CN220556302U

CN220556302U - Detection measuring tool

Info

Publication number: CN220556302U
Application number: CN202322179595.9U
Authority: CN
Inventors: 姚力军; 李桂鹏; 请求不公布姓名; 袁玉博; 张宇杰
Original assignee: Tongchuang Lishui Special Materials Co ltd
Current assignee: Tongchuang Lishui Special Materials Co ltd
Priority date: 2023-08-14
Filing date: 2023-08-14
Publication date: 2024-03-05
Anticipated expiration: 2033-08-14

Abstract

The utility model belongs to the technical field of machining, and discloses a detection measuring tool which comprises a bottom plate provided with a detection hole, a first measuring ruler component and a second measuring ruler component, wherein the first measuring ruler component comprises a first measuring ruler and a first limiting piece, and the second measuring ruler component comprises a second measuring ruler and a second limiting piece. Whether the dimension to be detected of the tantalum connecting portion is qualified or not can be intuitively determined by penetrating the tantalum connecting portion into the detecting hole, the specific numerical value of the height dimension can be confirmed through the first measuring rule arranged perpendicular to the bottom plate and matched with the first limiting piece in sliding connection with the first measuring rule, and the specific numerical value of the dimension to be detected can be confirmed through the second measuring rule parallel to the extending direction of the dimension to be detected and the second limiting piece in sliding connection with the second measuring rule. The detection measuring tool not only can rapidly judge whether the size of the part to be detected is qualified, but also can obtain the specific values of the height and the outer diameter of the part to be detected, thereby reducing the detection time and improving the detection efficiency and the labor cost.

Description

Detection measuring tool

Technical Field

The utility model relates to the technical field of machining, in particular to a detection measuring tool.

Background

Physical vapor deposition is one of the most critical processes in the production of semiconductor chips, and is performed by a sputtering machine, and the ring is a very important key consumable for the above processes. The ring member is connected with the sputtering machine through a raised tantalum connecting part (Knob) for conducting electricity and improving the uniformity of the coating film. The tantalum connection on the ring member acts to secure the ring member. In the machining process, most products need to pass the next process after being detected, and the detection task is particularly heavy for tantalum connecting parts with large batches and unique shapes.

As shown in fig. 1, the tantalum connection part comprises a base 1001, a column 1002 and a hole 1003, and in the production of the tantalum connection part, a inspector needs to measure 5 data of a top diameter a, a middle diameter b, a bottom diameter c, a base diameter d and a height e of a product by using a caliper to determine whether the product is qualified. Because the detection point of tantalum connecting portion is more, usually detect 1 tantalum connecting portion and need take about 25 seconds, and tantalum connecting portion belongs to mass production, and this kind of detection mode spends more and the required inspection personnel is also more, not only can cause work efficiency low, still can increase personnel's cost.

Therefore, there is a need for a gauge that solves the above-mentioned problems.

Disclosure of Invention

The utility model aims to provide a detection measuring tool which is used for measuring a plurality of point positions of a tantalum connecting part so as to ensure the size qualification rate of the tantalum connecting part.

To achieve the purpose, the utility model adopts the following technical scheme:

a detection gauge, comprising: the bottom plate is provided with a detection hole; the first measuring scale assembly comprises a first measuring scale and a first limiting part, the first measuring scale is vertically arranged on the bottom plate, scale marks of the first measuring scale are arranged in an extending mode along the vertical direction, scale starting points of the first measuring scale are flush with the bottom surface of the bottom plate, and the first limiting part is connected to the first measuring scale in a sliding mode and can move along the vertical direction; the second dipperstick subassembly, the second dipperstick subassembly includes second measuring tape and second locating part, the extending direction of the scale mark of second measuring tape is on a parallel with the extending direction of waiting to detect the size of waiting to detect in the inspection hole, just the scale starting point of second measuring tape with wait to detect the piece and be in the initial end parallel and level on the extending direction of waiting to detect the size, second locating part sliding connection is in on the second measuring tape and can follow the extending direction of the scale mark of second measuring tape removes.

Preferably, the detecting hole comprises a first hole, the first hole is a round hole, and the size of the first hole is the maximum radial size which can be achieved by the cylinder of the to-be-detected piece.

Preferably, the detection hole is a stepped hole, the detection hole further comprises a second hole connected with the first hole in a penetrating mode, the second hole is a round hole, and the size of the second hole is the maximum radial size which can be achieved by the base of the to-be-detected piece.

Preferably, the second measuring scale assembly further comprises a supporting rod, the supporting rod is vertically arranged on the bottom plate, and the second measuring scale is slidably connected to the supporting rod and used for detecting radial sizes of the to-be-detected piece at different heights.

Preferably, the number of the support rods is a plurality, and the second measuring scale is slidably connected with the plurality of support rods.

Preferably, the second measuring scale assembly further comprises a fixing member for fixing the position of the second measuring scale on the support bar.

Preferably, the second measuring ruler is provided with a threaded hole, the fixing piece is in threaded connection with the threaded hole, and the fixing piece moves to be abutted with the supporting rod so that the position of the second measuring ruler on the supporting rod is fixed.

Preferably, two second limiting members are provided, and the two second limiting members are respectively clamped at two ends of the to-be-detected member in the extending direction of the to-be-detected dimension.

Preferably, the first limiting member is detachably connected to the first measuring tape.

Preferably, a first detecting protrusion is arranged on the lower bottom surface of the first limiting piece, and the height of the first detecting protrusion in the vertical direction is the minimum depth which can be reached by the size of the inner aperture of the piece to be detected.

The beneficial effects are that:

the detection measuring tool provided by the utility model comprises a bottom plate provided with a detection hole, a first measuring rule component and a second measuring rule component, whether the size to be measured of the tantalum connecting part is qualified or not can be intuitively determined by penetrating the tantalum connecting part into the detection measuring tool, the specific value of the height size of the tantalum connecting part can be confirmed by matching a first measuring rule arranged perpendicular to the bottom plate with a first limiting piece which is connected to the first measuring rule in a sliding manner, and the specific value of the size to be measured of the tantalum connecting part can be confirmed by matching a second measuring rule arranged parallel to the bottom plate with a second limiting piece which is connected to the second measuring rule in a sliding manner. The detection measuring tool can be used for rapidly judging whether the size of the part to be detected is qualified or not, and can also obtain specific values of the height and the outer diameter of the part to be detected, so that the detection time is shortened, and the detection efficiency and the labor cost are improved.

Drawings

FIG. 1 is a schematic diagram of a structure of a part to be inspected according to the present utility model;

fig. 2 is a schematic structural diagram of the detection gauge provided by the utility model.

In the figure:

100. a piece to be detected; 1001. a base; 1002. a column; 1003. a hole groove;

1. a bottom plate;

2. a detection hole;

3. a first measuring scale assembly; 31. a first measuring scale; 32. a first limiting member;

4. a second measuring scale assembly; 41. a second measuring scale; 42. and the second limiting piece.

Detailed Description

The utility model is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the utility model and are not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present utility model are shown in the drawings.

The utility model provides a detection measuring tool which is used for measuring a plurality of point positions of a tantalum connecting part so as to ensure that the dimension of the tantalum connecting part is qualified. In the process of inspecting the tantalum connection portion, it is generally necessary to inspect the top diameter a, the middle diameter b, the bottom diameter c, the product base diameter d, and the product height e of the tantalum connection portion for qualification.

The detection measuring tool provided by the utility model is not only suitable for the tantalum connecting part, but also suitable for other workpieces which have similar structures with the tantalum connecting part or need to be subjected to the multi-point detection. For convenience of description, all tools that can be detected by the detection gauge are collectively referred to as a workpiece to be detected, and a specific embodiment of the detection gauge will be described below with reference to the workpiece to be detected as an example.

Specifically, as shown in fig. 2, the measuring tool includes a base plate 1, a first measuring ruler assembly 3 and a second measuring ruler assembly 4, a measuring hole 2 is formed in the base plate 1, and whether the radial dimension of the piece 100 to be detected is qualified can be judged by observing whether the piece 100 to be detected can be placed in the measuring hole 2, so as to realize preliminary detection of the piece 100 to be detected. The radial dimension is defined as the dimension of the member to be detected 100 in any direction parallel to the upper surface of the base plate 1.

The first measuring scale assembly 3 comprises a first measuring scale 31 and a first limiting part 32, the first measuring scale 31 is vertically arranged on the bottom plate 1, the scale marks of the first measuring scale 31 extend in the vertical direction, the scale starting points of the first measuring scale 31 are flush with the bottom surface of the bottom plate 1, the first limiting part 32 is slidably connected to the first measuring scale 31 and can move along the extending direction of the scale marks of the first measuring scale 31, after the to-be-detected part 100 is placed in the detection hole 2, a detector can manually change the position of the first limiting part 32, the lower surface of the first limiting part 32 is abutted against the highest position of the end surface of the to-be-detected part 100, and the specific numerical value of the height e of the to-be-detected part 100 can be obtained through the position of the first limiting part 32 on the first measuring scale 31.

The second measuring scale assembly 4 comprises a second measuring scale 41 and a second limiting piece 42, and is used for detecting the radial size of the piece 100 to be detected, the second measuring scale 41 is arranged on the bottom plate 1 in parallel, and the scale starting point of the second measuring scale 41 is flush with the edge of one end of the detecting hole 2 in the extending direction of the scale line of the second measuring scale 41. The extending direction of the scale line of the second measuring tape 41 is parallel to the extending direction of the dimension to be detected of the member to be detected 100 in the detection hole, and the second limiting member 42 is slidably connected to the second measuring tape 41 and can move along the extending direction of the scale line of the second measuring tape 41. After the to-be-detected piece 100 is placed in the detection hole 2, a detection person can manually change the position of the second limiting piece 42, so that the surface of the second limiting piece 42 is abutted against the side wall surface of the to-be-detected piece 100, and a specific value of the radial dimension of the to-be-detected piece 100 can be obtained through the position of the second limiting piece 42 on the second measuring scale 41. It should be noted that, by adjusting the position of the member to be detected 100 in the vertical direction in the detection hole 2, the second measuring scale assembly 4 can obtain the top diameter a, the middle diameter b, the bottom diameter c, and the product base diameter d of the member to be detected 100.

In some embodiments, a pointer is further disposed on the first limiting member 32, and the pointer can accurately indicate the value of the first limiting member 32 on the first measuring scale 31. In some embodiments, a pointer may also be provided on the second stop 42, which pointer is used to precisely indicate the value of the second stop 42 on the second measuring scale 41. Of course, in still other embodiments, the first stop 32 and the second stop 42 may be provided with pointers at the same time. It should be noted that, when the to-be-detected piece 100 is a tantalum connection portion, the shape of the detection hole 2 is a circular hole, and when the to-be-detected piece 100 is another workpiece, the detection hole 2 may be correspondingly configured to be rectangular or have another irregular shape.

In some implementations, the to-be-detected member 100 includes only a cylinder 1002, and in order to detect whether the size of the cylinder 1002 is too large, the above-mentioned detecting hole 2 includes a first hole, where the first hole is a circular hole, and the size of the first hole is the maximum radial size that can be achieved by the cylinder 1002 of the to-be-detected member 100, when the to-be-detected member 100 can be placed in the first hole, it indicates that the size of the cylinder 1002 meets the specified standard, and conversely, indicates that the size of the cylinder 1002 does not meet the specified standard. It should be noted that the shape and size of the first hole may be determined according to the cross-sectional shape of the column 1002 of the member to be detected 100 and the maximum standard size of the member to be detected 100.

In some other embodiments, as shown in fig. 1, when the to-be-detected member 100 is configured by two parts of a column 1002 and a base 1001 (for example, a tantalum connection part), the above-mentioned detecting hole 2 is configured as a stepped hole, and the detecting hole 2 further includes a second hole (not shown in the drawing), where the first hole is used for detecting whether the column 1002 of the to-be-detected member 100 meets the standard, the second hole is used for detecting whether the base 1001 of the to-be-detected member 100 meets the standard, the second hole is located below the first hole, the size of the second hole is the largest base 1001 size of the to-be-detected member 100, and when the to-be-detected member 100 can be placed in the second hole, the size of the base 1001 meets the standard, and otherwise, the size of the base 1001 does not meet the standard.

