CN2121676U - Three dimensional capacitor test tip for measure three coordinate measuring machine error - Google Patents
Three dimensional capacitor test tip for measure three coordinate measuring machine error Download PDFInfo
- Publication number
- CN2121676U CN2121676U CN 92200014 CN92200014U CN2121676U CN 2121676 U CN2121676 U CN 2121676U CN 92200014 CN92200014 CN 92200014 CN 92200014 U CN92200014 U CN 92200014U CN 2121676 U CN2121676 U CN 2121676U
- Authority
- CN
- China
- Prior art keywords
- coordinate
- measuring
- measure
- gauge head
- ball
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The utility model relates to a three-dimensional capacitance measuring head for measuring the mechanism error of a three coordinate machine, which belongs to the technical field of length metering and measure. The three-dimensional capacitance measuring head for measuring the mechanism error of a three coordinate machine is characterized in that the central normals of the measuring surfaces of three capacitance measuring heads which are fixed to the same rigid support are mutually perpendicular two by two and are crossed on the same point; the distances among the crossed point and the three measuring surfaces are equal. The three-dimensional capacitance measuring head for measuring the mechanism error of a three coordinate machine has the characteristics of high precise and noncontact measure. The coordinate values of three coordinate directions of a ball can be read out synchronously when the three dimensionalcapacitance measuring head and some ball in a standard ball array are aimed and positioned. The utility model can measure the 21 mechanism errors of the three coordinate machine under the condition that the utility model and a one-dimensional ball column are used together. The utility model is suitable for being used for any form of three coordinate machines.
Description
The utility model belongs to length metering and technical field of measurement and test.
Three coordinate machines are meant the lathe or the instrument of motion guide rail, precision length measurement system and coordinate display system with three mutually perpendicular directions, comprise three-coordinate measuring machine, numerically-controlled machine and jig borer etc.Three coordinate machine work spaces arbitrarily any composition error are structurally mainly comprehensively formed by 21 mechanism errors of this point.21 composition errors comprise three three axial site errors, six straightness errors, nine angular motion errors and three error of perpendicularitys, and the relative composition error between any 2 of the space also mainly is comprehensively to be formed by corresponding 2 21 mechanism errors locating.
In each class methods of measuring the three-coordinate measuring machine mechanism error, the one class fixed sturcture tactical deployment of troops is arranged, promptly form and have the lattice structure of constant spacing as the space length standard with two or more point, its mid point can come imbody with the centre of sphere of ball, this fixed sturcture is called the standard spherical array again, phase mutual edge distance of each centre of sphere is measured by other high precision instrument on it, on three-coordinate measuring machine, measure each ball and calculate each ball sphere center position and measuring distance each other with gauge head, with corresponding standard apart from the relative composition error that relatively can try to achieve between the respective point.
Measure the gauge head that each ball now uses on the spherical array two classes are arranged, one class is hard gauge head, another kind of is soft gauge head, (see The American Society of Mechanical Engineers, Proposed Standard for Performance Evaluation of Coordinate Measuring Machines, 1983), hard gauge head comprises the three-equilateral gauge head, female cone gauge head and magnetic ball seat etc., this class gauge head only is used for the manually operated measuring machine that floats, because of contact force is bigger, makes distortion inaccuracy bigger, but can obtain three coordinate values of the centre of sphere simultaneously with a contact measurement of ball.Soft gauge head comprises switch gauge head, proportion expression gauge head and zero-bit gauge head etc., and the contact force of this class gauge head and ball is very little, the measuring accuracy height, be applicable to all kinds of measuring machines, but need to measure the point more than four on the ball, calculate three coordinate values of the centre of sphere then, so efficiency of measurement is lower.
The purpose of this utility model is to develop a kind of novel gauge head, on measuring spherical array in the process of each centre of sphere coordinate, it had both had the characteristics that hard gauge head one-shot measurement can obtain three coordinate values of the centre of sphere simultaneously, had again and soft gauge head advantage of high precision, and was applicable to three coordinate machines of any pattern.
Fig. 1 is the device sketch of three-dimensional capacitance gauge head.
