CN105783816B - The three-coordinate measuring method in automatic identification radius compensation direction - Google Patents
The three-coordinate measuring method in automatic identification radius compensation direction Download PDFInfo
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- CN105783816B CN105783816B CN201610334296.XA CN201610334296A CN105783816B CN 105783816 B CN105783816 B CN 105783816B CN 201610334296 A CN201610334296 A CN 201610334296A CN 105783816 B CN105783816 B CN 105783816B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
Abstract
The invention discloses the three-coordinate measuring methods in automatic identification radius compensation direction.Existing radius compensation method is required for largely calculating.The specific steps of the present invention：Uniformly it is covered with the minimum capacitor plate of area with micro-array on gauge head, the shape of single pole plate is equilateral triangle or square；Pumping signal is applied to the capacitor plate array on gauge head, when gauge head is close to metal measured object, metal measured object and there is the capacitor plate of facing area to form a pair of plates capacitor, generate capacitance, different size of facing area will produce different size of capacitance simultaneously, contact point position, and then automatic identification radius compensation direction can be calculated according to the pole plate for generating capacitance and the size for generating capacitance.The present invention directly takes the maximum capacitor plate of output capacitance value to carry out radius compensation as contact point, need not calculate when required precision is not high；When required precision is higher, by calculating the anti-exact position for pushing away contact point.
Description
Technical field
The invention belongs to three coordinate measuring machine technical fields, and in particular to a kind of to be covered with capacitor plate with micro-array
Three coordinate measuring machine radius compensation measurement method, can automatic identification radius compensation normal direction.
Background technology
Three coordinate measuring machine is widely used in the complex parts almost T-stable inspection of the fields such as machinery, electronics, automobile and aerospace
It surveys, the detection content being related to includes the size, shape and mutual alignment relation of part.Due to versatile, measurement range
Greatly, precision is high, efficient, performance is good, can be connected with flexible manufacturing system, has been referred to as " measuring center " of complex parts.
Its measuring principle is first to convert the measurement of various geometric elements to the survey of some point set coordinate positions on these geometric elements
Amount.After the coordinate position for measuring these points, then the geometric element of requirement is calculated by algorithm software by certain assessment criteria
Size, shape, relative position etc..
The precision of three coordinate measuring machine and efficiency (measuring speed) depend primarily on mechanical structure, control system, gauge head and
Software systems etc..When three coordinate measuring machine measures operation using contact measuring head, because spheric probe exists centainly
Radius, the track of the gauge head centre of sphere and the actual profile of measured object are inconsistent, need to carry out on the basis of measurement result
Radius compensation.But the contact point pair of gauge head and measured object is unknown for measuring machine algorithm software, if cannot be calibrated
Really know contact point, radius compensation error will be generated, influence measurement accuracy.
Existing radius compensation method can substantially be divided into two-dimentional penalty method and three-dimensional penalty method.Because at two-dimentional penalty method
Reason is simple, and processing speed is fast, so being widely used at present, the representative method of two-dimentional penalty method is 3 points of concyclic methods.But
Two-dimentional penalty method will produce bigger error when measuring Irregular Boundary Surface, so on the basis of two-dimentional penalty method, it is domestic
Method arrow of the outer scholar for curved surface in measurement point propose three-dimensional penalty method, and the main method that represents has planar process, vector
Iterate method and the direct method of measurement etc..But either two-dimentional penalty method or three-dimensional penalty method, are required for when in use
It is a large amount of to calculate, obtain the normal direction of the gauge head and measured object contact point of three coordinate measuring machine.
In order to solve drawbacks described above, H.Aoyama et al. proposes a kind of method for metal measured object, on gauge head
Four measurement points are uniformly taken on a certain longitude, when gauge head is contacted with metal measured object, four measurement points will be measured
Different potential difference, according to four anti-positions for releasing contact point of different potential difference numerical value.The precision of the measurement method has
0.2 °, but the measurement method needs gauge head to be contacted with measured object, and it is counter push away contacting points position when need to carry out it is a large amount of
Calculating.
