CN112013766A - Non-contact R-test structural parameter redundancy-free calibration method - Google Patents

Non-contact R-test structural parameter redundancy-free calibration method Download PDF

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CN112013766A
CN112013766A CN202010895521.3A CN202010895521A CN112013766A CN 112013766 A CN112013766 A CN 112013766A CN 202010895521 A CN202010895521 A CN 202010895521A CN 112013766 A CN112013766 A CN 112013766A
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宋宝
郭艺璇
唐小琦
周向东
王国栋
肖千红
钟靖龙
熊烁
刘永兴
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Huazhong University of Science and Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/042Calibration or calibration artifacts
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques

Abstract

The invention discloses a non-contact R-test structural parameter redundancy-free calibration method, which comprises the following steps: firstly, sequentially calibrating installation direction errors of three sensors in a non-contact R-test; step two, establishing a redundancy-free model about the errors of the installation positions of the other two sensors by taking the installation position of one sensor in the three sensors as a reference; step three, solving the error which enables the target function to be minimum through an intelligent searching algorithm; and step four, sequentially compensating the position parameters of the sensor according to the error values obtained in the step three, and completing the calibration of the non-contact R-test structural parameters. The invention adopts the strategy of calibrating the position error and the direction error of the sensor step by step and establishes a redundancy-free error model related to the position error of the sensor, thereby solving the problem of low calibration precision caused by parameter redundancy in the existing calibration method and having higher calibration precision.

Description

Non-contact R-test structural parameter redundancy-free calibration method
Technical Field
The invention belongs to the technical field of precision measurement, relates to a structural parameter calibration method, and particularly relates to a non-contact R-test structural parameter redundancy-free calibration method.
Background
The R-test is a measuring device consisting of a precision ball and three sensors and is used for measuring and calibrating the geometric errors of the machine tool. Compared with a contact type R-test, the non-contact type R-test has the advantages of high dynamic response, no friction and no contact stress, and can improve the measurement precision.
The non-contact R-test is composed of a precise ball and three non-contact sensors, the precise ball is arranged at the tail end of a machine to be tested, and the displacement of the center of the ball is calculated by reading the readings of the three sensors and an algorithm. The position and direction parameters of the three sensors are structural parameters of the non-contact R-test and are core parameters of a measurement algorithm, however, errors are generated between the position and direction of the sensor and ideal values due to installation errors, and the measurement accuracy of the non-contact R-test is further influenced. Therefore, structural parameters of the non-contact R-test need to be calibrated, and the precision of the displacement measurement of the non-contact R-test is further improved.
Currently, a commonly used calibration method is the method described in document [1], which uses three laser displacement sensors to form a non-contact R-test, and calibrates the positions and directions of the three sensors together. The latest document [2] published in 2020 adopts three eddy current sensors and optimizes the structure of the non-contact R-test, and calibrates the positions of the three sensors and the measurement plane of the sensors together, and in fact the calibration method of the document [2] is essentially the same as that of the document [1] because the measurement plane of the sensors is equivalent to the measurement direction.
The main problems and drawbacks of the prior art include:
further research shows that the calibration methods of the documents [1] and [2] need to calibrate the positions and directions of the three sensors at the same time, namely, 18 parameters are calibrated in total, and because the positions of the three sensors are opposite in the structural parameters of the non-contact R-test, namely, only the position of one sensor needs to be fixed, and the positions of the other two sensors need to be calibrated, calibration parameter redundancy may cause the reduction of calibration precision.
Therefore, it is necessary to provide a non-redundant calibration method for the non-contact R-test structural parameters to improve the measurement accuracy of the non-contact R-test.
[1]C.Hong,S.Ibaraki,Non-contact R-test with laser displacement sensors for error calibration of five-axis machine tools,Pre.Eng.37(1)(2013)159–171.
[2]L.Jiang,B.Peng,G.Ding,S.Qin,J.Zhang,Li,Y,Optimization method for systematically improving non-contact R test accuracy,Int.J.Adv.Manuf.Technol.107(3–4)(2020)1697–1711.
Disclosure of Invention
Aiming at the problems and the defects in the prior art, the invention provides a non-contact R-test structural parameter non-redundant calibration method, which adopts a strategy of calibrating the position error and the direction error of a sensor step by step and establishes a non-redundant error model related to the position error of the sensor, thereby solving the problem of low calibration precision caused by parameter redundancy in the existing calibration method and having higher calibration precision.
Therefore, the invention adopts the following technical scheme:
a non-contact R-test structural parameter redundancy-free calibration method comprises the following steps:
firstly, sequentially calibrating installation direction errors of three sensors in a non-contact R-test;
step two, establishing a redundancy-free model about the errors of the installation positions of the other two sensors by taking the installation position of one sensor in the three sensors as a reference;
step three, solving the error which enables the target function to be minimum through an intelligent searching algorithm;
and step four, sequentially compensating the position parameters of the sensor according to the error values obtained in the step three, and completing the calibration of the non-contact R-test structural parameters.
Further, in the first step, the sensors are installed on the supporting piece, and the installation directions of the three sensors are sequentially calibrated through the dial indicator, the standard gauge block and the calibration surface.
Further, the specific process of the step one is as follows:
fixing the support piece on a machine tool workbench, installing the dial indicator on a machine tool spindle, aligning the standard gauge block with the calibration surface, moving the sensor to enable the sensor to be aligned with the calibration surface, measuring the direction precision of the calibrated sensor by using the dial indicator, and repeating the step until the direction precision of the sensor is within 0.001 mm.
Preferably, the three mounting planes of the support have a roughness of at least 0.001 mm.
Preferably, the redundancy-free model established in step two is as follows:
Figure BDA0002658337510000021
wherein
f(Δxi,Δyi,Δzi)=||U′j-Vj||;
U′j=O′j(x′j,y′j,z′j)-O′1(x′1,y′1,z′1);
Wherein, VjFor the commanded position of the jth measured sphere center relative to the first sphere center, Δi(Δxi,Δyi,Δzi) Is the position error of sensor i (i ═ 1,2,3), O'j(x′j,y′j,z′j) Is the true position of the jth measured sphere center, O'1(x′1,y′1,z′1) Is the true position of the 1 st sphere center, O'j(x′j,y′j,z′j) And O'1(x′1,y′1,z′1) Calculated by the following formula:
xj 2+yj 2+(R+D1j+zj)2=R2
(Δx2-xj)2+(Δy2-(R+D2j)-yj)2+(Δz2-zj)2=R2
(Δx3-(R+D3j)-xj)2+(Δy3-yj)2+(Δz3-zj)2=R2
r is the radius of the precision sphere, DijRepresenting the distance reading of sensor i.
Preferably, the command position is a command position acquired from a machine tool.
Preferably, the precision sphere has a roughness precision of at least 0.1 μm.
Preferably, the intelligent search algorithm in step three adopts a particle swarm algorithm.
Preferably, the sensors are all laser displacement sensors.
Preferably, the method further comprises a step five, wherein the process of the step five is as follows:
comparing the precision of the industrial robot after compensation with the precision requirement, if the precision of the non-contact R-test after compensation is not in the precision requirement range, repeating the second step to the fourth step, and continuing to compensate until the precision requirement is met; and replacing the initial values of the parameters in the step two with the parameters obtained by compensation in the step four, then calculating the compensation values again, namely replacing the position value of each sensor in the step two with the respective compensation value, then calculating the position compensation value of the sensor again according to the replaced parameters, finally compensating the parameters according to the compensation values of the parameters obtained by calculation again, and comparing the compensated values with the precision requirement until the precision requirement is met.
Compared with the prior art, the invention has the beneficial effects that:
(1) the invention adopts a strategy of calibrating the direction error and the position error of the sensor step by step, establishes a model of the position error of the sensor without redundant error, avoids the problem of low calibration precision caused by redundant parameters, and is simple and easy to operate and high in operation efficiency.
(2) The calibration method provided by the invention is not only suitable for calibrating the structural parameters of the non-contact R-test, but also can be used for calibrating the structural parameters of the contact R-test, and meanwhile, the type of the sensor forming the R-test is not limited, and the calibration method has high flexibility.
(3) The non-redundancy calibration method for the non-contact R-test structural parameters is provided, and the measurement precision of the non-contact R-test is improved.
Drawings
Fig. 1 is a flowchart of a non-contact R-test structural parameter redundancy-free calibration method according to an embodiment of the present invention.
FIG. 2 is a diagram of a noncontact R-test measurement configuration.
Fig. 3a is a schematic diagram of the measurement of the jth sphere center displacement.
Fig. 3b is a schematic diagram of the position error of sensor 2 and sensor 3.
FIG. 4 is a flowchart of an error identification method.
Fig. 5a shows the positioning accuracy before and after compensation at the compensation point.
Fig. 5b is the positioning accuracy before and after compensation at the verification point.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings and specific embodiments, which are provided for illustration only and are not to be construed as limiting the invention.
The invention provides a non-contact R-test structural parameter redundancy-free calibration method, which comprises the following steps:
(1) sequentially calibrating installation direction errors of the three sensors;
(2) establishing a non-redundant model of the installation position error of the other two sensors by taking the installation position of one of the three sensors as a reference:
Figure BDA0002658337510000041
wherein the content of the first and second substances,
f(Δxi,Δyi,Δzi)=||U′j-Vj|| (2)
U′j=O′j(x′j,y′j,z′j)-O′1(x′1,y′1,z′1) (3)
wherein, VjFor the commanded position of the jth measured sphere center relative to the first sphere center, Δi(Δxi,Δyi,Δzi) Is the position error of sensor i (i ═ 1,2,3), O'j(x′j,y′j,z′j) Is the true position of the jth measured sphere center, O'1(x′1,y′1,z′1) Is the true position of the 1 st sphere center, O'j(x′j,y′j,z′j) And O'1(x′1,y′1,z′1) Can be calculated by the following formula:
Figure BDA0002658337510000051
r is the radius of the precision sphere, DijRepresenting the distance reading of sensor i.
(3) Solving the error which enables the target function to be minimum through an intelligent searching algorithm;
(4) and (4) sequentially compensating the position parameters of the sensor according to the error values obtained in the step (3) so as to finish the calibration of the R-test structural parameters.
The sensors are all laser displacement sensors;
the roughness of the three mounting planes of the support should be at least 0.001 mm;
the roughness precision of the precision ball is at least 0.1 um;
the command position is a command position obtained from the machine tool;
the intelligent searching algorithm is a particle swarm algorithm.
Examples
As shown in fig. 1, a non-contact R-test structural parameter redundancy-free calibration method provided in an embodiment of the present invention includes the following steps:
(1) mounting the sensors on a support, and sequentially calibrating the mounting directions of the three sensors through a dial indicator, a standard gauge block and a calibration surface as shown in FIG. 2;
specifically, the support piece is fixed on a machine tool workbench, the dial indicator is installed on a machine tool spindle, the standard gauge block is aligned to the calibration surface, the sensor is moved to be aligned to the calibration surface, the direction accuracy of the calibrated sensor is measured by the dial indicator, and the step is repeated until the direction accuracy of the sensor is within 0.001 mm.
(2) Establishing a redundancy-free model of the errors of the installation positions of the other two sensors by taking the installation position of one of the three sensors as a reference;
specifically, the laser beams of the three sensors are orthogonal to one point, as shown in fig. 2, the origin and three coordinate axes of the coordinate system of the non-contact R-test are respectively located at the intersection point and the direction of the three orthogonal laser beams, and the laser beam, the sensor and the jth (j is 1iAnd Pij,liIndicates the distance from the sensor i (i ═ 1,2,3) to the virtual ball. lijIndicating the distance from sensor i to the jth measuring ball. The radius of the precision sphere is R. By the geometric relationship, the position O of the center of the precision sphere can be calculated by the following formulaj(xj,yj,zj):
Figure BDA0002658337510000061
UjRepresents the position of the jth sphere center relative to the first sphere center, which can be calculated by:
Uj=Oj(xj,yj,zj)-O1(x1,y1,z1) (6)
mounting errors can cause the position of the sensor to deviate from the ideal position in figure 3 b. Deltai(Δxi,Δyi,Δzi) Indicating the position error of the sensor. The real coordinate system of the R-test is set on the laser beam of the sensor 1 and made to delta1=(0,0,0)。l'ijTo compensate for the distance of the rear sensor i to the jth measuring ball. As shown in fig. 3a and 3b, then point P'1j,P′2j,P′3jAre (0,0, - (R + l) respectively1-l′1j)),(Δx2,Δy2-(R+l2-l′2j),Δz2),(Δx3-(R+l3-l′3j),Δy3,Δz3). The position O 'after the sphere center compensation can be calculated'j(x′j,y′j,z′j) Comprises the following steps:
Figure BDA0002658337510000062
Dijrepresenting the distance reading of sensor i, one can obtain:
li-l′ij=Dij (8)
the true position of the jth sphere center relative to the first sphere center is:
U′j=O′j(x′j,y′j,z′j)-O′1(x′1,y′1,z′1) (9)
Vjindicating the commanded position of the jth sphere center relative to the first sphere center. The positioning error between the calculated position of the center of sphere and the commanded position can be calculated by:
f(Δxi,Δyi,Δzi)=||U′j-Vj|| (10)
the redundancy-free error model can be expressed as:
Figure BDA0002658337510000071
(3) solving the error which enables the target function to be minimum through an intelligent searching algorithm;
specifically, the flow chart of the recognition is shown in fig. 4. The optimization problem is solved by adopting a particle swarm algorithm which is simple in structure and rapid in search, firstly, the particle swarm algorithm provides a group of initial values for errors, and the initial values are expressed as deltai m(Δxi m,Δyi m,Δzi m). M denotes the mth (M ═ 1.., M) iteration. Then, the compensated center position of the sphere
Figure BDA0002658337510000072
By mixing ofi m(Δxi m,Δyi m,Δzi m) And substituting the formula (3) to obtain the product. The compensated relative position is calculated by equation (5). The average compensated positioning error is calculated by:
Figure BDA0002658337510000073
where S is the maximum number of iterations. New deltai m(Δxi m,Δyi m,Δzi m) Will be searched and updated by the particle swarm algorithm until the maximum number of iterations is reached, or EmConverge to the specified value η.
(4) And (4) sequentially compensating the position parameters of the sensor according to the error values obtained in the step (3), so as to finish the calibration of the non-contact R-test structural parameters.
In order to improve the calibration accuracy, the method further comprises the following steps: (5) and (3) comparing the precision of the industrial robot after compensation with the precision requirement, if the precision of the non-contact R-test after compensation is not in the precision requirement range, repeating the steps (2) - (4), continuing to compensate until the precision requirement is met, namely replacing the original parameters with the compensated parameters, namely replacing the initial values of the parameters in the step (2) by the parameters obtained by compensation in the step (4), then calculating the compensation values again, namely replacing the position values of each sensor in the step (2) by respective compensation values, then calculating the position compensation values of the sensors again according to the replaced parameters, finally compensating each parameter according to the compensation values of each parameter obtained by calculation again, and comparing the compensated values with the precision requirement until the precision requirement is met.
Taking a non-contact R-test consisting of three Kinz H050 laser displacement sensors as an example, the structural parameter calibration comprises the following steps:
step 1): the method comprises the following steps of mounting a sensor on a support piece, mounting the support piece on a workbench of a five-axis high-performance machining center (DUP 800DURO of Mikron), mounting a dial indicator on a machine tool spindle, and sequentially calibrating installation direction errors of the three sensors through the dial indicator and a calibration surface;
step 2): the method comprises the steps of installing a precision ball on a main shaft, and in order to verify the calibration method, dividing a measuring point into an identification point and a verification point, wherein the identification point is used for identifying the position error of a sensor, the verification point is used for verifying the calibration accuracy of the identified error, a machine tool drives the precision ball to move to the measuring point, the instruction position of the machine tool is recorded, and then distance data measured by three laser sensors are recorded, wherein the instruction position of the movement of the machine tool is the instruction position of the center of the sphere of the precision ball.
Step 3): and (3) taking the data obtained in the step (2) as an initial value and introducing the initial value into an identification method, and solving the position errors of the three sensors through an identification algorithm, wherein the identified position errors are shown in a table 1.
TABLE 1 identified sensor position error
Figure BDA0002658337510000081
Step 4): and compensating the identified position error to a non-contact R-test to obtain the positioning accuracy before and after compensation, wherein the positioning accuracy before and after compensation of the compensation point is shown in figure 5a, the positioning accuracy before and after compensation of the verification point is shown in figure 5b, and the mathematical statistical result is shown in table 2. It can be seen that after the non-contact R-test is calibrated by the provided calibration method, various mathematical statistics values of the positioning accuracy are improved by more than 80%, and the effectiveness of the provided method is proved.
TABLE 2 positioning accuracy at verification and Compensation points
Figure BDA0002658337510000082
The non-contact R-test structural parameter non-redundancy calibration method provided by the invention calibrates the direction error and the position error of the sensor, establishes a sensor position error non-redundancy error model, avoids the problem of low calibration precision caused by redundancy parameters, is simple and easy to implement and has high operation efficiency.
The above description is only exemplary of the present invention and should not be taken as limiting the invention, as any modification, equivalent replacement, or improvement made within the spirit and scope of the present invention should be included in the present invention.

Claims (10)

1. A non-contact R-test structural parameter redundancy-free calibration method is characterized by comprising the following steps: the method comprises the following steps:
firstly, sequentially calibrating installation direction errors of three sensors in a non-contact R-test;
step two, establishing a redundancy-free model about the errors of the installation positions of the other two sensors by taking the installation position of one sensor in the three sensors as a reference;
step three, solving the error which enables the target function to be minimum through an intelligent searching algorithm;
and step four, sequentially compensating the position parameters of the sensor according to the error values obtained in the step three, and completing the calibration of the non-contact R-test structural parameters.
2. The non-contact R-test structural parameter redundancy-free calibration method according to claim 1, characterized in that: in the first step, the sensors are installed on the supporting piece, and the installation directions of the three sensors are sequentially calibrated through the dial indicator, the standard gauge block and the calibration surface.
3. The non-contact R-test structural parameter redundancy-free calibration method according to claim 2, characterized in that: the specific process of the step one is as follows:
fixing the support piece on a machine tool workbench, installing the dial indicator on a machine tool spindle, aligning the standard gauge block with the calibration surface, moving the sensor to enable the sensor to be aligned with the calibration surface, measuring the direction precision of the calibrated sensor by using the dial indicator, and repeating the step until the direction precision of the sensor is within 0.001 mm.
4. The non-contact R-test structural parameter redundancy-free calibration method according to claim 2, characterized in that: the roughness of the three mounting planes of the support is at least 0.001 mm.
5. The non-contact R-test structural parameter redundancy-free calibration method according to claim 1, characterized in that: the redundancy-free model established in the second step is as follows:
Figure FDA0002658337500000011
wherein
f(Δxi,Δyi,Δzi)=||U′j-Vj||;
U′j=O′j(x′j,y′j,z′j)-O′1(x′1,y′1,z′1);
Wherein, VjFor the commanded position of the jth measured sphere center relative to the first sphere center, Δi(Δxi,Δyi,Δzi) Is the position error of sensor i (i ═ 1,2,3), O'j(x′j,y′j,z′j) Is the true position of the jth measured sphere center, O'1(x′1,y′1,z′1) Is the true position of the 1 st sphere center, O'j(x′j,y′j,z′j) And O'1(x′1,y′1,z′1) Calculated by the following formula:
xj 2+yj 2+(R+D1j+zj)2=R2
(Δx2-xj)2+(Δy2-(R+D2j)-yj)2+(Δz2-zj)2=R2
(Δx3-(R+D3j)-xj)2+(Δy3-yj)2+(Δz3-zj)2=R2
r is the radius of the precision sphere, DijRepresenting the distance reading of sensor i.
6. The non-contact R-test structural parameter redundancy-free calibration method according to claim 5, characterized in that: the command position is a command position acquired from the machine tool.
7. The non-contact R-test structural parameter redundancy-free calibration method according to claim 5, characterized in that: the roughness precision of the precision ball is at least 0.1 mu m.
8. The non-contact R-test structural parameter redundancy-free calibration method according to claim 1, characterized in that: the intelligent searching algorithm in the third step adopts a particle swarm algorithm.
9. The non-contact R-test structural parameter redundancy-free calibration method according to claim 1, characterized in that: the sensors are all laser displacement sensors.
10. The non-contact R-test structural parameter redundancy-free calibration method according to any one of claims 1 to 9, characterized in that: the method also comprises a fifth step, wherein the process of the fifth step is as follows:
comparing the precision of the industrial robot after compensation with the precision requirement, if the precision of the non-contact R-test after compensation is not in the precision requirement range, repeating the second step to the fourth step, and continuing to compensate until the precision requirement is met; and replacing the initial values of the parameters in the step two with the parameters obtained by compensation in the step four, then calculating the compensation values again, namely replacing the position value of each sensor in the step two with the respective compensation value, then calculating the position compensation value of the sensor again according to the replaced parameters, finally compensating the parameters according to the compensation values of the parameters obtained by calculation again, and comparing the compensated values with the precision requirement until the precision requirement is met.
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CN113532275B (en) * 2021-07-26 2022-05-06 西安交通大学 Non-contact R-test sphere center coordinate calibration method adopting laser displacement sensor
CN114252036A (en) * 2021-12-15 2022-03-29 成都飞机工业(集团)有限责任公司 Contact type R-Test instrument calibration method adopting ball head displacement sensor
CN114252036B (en) * 2021-12-15 2022-10-25 成都飞机工业(集团)有限责任公司 Contact type R-Test instrument calibration method adopting ball head displacement sensor
CN114234877A (en) * 2022-02-28 2022-03-25 成都飞机工业(集团)有限责任公司 Displacement sensor vector calibration method for R-test instrument
CN114234877B (en) * 2022-02-28 2022-06-14 成都飞机工业(集团)有限责任公司 Displacement sensor vector calibration method for R-test instrument

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Application publication date: 20201201