The technical solution of the utility model as shown in Figure 1.Wherein (1) is rigid support, and (2) are universal plane electric capacity, and (3) and (4) are " L " shape electric capacity gauge heads.The measurement face of said electric capacity gauge head (2), (3) and (4) often is that the centre normal of these three circular flats of circular flat is vertical mutually in twos, and can meet at a bit, these three circular flats equate with the distance of intersection point respectively, electric capacity gauge head (2), (3) and (4) are installed on the rigid support (1), and it is fixing to adjust the back according to the mutual alignment.The output terminal of electric capacity gauge head (2), (3) and (4) is linked by three input ends of shielded conductor and capacitance gage respectively.
When the utility model is used to measure three coordinate machine mechanism errors, all be installed on the measuring head base of three coordinate machines, can move with measuring head base.(base of tool of numerically-controlled machine and jig borer is called measuring head base at this moment).The standard spherical array places on the worktable of three coordinate machines, adjust the position, make three indicating value zero clearings of three coordinate machines dial gauge the time with first ball aiming location, when measuring machine moves to the normal place of other each ball, by reading three readings on the dial gauge, obtain each ball relative error of first ball relatively.
Fig. 2 is the one dimension spherical column synoptic diagram.
The utility model uses 21 mechanism errors of the three coordinate machines that can measure with one dimension spherical column.One dimension spherical column is meant the standard spherical array that the centre of sphere of all balls all is located on the same line, as shown in Figure 2.The three-dimensional capacitance gauge head is installed on the measuring head base of three coordinate machines, one dimension spherical column places on the worktable, adjust the position, behind three-dimensional capacitance dial gauge and first ball aiming location,, when moving to by other normal place of one dimension spherical column decision, gauge head obtains error amount by reading on the dial gauge with the dial gauge zero clearing.One dimension spherical column ball column direction u to sphere gap and the deviation δ u of standard nominal distance measure by two-frequency laser interferometer, the centre of sphere of each ball perpendicular to the V of ball column direction to W to straightness error δ V and δ W, a certainly in the measuring machine upper edge axially calculate by twice measurement before and after 180 ° of counter-rotatings.One dimension spherical column is placed three axis directions of three coordinate machine coordinate systems respectively, can obtain three axial site errors and straightness error by measuring; With one dimension spherical column respectively along vertical axis direction translation one segment distance, (according to the requirement of the error composite formula of tested three-coordinate measuring machine, some situation between measuring head base and three-dimensional capacitance gauge head, need to add one with the horizontal extension bar of a certain axially parallel), measure respectively then and obtain corresponding error amount, corresponding error amount subtracts each other divided by translation distance (when adding extension rod divided by extension rod length) again before and after the every pair of translation like this, can obtain the angular motion error of measuring machine; One dimension spherical column is not placed along three diagonal positions of measuring basal plane in the coordinate system respectively, can be measured and calculate three error of perpendicularitys, concrete measurements and calculations process must be according to the pattern and the decision of error composite formula of tested three coordinate machines.
The utility model is compared with existing other gauge head, and its characteristics are:
1. capacitance gage is better than the high precision of 0.1 μ m and the characteristic of non-cpntact measurement has determined the utlity model has very high measuring accuracy.
2. one-shot measurement can obtain three coordinate values of the centre of sphere simultaneously, so have higher efficiency of measurement.
3. also use 21 mechanism errors of the three coordinate machines of can completely measuring accurately with one dimension spherical column.
4. be applicable to three coordinate machines of any pattern.
