clamps, the light path target mirror 17 of transferring is fixed in the center of copline twin shaft locating platform 5, the table top of the minute surface of its light path turning mirror 13 and central task platform 5 angle at 45, with 90 ° of laser optical path turnovers, the Z axle axial drive system surface level catoptron 14 of the axial target mirror of incident Z, the reflection back forms the interferometry loop.Adjust the measurement light path in the range ability,, drive the axial target mirror of Z position and change,, read displacement measurement by Survey Software INFASNTC by moving of Z axle axial drive system.
Equidistantly drive the piezoelectric ceramic actuator of Z axle axial drive system, in range ability, come and go and measure, the displacement measurement of record longitudinal edge laser interferometer 1 and the indicating value of one-dimensional grating chi, calculated difference is averaged in 3~5 groups of duplicate measurementss.According to the Z axial location error of calculating gained, axially realize equidistant discrete sampling at Z, use cubic spline interpolation that sampled point is carried out the curve interpolation fitting, draw curvilinear function, be the Z axial location error delta of examining and determine out z(z).
As Fig. 3, Fig. 4 and shown in Figure 7, drive the motion of Z axial guidance by piezoelectric ceramic actuator, will be in X and Y-axis to causing straightness error.The axial target mirror 18 of Z is fixed in the position that is used for installing the three coordinate measuring machine laser feeler in the Z axle axial drive system 10; Regulate the scissor lift platform in the laser head attitude adjusting bracket, make the beam of laser bundle difference incident Z axle axial drive system longitudinal edge plane mirror 15 of longitudinal edge laser interferometer 1 and horizontal edge laser interferometer 3 and Z axle axial drive system horizontal edge plane mirror 16 reflection backs form the interferometry loop.Adjust the measurement light path in the range ability,, drive the axial target mirror of Z position and change,, draw curvilinear function with Z axial location error calibration method by moving of Z axle axial drive system, can the axial straightness error δ of synchronous verification Z x(z) and δ y(z).
Present embodiment is that the miniature high-precision three coordinate measuring machine is considered as rigid model, its multinomial geometric error is examined and determine, and according to its design characteristics, make hypothesis, ignores some geometric error items, thinks that their relative influence is less, puts aside.Comprise: the motion of the X axis guide rail of copline twin shaft locating platform 5, also will cause Y-axis to roll error, but because the conventional magnetic suspended guide that uses, can think its roll error ε x(x) influence is less relatively; In like manner, put aside ε y(y).Owing to adopt the setting that separates of Z axle axial drive system and copline twin shaft locating platform, according to the platform motion characteristic, X and Y-axis to motion, at the axial straightness error δ of Z z(x), δ z(y) can put aside.In Z axle axial drive system, piezoelectric ceramic actuator drives the motion of Z axial guidance, also will be in X and Y-axis to causing roll error, because motion vertically, so roll error ε z(z) influence is less relatively.Because the design of Z axle axial drive system meets abbe ' s principle, then think its angular motion error ε x(z), ε y(z) influence is less relatively.In addition, according to above-mentioned calibrating, can examine and determine three axial error of perpendicularity a indirectly by Calculation Method to X, Y and the axial straightness error of Z Xy, a XzAnd a Yz

Claims (1)