Invention content
The deficiency that the purpose of the present invention is can not accurately be obtained for existing CMM Probe Radius Compensation direction,
The gauge head of three coordinate measuring machine is improved, makes gauge head when close to metal measured object it is known that gauge head and metal quilt
The position of the contact point of object is surveyed, error compensation then is carried out to measurement result.Specifically, microarray is exactly used on gauge head
Mode be uniformly covered with the minimum capacitor plate of area, the shape of single pole plate is equilateral triangle or square.To on gauge head
Capacitor plate array applies pumping signal (energisation mode that can refer to capacitance sensor), when gauge head is close to metal measured object
When, metal measured object and there is the capacitor plate of facing area that will form a pair of plates capacitor, generates capacitance, while different
The facing area of size will produce different size of capacitance, can be counted according to the pole plate for generating capacitance and the size for generating capacitance
Calculate contact point position.
The present invention is as follows：
Step 1: being uniformly covered with capacitor plate in the measurement head of three coordinate measuring machine with array way, and record respectively
Each position of the capacitor plate in measurement head.Capacitor plate shape is square or equilateral triangle.
Step 2: the capacitance of capacity cell calculates.Each capacitor plate is respectively formed with metal measured object in measurement head
One capacity cell；Capacitor plate in measurement head is denoted as G, the value of area S is less than 100 μm2.Capacitor plate G is thrown
It is electric to form projection to capacitor plate G excessively and on the faces that section is parallel at the projection on metal measured object capacitor plate G for shadow
Hold pole plate G '；The area for projecting capacitor plate G ' is Scos θ, wherein θ is the angle of capacitor plate G and projection capacitor plate G '.
It can be obtained according to capacitance calculation formula：Wherein, d indicates projection capacitor plate G ' and capacitor plate G in metal
The gap of section at projection on measured object, ε indicate dielectric constant.
Step 3: judging the contacting points position of measurement head and metal measured object.The capacitor plate used is equilateral triangle
When, when measurement head is contacted with metal measured object, position of the contact point in measurement head will be there are three types of situation：It falls positive three
On the vertex of angular capacitor plate, falls on three arms of angle of equilateral triangle capacitor plate, fall in equilateral triangle capacitor plate.Root
According to the calculation formula of capacitance, these three positions are differentiated by the capacitance output valve of capacitor plate：If the capacitance of capacitor plate is defeated
Go out value there are six value it is identical and all be maximum value, then contact point fall on the vertex of equilateral triangle capacitor plate；If capacitor plate
Capacitance output valve there are two be worth it is identical and all be maximum value, then contact point fall on three arms of angle of equilateral triangle capacitor plate；
If the capacitance output valve of capacitor plate is only there are one maximum value, contact point is fallen in equilateral triangle capacitor plate.Capacitor plate
When being square, position of the contact point in measurement head also will be there are three types of situation：It falls on the vertex of square capacitor plate,
It falls on the side of square capacitor plate, falls in square capacitor plate.According to the calculation formula of capacitance, pass through capacitance pole
The capacitance output valve of plate differentiates these three positions：If the capacitance output valve of capacitor plate is identical there are four value and is all maximum value,
Then contact point is fallen on the vertex of square capacitor plate；If there are two be worth identical and be all most for the capacitance output valve of capacitor plate
Big value, then contact point is fallen on the side of square capacitor plate；If maximum value that there are one the capacitance output valves of capacitor plate,
Contact point is fallen in square capacitor plate.In this way after capacitor plate has capacitance output, according to the capacitance pole for generating capacitance
Board position and generate capacitance size can butt contact position judged only have for the capacitance output valve of capacitor plate
The case where one maximum value, can directly determine the position of contact point, and then automatic identification radius compensation direction.