Claims (1)
1, be used to measure the three-dimensional capacitance gauge head of three coordinate machine mechanism errors, it is characterized in that it is by rigid support (1), universal plane electric capacity (2), " L " shape electric capacity gauge head (3) and (4) are formed, said electric capacity gauge head (2), (3) and the measurement face of (4) often be circular flat, the centre normal of these three circular flats is vertical mutually in twos, and meet at a bit, these three circular flats equate with the distance of intersection point respectively, electric capacity gauge head (2), (3) and (4) be installed on the rigid support (1) electric capacity gauge head (2), (3) and the output terminal of (4) link by three input ends of shielded conductor and capacitance gage respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 92200014 CN2121676U (en) | 1992-01-03 | 1992-01-03 | Three dimensional capacitor test tip for measure three coordinate measuring machine error |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 92200014 CN2121676U (en) | 1992-01-03 | 1992-01-03 | Three dimensional capacitor test tip for measure three coordinate measuring machine error |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2121676U true CN2121676U (en) | 1992-11-11 |
Family
ID=4947358
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 92200014 Granted CN2121676U (en) | 1992-01-03 | 1992-01-03 | Three dimensional capacitor test tip for measure three coordinate measuring machine error |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2121676U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105783816A (en) * | 2016-05-19 | 2016-07-20 | 杭州电子科技大学 | Three-coordinate measuring method capable of automatically identifying radius compensation direction |
| CN107727051A (en) * | 2017-11-28 | 2018-02-23 | 中国工程物理研究院机械制造工艺研究所 | A kind of reversal process linearity measurer based on 6 DOF adjustment |
-
1992
- 1992-01-03 CN CN 92200014 patent/CN2121676U/en active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105783816A (en) * | 2016-05-19 | 2016-07-20 | 杭州电子科技大学 | Three-coordinate measuring method capable of automatically identifying radius compensation direction |
| CN105783816B (en) * | 2016-05-19 | 2018-08-10 | 杭州电子科技大学 | The three-coordinate measuring method in automatic identification radius compensation direction |
| CN107727051A (en) * | 2017-11-28 | 2018-02-23 | 中国工程物理研究院机械制造工艺研究所 | A kind of reversal process linearity measurer based on 6 DOF adjustment |
| CN107727051B (en) * | 2017-11-28 | 2024-02-13 | 中国工程物理研究院机械制造工艺研究所 | Inversion method straightness measuring device based on six-dimensional adjustment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5832416A (en) | Calibration system for coordinate measuring machine | |
| EP1225423B1 (en) | Method for evaluating measurement error in coordinate measuring machine and gauge for coordinate measuring machine | |
| US4261107A (en) | Coordinate locating device | |
| CN100595513C (en) | Cylinder diameter and form and position error integrated measuring apparatus | |
| CN109839047A (en) | A kind of piece surface hole site and center are away from dimension detection tool | |
| CN101419044B (en) | Micron-nano grade three-dimensional measurement '331' system and measurement method thereof | |
| CN102278957A (en) | Positioning and measuring tool and method for guide rail of high-accuracy and long-distance machine tool | |
| CN113523901A (en) | Precision detection method for five-axis machine tool | |
| CN109839049B (en) | Quick and simple dovetail groove guide rail size measuring device | |
| CN201145553Y (en) | Adjustable hole center distance measuring ruler | |
| CN207742559U (en) | The full degree of freedom accuracy detecting device of lathe linear motion run mode | |
| CN102012211A (en) | Three pairs of sliding pair-spherical hinge-spherical hinge (3-PSS) mechanism-based coordinate measuring machine | |
| CN115979118B (en) | Device and method for measuring verticality error and error azimuth angle of cylindrical part | |
| CN108153234A (en) | The full degree of freedom accuracy detecting device of lathe linear motion run mode | |
| CN111664804A (en) | High-precision three-dimensional profile scanning and measuring platform based on glass guide rail | |
| CN106247927A (en) | A kind of negative cruvature ruled surface measuring device for surface roughness and method | |
| CN201828245U (en) | Numerical control machine tool form and position error precision measuring device based on LabVIEW (laboratory virtual instrument engineering workbench) software | |
| CN218698994U (en) | Mechanical arm calibration and motion precision detection assembly | |
| CN110864624A (en) | One-machine dual-purpose measuring instrument | |
| CN2121676U (en) | Three dimensional capacitor test tip for measure three coordinate measuring machine error | |
| Knapp et al. | Testing the contouring performance in 6 degrees of freedom | |
| CN201037760Y (en) | Measuring tool for hole | |
| CN113513986B (en) | Geometric tolerance measuring device and measuring method thereof | |
| CN105606014A (en) | Test apparatus of inductance scan probe, and test method | |
| CN201858964U (en) | Coordinate measuring machine based on 3-PSS mechanism |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |