CN109032070A - A kind of contactless R-test measuring instrument scaling method using eddy current displacement sensor - Google Patents
A kind of contactless R-test measuring instrument scaling method using eddy current displacement sensor Download PDFInfo
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- G—PHYSICS
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- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/401—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes
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- G—PHYSICS
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- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
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Abstract
The present invention discloses a kind of contactless R-test measuring instrument scaling method using eddy current displacement sensor, including measuring the calibration of coordinate system and the calibration in displacement sensor plane face.Measurement ball is mounted on machine tool chief axis, measuring instrument bottom surface is placed on platen, mobile main shaft makes to measure the intersection point that the centre of sphere is located substantially at three displacement sensor axis, and calibration R-test measuring instrument measures coordinate origin, and using lathe coordinate system direction as measurement coordinate system direction；Mobile main shaft makes bulb be moved to different coordinate points, according to each coordinate points to the distance of sensor sensing plane, completes the calibration of contactless R-test measuring instrument sensor sensing plane.The present invention can significantly reduce contactless R-test measuring instrument in process and assemble and influence of the installation error to measurement accuracy on lathe, to reduce the manufacturing cost and use cost of instrument, improve measurement accuracy and efficiency.
Description
Technical field
The present invention relates to NC Machine Error field of measuring technique, specially a kind of using the non-of eddy current displacement sensor
Contact R-test measuring instrument scaling method.
Background technique
With the raising of machining accuracy, also become more and more important to the geometric error measurement of five-axle number control machine tool, for five number of axle
The rotation axis geometric error measurement of lathe is controlled, the measuring instrument generallyd use at present is ball bar and laser interferometer.However, this
A little measuring instruments are not fully dedicated to the error measure of rotation axis, and there are efficiency that lower, installation error is difficult to the deficiencies of eliminating.Phase
Than the deficiency of above-mentioned instrument, R-test measuring instrument has many advantages, such as that structure is simple, measurement efficiency is high, can preferably meet five axis
The geometric error measurement request of numerically-controlled machine tool rotation axis.The companies such as FIDIA, IBS have corresponding commercially produced product, and in industry
Preferable application is inside obtained.
R-test measuring instrument mainly uses two kinds of measurement methods, that is, passes through tangent displacement sensor or contactless displacement
Sensor measurement astrosphere sphere centre coordinate.The existing research about R-test measuring instrument is mostly focused on contact type measurement mode,
Liu great Wei, Li Liangliang etc. propose the measuring principle of the R-test instrument using tangent displacement sensor, and to its structure into
Optimization of having gone is analyzed.The application such as Bringmann B, Ibaraki S is using the R-test instrument of tangent displacement sensor to five
The error identification theory of Shaft and NC Machining Test rotary axis of machine tool is analyzed, and with having for the equipment of corresponding experiment and simulating, verifying
Effect property.Li J proposed one kind using the R-test instrument of non-contact displacement transducer, and to the identification algorithm of the equipment into
Analysis is gone.Contact R-test measuring instrument Measurement Algorithm is simpler, and sensor mounting location deviation will not be to measurement result
Constituting influences, but since mechanical structure problem causes the reading susceptibility of sensor not high, while contact wear is also to a certain degree
On affect measurement accuracy.The measurement error that contactless R-test measuring instrument can generate to avoid measurement abrasion, and can be
It is measured under the conditions of main shaft high-speed rotation, sensitivity of measurement and stability are more preferable.But non-contact measuring instrument structure processing and
The influence assembled to measurement accuracy is very big, and it is difficult to improve instrument itself precision.In addition, the condition by measure field limits
System, instrument installation accuracy when installation is difficult to reach preparatory calibration on lathe.Therefore, needing one kind can be with field calibration method
(induction planes circle under calibration, the calibration for measuring coordinate system lower sensor induction planes, measurement coordinate system including measuring coordinate system
The calibration of the heart), under the premise of guaranteeing measuring instrument precision, reduces the processing of non-contact measuring instrument structure and assembly and in-site installation is wanted
It asks.
Summary of the invention
In view of the above-mentioned problems, the purpose of the present invention is to provide one kind can significantly reduce contactless R-test measurement
Instrument is in process and assemble and influence of the installation error to measurement accuracy on lathe, to reduce the manufacture and use of instrument
Cost improves the scaling method of the contactless R-test measuring instrument of measurement efficiency.Technical solution is as follows:
A kind of scaling method of the contactless R-test measuring instrument using eddy current displacement sensor, including following step
Suddenly；
Step 1: demarcate contactless R-test measuring instrument measurement coordinate system:
Measurement ball is mounted on machine tool chief axis, measuring instrument bottom surface is placed on platen, and mobile main shaft makes to measure
The centre of sphere is located substantially at the intersection position of 3 eddy current displacement sensor axis, establishes measurement coordinate by origin of the centre of sphere at this time
System, the direction of reference axis are consistent with lathe coordinate system direction；
Step 2: demarcate the eddy current displacement sensor induction planes of contactless R-test measuring instrument:
It is that radius is denoted as R by sensor endIt visits, the radius for measuring ball is RBall；
A) when measurement ball is radially offset from the variation of induced voltage caused by sensor axis in measurement range can be ignored,
Sensor sensing voltage response equation are as follows:
Wherein, UiFor induced voltage, LiDistance for the measurement centre of sphere to i-th of sensor sensing plane, ki、mi、qiTo pass
Sensor induced voltage characterisitic parameter (being constant, producer provides by sensor)；
It is a in the induction planes equation that measurement coordinate system divides into sensor 11x+b1y+c1z+d1=0；
Lathe is operated, mobile main shaft makes bulb be moved to 4 different coordinate points Pj(xj,yj,zj), j=1,2,3,4；Pj
To the distance L of 1 induction planes of sensor1,jAccording to the induced voltage U of sensor 1 at this time1,jIt converts to obtain with above formula, it may be assumed that
1 induction planes parameter a of sensor is acquired by above equation group1、b1、c1、d1Value；Similarly acquire other two
Plane equation coefficient of the sensor sensing plane in the case where measuring coordinate system；
Further, when measurement ball be radially offset from measurement range induced voltage caused by sensor axis variation can
When ignoring, in the solution procedure of induction planes equation parameter, the solution of above equation group is converted using differential evolution algorithm
For optimization optimization problem, following nonlinear equation is constructed:
According to above formula, if objective function are as follows:
For the value of objective function closer to zero, the solution of above-mentioned nonlinear equation is more accurate.
B) it can not ignore when measurement ball is radially offset from the variation of induced voltage caused by sensor axis in measurement range
When, sensor sensing voltage curve equation are as follows:
Wherein, UiFor the induced voltage of i-th of sensor, LiFor the measurement centre of sphere to i-th sensor sensing plane away from
From ti、ki、mi、ni、qiFor sensor sensing voltage characteristic parameter (being constant, by sensor, producer is provided)；
It is a in the plane equation that measurement coordinate system divides into sensor 11x+b1y+c1z+d1=0, mobile main shaft moves bulb
Move measurement lower 12 different coordinate points P of coordinate systemj(xj,yj,zj), j=1 ..., 12；
The range equation and Pythagorean theorem that plane is arrived according to point, obtain in conjunction with 1 induced voltage characteristic curve equation of sensor
To following equation group:
The induction planes parameter a of sensor 1 can be acquired by above-mentioned equation group1、b1、c1、d1And induction planes central coordinate of circle
(x1-0、y1-0、z1-0)；The induction planes parameter and induction planes central coordinate of circle of other two sensor can similarly be obtained.
Further, when measurement ball is radially offset from the variation of induced voltage caused by sensor axis not in measurement range
When negligible, in the solution procedure of induction planes equation parameter, the solution of above-mentioned equation group is turned using differential evolution algorithm
Optimization optimization problem is turned to, according to the range formula for arriving plane and at this time sensor sensing voltage response equation is put, is constructed
Following nonlinear equation:
fj(a1,b1,c1,d1)=(xj-x1-0)2+(yj-y1-0)2+(zj-z1-0)2-r1-j 2-L1-j 2J=1 ..., 12
According to above formula, if objective function are as follows:
For the value of objective function closer to zero, the solution of above-mentioned nonlinear equation is more accurate.
The beneficial effects of the present invention are: the present invention is directed to contactless R-test five-axle number control machine tool rotation axis error measure
Instrument, the instrumental calibration method of design can significantly reduce contactless R-test measuring instrument in process and assemble and on lathe
Influence of the installation error to measurement accuracy improve measurement efficiency to reduce the manufacturing cost and use cost of instrument, it is fixed simultaneously
Phase, which calibrates instrument itself, also can preferably guarantee Instrument measuring precision.
Detailed description of the invention
Fig. 1 is the contactless R-test measuring instrument structural model figure using eddy current displacement sensor.
Fig. 2 is eddy current displacement sensor-measurement ball spatial relationship schematic diagram.
Fig. 3 is the induction planes calibration schematic diagram of eddy current displacement sensor.
Specific embodiment
The present invention is described in further details in the following with reference to the drawings and specific embodiments.
(1) contactless R-test measuring instrument structure explanation:
The structural model of contactless R-test measuring instrument is as shown in Figure 1, mainly include equally distributed 3 contactless
Eddy current displacement sensor and a canonical measure ball.According to the shortest distance spatial position of sensor sensing plane and measurement ball
Relationship, the coordinate for measuring ball center point P calculate.
AA in Fig. 11、BB1、CC1For 3 sensor axis (A1、B1、C1For the induction planes central point of 3 sensors, A,
B, C is the bottom center point of 3 sensors), sensor end is that radius is RIt visitsInduction planes circle, the radius for measuring ball is
RBall.Plane is benchmark face where defining Δ ABC, and the sensor elevation angle (angle of sensor axis and datum level) is α.It establishes and surveys
Coordinate system is measured, origin is almost the same at a distance from 3 induction planes, and XY coordinate surface is parallel with datum level.
The spatial relationship of sensor and measurement sphere is as shown in Fig. 2, set the measurement centre of sphere to i-th sensor sensing plane
Distance is Li, the distance of the centre of sphere to center sensor axis is ri, corresponding induced voltage is Ui.It is former according to the induction of sensor
Reason and rating test, can obtain sensor sensing voltage response equation are as follows:
U in formulaiThe inductive voltage value measured for sensor；riDeviate the distance of sensor axis for the centre of sphere；ti、ki、mi、
ni、qiFor sensor sensing voltage characteristic parameter, it can be tested by transducer calibration or producer's factory certificate obtains.
It is radially offset from the variation of induced voltage caused by sensor axis in measurement range whether can be with according to measurement ball
Ignore, the calibration of sensor sensing plane can be divided into following two situation:
1) when measurement ball is radially offset from the variation of induced voltage caused by sensor axis in measurement range can be ignored,
That is influence of the sensor sensing voltage characteristic parameter t and n to induced voltage U is ignored, and can not consider characterisitic parameter t and n,
Can be by sensor sensing voltage response equation simplification
2) it can not ignore when measurement ball is radially offset from the variation of induced voltage caused by sensor axis in measurement range
When, i.e. influence of the sensor sensing voltage characteristic parameter t and n to induced voltage U cannot be ignored, otherwise to the precision of measurement result
It is affected, sensor sensing voltage response is formula (1) at this time.
(2) calibration of contactless R-test measuring instrument measurement coordinate system:
Before the calibration of sensor sensing floor coefficient, need first to demarcate measurement coordinate system.As shown in Figure 1, will when calibration
Measurement ball is mounted on machine tool chief axis, and measuring instrument bottom surface is placed on platen.Movement main shaft makes to measure after equipment is powered
Ball is located substantially at the center (can carry out Coordinate Adjusting by observing the induced voltage of sensor) of 3 sensors, with this
When the centre of sphere be that origin establishes measurement coordinate system, the direction of reference axis is consistent with lathe coordinate system direction.
(3) calibration of contactless R-test measuring instrument displacement sensor induction planes:
It is radially offset from the variation of induced voltage caused by sensor axis in measurement range whether can be with according to measurement ball
Ignore, the calibration mode of sensor sensing plane is also classified into following two situation.
1) when measurement ball is radially offset from the variation of induced voltage caused by sensor axis in measurement range can be ignored,
Mean that the ball centre offset r perpendicular to sensor axis direction will not influence sensor sensing voltage value, sensor sensing
Influence of voltage characteristic parameter t, n to measurement result can be ignored, it is only necessary to demarcate 3 sensor sensing plane sides of measuring instrument
Journey coefficient.
By taking 1 induction planes of sensor as an example.As shown in figure 3, dividing into the induction planes equation of sensor 1 in measurement coordinate system
For a1x+b1y+c1z+d1=0.Lathe is operated, mobile main shaft makes bulb be moved to 4 different coordinate points Pj(xj,yj,zj) (j=
1,2,3,4), PjDistance to 1 induction planes of sensor can be obtained according to sensor sensing voltage and formula (2) conversion, it may be assumed that
1 induction planes parameter a of sensor can be acquired by equation group (3)1、b1、c1、d1Value.Other two can similarly be obtained
Plane equation coefficient of the plane of sensor in the case where measuring coordinate system.
In the solution procedure of above-mentioned induction planes equation parameter, since inductive voltage value is approximation, what is solved is flat
Face equation coefficient is also approximation.For the accuracy of solving result, the present invention uses differential evolution algorithm by equation group (3)
Solution is converted into optimization optimization problem, to improve stated accuracy as far as possible.
According to equation group (3), following nonlinear equation can be constructed:
According to formula (4), if objective function is
Obviously, if formula (4) has solution, the minimum value of objective function (5) is zero.In the algorithm, the value of objective function (5) is got over
Close to zero, the solution of corresponding equation group (4) is more accurate.
Shown in the differential evolution algorithm parameter setting that the present invention uses such as table 1 (D=4).
2) it can not ignore when measurement ball is radially offset from the variation of induced voltage caused by sensor axis in measurement range
When, it is meant that sensor sensing voltage value is affected by the ball centre offset r perpendicular to sensor axis direction, passes
Influence of sensor induced voltage characterisitic parameter t, the n to measurement result cannot be ignored.Not only need to demarcate 3 sensings of measuring instrument
The induction planes equation coefficient of device, and need to demarcate the center of circle P of 3 induction planes circle1-0、P2-0And P3-0。
It is illustrated by taking 1 induction planes of sensor as an example, as shown in Figure 3.The plane of sensor 1 is divided into measurement coordinate system
Equation is a1x+b1y+c1z+d1=0.Mobile main shaft makes bulb be moved to 12 coordinate points P different under measurement coordinate systemj(xj,
yj,zj) (j=1 ... 12).The range equation and Pythagorean theorem that plane is arrived according to point, it is bent in conjunction with 1 induced voltage characteristic of sensor
Line equation can obtain following equation group:
The induction planes parameter a of sensor 1 can be acquired by equation group (6)1、b1、c1、d1And induction planes central coordinate of circle
(x1-0、y1-0、z1-0).The induction planes parameter and induction planes central coordinate of circle of other two sensor can similarly be obtained.
In the solution procedure of above-mentioned induction planes equation parameter, since inductive voltage value is approximation, what is solved is flat
Face equation coefficient is also approximation.For the accuracy of solving result, it is equally utilized in the present invention that differential evolution algorithm is by equation group
(6) solution is converted into optimization optimization problem, to improve stated accuracy as far as possible.The range formula and formula (1) of plane are arrived according to point,
Following nonlinear equation can be constructed:
fj(a1,b1,c1,d1)=(xj-x1-0)2+(yj-y1-0)2+(zj-z1-0)2-r1-j 2-L1-j 2(j=1 ..., 12)
(7)
Objective function form and formula (5) are consistent (wherein j=1,2 ..., 12).If formula (7) has solution, objective function is most
Small value is zero.In the algorithm, for the value of objective function closer to zero, the solution of corresponding equation group (7) is more accurate.
Shown in the differential evolution algorithm parameter setting that the present invention uses such as table 1 (D=7).
1 differential evolution algorithm parameter setting of table
(1) scaling method is verified
The 16U eddy current displacement sensor (range 4mm) of kaman company is now chosen, canonical measure ball makes and assembles
The length, width and height (without measurement ball) of measuring instrument, instrument are respectively 170mm, 170mm, 120mm.
When measurement ball is radially offset from the variation of induced voltage caused by sensor axis in measurement range can be ignored, move
Dynamic main shaft obtains 4 different sphere center positions as calibration point P1、P2、P3、P4(calibration point cannot be former for measurement coordinate system
Point), shown in calibration point coordinate and each sensor voltage reading table 2.According to 2 data of table, can be solved respectively by differential evolution algorithm
The coefficient of sensor sensing plane equation is as shown in table 3.
Calibration point coordinate and sensor sensing voltage readings when the variation of 2 induced voltage of table is negligible
Note: U1=0.512L1-6.251；U2=0.501L2-6.062；U3=0.524L3-6.456。
Sensor sensing plane equation coefficient when the variation of 3 induced voltage of table is negligible
When measurement ball is radially offset from the variation of induced voltage caused by sensor axis in measurement range can not ignore,
Mobile main shaft obtains 12 different sphere center positions as calibration point P1、P2、…、P11And P12(calibration point cannot be sat for measurement
Mark system origin), calibration point coordinate and each sensor voltage reading are as shown in table 4.According to 4 data of table, pass through differential evolution algorithm
Each sensor sensing plane equation coefficient and induction planes central coordinate of circle can be solved as shown in table 5 and table 6.
Calibration point coordinate and each sensor sensing voltage readings when the variation of 4 induced voltage of table be can not ignore
Note: U1=0.532L1 0.5+0.065r1 0.5+0.168；U2=0.526L2 0.5+0.072r2 0.5+0.183；U3=
0.531L3 0.5+0.068r3 0.5+0.168。
Sensor sensing plane equation coefficient when the variation of 5 induced voltage of table be can not ignore
Sensor sensing plane central coordinate of circle (unit: mm) when the variation of 6 induced voltage of table be can not ignore
(2) sphere centre coordinate calculates verifying
When measurement ball is radially offset from the variation of induced voltage caused by sensor axis in measurement range can be ignored, take
For 3 different sphere center positions as check post, each sensor voltage reading of 3 check posts is as shown in table 7.Using this calibration side
The sphere centre coordinate calculated result of the R-test measuring instrument of method and the comparison of theoretical coordinate value are as shown in table 8.From the data comparison of table 8
It can be found that the difference between the sphere centre coordinate and theoretical coordinate that are measured by this method is no more than 0.0001mm.
Each sensor sensing voltage readings in check post (unit: V) when the variation of 7 induced voltage of table is negligible
Check post coordinates computed value and theoretical coordinate value comparison (unit: mm) when the variation of 8 induced voltage of table is negligible
When measurement ball is radially offset from the variation of induced voltage caused by sensor axis in measurement range can not ignore,
Take 3 different sphere center positions as check post, each sensor voltage reading of 3 check posts is as shown in table 9.Using this calibration
The sphere centre coordinate calculated result of the R-test measuring instrument of method and the comparison of theoretical coordinate value are as shown in table 10.From the data of table 10
It compares it can be found that the difference between the sphere centre coordinate and theoretical coordinate measured by this method is no more than 0.00039mm.
Each sensor sensing voltage readings in check post (unit: V) when the variation of 9 induced voltage of table be can not ignore
Check post coordinates computed value and theoretical coordinate value comparison (unit: mm) when the variation of 10 induced voltage of table be can not ignore
Claims (3)
1. a kind of contactless R-test measuring instrument scaling method using eddy current displacement sensor, which is characterized in that including
Following steps:
Step 1: demarcate contactless R-test measuring instrument measurement coordinate system:
Measurement ball is mounted on machine tool chief axis, measuring instrument bottom surface is placed on platen, and mobile main shaft makes to measure the centre of sphere
It is located substantially at the intersection position of 3 eddy current displacement sensor axis, measurement coordinate system is established by origin of the centre of sphere at this time, sits
The direction of parameter is consistent with lathe coordinate system direction；
Step 2: demarcate the eddy current displacement sensor induction planes of contactless R-test measuring instrument:
A) when measurement ball is radially offset from the variation of induced voltage caused by sensor axis in measurement range can be ignored, sensing
Device induced voltage characteristic curve equation are as follows:
Wherein, UiFor induced voltage, LiDistance for the measurement centre of sphere to i-th of sensor sensing plane, ki、mi、qiFor sensor
Induced voltage characterisitic parameter is constant；
It is a in the induction planes equation that measurement coordinate system divides into sensor 11x+b1y+c1z+d1=0；
Lathe is operated, mobile main shaft makes bulb be moved to 4 different coordinate points Pj(xj,yj,zj), j=1,2,3,4；PjTo biography
The distance L of 1 induction planes of sensor1,jAccording to the induced voltage U of sensor 1 at this time1,jIt converts to obtain with above formula, it may be assumed that
1 induction planes parameter a of sensor is acquired by above equation group1、b1、c1、d1Value；Similarly acquire other two sensor
Plane equation coefficient of the induction planes in the case where measuring coordinate system；
B) it can not ignore constantly when measurement ball is radially offset from the variation of induced voltage caused by sensor axis in measurement range,
Sensor sensing voltage response equation are as follows:
Wherein, UiFor the induced voltage of i-th of sensor, LiDistance for the measurement centre of sphere to i-th of sensor sensing plane, ti、
ki、mi、ni、qiIt is constant for sensor sensing voltage characteristic parameter；
It is a in the plane equation that measurement coordinate system divides into sensor 11x+b1y+c1z+d1=0, mobile main shaft makes bulb be moved to survey
Measure 12 coordinate points P different under coordinate systemj(xj,yj,zj), j=1 ... 12；
According to point arrive plane range equation and Pythagorean theorem, in conjunction with 1 induced voltage characteristic curve equation of sensor obtain as
Lower equation group:
The induction planes parameter a of sensor 1 can be acquired by equation group1、b1、c1、d1And induction planes central coordinate of circle (x1-0、y1-0、
z1-0), it can similarly obtain the induction planes parameter and induction planes central coordinate of circle of other two sensor.
2. the scaling method of contactless R-test measuring instrument according to claim, which is characterized in that when measurement ball exists
When being radially offset from the variation of induced voltage caused by sensor axis in measurement range can be ignored, in induction planes equation parameter
In solution procedure, optimization optimization problem is converted for the solution of above equation group using differential evolution algorithm, building is following non-thread
Property equation:
According to above formula, if objective function are as follows:
For the value of objective function closer to zero, the solution of above-mentioned nonlinear equation is more accurate.
3. the scaling method of contactless R-test measuring instrument according to claim, which is characterized in that when measurement ball exists
When being radially offset from the variation of induced voltage caused by sensor axis in measurement range can not ignore, in induction planes equation parameter
Solution procedure in, optimization optimization problem is converted for the solution of above-mentioned equation group using differential evolution algorithm, according to point to flat
The range formula in face and at this time sensor sensing voltage response equation, construct following nonlinear equation:
fj(a1,b1,c1,d1)=(xj-x1-0)2+(yj-y1-0)2+(zj-z1-0)2-r1-j 2-L1-j 2J=1 ..., 12
According to above formula, if objective function are as follows:
For the value of objective function closer to zero, the solution of above-mentioned nonlinear equation is more accurate.
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012088244A (en) * | 2010-10-21 | 2012-05-10 | Toshiba Corp | Three-dimensional surface shape calculation apparatus, automatic construction device using the apparatus, and method thereof |
| CN103342101A (en) * | 2013-06-14 | 2013-10-09 | 北京航空航天大学 | Induction type non-contact charging locating aligning device and locating method thereof |
| CN104279946A (en) * | 2014-09-16 | 2015-01-14 | 大连理工大学 | Calibration method for spherical surface displacement measurement through electrical vortex sensor |
| CN104392437A (en) * | 2014-11-11 | 2015-03-04 | 西南交通大学 | Object tracking method based on state fusion of multiple cell blocks |
| CN105547544A (en) * | 2016-01-04 | 2016-05-04 | 西南交通大学 | Ultrasonic wave residual stress test method for macro outer deformation flat weldment |
| CN106363465A (en) * | 2016-11-02 | 2017-02-01 | 西南交通大学 | Method for identifying mutual position relationship of horizontally moving shafts and rotating shaft of multi-axis numerically-controlled machine tool |
| CN107363812A (en) * | 2017-08-07 | 2017-11-21 | 浙江工业大学 | Wireless control six-degree-of-freedom mechanical arm demonstration system |
| CN107680137A (en) * | 2017-09-20 | 2018-02-09 | 东南大学 | A kind of polyphaser demarcation and parameter optimization method based on spheroid projection common tangent |
-
2018
- 2018-07-19 CN CN201810793831.7A patent/CN109032070B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012088244A (en) * | 2010-10-21 | 2012-05-10 | Toshiba Corp | Three-dimensional surface shape calculation apparatus, automatic construction device using the apparatus, and method thereof |
| CN103342101A (en) * | 2013-06-14 | 2013-10-09 | 北京航空航天大学 | Induction type non-contact charging locating aligning device and locating method thereof |
| CN104279946A (en) * | 2014-09-16 | 2015-01-14 | 大连理工大学 | Calibration method for spherical surface displacement measurement through electrical vortex sensor |
| CN104392437A (en) * | 2014-11-11 | 2015-03-04 | 西南交通大学 | Object tracking method based on state fusion of multiple cell blocks |
| CN105547544A (en) * | 2016-01-04 | 2016-05-04 | 西南交通大学 | Ultrasonic wave residual stress test method for macro outer deformation flat weldment |
| CN106363465A (en) * | 2016-11-02 | 2017-02-01 | 西南交通大学 | Method for identifying mutual position relationship of horizontally moving shafts and rotating shaft of multi-axis numerically-controlled machine tool |
| CN107363812A (en) * | 2017-08-07 | 2017-11-21 | 浙江工业大学 | Wireless control six-degree-of-freedom mechanical arm demonstration system |
| CN107680137A (en) * | 2017-09-20 | 2018-02-09 | 东南大学 | A kind of polyphaser demarcation and parameter optimization method based on spheroid projection common tangent |
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| CN112378326A (en) * | 2020-10-10 | 2021-02-19 | 中国科学院苏州生物医学工程技术研究所 | Single-end type eddy current micro-displacement sensor calibration device and method, computer equipment and storage medium |
| CN112729087B (en) * | 2020-12-16 | 2022-03-22 | 中国科学院苏州生物医学工程技术研究所 | Differential eddy current micro-displacement sensor calibration device, method, computer equipment and storage medium |
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| CN113031514B (en) * | 2021-03-18 | 2022-03-18 | 西南交通大学 | R-test calibration uncertainty evaluation method based on metrology |
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