CN111521103A - Method and device for detecting flatness of crystal bar - Google Patents
Method and device for detecting flatness of crystal bar Download PDFInfo
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- CN111521103A CN111521103A CN202010436891.0A CN202010436891A CN111521103A CN 111521103 A CN111521103 A CN 111521103A CN 202010436891 A CN202010436891 A CN 202010436891A CN 111521103 A CN111521103 A CN 111521103A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/02—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness
- G01B5/06—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness for measuring thickness
Abstract
The invention provides a method and a device for detecting the flatness of a crystal bar, wherein the method comprises the following steps: (1) placing a crystal bar to be detected on a sample table, and controlling the distance from a dial indicator probe to the surface of the sample table to be larger than the thickness of the crystal bar, wherein the difference between the distance and the thickness of the crystal bar is a first distance; (2) and vertically moving the dial indicator by a second distance to enable the probe of the dial indicator to contact or separate from the surface to be detected, controlling the horizontal relative position of the dial indicator and the crystal bar, obtaining dial indicator values of a plurality of test points on the surface to be detected, and obtaining the difference value between the maximum value and the minimum value, namely the flatness of the crystal bar. The method of the invention obtains the dial indicator values of different test points of the crystal bar by moving the dial indicator for a fixed distance, detects the total thickness change of the surface of the silicon carbide crystal bar, and is used for representing the surface flatness of the crystal bar.
Description
Technical Field
The invention relates to a method and a device for detecting the flatness of a crystal bar, belonging to the technical field of sample surface flatness detection.
Background
Silicon carbide (SiC) single crystal has excellent semiconductor physical properties such as high thermal conductivity, high breakdown voltage, extremely high carrier mobility, high chemical stability and the like, can be manufactured into high-frequency and high-power electronic devices and optoelectronic devices which work under the conditions of high temperature and strong radiation, has great application value in the fields of national defense, high technology, industrial production, power supply and power transformation, and is regarded as a third-generation wide-bandgap semiconductor material with great development prospect.
The silicon carbide has strong ionic covalent bonds and has the properties of high hardness, strong corrosion resistance, high temperature resistance, good chemical stability and the like, so that the processing of the semiconductor silicon carbide material is also a technical problem obtained by the prior high-quality silicon carbide substrate material, and the quality monitoring test of each process of material processing is very important. At present, the thickness of a semiconductor silicon carbide single crystal grown by a relatively mature vapor transport method (PVT) is usually less than 50 mm, and the silicon carbide crystal is subjected to rounding, surface grinding and positioning edge processing to obtain a silicon carbide crystal bar with a standard size. Because of the small thickness of a single silicon carbide crystal bar, in order to improve the cutting efficiency and reduce the cost of the subsequent silicon carbide crystal bar, a plurality of silicon carbide crystal bars are generally bonded together to obtain a crystal bar body with the total thickness meeting the cutting length requirement. In order to ensure the smoothness of bonding between silicon carbide crystal bars and reduce the surface deviation of a cutting piece caused by bonding, the surface smoothness of each silicon carbide crystal bar is required to be controlled, so that the rapid and accurate test of the surface smoothness of the silicon carbide crystal bars is a necessary condition for obtaining high-quality silicon carbide single crystal pieces.
Currently, the methods for testing the surface flatness of silicon carbide crystal bars are generally used as follows: a caliper or a screw micrometer is adopted for multi-point thickness measurement, and the flatness value of the crystal bar is obtained through the thickness difference of different points of the thickness, but the test method has the advantages of few test points, low efficiency and large test error caused by manual operation. In another method, a flatness result of the crystal bar is obtained by testing fluctuation deviation of the surface of the crystal bar, the detector is descended by fixing a reference surface on the detector, the moving distance of the detector is recorded when the detector is in contact with a sample, and the flatness result is obtained by calculating distance deviation through multi-point testing.
Disclosure of Invention
In order to solve the problems, the invention provides a method and a device for detecting the flatness of a crystal bar, wherein the total thickness change of the surface of the silicon carbide crystal bar is detected by ascending or descending a dial indicator for a fixed distance to represent the surface flatness of the crystal bar; the device controls the dial indicator to ascend or descend through the lifting device, and therefore the rapid and accurate test of each test point on the crystal bar is achieved.
According to one aspect of the application, a method for detecting the flatness of an ingot is provided, and the method comprises the following steps:
(1) placing a crystal bar to be tested on a sample platform, enabling the surface to be tested of the crystal bar to face a dial indicator, wherein the dial indicator comprises a dial plate, a fixed shaft sleeve and a probe, the fixed shaft sleeve is fixed at the lower end of the dial plate, the probe is retractable in the fixed shaft sleeve, the distance from the probe to the surface of the sample platform is controlled to be larger than the thickness of the crystal bar, and the difference between the distance and the thickness of the crystal bar is a first distance;
(2) vertically moving a dial indicator by a second distance to enable the probe to be in contact with or separate from the surface to be detected, controlling the horizontal relative position of the dial indicator and the crystal bar, obtaining dial indicator values of a plurality of test points on the surface to be detected, and obtaining the difference value between the maximum value and the minimum value, namely the flatness of the crystal bar;
and the second distance is greater than the first distance and less than the sum of the first distance and the dial indicator range.
Further, the second distance is greater than the sum of the first distance and one quarter of the range of the dial indicator and is less than the sum of the first distance and three quarters of the range of the dial indicator; preferably, the second distance is the sum of the first distance and one-half measuring range of the dial indicator; preferably, the dial gauge range is selected from at least one of 0.5mm, 0.8mm, 1mm and 5 mm.
Further, the first distance is less than 10 mm; preferably, the first distance is 0.5 to 5 mm.
Furthermore, the test points are in a cross shape, a meter shape and/or a zigzag shape; preferably, the plurality of test points are symmetrically distributed on the crystal bar; preferably, the number of the test points is at least more than 5; preferably, the number of the test points is 17.
Further, in the step (2), the method for controlling the horizontal relative position of the dial indicator and the crystal bar comprises the following steps: controlling the sample stage to move in the X and/or Y direction, so that the dial indicator is positioned right above different test points on the crystal bar; preferably, the sample stage moves in the X or Y direction by a distance of at least 200 mm.
Further, in the step (2), the method for obtaining the dial indicator values of the plurality of test points on the crystal bar comprises the following steps: and the dial indicator transmits the numerical value to the data receiver, and the dial indicator numerical values of the plurality of test points are obtained on the data receiver.
Further, in the step (2), the specific operation of controlling the dial indicator to sequentially ascend or descend by taking the distance as the second distance is as follows: and controlling the dial indicator to sequentially ascend or descend by a set fixed distance by using the controller.
Further, the size of the crystal bar is selected from at least one of 2inch and more; preferably, the size of the crystal bar is selected from at least one of 2inch, 3inch, 4inch, 6inch and 8 inch.
According to another aspect of the application, a device for realizing the method is provided, and the device comprises a sample table, a dial indicator and a lifting device, wherein the sample table is used for placing a crystal bar to be tested, the dial indicator is arranged above the sample table, and the lifting device is connected with the dial indicator and is used for controlling the dial indicator to ascend and/or descend;
furthermore, the device also comprises a base, and the sample table is horizontally arranged on the base in a sliding manner.
Preferably, the sample stage comprises a first sample stage and a second sample stage, the second sample stage is provided with an X-direction chute, the base is provided with a Y-direction chute, the bottom end of the first sample stage is connected with the X-direction chute through a slide block, the bottom end of the second sample stage is connected with the Y-direction chute through a slide block,
preferably, the first sample stage and the second sample stage are respectively fixedly connected with a ball screw.
Furthermore, the lifting device comprises a screw rod and a lifting platform, one end of the screw rod is in threaded fit connection with the base, and a clamping part for fixing the dial indicator and a screw hole through which the screw rod penetrates are arranged on the lifting platform.
Preferably, the device also comprises a controller, and the controller is respectively connected with the sample stage and the lifting stage.
The invention has the beneficial effects that:
(1) the method can obtain the dial indicator value of the crystal bar test point by moving the dial indicator for a fixed distance and contacting the dial indicator with the surface to be tested, and detects the total thickness change of the surface of the silicon carbide crystal bar by controlling the horizontal relative position of the dial indicator and the crystal bar so as to represent the surface flatness of the crystal bar.
(2) The method of the invention optimizes the point-taking style and the point-taking quantity of a plurality of test points, thereby ensuring the test efficiency and being beneficial to the accuracy and the uniformity of test results; and the movement of the sample stage is controlled, so that the point taking test of different test points of the crystal bar can be realized, the limitation of the size of the crystal bar is avoided, and the flatness test of the surfaces of the crystal bars with different sizes can be met.
(3) The method of the invention can ensure the accuracy and consistency of the readings on a plurality of different test points by transmitting the value of the dial indicator to the data receiver and acquiring the value of the dial indicator from the data receiver.
(4) The device controls the dial indicator to ascend and descend through the lifting device, can realize the test of the flatness of the crystal bar, can realize the automatic control of the ascending and descending of the dial indicator and the movement of the sample stage through the arrangement of the controller, and has simple structure and high detection efficiency of the flatness of the crystal bar.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and not to limit the invention.
In the drawings:
FIG. 1 is a schematic structural diagram of an apparatus for detecting a crystal bar according to the present invention;
FIG. 2 is a schematic view of an assembly structure of the base and the lifting device of the present invention;
FIG. 3 is a schematic structural diagram of a sample stage according to the present invention;
FIG. 4 is a schematic diagram of a cross-shaped point-taking test of the present invention, point A, 5 tests; B. 9-point testing; C. testing at 17 points;
FIG. 5 is a schematic diagram of a Mi-shaped point-taking test according to the present invention, wherein points A and 9 are tested; B. testing at 17 points;
FIG. 6 is a schematic diagram of the zigzag point test of the present invention, point A and 9; B. testing at 49 points; C. testing at 57 points;
FIG. 7 is a schematic diagram illustrating the flatness detection result of the ingot according to the present invention;
wherein, 1, a first sample table; 2. a second sample stage; 21. an X-direction chute; 3. a base; 31. a Y-direction chute; 4. a dial indicator; 5. a lifting platform; 51. a clamping portion; 511. a first clamp; 512. a second clamp; 52. a connecting portion; 521. a screw hole; 522. a bevel; 6. a lead screw; 7. a displacement limiting frame; 71. a restraining bar; 72. a short bar; 8. a controller; 9. a data receiver; 10. a ball screw.
Detailed Description
The present invention will be described in detail with reference to examples, but the present invention is not limited to these examples.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced in other ways than those specifically described herein, and therefore the scope of the present invention is not limited by the specific embodiments disclosed below.
In addition, in the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.
The embodiments in the present specification are described in a progressive manner, and the same and similar parts among the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integral; the connection can be mechanical connection, connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Example 1
Referring to fig. 1 and 2, an embodiment of the invention discloses a device for detecting flatness of a crystal bar, which comprises a sample stage, a base 3, a dial indicator 4 and a lifting device; the sample table is used for placing a crystal bar to be tested; the sample table is horizontally arranged on the base 3in a sliding manner; the dial indicator 4 is arranged right above the base 3; the lifting device comprises a lifting platform 5, a clamping part 51 for fixing the dial indicator 4 is arranged on the lifting platform 5, and the lifting device is used for controlling the dial indicator 4 to ascend and descend.
According to the method and the device, the lifting device is connected with the dial indicator 4, so that the dial indicator 4 can ascend and descend, the probe on the dial indicator 4 is contacted with the surface to be measured of the crystal bar, and the dial indicator value of the surface to be measured can be obtained; and different test points on the surface to be tested can be positioned under the dial indicator 4 by horizontally moving the sample stage on the base 3, dial indicator values of the different test points on the surface to be tested are obtained after the dial indicator 4 is moved in the vertical direction, and the difference value between the maximum value and the minimum value is the total thickness change TTV of the surface of the crystal bar, so that the flatness of the surface of the crystal bar is obtained.
As a preferred embodiment of the present application, the clamping portion 51 includes a first clamp 511 and a second clamp 512, one end of the first clamp 511 and one end of the second clamp 512 are fixed, the other end of the first clamp 511 and the other end of the second clamp 512 are both provided with a screw hole through which a bolt passes, and the dial indicator 4 is fixed between the first clamp 511 and the second clamp 512. The device of this application is when using, fixes through the fixed axle sleeve with amesdial 4 between first anchor clamps 511 and second anchor clamps 512, and presss from both sides amesdial 4 tight fixedly through the bolt for amesdial 4 is not hard up, not slide in the testing process, guarantees the accuracy of amesdial 4 test result, and makes things convenient for the dismouting and the change of amesdial 4.
As a preferred embodiment of this application, elevating gear still includes lead screw 6, the one end and the base 3 screw-thread fit of lead screw 6 are connected, the middle part of lead screw 6 with elevating platform 5 threaded connection. The screw thread rotary motion at the end or the middle part of the screw rod 6 is converted into the motion of the screw rod 6in the vertical direction, and the screw rod 6 is connected with the lifting platform 5, so that the lifting platform 5 moves in the vertical direction, the lifting platform 5 is lifted and lowered, and the dial indicator 4 is driven to lift and fall. Preferably, the lifting device further comprises a power device for driving the screw rod to move, and the power device is used for converting the rotary motion of the screw rod 6 into the linear motion. As a preferred embodiment of the present application, the lifting table 5 includes a connecting portion 52, and a screw hole 521 through which a lead screw passes is formed on the connecting portion 52. Preferably, the middle of the lifting platform 5 is provided with a connecting part 52, one side of the lifting platform is provided with a clamping part 51, and the side opposite to the clamping part 51 is provided with a clamping part which comprises a screw hole through which a bolt can pass to clamp and fix the screw rod 6.
As a preferred embodiment of the present application, the connecting portion 52 is provided with a slope 522 inclined downward toward the holding portion 51, and the slope provides a sufficient operating space for replacing the dial gauge 4. The inclined plane 522 of downward sloping for the thickness of clamping part 51 is less than the thickness of connecting portion 52, and after fixing dial indicator 4in the installation, there is certain distance between dial indicator 4 and connecting portion 52, avoids dial plate part of dial indicator 4 to touch connecting portion 52 surface, influences the accuracy of test result.
As a preferred embodiment of the present application, the detecting device further includes a displacement limiting frame 7, the connecting portion of the lead screw 6 and the lifting platform 5 is located inside the displacement limiting frame 7, the displacement limiting frame 7 includes a plurality of limiting rods 71, one end of each of the limiting rods 71 is fixed on the base 3, the adjacent limiting rods 71 at the other end are connected through a short rod 72, and the height of the limiting rod 71 is large enough but not larger than the height of the lead screw 6, so as to satisfy the lifting displacement of the lifting device. The lead screw 6 and the lifting platform 5 penetrate through the displacement limiting frame 7, the displacement limiting frame 7 is used for limiting the horizontal shaking of the lead screw 6 and the lifting platform 5, and the influence of the shaking of the lead screw 6 and the lifting platform 5 on the test result of the dial indicator 4 is effectively avoided.
Referring to fig. 3, as a preferred embodiment of the present application, the sample stage includes a first sample stage 1 and a second sample stage 2, the second sample stage 2 is provided with an X-direction chute 21, the base 3 is provided with a Y-direction chute 31, the bottom end of the first sample stage 1 is connected with the X-direction chute 21 through a slider, the bottom end of the second sample stage 2 is connected with the Y-direction chute 31 through a slider, and the ingot to be measured is placed on the first sample stage 2. The movable range of the sample stage in the X direction and the Y direction is at least 200mm, so that the 8inch crystal bar test is met.
This application is through setting up two sample platforms, and first sample platform 1 realizes the removal of sample platform in the X direction through the removal of slider at X direction spout 21, and the removal of sample platform in the Y direction has been realized through the slider removal at Y direction spout 31 in 2 bottoms of second sample platform. The horizontal movement of the sample stage in the X and Y directions may also be implemented in other manners or structures conventionally used in the art, as long as the horizontal movement of the sample stage is achieved.
Preferably, the first sample stage 1 and the second sample stage 2 are respectively connected to a ball screw 10, and the linear motion of the first sample stage 1 and the second sample stage 2 driven by the ball screw in the X-direction chute 21 and the Y-direction chute 31 is realized through the rotation motion of the ball screw. Preferably, the detection device further comprises a power device for driving the ball screw to move, and the power device is used for converting the rotary motion of the ball screw into the linear motion.
As a preferred embodiment of the present application, the detection apparatus further comprises a controller 8, and the controller 8 is connected to the lifting table 5 and the sample table, respectively. Preferably, the controller 8 is respectively connected with the screw 6 on the lifting table 5 and the ball screw 10 on the sample table, and is used for controlling the movement of the screw 6 and the ball screw 10, so as to realize the automatic control of the lifting table 5 and the movement of the sample table.
As a preferred embodiment of the application, the detection device further comprises a data receiver 9, and the data receiver 9 is connected with the dial indicator 4. The numerical values on the dial indicator 4 are transmitted to the data receiver 9, the numerical values of the dial indicator 4 of different test points are obtained through the data receiver 9, errors caused by subjective reading are avoided, and the accuracy and consistency of the reading on the different test points are guaranteed.
As a preferred embodiment of the application, the sample stage is provided with a first clamping piece and a second clamping piece, and the first clamping piece and the second clamping piece are used for fixing the crystal bar to be detected. Preferably, the first clamping piece is a fixed clamping piece, the second clamping piece is a movable clamping piece, one end of the movable clamping piece is fixed on the sample table, and the other end of the movable clamping piece can rotate; or the second clamping piece can be a fixed clamping piece, the first clamping piece is a movable clamping piece, one end of the movable clamping piece is fixed on the sample table, and the other end of the movable clamping piece can rotate; or the first clamping piece and the second clamping piece are movable clamping pieces. The crystal bar to be tested is fixed between the first clamping piece and the second clamping piece, so that the crystal bar to be tested is ensured to be fixed on the sample table in the testing process, and the influence of the movement of the crystal bar to be tested on the sample table on the point taking test of different test points of the crystal bar is avoided.
As a preferred embodiment of the present application, the structure that the ingot to be measured is fixed on the sample stage may be other manners conventionally used in the art. For example, a sample cell is arranged on the sample stage, a micro vacuum absorber is arranged at the bottom end of the sample cell, and the micro vacuum absorber is used for fixing the crystal bar to be detected in the sample cell.
As a preferred embodiment of the present application, the base 3 has a flatness of less than 10 μm; preferably, the base 3 is a marble base. The flatness of the base 3 can influence the test of the crystal bar to be tested on the sample table, so that the test result of the flatness of the crystal bar to be tested by external factors is reduced by selecting the base 3 with good flatness, and the accuracy and consistency of the test result are ensured.
As is well known in the art, the dial indicator 4 includes a dial plate, a fixed shaft sleeve, a measuring rod and a probe, the fixed shaft sleeve is fixed at the lower end of the dial plate, the measuring rod is located inside the fixed shaft sleeve, one end of the measuring rod fixes the probe, the other end of the measuring rod is connected with a rack gear or a lever gear, and the probe can be retracted in the fixed shaft sleeve. The dial gauge range is selected from at least one of 0.5mm, 0.8mm, 1mm and 5 mm. The working principle of the dial gauge is that the small linear movement of the measuring rod caused by the measured dimension is amplified through gear transmission and changed into the rotation of the indicator at the dial plate part, so that the measured dimension is read.
Example 2
The embodiment provides a method for detecting the flatness of an ingot by using the device, which comprises the following steps:
(1) placing a dial indicator above a sample table, wherein the distance between a probe of the dial indicator and the surface of the sample table is larger than the thickness of the crystal bar, the sample table is arranged on a base, and the flatness of the surface of the base is smaller than 10 mu m;
(2) placing a crystal bar to be tested on a sample table, and controlling the difference value between the distance from the probe of the dial indicator to the surface of the sample table and the thickness of the crystal bar to be a first distance; preferably, the first distance is less than 10mm, more preferably, the first distance is 0.5-5 mm, so that the ascending and descending distances and time of the dial indicator are reduced, and the testing efficiency is improved;
the method comprises the following steps that (1) a dial indicator is placed above a sample table, the order of placing a crystal bar to be tested on the sample table in the step (2) is not required, the crystal bar can be placed first, and then the dial indicator is placed;
(3) controlling the dial indicator to sequentially ascend or descend by a second distance, wherein the second distance is fixed in the test process, so that the probe of the dial indicator is in contact with the crystal bar; the second distance is greater than the first distance and less than the sum of the first distance and the dial indicator range; preferably, the second distance is greater than the sum of the first distance and one-fourth range of the dial indicator and is less than the sum of the first distance and three-fourth range of the dial indicator; more preferably, the second distance is the sum of the first distance and one-half measuring range of the dial indicator;
(4) setting a point taking pattern and a point taking quantity of test points, wherein the test points are in a cross shape, a rice character shape and/or a zigzag shape; more preferably, the plurality of test points are symmetrically distributed on the crystal bar; the number of the test points is at least more than 5; preferably, the number of the test points is 17; more preferably, a 'mi' type 17 point sampling test is adopted, as shown in FIGS. 4-6;
(5) controlling the horizontal relative position of the dial indicator and the crystal bar, controlling the sample stage to move in the X and/or Y direction to enable the dial indicator to be positioned right above different test points on the crystal bar, obtaining dial indicator values of a plurality of test points on the crystal bar,
the specific operation is as follows: the controller can be used for operating a moving program of the lifting device, the dial indicator can be used for setting the ascending distance and the descending distance according to the set ascending distance and the set descending distance, the ascending distance and the descending distance are both the second distance, the dial indicator starts to descend to contact the surface of the crystal bar to be tested, the data receiver reads the numerical value of the dial indicator of each test point, when each test point is tested, the controller controls the ascending distance of the dial indicator to be away from the surface of the sample, the controller controls the sample stage to move, the crystal bar to be tested is enabled to reach the next test point, the steps are tested in a circulating mode, the maximum value a and the minimum value b of all the test points are obtained through recording, the total thickness change TTV of the surface of the.
Examples of the experiments
The method is characterized in that a traditional micrometer screw is adopted to carry out 49-point test on a 4-inch silicon carbide crystal bar, 49 points are uniformly distributed on the surface of the crystal bar, in order to reduce test errors, the 49 points are repeatedly tested for 3 times, the average value of the tests for 3 times is taken, the flatness result of the crystal bar is 13 mu m, and the flatness 13 mu m is closer to the actual flatness of the crystal bar because a plurality of test points are arranged and the test errors are reduced by measuring for a plurality of times. The flatness detection method of the 4inch crystal bar surface respectively adopts the method of detecting flatness by adopting the micrometer screw and the detector mentioned in the background technology and the method related in the application to respectively detect the flatness of the 4inch crystal bar surface, the test points are 5 points and 17 points, the detection results are shown in tables 1 and 2, and the results of the tables 1 and 2 can be obtained.
TABLE 1 results of testing surface flatness of 4inch crystal bar at 5 points by different detection methods
TABLE 2 results of 17-point testing of surface flatness of 4inch crystal bars by different testing methods
The above description is only an example of the present invention, and the protection scope of the present invention is not limited by these specific examples, but is defined by the claims of the present invention. Various modifications and alterations to this invention will become apparent to those skilled in the art. Any modification, equivalent replacement, or improvement made within the technical spirit and principle of the present invention should be included in the scope of protection of the present invention.
Claims (10)
1. A method for detecting the flatness of an ingot is characterized by comprising the following steps:
(1) placing a crystal bar to be tested on a sample platform, enabling the surface to be tested of the crystal bar to face a dial indicator, wherein the dial indicator comprises a dial plate, a fixed shaft sleeve and a probe, the fixed shaft sleeve is fixed at the lower end of the dial plate, the probe is retractable in the fixed shaft sleeve, the distance from the probe to the surface of the sample platform is controlled to be larger than the thickness of the crystal bar, and the difference between the distance and the thickness of the crystal bar is a first distance;
(2) vertically moving a dial indicator by a second distance to enable the probe to be in contact with or separate from the surface to be detected, controlling the horizontal relative position of the dial indicator and the crystal bar, obtaining dial indicator values of a plurality of test points on the surface to be detected, and obtaining the difference value between the maximum value and the minimum value, namely the flatness of the crystal bar;
and the second distance is greater than the first distance and less than the sum of the first distance and the dial indicator range.
2. The method of claim 1, wherein the second distance is greater than the sum of the first distance and one-quarter of the dial gauge and less than the sum of the first distance and three-quarters of the dial gauge;
preferably, the second distance is the sum of the first distance and one-half measuring range of the dial indicator;
preferably, the dial gauge range is selected from at least one of 0.5mm, 0.8mm, 1mm and 5 mm.
3. The method of claim 1, wherein the first distance is less than 10 mm;
preferably, the first distance is 0.5 to 5 mm.
4. The method of claim 1, wherein the plurality of test points have a point pattern selected from at least one of a cross, a mi-type, and a zig-zag;
preferably, the plurality of test points are symmetrically distributed on the crystal bar;
preferably, the number of the test points is at least more than 5;
preferably, the number of the test points is 17.
5. The method according to claim 1, wherein in the step (2), the method for controlling the horizontal relative position of the dial indicator and the crystal bar comprises the following steps:
controlling the sample stage to move in the X and/or Y direction, so that the dial indicator is positioned right above different test points on the crystal bar;
preferably, the sample stage moves in the X or Y direction by a distance of at least 200 mm.
6. The method according to claim 1, wherein in the step (2), the method for obtaining the dial indicator values of the plurality of test points on the crystal bar comprises:
and the dial indicator transmits the numerical value to the data receiver, and the dial indicator numerical values of the plurality of test points are obtained on the data receiver.
7. The method according to claim 1, wherein in the step (2), the specific operation of controlling the dial indicator to ascend or descend in sequence by the second distance is as follows:
and controlling the dial indicator to sequentially ascend or descend by a set fixed distance by using the controller.
8. The device for realizing the method according to any one of claims 1 to 7 is characterized by comprising a sample table, a dial indicator and a lifting device, wherein the sample table is used for placing a crystal bar to be tested, the dial indicator is arranged above the sample table, and the lifting device is connected with the dial indicator and is used for controlling the dial indicator to ascend and/or descend.
9. The apparatus according to claim 8, further comprising a base, wherein the sample stage is horizontally slidably disposed on the base;
preferably, the sample stage comprises a first sample stage and a second sample stage, the second sample stage is provided with an X-direction sliding chute, the base is provided with a Y-direction sliding chute, the bottom end of the first sample stage is connected with the X-direction sliding chute through a sliding block, and the bottom end of the second sample stage is connected with the Y-direction sliding chute through a sliding block;
preferably, the first sample stage and the second sample stage are respectively fixedly connected with a ball screw.
10. The device according to claim 8, wherein the lifting device comprises a lead screw and a lifting table, one end of the lead screw is in threaded fit connection with the base, and a clamping part for fixing the dial indicator and a screw hole for the lead screw to pass through are arranged on the lifting table;
preferably, the device also comprises a controller, and the controller is respectively connected with the sample stage and the lifting stage.
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| CN202010436891.0A CN111521103A (en) | 2020-05-21 | 2020-05-21 | Method and device for detecting flatness of crystal bar |
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