CN109115095A - A kind of structure parameter optimizing method of contactless R-test measuring instrument - Google Patents

A kind of structure parameter optimizing method of contactless R-test measuring instrument Download PDF

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CN109115095A
CN109115095A CN201810878564.3A CN201810878564A CN109115095A CN 109115095 A CN109115095 A CN 109115095A CN 201810878564 A CN201810878564 A CN 201810878564A CN 109115095 A CN109115095 A CN 109115095A
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sensor
measurement
measuring instrument
equation
center
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CN109115095B (en
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丁国富
江磊
丁国华
张剑
黎荣
邹益胜
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Chengdu Tianyou Hit Soft Technology Co Ltd
Southwest Jiaotong University
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Chengdu Tianyou Hit Soft Technology Co Ltd
Southwest Jiaotong University
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness

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Abstract

本发明公开了一种非接触式R‑test测量仪的结构参数优化方法，属于非接触式R‑test五轴数控机床转动轴误差测量仪器领域；其方法包括步骤1：建立采用电涡流位移传感器的非接触式R‑test测量仪的结构模型，并对结构模型的坐标进行预处理；步骤2：基于步骤1和传感器测得的感应电压构建测量灵敏度方程获得灵敏度最大化对应的传感器仰角；步骤3：基于灵敏度最大化的结构模型计算各传感器的测量约束方程；步骤4：计算同时满足测量约束方程的测量点个数即测量空间体积后，获得测量空间最大化对应的传感器中心间距，完成结构参数优化；解决了现有接触式R‑test测量仪因接触磨损和机械结构导致传感器读数灵敏度差和测量精度低等问题，实现了测量仪的精确测量。

The invention discloses a structure parameter optimization method of a non-contact R-test measuring instrument, belonging to the field of non-contact R-test five-axis numerically controlled machine tool rotation axis error measuring instruments; the method includes step 1: establishing an eddy current displacement sensor The structure model of the non-contact R‑test measuring instrument, and the coordinates of the structure model are preprocessed; Step 2: Based on Step 1 and the induced voltage measured by the sensor, construct a measurement sensitivity equation to obtain the sensor elevation angle corresponding to the maximum sensitivity; Step 2 3: Calculate the measurement constraint equation of each sensor based on the structural model with maximum sensitivity; Step 4: Calculate the number of measurement points that satisfy the measurement constraint equation at the same time, that is, after the measurement space volume, obtain the sensor center distance corresponding to the maximum measurement space, and complete the structure Parameter optimization; solves the problems of poor sensor reading sensitivity and low measurement accuracy caused by contact wear and mechanical structure of the existing contact R‑test measuring instrument, and realizes the accurate measurement of the measuring instrument.

Description

A kind of structure parameter optimizing method of contactless R-test measuring instrument
Technical field
The invention belongs to contactless R-test five-axle number control machine tool rotation axis error measure instrument fields, especially a kind of The structure parameter optimizing method of contactless R-test measuring instrument.
Background technique
With the increase of lathe service life, due to wearing, deforming etc., each component geometry precision of lathe is reduced, and makes The decline of its machining accuracy.The error of accurate measurement lathe point of a knife point is the key that carry out error compensation to improve its machining accuracy, And to the measurement of the geometric error of lathe rotation axis, there has been no dedicated fine measuring instrument and specifications, generally use laser interference The problems such as instrument, ball bar etc. are measured indirectly, and low, measurement accuracy that there are measurement efficiencies is influenced by installation error；Compared to upper State the deficiency of instrument, the RTCP of R-test measuring instrument combination five-axle number control machine tool RPCP linkage function, can directly measure identification and obtain The geometric error of rotation axis, the kinematic error of main shaft, thermal deformation errors etc. are taken, realize that the geometry of easy measurement lathe rotation axis misses Difference；R-test measuring instrument mainly uses two kinds of measurement methods to pass through tangent displacement sensor or non-contact displacement transducer Measuring center ball sphere centre coordinate；Very few about its research in the prior art, the research about R-test measuring instrument, which concentrates on, to be connect Touch measurement method, wherein big bright, Li Liangliang of Liu etc. proposes the measurement of the R-test instrument using tangent displacement sensor Principle, and analysis is optimized to its structure；Contact R-test measuring instrument Measurement Algorithm is simple, and sensor mounting location Deviation, which will not be constituted measurement result, to be influenced, but its mechanical structure causes the reading susceptibility of sensor not high, and contact brings mill Damage, causes measurement accuracy low.The measurement error that contactless R-test measuring instrument can generate to avoid measurement abrasion, and can be It being measured under the conditions of main shaft high-speed rotation, sensitivity of measurement and stability are more preferable, but in the prior art to contactless R- The research of test measuring instrument is very few；Shadow of the main performance index of contactless R-test measuring instrument by the structural parameters of measuring instrument Sound is larger, it is therefore desirable to which a kind of method optimizes the structural parameters of contactless R-test measuring instrument, realizes contactless R-test The high sensitivity of measurement and biggish measurement space.