1, error detecting system of minitype high accuracy three coordinate measuring machine is characterized in that system's formation comprises:
The axial target mirror of one X/Y (11), have minute surface and Y-axis to parallel longitudinal edge plane mirror (6), the minute surface horizontal edge plane mirror (7) parallel with X axis, and the axial target microscope base of X/Y (19) that is used to support described longitudinal edge plane mirror (6) and horizontal edge plane mirror (7), the axial target microscope base of described X/Y (19) can be placed on the copline twin shaft locating platform (5) of three coordinate measuring machine;
One light path turnover target mirror (17), have minute surface horizontal by the light path turning mirror (13) of 45 be used to support the light path turnover target microscope base (12) of described light path turning mirror (13), described light path turnover target microscope base (12) can be placed on the copline twin shaft locating platform (5) of three coordinate measuring machine;
The axial target mirror of one Z (18), being suspends is provided with on the axle bottom face of Z axle axial drive system (10), be on the facade of the axial target microscope base of Z (25), minute surface and Y-axis be set respectively to parallel Z axle axial drive system longitudinal edge plane mirror (15) and the minute surface Z axle axial drive system horizontal edge plane mirror (16) parallel with X axis; Z axle axial drive system surface level catoptron (14) is set on the base plane of the axial target microscope base of Z (25);
The longitudinal edge laser interferometer (1) that one optical axis is parallel with X axis, described longitudinal edge laser interferometer (1) be arranged on by longitudinal edge laser head attitude adjusting bracket (2) be in the pedestal (8) of copline twin shaft locating platform Y-axis to longitudinal edge on, the Z axial height of described longitudinal edge laser interferometer (1) on described longitudinal edge laser head attitude adjusting bracket (2) is adjustable;
One optical axis and Y-axis are to parallel horizontal edge laser interferometer (3), described horizontal edge laser interferometer (3) is arranged on by horizontal edge laser head attitude adjusting bracket (4) in the pedestal (8) of copline twin shaft locating platform and is on the horizontal edge of X axis, and the Z axial height of described horizontal edge laser interferometer (3) on described horizontal edge laser head attitude adjusting bracket (4) is adjustable.
CNA2009101169783A 2009-06-15 2009-06-15 Error detecting system of minitype high accuracy three coordinate measuring machine CN101571374A (en)

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101982726A (en) * 2010-09-27 2011-03-02 上海交通大学 Method for detecting geometrical motion error of triaxial numerical control equipment
CN102506702A (en) * 2011-09-29 2012-06-20 天津大学 Large three-dimensional coordinate measuring method with laser tracking and device
CN106247997A (en) * 2016-08-09 2016-12-21 中国人民解放军国防科学技术大学 Error of perpendicularity method for orthogonal guide rail platform
CN107806825A (en) * 2017-09-29 2018-03-16 西安交通大学 The line lathe space geometry error measure discrimination method of three face five based on plane grating
CN108890139A (en) * 2018-07-11 2018-11-27 西安交通大学 A kind of femtosecond laser dot matrix marking method based on anti-reflection microstructure
CN109513947A (en) * 2019-01-10 2019-03-26 江阴普洋法兰有限公司 A kind of processing technology of the large-sized flange with conical surface sealing structure
CN109732402A (en) * 2019-03-14 2019-05-10 西安交通大学 Multi-thread lathe space geometry error measure discrimination method based on laser interferometer
CN110030922A (en) * 2018-01-11 2019-07-19 大族激光科技产业集团股份有限公司 A kind of Multipoint synchronous measurement method and measuring system and storage medium

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101982726A (en) * 2010-09-27 2011-03-02 上海交通大学 Method for detecting geometrical motion error of triaxial numerical control equipment
CN102506702A (en) * 2011-09-29 2012-06-20 天津大学 Large three-dimensional coordinate measuring method with laser tracking and device
CN102506702B (en) * 2011-09-29 2013-12-11 天津大学 Large three-dimensional coordinate measuring method with laser tracking and device
CN106247997A (en) * 2016-08-09 2016-12-21 中国人民解放军国防科学技术大学 Error of perpendicularity method for orthogonal guide rail platform
CN106247997B (en) * 2016-08-09 2018-12-28 中国人民解放军国防科学技术大学 Error of perpendicularity method for orthogonal guide rail platform
CN107806825A (en) * 2017-09-29 2018-03-16 西安交通大学 The line lathe space geometry error measure discrimination method of three face five based on plane grating
CN107806825B (en) * 2017-09-29 2019-04-09 西安交通大学 Three faces, five line lathe space geometry error measure discrimination method based on plane grating
CN110030922A (en) * 2018-01-11 2019-07-19 大族激光科技产业集团股份有限公司 A kind of Multipoint synchronous measurement method and measuring system and storage medium
CN108890139A (en) * 2018-07-11 2018-11-27 西安交通大学 A kind of femtosecond laser dot matrix marking method based on anti-reflection microstructure
CN109513947A (en) * 2019-01-10 2019-03-26 江阴普洋法兰有限公司 A kind of processing technology of the large-sized flange with conical surface sealing structure
CN109732402A (en) * 2019-03-14 2019-05-10 西安交通大学 Multi-thread lathe space geometry error measure discrimination method based on laser interferometer

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