When butt contact position is judged, without analyzing each capacitor plate for having capacitance output valve, only
The shape according to capacitor plate and required precision are needed, the capacitor plate for taking several capacitance output valves larger is analyzed.
The beneficial effects of the invention are as follows：
1, the present invention directly takes the maximum capacitor plate of output capacitance value to be carried out as contact point when required precision is not high
Radius compensation need not calculate.
2, the present invention, can be by some calculating come the anti-exact position for releasing contact point, completely when required precision is higher
The high-precision requirement of foot.
As long as 3, the mode of microarray of the invention is covered with the minimum capacitance pole of area on the gauge head of three coordinate measuring machine
Plate, does not influence the structure of existing three coordinate measuring machine, it can be achieved that property is strong, simple in structure.
Description of the drawings
Fig. 1 is covered with the schematic diagram of capacitor plate by the way of array in the measurement head for the present invention；
Fig. 2 is measurement head in the present invention close to the schematic diagram of metal measured object.
Fig. 3 is covered with the partial enlarged view of square capacitor plate in the measurement head for the present invention；
Fig. 4 is the schematic diagram that capacitor plate forms capacity cell with metal measured object in the present invention；
Fig. 5 is position classification schematic diagram of the contact point in measurement head in adjacent six pieces of equilateral triangle capacitor plates.
Fig. 6 is position classification schematic diagram of the contact point in measurement head in adjacent four pieces square capacitor plates.
Specific implementation mode
The invention will be further described with reference to the accompanying drawings and embodiments.
The three-coordinate measuring method in automatic identification radius compensation direction, is as follows：
Step 1: as shown in Figure 1, be uniformly covered with capacitor plate in the measurement head of three coordinate measuring machine with array way,
And position of each capacitor plate in measurement head is recorded respectively, Fig. 1 is the mesh generation mode illustrated on spherical surface, practical
Middle capacitor plate area is minimum.As shown in Fig. 2, measurement head and metal measured object are close.As shown in figure 3, capacitance pole will be covered with
A part of spherical surface of the measurement head of plate is amplified, it can be seen that the numerous and area of capacitor plate is minimum, can be by
Approximation regards a point as.Capacitor plate shape in Fig. 3 is square, and equilateral triangle as illustrated in fig. 1 and 2 can also be used.
Step 2: as shown in figure 4, the capacitance of capacity cell calculates.Each capacitor plate and metal are tested in measurement head
Object has been respectively formed a capacity cell；Capacitor plate in measurement head is denoted as G, the value of area S is less than 100 μm2.It will be electric
Hold pole plate G and projects to capacitor plate G and (above-mentioned it is stated that capacitance pole with projections of the capacitor plate G on metal measured object
Plate suqare is minimum, can be regarded as a point by approximation, thus the projection on metal measured object also can approximation regard a point as)
Locate on the parallel face in section, forms projection capacitor plate G '；The area for projecting capacitor plate G ' is Scos θ, wherein θ is capacitance
The angle of pole plate G and projection capacitor plate G '.It can be obtained according to capacitance calculation formula：Wherein, d indicates projection
The gap of capacitor plate G ' and the sections at the projection on metal measured object capacitor plate G, ε indicate dielectric constant.
When capacitor plate is on the hemisphere of face metal measured object, the capacitor plate closer from contact point and metal quilt
Surveying the distance between object can be smaller, and the angle between metal measured object is also smaller, so the electricity closer from contact point
The capacitance output valve for holding pole plate is bigger.
Step 3: judging the contacting points position of measurement head and metal measured object.According to capacitor plate be positive triangle
Shape, when measurement head is contacted with metal measured object, as shown in figure 5, position of the contact point in measurement head will be there are three types of feelings
Condition：1, it falls on the vertex of equilateral triangle capacitor plate, i.e. contact point A；2, it falls on three arms of angle of equilateral triangle capacitor plate,
That is contact point B；3, it falls in equilateral triangle capacitor plate, i.e. contact point C.According to the calculation formula of capacitance, pass through capacitance pole
The capacitance output valve of plate differentiates these three positions：If the capacitance output valve of capacitor plate is identical there are six value and is all maximum value,
Then contact point is fallen on the vertex of equilateral triangle capacitor plate；If the capacitance output valve of capacitor plate is identical there are two value and is all
Maximum value, then contact point fall on three arms of angle of equilateral triangle capacitor plate；If there are one the capacitance output valves of capacitor plate
Maximum value, then contact point fall in equilateral triangle capacitor plate.Other shapes of capacitor plate can be analogized.If for example,
Capacitor plate is square, as shown in fig. 6, position of the contact point in measurement head also will be there are three types of situation：1, it falls in pros
On the vertex of shape capacitor plate, i.e. contact point D；It falls on the side of square capacitor plate, i.e. contact point E；It falls in square electricity
Hold in pole plate, i.e. contact point F.According to the calculation formula of capacitance, these three positions are differentiated by the capacitance output valve of capacitor plate
It sets：If the capacitance output valve of capacitor plate is there are four being worth identical and being all maximum value, contact point is fallen in square capacitor plate
Vertex on；If the capacitance output valve of capacitor plate is there are two being worth identical and being all maximum value, contact point is fallen in square electricity
On the side for holding pole plate；If the capacitance output valve of capacitor plate is only there are one maximum value, contact point is fallen in square capacitor plate
It is interior.In this way after capacitor plate has capacitance output, according to the capacitor plate position for generating capacitance and the size of capacitance is generated just
It can be judged with butt contact position, it only can be direct there are one the case where maximum value for the capacitance output valve of capacitor plate
Determine the position of contact point, and then automatic identification radius compensation direction.
For the convenience of analysis, butt contact position is counter pushed away when, without having capacitance output valve to each
Capacitor plate is all analyzed, it is only necessary to according to the shape of capacitor plate and required precision, take several capacitance output valves larger
Capacitor plate is analyzed.If necessary to higher precision, then the capacitance around the maximum capacitor plate of output capacitance value
The capacitance of pole plate output can be used for accurately instead releasing the specific location of contact point.Reduce the area of capacitor plate, increases
The quantity of capacitor plate can also be used to improve measurement accuracy.
Claims (2)
1. the three-coordinate measuring method in automatic identification radius compensation direction, it is characterised in that：This method is as follows：
Step 1: capacitor plate is uniformly covered with array way in the measurement head of three coordinate measuring machine, and record is each respectively
Position of the capacitor plate in measurement head；Capacitor plate shape is square or equilateral triangle；
Step 2: the capacitance of capacity cell calculates：Each capacitor plate has been respectively formed one with metal measured object in measurement head
A capacity cell；Capacitor plate in measurement head is denoted as G, the value of area S is less than 100 μm2；Capacitor plate G is projected to
It crosses capacitor plate G and on the faces that section is parallel at the projection on metal measured object capacitor plate G, is formed and project capacitance pole
Plate G '；The area for projecting capacitor plate G ' is Scos θ, wherein θ is the angle of capacitor plate G and projection capacitor plate G '；According to
Capacitance calculation formula can obtain：Wherein, d indicates that projection capacitor plate G ' and capacitor plate G is tested in metal
The gap of section at projection on object, ε indicate dielectric constant；
Step 3: judging the contacting points position of measurement head and metal measured object：When the capacitor plate used is equilateral triangle, when