Summary of the invention
It is an object of the invention to: the present invention provides a kind of structure parameter optimizing sides of contactless R-test measuring instrument Method solves existing contact R-test measuring instrument because contact wear and mechanical structure cause measurement sensitivity difference and measurement accuracy low The problem of.
The technical solution adopted by the invention is as follows:
A kind of structure parameter optimizing method of contactless R-test measuring instrument, includes the following steps:
Step 1: establishing the structural model of the contactless R-test measuring instrument using eddy current displacement sensor, and to knot The coordinate of structure model is pre-processed；
Step 2: the induced voltage building measurement measured according to pretreated structural model and eddy current displacement sensor Sensitivity equation obtains sensitivity and maximizes corresponding sensor angle of elevation alpha；
Step 3: the measurement constraint equation of each eddy current displacement sensor is calculated based on the maximized structural model of sensitivity；
Step 4: calculate simultaneously meet measurement constraint equation measurement point number measure spatial volume after, acquisition measure sky Between the corresponding center sensor spacing λ of volume maximization, complete structure parameter optimizing.
Preferably, the step 1 includes the following steps:
Step 1.1: establishing includes equally distributed three non-contact electric eddy shift sensors and a measurement ball Structural model；
Step 1.2: plane Δ ABC where defining three sensor bottom center points is benchmark face, sensor axis and base The angle in quasi- face is sensor angle of elevation alpha；
Step 1.3: establishing measurement coordinate system XYZ, coordinate system Z axis is overlapped with measuring instrument central axis, and the XOY of coordinate system is sat Mark face is parallel with datum level.
Preferably, the step 2 includes the following steps:
Step 2.1: in conjunction with pretreated structural model, according to the principle of induction and transducer calibration of current vortex sensor Test building sensor measurement characteristic curve equation one, equation one is as follows:
Wherein, k, t, m, n, q are sensor measurement characterisitic parameter, and δ is transducer range, LiIt is the measurement centre of sphere to i-th The distance of sensor sensing end face, riFor the centre of sphere to the distance of i-th of center sensor axis, rmaxIt can be effective for sensor Measure permitted maximum ri, UiFor the induced voltage that i-th of sensor measures, RBallTo measure the radius of a ball；
Step 2.2: assuming that the measurement characterisitic parameter of all the sensors is consistent, measurement coordinate origin is defined as in sensor The intersection point of mandrel line, that is, sensor elevation angle is α, and the centre of sphere is to the distance r of center sensor axisi=0, obtain following sensing Device measures characteristic curve equation two:
Step 2.3: calculating the centre of sphere and sensor end face distance Li:
Wherein, (x, y, z) is sphere centre coordinate, ai、bi、ci、diFor each sensor sensing end face equation coefficient；
Step 2.4: by LiThe variation delta U of induced voltage, meter are calculated after substitution sensor measurement characteristic curve equation two It is as follows to calculate formula:
Step 2.5: the variation delta U of induced voltage is subjected to mathematical distortions and obtains following formula:
Step 2.6: due to ai、bi、ci、diFor each sensor sensing end face equation coefficient, and diValue will not influence Δ U with Δ x, Δ y, the relationship between Δ z, therefore can be sweared with any one per unit system of sensor sensing end face indicate ai、bi、ciValue AndIt answers one group of per unit system of end face to swear according to sensor elevation angle the sense of access of measuring instrument, calculates measuring instrument Measurement sensitivity equation, equation be based on the face XOZ:
Wherein, Δ P is the measurement micro transformation matrices of ball sphere centre coordinateΔ U is the induction that sensor measures Voltage variety, the matrix J about sensor angle of elevation alpha indicate that the measurement micro transformation matrices Δ P of ball sphere centre coordinate and sensor are surveyed The mapping relations between induced voltage variation delta U obtained.
Step 2.7: the inverse for defining the conditional number of the matrix J about sensor angle of elevation alpha refers to as measurement sensitivity evaluation Prec is marked, the relation curve of measuring instrument sensitivity evaluation index Prec and sensor elevation angle a are drawn according to measurement sensitivity equation, The maximized sensor angle of elevation alpha of sensitivity is obtained according to curve.
Preferably, the step 3 includes the following steps:
Step 3.1: deriving that sensor can be surveyed effectively based on the maximized structural model of sensitivity (being based on XOZ plane) Measure permitted maximum riThat is rmaxEquation:
Wherein, M (x, y, z) is sensor external cylindrical surface any point, and V is sensor sensing end face normal vector, Pi-0For Each sensor sensing end face center point, rmaxPermitted maximum r can be effectively measured for each sensori；
Step 3.2: being based on the corresponding r of sensor 3maxThe survey of sensor 3 is obtained to sensor sensing end face distance with M point Measure constraint equation:
Wherein, RIt visitsFor sensor end radius, RBallTo measure the radius of a ball, δ is transducer range, and λ is between center sensor Away from i.e. measuring instrument central axis at a distance from the center of circle of sensor sensing end face；
Step 3.3: being based on the corresponding r of sensor 2maxThe survey of sensor 2 is obtained to sensor sensing end face distance with M point Measure constraint equation:
Step 3.4: being based on the corresponding r of sensor 1maxThe survey of sensor 1 is obtained to sensor sensing end face distance with M point Measure constraint equation:
Preferably, the step 4 includes the following steps:
Step 4.1: being calculated using monte-carlo search method and meet 3 measurement constraint sides under measurement spatial volume, that is, current λ The measurement point number of range request；
Step 4.2: the measurement space S under different λ is calculated based on step 4.1j, wherein j=1 ..., m；M is a of taken λ Number；
Step 4.3: drawing S- λ relation curve, obtain the corresponding center sensor spacing λ of measurement volume maximization, realize Measurement sensitivity maximizes and measurement space maximizes, and completes structure parameter optimizing.
In conclusion by adopting the above-described technical solution, the beneficial effects of the present invention are:
1. the present invention is by establishing contactless R-test structural model, by optimum structural parameter sensor angle of elevation alpha and Center sensor spacing λ realizes that measuring instrument measurement sensitivity and measurement space maximize, solves existing contact R-test and survey Amount instrument has reached because contact wear and mechanical structure lead to measurement sensitivity difference and the low problem of measurement accuracy and has improved measuring instrument The effect of measurement accuracy；
2. R-test measuring instrument susceptibility of the invention refers to that the minimum centre of sphere that can generate actual induction voltage signal is mobile Amount is related to sensor angle of elevation alpha；Plan range formula, structure are arrived according to sensor sensing voltage measurement characteristic curve equation and point Build induced voltage UiWith measurement ball sphere centre coordinate (x, y, z) functional relationship model, to establish the variation delta U of induced voltagei With the measurement micro transformation matrices Δ P of ball sphere centre coordinate (Δ x, Δ y, Δ z)TMatrix equation；With one group about sensor angle of elevation alpha Per unit system arrow matrix J replace Δ U- Δ P matrix equation in sensor sensing end face plane coefficient ai、bi、ciAnd di；According to Matrix analysis is theoretical, using the inverse of the conditional number of matrix J as measurement sensitivity evaluation index Prec, determines pair of Prec and α It should be related to, acquisition makes the maximum sensor angle of elevation alpha of measurement sensitivity evaluation index Prec, realizes that measuring instrument measurement sensitivity is maximum Change；
3. the maximum measurement space of the contactless R-test measuring instrument of the present invention is measurement ball centre of sphere institute energy in measurement process The maximum magnitude of movement is related to center sensor spacing λ；On the basis of guaranteeing that measuring instrument measurement sensitivity is maximum, establish Measurement constraint equation of each eddy current displacement sensor about center sensor spacing λ defines monte-carlo search section, benefit The point for meeting measurement constraint equation in the region of search is found with monte-carlo search method, is put under the spacing λ of different sensors center Number is the measurement space S of respective sensor center spacing λ, and acquisition makes to measure the maximum center sensor spacing λ of space S, Realize that measuring instrument measurement space maximizes.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached Figure is briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not construed as pair The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this A little attached drawings obtain other relevant attached drawings.
Fig. 1 is flow chart of the method for the present invention；
Fig. 2 is contactless R-test measuring instrument structural model figure of the invention；
Fig. 3 is sensor of the invention-measurement ball spatial relationship schematic diagram；
Fig. 4 is the graph of relation of sensitivity evaluation index Prec and sensor angle of elevation alpha of the invention；
Fig. 5 is centre of sphere motion range schematic diagram of the invention；
Fig. 6 is sensor of the invention and measurement geometry of sphere positional diagram；
Fig. 7 is measurement space S calculation flow chart of the invention；
Fig. 8 is the graph of relation of measurement space S and center sensor spacing λ of the invention.
Appended drawing reference: 1- measures ball, and 2- sensor i, 3- sensor i incudes end face, and 4- measures ball centre of sphere motion range, 5- Sensors A, 6- sensor B, 7- sensor C, A- sensors A bottom center point, B- sensor B bottom center point, C- sensor C Bottom center point, A1Sensors A incudes end face central point, B1Sensor B incudes end face central point, C1Sensor C induction end Face central point.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right The present invention is further elaborated.It should be appreciated that described herein, specific examples are only used to explain the present invention, not For limiting the present invention, i.e., described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is logical The component for the embodiment of the present invention being often described and illustrated herein in the accompanying drawings can be arranged and be designed with a variety of different configurations.
Therefore, the detailed description of the embodiment of the present invention provided in the accompanying drawings is not intended to limit below claimed The scope of the present invention, but be merely representative of selected embodiment of the invention.Based on the embodiment of the present invention, those skilled in the art Member's every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
It should be noted that the relational terms of term " first " and " second " or the like be used merely to an entity or Operation is distinguished with another entity or operation, and without necessarily requiring or implying between these entities or operation, there are any This actual relationship or sequence.Moreover, the terms "include", "comprise" or its any other variant be intended to it is non-exclusive Property include so that include a series of elements process, method, article or equipment not only include those elements, but also Further include other elements that are not explicitly listed, or further include for this process, method, article or equipment it is intrinsic Element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that including described There is also other identical elements in the process, method, article or equipment of element.
Technical problem: existing contact R-test measuring instrument is solved because contact wear and mechanical structure lead to measurement sensitivity The difference problem low with measurement accuracy；
Technological means:
A kind of structure parameter optimizing method of contactless R-test measuring instrument, includes the following steps:
Step 1: establishing the structural model of the contactless R-test measuring instrument using eddy current displacement sensor, and to knot The coordinate of structure model is pre-processed；
Step 2: the induced voltage building measurement measured according to pretreated structural model and eddy current displacement sensor Sensitivity equation obtains sensitivity and maximizes corresponding sensor angle of elevation alpha；
Step 3: the measurement constraint equation of each eddy current displacement sensor is calculated based on the maximized structural model of sensitivity；
Step 4: calculate simultaneously meet measurement constraint equation measurement point number measure spatial volume after, acquisition measure sky Between the corresponding center sensor spacing λ of volume maximization, complete structure parameter optimizing.
Step 1 includes the following steps:
Step 1.1: establishing includes equally distributed three non-contact electric eddy shift sensors and a measurement ball Structural model；Three non-contact electric eddy shift sensors are respectively sensors A, sensor B and sensor C；
Step 1.2: plane Δ ABC where defining three sensor bottom center points is benchmark face, sensor axis and base The angle in quasi- face is sensor angle of elevation alpha；
Step 1.3: establishing measurement coordinate system XYZ, coordinate system Z axis is overlapped with measuring instrument central axis, and the XOY of coordinate system is sat Mark face is parallel with datum level.
Step 2 includes the following steps:
Step 2.1: in conjunction with pretreated structural model, according to the principle of induction and transducer calibration of current vortex sensor Test building sensor measurement characteristic curve equation one, equation one is as follows:
Wherein, k, t, m, n, q are sensor measurement characterisitic parameter, and δ is transducer range, LiIt is the measurement centre of sphere to i-th The distance of sensor sensing end face, riFor the centre of sphere to the distance of i-th of center sensor axis, rmaxIt can be effective for sensor Measure permitted maximum ri, UiFor the induced voltage that i-th of sensor measures, RBallTo measure the radius of a ball；
Step 2.2: the measurement characterisitic parameter for defining all the sensors is consistent, and measurement coordinate origin is defined as in sensor The intersection point of mandrel line, that is, sensor elevation angle is α, and the centre of sphere is to the distance r of center sensor axisi=0, obtain following sensing Device measures characteristic curve equation two:
Step 2.3: calculating the measurement ball centre of sphere and sensor end face distance Li:
Wherein, (x, y, z) is sphere centre coordinate, ai、bi、ci、diFor each sensor sensing end face equation coefficient；
Step 2.4: by LiThe variation delta U of induced voltage, meter are calculated after substitution sensor measurement characteristic curve equation two It is as follows to calculate formula:
Step 2.5: the variation delta U of induced voltage is subjected to mathematical distortions and obtains following formula:
Step 2.6: due to ai、bi、ci、diFor each sensor sensing end face equation coefficient, and diValue will not influence Δ U with Δ x, Δ y, the relationship between Δ z, therefore can be sweared with any one per unit system of sensor sensing end face indicate ai、bi、ciValue AndIt answers one group of per unit system of end face to swear according to sensor elevation angle the sense of access of measuring instrument, calculates measuring instrument Measurement sensitivity equation, equation be based on the face XOZ:
Wherein, Δ P is the measurement micro transformation matrices of ball sphere centre coordinateΔ U is the induction that sensor measures Voltage variety, the matrix J about sensor angle of elevation alpha indicate that the measurement micro transformation matrices Δ P of ball sphere centre coordinate and sensor are surveyed The mapping relations between induced voltage variation delta U obtained.
Step 2.7: the inverse for defining the conditional number of the matrix J about sensor angle of elevation alpha refers to as measurement sensitivity evaluation Prec is marked, the relation curve of measuring instrument sensitivity evaluation index Prec and sensor elevation angle a are drawn according to measurement sensitivity equation, The maximized sensor angle of elevation alpha of sensitivity is obtained according to curve.
Step 3 includes the following steps:
Step 3.1: deriving that sensor can be surveyed effectively based on the maximized structural model of sensitivity (being based on XOZ plane) Measure permitted maximum riThat is rmaxEquation:
Wherein, M (x, y, z) is sensor external cylindrical surface any point, and V is sensor sensing end face normal vector, Pi-0For Each sensor sensing end face center point, rmaxPermitted maximum r can be effectively measured for each sensori；
Step 3.2: being based on the corresponding r of sensor 3maxThe survey of sensor 3 is obtained to sensor sensing end face distance with M point Measure constraint equation:
Wherein, RIt visitsFor sensor end radius, RBallTo measure the radius of a ball, δ is transducer range, and λ is between center sensor Away from i.e. measuring instrument central axis at a distance from the center of circle of sensor sensing end face；
Step 3.3: being based on the corresponding r of sensor 2maxThe survey of sensor 2 is obtained to sensor sensing end face distance with M point Measure constraint equation:
Step 3.4: being based on the corresponding r of sensor 1maxThe survey of sensor 1 is obtained to sensor sensing end face distance with M point Measure constraint equation:
Step 4 includes the following steps:
Step 4.1: being calculated using monte-carlo search method and meet 3 measurement constraint sides under measurement spatial volume, that is, current λ The measurement point number of range request；
Step 4.2: the measurement space S under different λ is calculated based on step 4.1j, wherein j=1 ..., m；M is a of taken λ Number；
Step 4.3: drawing S- λ relation curve, obtain the corresponding center sensor spacing λ of measurement volume maximization, realize Measurement sensitivity maximizes and measurement space maximizes, and completes structure parameter optimizing.
Technical effect: by establishing contactless R-test structural model, by optimum structural parameter sensor angle of elevation alpha and Center sensor spacing λ realizes that measuring instrument measurement sensitivity and measurement space maximize, solves existing contact R-test and survey Amount instrument has reached because contact wear and mechanical structure lead to measurement sensitivity difference and the low problem of measurement accuracy and has improved measuring instrument The effect of measurement accuracy；
Feature and performance of the invention are described in further detail with reference to embodiments.
Embodiment 1
As shown in Fig. 2,3,5 and 6, establishing includes equally distributed three non-contact electric eddy shift sensors and one Measure the structural model of ball 1；Three non-contact electric eddy shift sensors are respectively sensors A 5, sensor B6 and sensor C7；As shown in figure 4, the measurement sensitivity index Prec of contactless R-test measuring instrument with the variation of sensor angle of elevation alpha and Change, monotone decreasing after first monotonic increase is determined when α=33.69 °, and measurement sensitivity index Prec reaches maximum；Guaranteeing (α=33.69 ° are taken) on the basis of measurement sensitivity, between the measurement space S and center sensor of contactless R-test measuring instrument Relationship (r away from λmax=4mm, RIt visits=7mm, RBall=15mm, δ=4mm) as depicted in figure 8, it determines as λ=14mm, measures space S Maximum, about 33mm3。
The calculation process for measuring spatial volume S is as follows, and flow chart is as shown in Figure 7:
(1) region of search: x [x is definedmin,xmax], y [ymin,ymax], z [zmin,zmax](xmin、xmax、ymin、ymax、zmin、 zmaxValue should ensure that can cover all point sections met the requirements)；
(2) using unit length as step-length, the above-mentioned region of search is divided into n measurement point set, measurement point is defined as Pi (i=1 ..., n)；
(3) α=33.69 ° are set, in [RIt visits, RBall+ δ] in range with λ0λ (λ is successively taken for step-length0=1mm)；
(4) by measurement point PiTogether with parameter rmax、RIt visits、RBall, δ, α substitute into the measurement constraint equation of sensor 1,2,3 together； If meeting constraint equation (9), (10), (11) simultaneously, show PiIn effective centre of sphere motion range；
(5) measurement space S is equal to and meets the measurement point number that 3 measurement constraint equations require under current λ；
(6) the measurement space S under different λ can be obtained by repeating step (3)-(5)j(j=1 ..., m；M for taken λ number).
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.

Claims (5)

1.一种非接触式R-test测量仪的结构参数优化方法，其特征在于：包括如下步骤：1. a structure parameter optimization method of non-contact R-test measuring instrument, is characterized in that: comprise the steps: 步骤1：建立采用电涡流位移传感器的非接触式R-test测量仪的结构模型，并对结构模型的坐标进行预处理；Step 1: Establish a structural model of a non-contact R-test measuring instrument using an eddy current displacement sensor, and preprocess the coordinates of the structural model; 步骤2：根据预处理后的结构模型和电涡流位移传感器测得的感应电压构建测量灵敏度方程获得灵敏度最大化对应的传感器仰角α；Step 2: According to the preprocessed structural model and the induced voltage measured by the eddy current displacement sensor, a measurement sensitivity equation is constructed to obtain the sensor elevation angle α corresponding to the maximum sensitivity; 步骤3：基于灵敏度最大化的结构模型计算各电涡流位移传感器的测量约束方程；Step 3: Calculate the measurement constraint equation of each eddy current displacement sensor based on the structural model with maximum sensitivity; 步骤4：计算同时满足测量约束方程的测量点个数即测量空间体积后，获得测量空间体积最大化对应的传感器中心间距λ，完成结构参数优化。Step 4: After calculating the number of measurement points that satisfy the measurement constraint equation at the same time, that is, the measurement space volume, obtain the sensor center distance λ corresponding to the maximization of the measurement space volume, and complete the structural parameter optimization. 2.根据权利要求1所述的一种非接触式R-test测量仪的结构参数优化方法，其特征在于：所述步骤1包括如下步骤：2. the structural parameter optimization method of a kind of non-contact R-test measuring instrument according to claim 1, is characterized in that: described step 1 comprises the steps: 步骤1.1：建立包括均匀分布的三个非接触式电涡流位移传感器和一个测量球的结构模型；Step 1.1: Establish a structural model including three uniformly distributed non-contact eddy current displacement sensors and a measuring ball; 步骤1.2：定义三个传感器底端中心点所在平面ΔABC为基准面，传感器轴线与基准面的夹角均为传感器仰角α；Step 1.2: Define the plane ΔABC where the center points of the bottom ends of the three sensors are located as the reference plane, and the angle between the sensor axis and the reference plane is the sensor elevation angle α; 步骤1.3：建立测量坐标系XYZ，坐标系Z轴与测量仪中心轴线重合，坐标系的XOY坐标面与基准面平行。Step 1.3: Establish a measurement coordinate system XYZ, the Z axis of the coordinate system coincides with the central axis of the measuring instrument, and the XOY coordinate plane of the coordinate system is parallel to the reference plane. 3.根据权利要求2所述的一种非接触式R-test测量仪的结构参数优化方法，其特征在于：所述步骤2包括如下步骤：3. the structural parameter optimization method of a kind of non-contact R-test measuring instrument according to claim 2, is characterized in that: described step 2 comprises the steps: 步骤2.1：结合预处理后的结构模型，根据电涡流传感器的感应原理和传感器标定试验构建传感器测量特性曲线方程一，方程一如下：Step 2.1: Combined with the pre-processed structural model, according to the induction principle of the eddy current sensor and the sensor calibration test, construct the sensor measurement characteristic curve equation 1. Equation 1 is as follows: 其中，k、t、m、n、q为传感器测量特性参数，δ为传感器量程，Li为测量球心到第i个传感器感应端面的距离，ri为球心到第i个传感器中心轴线的距离，rmax为传感器能够有效测量所允许的最大ri，Ui为第i个传感器测得的感应电压，R球为测量球半径；Among them, k, t, m, n, and q are the measurement characteristic parameters of the sensor, δ is the sensor range, Li is the distance from the center of the measurement sphere to the sensing end face of the ith sensor, and ri is the center of the sphere to the center axis of the ith sensor distance, r max is the maximum allowable r i that the sensor can measure effectively, U i is the induced voltage measured by the ith sensor, and R sphere is the radius of the measuring sphere; 步骤2.2：假设所有传感器的测量特性参数一致，测量坐标系原点定义为传感器中心轴线的交点即传感器仰角均为α，且球心到传感器中心轴线的距离ri＝0，获得如下传感器测量特性曲线方程二：Step 2.2: Assuming that the measurement characteristic parameters of all sensors are the same, the origin of the measurement coordinate system is defined as the intersection of the sensor center axis, that is, the sensor elevation angle is α, and the distance from the center of the sphere to the sensor center axis ri =0, obtain the following sensor measurement characteristic curve Equation two: Ui＝kLi m+q (i＝1,2,3)U i =kL i m +q (i=1,2,3) 步骤2.3：计算球心与传感器端面的距离Li：Step 2.3: Calculate the distance Li between the center of the sphere and the end face of the sensor : 其中，(x,y,z)为球心坐标，ai、bi、ci、di为各传感器感应端面方程系数；Among them, (x, y, z) are the coordinates of the center of the sphere, and a i , bi , c i , and d i are the induction end face equation coefficients of each sensor; 步骤2.4：将Li代入传感器测量特性曲线方程二后计算感应电压的变化量ΔU，计算公式如下：Step 2.4: Substitute Li into the sensor measurement characteristic curve equation 2 to calculate the variation ΔU of the induced voltage. The calculation formula is as follows: 步骤2.5：将感应电压的变化量ΔU进行数学变形获得如下公式：Step 2.5: Mathematically deform the variation ΔU of the induced voltage to obtain the following formula: 步骤2.6：由于ai、bi、ci、di为各传感器感应端面方程系数，且di的值不会影响ΔU与Δx、Δy、Δz之间的关系，故可以用传感器感应端面的任意一个单位法矢表示ai、bi、ci的值且根据测量仪的传感器仰角获得感应端面的一组单位法矢，计算测量仪的测量灵敏度方程，方程基于XOZ面：Step 2.6: Since a i , b i , c i , and d i are the coefficients of the induction end face equation of each sensor, and the value of d i will not affect the relationship between ΔU and Δx, Δy, and Δz, the sensor can be used to sense the end face. Any unit normal vector represents the value of a i , bi , c i and According to the sensor elevation angle of the measuring instrument, a set of unit normal vectors of the sensing end face are obtained, and the measurement sensitivity equation of the measuring instrument is calculated. The equation is based on the XOZ plane: 其中，ΔP为测量球球心坐标微量变化矩阵(Δx，Δy，Δz)T，ΔU为传感器测得的感应电压变化量，关于传感器仰角α的矩阵J表示测量球球心坐标微量变化矩阵ΔP与传感器测得的感应电压变化量ΔU之间的映射关系。Among them, ΔP is the measurement sphere center coordinate micro-change matrix (Δx, Δy, Δz) T , ΔU is the induced voltage change measured by the sensor, the matrix J about the sensor elevation angle α represents the measurement sphere center coordinate micro-change matrix ΔP and The mapping relationship between the induced voltage variation ΔU measured by the sensor. 步骤2.7：定义关于传感器仰角α的矩阵J的条件数的倒数作为测量灵敏度评价指标Prec，根据测量灵敏度方程绘制测量仪灵敏度评价指标Prec与传感器仰角a的关系曲线，根据曲线获得灵敏度最大化的传感器仰角α。Step 2.7: Define the reciprocal of the condition number of the matrix J about the sensor elevation angle α as the measurement sensitivity evaluation index Prec, draw the relationship curve between the measurement instrument sensitivity evaluation index Prec and the sensor elevation angle a according to the measurement sensitivity equation, and obtain the sensor with the maximum sensitivity according to the curve. Elevation angle α. 4.根据权利要求3所述的一种非接触式R-test测量仪的结构参数优化方法，其特征在于：所述步骤3包括如下步骤：4. the structural parameter optimization method of a kind of non-contact R-test measuring instrument according to claim 3, is characterized in that: described step 3 comprises the steps: 步骤3.1：基于灵敏度最大化的结构模型(基于XOZ平面)推导出传感器能够有效测量所允许的最大ri即rmax方程：Step 3.1: Based on the sensitivity-maximizing structural model (based on the XOZ plane), derive the maximum r i that the sensor can effectively measure, the r max equation: 其中，M(x，y，z)为传感器外圆柱面任意一点，V为传感器感应端面法向矢量，Pi-0为各传感器感应端面中心点，rmax为各传感器能够有效测量所允许的最大ri；Among them, M(x, y, z) is any point on the outer cylindrical surface of the sensor, V is the normal vector of the sensing end face of the sensor, P i-0 is the center point of the sensing end face of each sensor, and r max is the allowable amount that each sensor can measure effectively. maximum ri ; 步骤3.2：基于传感器3对应的rmax和M点到传感器感应端面距离获得传感器3的测量约束方程：Step 3.2: Obtain the measurement constraint equation of sensor 3 based on the distance from the r max and M point corresponding to sensor 3 to the sensing end face of the sensor: 其中，R探为传感器端部半径，R球为测量球半径，δ为传感器量程，λ为传感器中心间距即测量仪中心轴线与传感器感应端面圆心的距离；Among them, R probe is the radius of the end of the sensor, R ball is the radius of the measuring ball, δ is the sensor range, λ is the distance between the center of the sensor, that is, the distance between the center axis of the measuring instrument and the center of the sensing end face of the sensor; 步骤3.3：基于传感器2对应的rmax和M点到传感器感应端面距离获得传感器2的测量约束方程：Step 3.3: Obtain the measurement constraint equation of sensor 2 based on the distance from point rmax and point M corresponding to sensor 2 to the sensing end face of the sensor: 步骤3.4：基于传感器1对应的rmax和M点到传感器感应端面距离获得传感器1的测量约束方程：Step 3.4: Obtain the measurement constraint equation of sensor 1 based on the distance from the r max and point M corresponding to sensor 1 to the sensing end face of the sensor: 5.根据权利要求4或者1所述的一种非接触式R-test测量仪的结构参数优化方法，其特征在于：所述步骤4包括如下步骤：5. the structural parameter optimization method of a kind of non-contact R-test measuring instrument according to claim 4 or 1, is characterized in that: described step 4 comprises the steps: 步骤4.1：利用蒙特卡罗搜索法计算测量空间体积即当前λ下满足3个测量约束方程要求的测量点个数；Step 4.1: Use the Monte Carlo search method to calculate the measurement space volume, that is, the number of measurement points that meet the requirements of the three measurement constraint equations under the current λ; 步骤4.2：基于步骤4.1计算不同λ下的测量空间Sj，其中j＝1，…，m；m为所取λ的个数；Step 4.2: Calculate the measurement space S j under different λ based on step 4.1, where j = 1, ..., m; m is the number of λ taken; 步骤4.3：绘制S-λ关系曲线，获得测量空间最大化对应的传感器中心间距λ，实现测量灵敏度最大化和测量空间最大化，完成结构参数优化。Step 4.3: Draw the S-λ relationship curve, obtain the sensor center distance λ corresponding to the maximum measurement space, maximize the measurement sensitivity and the measurement space, and complete the structural parameter optimization.
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