It should be noted that, when the size of the base 1001 of the member to be detected 100 is larger than the size of the column 1002, the member to be detected 100 may be inserted from below the measuring tool, when the size of the base 1001 of the member to be detected 100 is smaller than the size of the column 1002, the member to be detected 100 may be inserted from above the measuring tool, if the member to be detected can be inserted into the detecting hole 2, it is indicated that the sizes of the base 1001 and the column 1002 meet the standard, otherwise, it is indicated that the member to be detected 100 is not qualified.

It should be further noted that, when the to-be-detected piece 100 is further provided with a plurality of annular steps, and the height of the annular steps needs to be subjected to qualification detection, the detection hole 2 may be correspondingly configured as a stepped hole formed by communicating a plurality of different apertures, and the specific size of the aperture is determined according to the shape of the to-be-detected piece 100 and the detection standard.

Further, in order to measure the radial dimensions of the workpiece 100 at different heights, the second measuring scale assembly 4 further includes a support rod (not shown) vertically disposed on the base plate 1, and the second measuring scale 41 is slidably coupled to the support rod, and the top diameter a, the middle diameter b, and the bottom diameter c of the workpiece 100 can be measured by adjusting different positions of the second measuring scale 41 on the support rod.

In some embodiments, the support rods are vertically arranged on the base plate 1 in order to save space and improve the compactness of the gauge. In some embodiments, a sliding rail is arranged on the supporting rod, a sliding groove matched with the sliding rail is arranged on the second measuring tape 41, and the sliding groove is matched with the sliding rail to realize the movement of the second measuring tape 41 on the supporting rod. In some other embodiments, the second measuring tape 41 is sleeved on the supporting rod, so that the second measuring tape 41 is slidingly connected on the supporting rod.

In order to improve the accurate degree of measurement, make second graduated flask 41 remain parallel to bottom plate 1 throughout, set up the quantity of bracing piece to a plurality of, second graduated flask 41 and a plurality of bracing piece synchronous sliding connection can effectively guarantee that the surface of second graduated flask 41 is on a parallel with the surface of bottom plate 1, improves measuring precision and convenient degree.

Further, the second measuring scale assembly 4 further comprises a fixing piece (not shown in the figure), the fixing piece is used for fixing the position of the second measuring scale 41 on the supporting rod, so that a detector can conveniently operate the second limiting block while moving the second measuring scale 41, measurement and data recording are facilitated, and the convenience degree of detecting the radial sizes of the parts to be measured at different heights is effectively improved.

In some embodiments, the second measuring tape 41 is provided with a threaded hole, the fixing piece is in threaded connection with the threaded hole and can move along the axis direction of the threaded hole, when the position of the second measuring tape 41 on the supporting rod needs to be fixed, the fixing piece is rotated to enable one end of the fixing piece to move to be in contact with the supporting rod, at the moment, the second measuring tape 41 and the supporting rod are pressed by the fixing piece, and the second measuring tape 41 can be fixed at a certain position on the supporting rod through friction between the fixing piece and the supporting rod. In some embodiments, in order to improve the friction between the fixing member and the supporting rod, a rubber layer or anti-slip grains can be further arranged on the contact surface of one end of the fixing member.

When the shape of the to-be-detected piece 100 is irregular, the side wall of one side of the to-be-detected piece 100 is difficult to be flush with the scale starting point of the second measuring tape 41, so that errors occur in measurement, the to-be-detected size of the to-be-detected piece 100 is difficult to be measured only through one second limiting piece 42, therefore, two second limiting pieces 42 can be further arranged, the two second limiting pieces 42 are in sliding connection with the second measuring tape 41, the two second limiting pieces 42 are respectively clamped at two ends of the to-be-detected piece 100 in the extending direction of the to-be-detected size, the to-be-detected piece 100 is clamped by the two second limiting pieces 42, and the difference between the numerical values indicated by the two second limiting pieces 42 on the second measuring tape 41 is read, so that the to-be-detected size of the to-be-detected piece 100 in irregular shape can be obtained.

In some embodiments, the top surface of the member to be detected 100 is provided with a hole groove 1003, and when the depth of the hole groove 1003 needs to be detected, a first detecting protrusion (not shown in the figure) may also be provided on the lower bottom surface of the first limiting member 32. The height of the first detecting protrusion along the vertical direction is the minimum depth of the internal hole groove 1003 of the to-be-detected member 100, and when the first detecting protrusion of the first limiting member 32 can fully extend into the to-be-detected member 100, it indicates that the depth of the internal hole groove 1003 of the to-be-detected member 100 is greater than the specified minimum depth, and the to-be-detected member 100 meets the standard, otherwise, it indicates that the to-be-detected member 100 does not meet the standard. When the structures of the to-be-detected pieces 100 are different, the first limiting piece 32 matched with the to-be-detected pieces 100 can be selected, so that the first limiting piece 32 is detachably connected with the first measuring tape 31, and the first limiting piece 32 with different shapes can be replaced conveniently. In some embodiments, the first detection protrusion is typically configured as a thin rod in order to avoid interference in size such that the first detection protrusion cannot extend into the aperture slot 1003.

In the description of the present utility model, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

In the present utility model, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "right", etc. orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are merely for convenience of description and simplicity of operation, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the utility model. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.

It is to be understood that the above examples of the present utility model are provided for clarity of illustration only and are not limiting of the embodiments of the present utility model. Various obvious changes, rearrangements and substitutions can be made by those skilled in the art without departing from the scope of the utility model. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are desired to be protected by the following claims.

Claims

1. A test gauge, comprising:

the device comprises a bottom plate (1), wherein a detection hole (2) is formed in the bottom plate (1);

the first measuring scale assembly (3), the first measuring scale assembly (3) comprises a first measuring scale (31) and a first limiting part (32), the first measuring scale (31) is vertically arranged on the bottom plate (1), scale marks of the first measuring scale (31) are arranged in an extending mode along the vertical direction, scale starting points of the first measuring scale (31) are flush with the bottom surface of the bottom plate (1), and the first limiting part (32) is connected to the first measuring scale (31) in a sliding mode and can move along the vertical direction;

the second dipperstick subassembly (4), second dipperstick subassembly (4) include second graduated flask (41) and second locating part (42), the extending direction of the scale mark of second graduated flask (41) is on a parallel with the extending direction of waiting to detect the size of piece (100) to be detected in detection hole (2), just the scale starting point of second graduated flask (41) with wait to detect piece (100) are in the initial end parallel and level on the extending direction of size to be detected, second locating part (42) sliding connection is in on second graduated flask (41) and can follow the extending direction of the scale mark of second graduated flask (41) removes.

2. The gauge according to claim 1, wherein,

the detection hole (2) comprises a first hole, the first hole is a round hole, and the size of the first hole is the maximum radial size which can be achieved by the cylinder (1002) of the to-be-detected piece (100).

3. The gauge according to claim 2, wherein,

the detection hole (2) is a stepped hole, the detection hole (2) further comprises a second hole which is connected with the first hole in a penetrating mode, the second hole is a round hole, and the size of the second hole is the maximum radial size which can be achieved by the base (1001) of the piece (100) to be detected.

4. The gauge according to claim 1, wherein,

the second measuring ruler assembly (4) further comprises a supporting rod, the supporting rod is vertically arranged on the bottom plate (1), and the second measuring ruler (41) is connected to the supporting rod in a sliding mode and used for detecting radial sizes of the to-be-detected piece (100) at different heights.

5. The gauge according to claim 4, wherein,

the number of the supporting rods is multiple, and the second measuring ruler (41) is in sliding connection with the multiple supporting rods.

6. The gauge according to claim 4, wherein,

the second measuring scale assembly (4) further comprises a fixing piece used for fixing the position of the second measuring scale (41) on the supporting rod.

7. The gauge according to claim 6, wherein,

the second measuring ruler (41) is provided with a threaded hole, the fixing piece is in threaded connection with the threaded hole, and the fixing piece moves to be abutted with the supporting rod so that the position of the second measuring ruler (41) on the supporting rod is fixed.

8. The gauge according to claim 1, wherein,

the two second limiting pieces (42) are arranged, and the two second limiting pieces (42) are respectively clamped at two ends of the to-be-detected piece (100) in the extending direction of the to-be-detected dimension.

9. The gauge according to claim 1, characterized in that the first stop (32) is detachably connected to the first measuring tape (31).

10. The gauge according to claim 1, wherein,

the lower bottom surface of the first limiting part (32) is provided with a first detection protrusion, and the height of the first detection protrusion in the vertical direction is the minimum depth which can be reached by the size of the inner aperture of the part to be detected (100).