When measurement head is contacted with metal measured object, position of the contact point in measurement head will be there are three types of situation：It falls in equilateral triangle
On the vertex of capacitor plate, falls on three arms of angle of equilateral triangle capacitor plate, fall in equilateral triangle capacitor plate；According to electricity
The calculation formula of capacitance differentiates these three positions by the capacitance output valve of capacitor plate：If the capacitance output valve of capacitor plate
There are six being worth identical and being all maximum value, then contact point is fallen on the vertex of equilateral triangle capacitor plate；If the electricity of capacitor plate
Hold output valve there are two being worth identical and being all maximum value, then contact point is fallen on three arms of angle of equilateral triangle capacitor plate；If electric
There are one maximum values, then contact point to fall in equilateral triangle capacitor plate for the capacitance output valve of appearance pole plate；Capacitor plate is just
When rectangular, position of the contact point in measurement head also will be there are three types of situation：It falls on the vertex of square capacitor plate, falls
On the side of square capacitor plate, fall in square capacitor plate；According to the calculation formula of capacitance, pass through capacitor plate
Capacitance output valve differentiates these three positions：If the capacitance output valve of capacitor plate connects there are four being worth identical and being all maximum value
Contact is fallen on the vertex of square capacitor plate；If there are two be worth identical and be all maximum for the capacitance output valve of capacitor plate
Value, then contact point is fallen on the side of square capacitor plate；If only there are one maximum values for the capacitance output valve of capacitor plate, connect
Contact is fallen in square capacitor plate；In this way after capacitor plate has capacitance output, according to the capacitor plate for generating capacitance
Position and generate capacitance size can butt contact position judged there was only one for the capacitance output valve of capacitor plate
The case where a maximum value, can directly determine the position of contact point, and then automatic identification radius compensation direction.
2. the three-coordinate measuring method in automatic identification radius compensation according to claim 1 direction, it is characterised in that：Docking
When contact position is judged, without analyzing each capacitor plate for having capacitance output valve, it is only necessary to according to capacitance
The shape of pole plate and required precision, the capacitor plate for taking several capacitance output valves larger are analyzed.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2121676U (en) * | 1992-01-03 | 1992-11-11 | 天津大学 | Three dimensional capacitor test tip for measure three coordinate measuring machine error |
| JPH07260471A (en) * | 1994-03-16 | 1995-10-13 | Nikon Corp | Measuring apparatus of surface shape |
| CN1540280A (en) * | 2003-10-31 | 2004-10-27 | 哈尔滨工业大学 | Method of accurate measurement of coordinates and equipment |
| CN101424506A (en) * | 2008-10-17 | 2009-05-06 | 红塔烟草(集团)有限责任公司 | Method for precision measurement of point on space surface and the space surface by utilizing point gage sphere centre coordinate |
| CN101750043A (en) * | 2008-11-28 | 2010-06-23 | 红塔烟草(集团)有限责任公司 | Method for measuring 3D profile surface by trigger measuring head on measuring machine |
-
2016
- 2016-05-19 CN CN201610334296.XA patent/CN105783816B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2121676U (en) * | 1992-01-03 | 1992-11-11 | 天津大学 | Three dimensional capacitor test tip for measure three coordinate measuring machine error |
| JPH07260471A (en) * | 1994-03-16 | 1995-10-13 | Nikon Corp | Measuring apparatus of surface shape |
| CN1540280A (en) * | 2003-10-31 | 2004-10-27 | 哈尔滨工业大学 | Method of accurate measurement of coordinates and equipment |
| CN101424506A (en) * | 2008-10-17 | 2009-05-06 | 红塔烟草(集团)有限责任公司 | Method for precision measurement of point on space surface and the space surface by utilizing point gage sphere centre coordinate |
| CN101750043A (en) * | 2008-11-28 | 2010-06-23 | 红塔烟草(集团)有限责任公司 | Method for measuring 3D profile surface by trigger measuring head on measuring machine |
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| CN105783816A (en) | 2016-07-20 |
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Application publication date: 20160720 Assignee: HANGZHOU ZHONG CE TECHNOLOGY Co.,Ltd. Assignor: HANGZHOU DIANZI University Contract record no.: X2020330000121 Denomination of invention: Three coordinate measurement method for automatically identifying radius compensation direction Granted publication date: 20180810 License type: Common License Record date: 20201224 |